• Title/Summary/Keyword: Roughness control

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High Density Inductively Coupled Plasma Etching of III-V Semiconductors in BCI3Ne Chemistry (BCI3Ne 혼합가스를 이용한 III-V 반도체의 고밀도 유도결합 플라즈마 식각)

  • 백인규;임완태;이제원;조관식
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.12S
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    • pp.1187-1194
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    • 2003
  • A BCl$_3$/Ne plasma chemistry was used to etch Ga-based (GaAs, AIGaAs, GaSb) and In-based (InGaP, InP, InAs and InGaAsP) compound semiconductors in a Planar Inductively Coupled Plasma (ICP) reactor. The addition of the Ne instead of Ar can minimize electrical and optical damage during dry etching of III-V semiconductors due to its light mass compared to that of Ar All of the materials exhibited a maximum etch rate at BCl$_3$ to Ne ratios of 0.25-0.5. Under all conditions, the Ga-based materials etched at significantly higher rates than the In-based materials, due to relatively high volatilities of their trichloride etch products (boiling point CaCl$_3$ : 201 $^{\circ}C$, AsCl$_3$ : 130 $^{\circ}C$, PCl$_3$: 76 $^{\circ}C$) compared to InCl$_3$ (boiling point : 600 $^{\circ}C$). We obtained low root-mean-square(RMS) roughness of the etched sulfate of both AIGaAs and GaAs, which is quite comparable to the unetched control samples. Excellent etch anisotropy ( > 85$^{\circ}$) of the GaAs and AIGaAs in our PICP BCl$_3$/Ne etching relies on some degree of sidewall passivation by redeposition of etch products and photoresist from the mask. However, the surfaces of In-based materials are somewhat degraded during the BCl$_3$/Ne etching due to the low volatility of InCl$_{x}$./.

Characteristics of the Seasonal Variation of the Radiation in a Mixed Forest at Kwangneung Arboretum (광릉수목원 혼합림에서 복사 에너지의 계절 변화 특성)

  • 김연희;조경숙;김현탁;엄향희;최병철
    • Journal of Korean Society for Atmospheric Environment
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    • v.19 no.3
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    • pp.285-296
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    • 2003
  • The measurement of the radiation energy, trunk temperature, leaf area index (LAI), air temperature, vapor pres-sure, and precipitation has been conducted under a mixed forest at Kwangneung Arboretum during the period of 2001. Characteristics of the diurnal and seasonal variation of the radiative energy were investigated. The aerodynamic roughness length was determined as about 1.6 m and the mean albedo was about 0.1 The downward short-wave radiation was linearly correlated with the net radiation and its correlation coefficient was about 0.96. From this linear relation, the heating coefficient was calculated and its annual mean value was about 0.21 The albedo and heating coefficient was varied with season, surface characteristics, and meteorological conditions. The diurnal and seasonal variations of radiation energy were discussed in terms of the surface characteristics and meteorological conditions. In the daytime, during clear skies, net radiation was dominated by the shortwave radiation. In presence of clouds and fog, the radiation energy was diminished. At night, the net radiation was entirely dominated due to the net longwave radiation. There was no distinct diurnal variation in net radiation flux during the overcast or rainy days. The net radiation was strongest in spring and weakest in winter. The seasonal development in leaf area was also reflected in a strong seasonal pattern of the radiation energy balance. The timing, duration, and maximum leaf area and trunk temperature were found to be an important control on radiation energy budget. The trunk temperature was either equal or warmer than air temperature during most of the growing season because the canopy could absorb a substantial amount of sunlight. After autumn (after the middle of October), the trunk temperature was consistently cooler than air temperature.

Detection of Misfire in Car Engines using Walsh Discrete Fourier Transform (WDFT를 이용한 자동차 엔진의 실화검출)

  • 김종부;이태표;오정수;임국현
    • Journal of the Korean Institute of Telematics and Electronics T
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    • v.35T no.1
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    • pp.67-74
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    • 1998
  • The primary cause of air pollution by vehicles is imperfect combustion of fuel. One of the most usual causes of this imperfect combustion is the misfire in IC engins. The U.S. EPA(Environment Protection Agency) and the CARB(California air Resources Board) have imposed regulations for the detection of misfiring in automotive engines. The OBD-II regulations require that misfire should be monitored by the engine diagnostic system, and that the goal of OBD-II is to alert the driver to the presence of a malfunction of the emission control system. Several solutions to the misfire detection problem have been proposed for the detection of misfires. However, the performance of these methods in the presence of misfire is not altogether clear. This paper presents a precise method and system for internal combustion engine misfire. Present invention based upon measurements of engine roughness as derived from crankshaft angular velocity measurements with special signal processing method. Crankshaft angular velocity signals are processed by WDPT, so that the more reliable misfire detection than the time domain analysis. Experimental work confirms that it is possible to apply the WDFT for the detection of misfires in no-load idle and road testing.

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Micromorphometric change of implant surface conditioned with tetracycline-HCI;HA and oxidized surface (표면처리 시간에 따른 임플란트 미세구조의 변화;HA와 양극산화 표면 임플란트)

  • An, Sang-Ho;Park, Joon-Bong;Kwon, Young-Hyuk;Herr, Yeek;Chung, Jong-Hyuk
    • Journal of Periodontal and Implant Science
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    • v.35 no.4
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    • pp.891-905
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    • 2005
  • The present study was performed to evaluate the effect of tetracycline-HCL on the change of implant surface microstructure according to application time. Implant with pure titanium machined surface. HA-coated surface and TiUniteTM surface were utilized. Implant surface was rubbed with 50mg/ml tetracycline-HCL solution for $\frac{1}{2}min.$, 1min., $1\frac{1}{2}min.$, 2min., and $2\frac{1}{2}min.$ respectively in the test group. Then, specimens were processed for scanning electron microscopic observation. The results of this study were as follows. 1. Both test and control group showed a few shallow grooves and ridges in pure titanium machined surface implants. There were not significant differences between two groups. 2. In HA-coated surfaces, round particles were deposited irregularly. The roughness of surfaces conditioned with tetracycline-HCL was lessened and the cracks were increased relative to the application time. 3. The anodic oxidized surfaces showed the craterous structures. The surface conditioning with tetracycline-HCl didn't influence on its micro-morphology. In conclusion, the detoxification with 50mg/ml tetracycline-HCL must be applied respectively with different time according to various implant surfaces.

Implant surface treatments affect gene expression of Runx2, osteogenic key marker

  • Na, Young;Heo, Seong-Joo;Kim, Seong-Kyun;Koak, Jai-Young
    • The Journal of Advanced Prosthodontics
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    • v.1 no.2
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    • pp.91-96
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    • 2009
  • STATEMENT OF PROBLEM. The aim of this study was to study the effects of various surface treatments to a titanium surface on the expression of Runx2 in vitro. MATERIAL AND METHODS. Human Osteosarcoma TE-85 cells were cultured on machined, sandblasted, or anodic oxidized cpTi discs. At various times of incubation, the cells were collected and then processed for the analysis of mRNA expression of Runx2 using reverse transcription-PCR. RESULTS. The expression pattern of Runx2 mRNA was differed according to the types of surface treatment. When the cells were cultured on the untreated control culture plates, the gene expression of Runx2 was not increased during the experiments. In the case of that the cells were cultured on the machined cpTI discs, the expression level was intermediate at the first day, but increased constitutively to day 5. In cells on sandblasted cpTi discs, the expression level was highest in the first day sample and the level was maintained to 5 days. In cells on anodized cpTi discs, the expression level increased rapidly to 3 days, but decreased slightly in the 5-th day sample. CONCLUSION. Different surface treatments may contribute to the regulation of osteoblast function by influencing the level of gene expression of key osteogenic factors.

Synthesis Technology of Functional Colloid Particles and Its Applications (기능성 콜로이드 입자의 제조기술 및 이의 응용)

  • Kang, Sung-Min;Choi, Chang-Hyung;Kim, Jongmin;Lee, Chang-Soo
    • Clean Technology
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    • v.18 no.4
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    • pp.331-340
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    • 2012
  • Synthetic methods of colloids have been significantly developed in industry due to their significant demand for preparation of functional particles. Recently, dynamic/static microfluidic system has emerged as a promising route to the synthesis of the particles, providing precise control of physical and chemical properties such as size, shape, porosity, surface roughness, and surface functionality. These formed particles can be potentially used in various applications including medical diagnostics, photonic device, and biological industry. In addition, these particles provide a novel route to create new materials via their directed self-assembly, and it enable to study and predict the natural phenomenon by mimicking of the nature. Therefore, we describe recent progress for functional colloid particles and its applications.

Interface Structure and Thin Film Adhesion (계면구조와 박막의 접착)

  • Lee, Ho-Young;Kim, Sung-Ryong
    • Journal of Adhesion and Interface
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    • v.3 no.4
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    • pp.37-43
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    • 2002
  • A number of thin-film deposition technologies have been developed. However, even a thin film whose properties are excellent may not be used as long as the adhesion strength between the thin film and the substrate is poor. For thin films, the adhesion strength is as important as the properties. In the present article, relation between interface structure and thin film adhesion, and factors affecting thin film adhesion are reviewed. Two kinds of factors, internal factors and external factors, affect thin film adhesion. Such factors as composition, structure, and reactivity of both thin film and substrate as well as surface roughness of the substrate and residual stress of the thin film belong to internal factors. And such factors as load, temperature, humidity, and corrosive environment belong to external factors. It is also reviewed that how we can control the internal factors and the external factors to enhance or keep the adhesion strength.

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Role of ${\alpha}-Al_2O_3$ buffer layer in $Ba-ferrite/SiO$ magnetic thin films (Ba-페라이트/$SiO_2$ 자성박막에서 ${\alpha}-Al_2O_3$ buffer 층의 역할)

  • Cho, Tae-Sik;Jeong, Ji-Wook;Kwon, Ho-Jun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.267-270
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    • 2003
  • We have studied the interfacial diffusion phenomena and the role of ${\alpha}-Al_2O_3$ buffer layer as a diffusion barrier in the $Ba-ferrite/SiO_2$ magnetic thin films for high-density recording media. In the interface of amorphous Ba-ferrite ($1900-{\AA}-thick)/SiO_2$ thin film during annealing, the interfacial diffusion started to occur at ${\sim}700^{\circ}C$. As the annealing temperature increased up to $800^{\circ}C$, the interfacial diffusion abruptly proceeded resulting in the high interface roughness and the deterioration of the magnetic properties. In order to control the interfacial diffusion at the high temperature, we introduced ${\alpha}-Al_2O_3$ buffer layer ($110-{\AA}-thick$) in the interface of $Ba-ferrite/SiO_2$ thin film. During the annealing of $Ba-ferrite/{\alpha}-Al_2O_3/SiO_2$ thin film even at ${\sim}800^{\circ}C$, the interface was very smooth. The smooth interface of the film was also clearly shown by the cross-sectional FESEM. The magnetic properties, such as saturation magnetization 3nd intrinsic coercivity, were also enhanced, due to the inhibition of interfacial diffusion by the ${\alpha}-Al_2O_3$ buffer layer. Our study suggests that the ${\alpha}-Al_2O_3$ buffer layer act as a useful interfacial diffusion barrier in the $Ba-ferrite/SiO_2$ thin films.

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Fabrication of a robust, transparent, and superhydrophobic soda-lime glass

  • Rahmawan, Yudi;Kwak, Moon-Kyu;Moon, Myoung-Woon;Lee, Kwang-Ryeol;Suh, Kahp-Yang
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.86-86
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    • 2010
  • Micro- and nanoscale texturing and control of surface energy have been considered for superhydrophobicity on polymer and silicon. However these surfaces have been reported to be difficult to meet the robustness and transparency requirements for further applications, from self cleaning windows to biochip technology. Here we provided a novel method to fabricate a nearly superhydrophobic soda-lime glass using two-step method. The first step involved wet etching process to fabricate micro-sale patterns on soda-lime glass. The second step involved application of $SiO_x$-incorporated DLC to generate high intrinsic contact angle on the surface using chemical vapor deposition (CVD) process. To investigate the effect of surface roughness, we used both positive and negative micro-scale patterns on soda-limeglass, which is relatively hard for surface texturing in comparison to quartz or Pyrex glasses due to the presence of impurities, but cheaper. For all samples we tested the static wetting angle and transparency before and after 100 cycles of wear test using woolen steel. The surface morphology is observed using optical and scanning electron microscope (SEM). The results shows that negative patterns had a greater wear resistance while the hydrophobicity was best achieved using positive patterns having static contact angle up to 140 deg. with about 80% transparency. The overall experiment shows that positive patterns at etching time of 1 min shows the optimum transparency and hydrophobicity. The optimization of micro-scale pattern to achieve a robust, transparent, superhydrophobic soda-lime glass will be further investigated in the future works.

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Effect of Surfactants on the Characteristics of Cooked Rice During Storage (계면활성제가 저장 중의 밥의 특성에 미치는 영향)

  • 김수경;이신경;신말식
    • Korean journal of food and cookery science
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    • v.13 no.3
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    • pp.278-285
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    • 1997
  • The effects of three surfactants (SSL, Dimodan, and SE1670) on the properties of cooked nonwaxy and waxy rice during storage were investigated by sensory evaluation, instrumental test, and measurement of retrogradation degree. The results of sensory evaluation revealed that the overall quality of cooked rice was affected by textural characteristics. The addition of surfactant decreased the roughness and hardness of cooked rice, however, increased the stickiness and moistness during the storage in the order of SE, SSL, and Dimodan. In instron test, the hardness of surfactant-added cooked rice was significant lower than that of control. The addition of surfactant decreased the degree of retrogradation both in cooked nonwaxy and waxy rices.

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