• Title/Summary/Keyword: Rotation table

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Review for Features of Wafer In-feed Grinder Structure (실리콘 웨이퍼 단면 연삭기 구조물 특성평가)

  • Ha S.B.;Choi S.J.;Ahn D.K.;Kim I.S.;Choi Y.H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.555-556
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    • 2006
  • In recent years, the higher flatness level in wafer shape has been strictly demanded with a high integration of the semiconductor devices. It has become difficult for a conventional wafer preparing process to satisfy those demands. In order to meet those demands, surface grinding with in-feed grinder is adopted. In an in-feed grinding method, a chuck table fur fixing a semiconductor wafrr rotates on its rotation axis with a slight tilt angle to the rotation axis of a cup shaped grinding wheel and the grinding wheel in rotation moves down to grind the wafer. So, stability of the grinder structure is very important to aquire a wafer of good quality. This paper describes the features of the in-feed grinder and some FEM analysis results of the grinder structure.

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Rotational Stability and Lubrication State Evaluation of the Polishing Head for High Speed Polishing (폴리싱 고속화를 위한 연마헤드의 회전 안정성과 윤활 상태 평가)

  • Lee, Hocheol;Choi, Minseok
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.25 no.4
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    • pp.301-306
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    • 2016
  • High speed polishing can kinematically increase the polishing removal rate by using the conventional Preston equation, especially for hard substrates such as sapphire or diamond. However, high speed effects should be clarified beforehand considering the lubrication state and process parameter variations. In this paper, we developed a polishing experimental method and apparatus to determine the lubrication state by measuring the real time friction coefficient using two load cells. Through experiments, we obtained a boundary lubrication state above 0.35 of the friction coefficient by using low table speed and high polishing load, indicating a synchronized stable behavior in polishing head rotation. However, larger Stribeck indexes by a high speed above 200 rpm can generate a hydrodynamic lubrication state below 0.25 of the low friction coefficient. This causes the polishing head rotation to stop. A forced and synchronized head rotation is required for high speed polishing.

Real-time Multiple Stereo Image Synthesis using Depth Information (깊이 정보를 이용한 실시간 다시점 스테레오 영상 합성)

  • Jang Se hoon;Han Chung shin;Bae Jin woo;Yoo Ji sang
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.30 no.4C
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    • pp.239-246
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    • 2005
  • In this paper. we generate a virtual right image corresponding to the input left image by using given RGB texture data and 8 bit gray scale depth data. We first transform the depth data to disparity data and then produce the virtual right image with this disparity. We also proposed a stereo image synthesis algorithm which is adaptable to a viewer's position and an real-time processing algorithm with a fast LUT(look up table) method. Finally, we could synthesize a total of eleven stereo images with different view points for SD quality of a texture image with 8 bit depth information in a real time.

A Study on the Validation of Heliodon for Daylighting Performance Evaluation (자연채광성능 평가를 위한 태양고정형 Heliodon의 유용성 검증에 관한 연구)

  • Kim, Jeong-Tai;Lee, Ji-Hyun;Kim, Gon
    • Journal of the Korean Solar Energy Society
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    • v.24 no.2
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    • pp.51-62
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    • 2004
  • Architects may evaluate building models to see how a building will shadow itself and its neighbors at various times. A heliodon, a tilt-table which is a machine that imitates the rotation and orbit of the Earth, helps architects wanting to analyze patterns of shadow patch, passive solar heating options, site solar panels, or control solar heat gain. The heliodon swivels in three directions for setting latitude, season, and time of day. Using the device, an architect first clamps a model to the tabletop, then turns the table to the coordinates of interest. Usually, the winter and summer solstices receive strong attention, for they represent extreme cases, A more recent installation at a university adds to its heliodon a set of lamps to recreate the illumination level and more accurate patterns of shadow patch. The table holds the building model at various angles to a spotlight, which mounts in the pole. The set of scale model measurement describes the validity of various electric lamps as an artificial sun to approximate the sun's parallel rays, helping designers to distinguish between illuminated areas in and around a building and those regions falling in the shadows.

Robust Watermarking in Medical Images Using by Polar Transformation (의료영상에서 Polar 변환을 적용한 강인한 워터마킹 기법)

  • 남기철;박무훈
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.8 no.2
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    • pp.379-385
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    • 2004
  • Medical images are being managed more by PACS in general medical institutions. It is important to protect patients from being invaded their privacy related to the images. It is also necessary to confirm the ownership, the right of property of the medical images and notice whether the data are modified. In this paper, we propose a robust watermarking against RST attacks in medical images on the PACS. The proposed scheme modifies and improves Log-Polar Mapping and Fourier Mellin Transform in order to realize and recover serious image degradation and watermark data loss caused by the conversion between cartesian coordinate and log-polar coordinate. We used the radius and theta Look Up Table to solve the realization of the Fourier Mellin Transform, and inserted a watermark into 2D-DFT magnitudes using Spread Spectrum. Experimental results shows that this method are robust to rotation attack.

Influence of Tibial Rotation on EMG Activities of Medial and Lateral Hamstrings During Maximal Isometric Knee Flexion

  • Lim, Woo-taek
    • Physical Therapy Korea
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    • v.25 no.4
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    • pp.46-52
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    • 2018
  • Background: The hamstring muscles in the lower extremity are highly important for knee joint stability and can be classified into medial and lateral hamstrings according to the anatomical position, which have some different functions. To measure the strength of the individual hamstring muscles, manual muscle testing is clinically performed by dividing rotation postures into internal and external postures. However, this has no sufficient scientific background. Objects: This study aimed to test the difference that the tibial rotation would cause in the muscle activity of the medial and lateral hamstrings. Methods: The muscle activities of the biceps femoris, semitendinosus, and semimembranosus were measured in a total of three different postures (neutral position and internal and external rotations) with 3 replications. During the maximal isometric contraction, resistance was constantly provided by the string attached to the strap, not by manual resistance of the examiner. Before and after electromyography measurements, the participants underwent hamstring flexibility measurement using the active knee extension test in the supine position on the treatment table. Results: The semitendinosus had a 12.56% reduction in muscle activity in external rotation as compared with that in neutral position. The biceps femoris and semimembranosus showed reduced muscle activities in both external and internal rotations as compared with those in neutral position. Only the women showed significant decreases in the comparison between pre and post-active knee extension. Conclusion: Only the semitendinosus muscle was consistent with the anatomical speculation. However, the reduction in the muscle activity of the semitendinosus as compared with that in neutral position was only 12.56%, the clinical value of which may be difficult to justify.

CNC 공구 연삭기의 개발 및 성능향상에 대한 연구

  • 김성청;이근찬
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1993.04b
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    • pp.272-276
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    • 1993
  • We made to develop CNC Tool Grinding Machine automating the linear motion of X,Y,Z axis of table, and thetilting and rotation of tool holding vice by using Encorder to increase the efficiency of tool grinding for the Conventional Tool Grinding Machine. We did not consider the part of static, dynamic and thermal behavior that must necessary consider when wedesign, because we used existing Conventional Tool Grinding Machine as it is. We investigated simulation to make existing Conventional Tool Grinding Machine like CNC. We also designed it, and we compared the capability of existing Conventional Tool Grinding and CNC Tool Grinding Machine, and we investigated, too.

Tests of integrated ceilings and the construction of simulation models

  • Lyu, Zhilun;Sakaguchi, Masakazu;Saruwatari, Tomoharu;Nagano, Yasuyuki
    • Advances in Computational Design
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    • v.4 no.4
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    • pp.381-395
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    • 2019
  • This paper proposes a new approach to model the screw joints of integrated ceilings via the finite element method (FEM). The simulation models consist of the beam elements. The screw joints used in the main bars and cross bars and in the W bars and cross bars are assumed to be rotation springs. The stiffness of the rotation springs is defined according to the technical standards proposed by the National Institute for Land and Infrastructure Management of Japan. By comparing the results of the sheer tests and the simulation models, the effectiveness and efficiency of the simulation models proposed in this paper are verified. This paper indicates the possibility that the seismic performance of suspended ceilings can be confirmed directly via beam element models using FEM if the stiffnesses of the screw joints of the ceiling substrates are appropriately defined. Because cross-sectional shapes, physical properties, and other variables of the ceiling substrates can be easily changed in the models, it is expected that suspended ceiling manufactures will be able to design and confirm the seismic performance of suspended ceilings with different cross-sectional shapes or materials via computers, instead of spending large amounts of time and money on shake table tests.

Initial Rotor Position Detection of a Toroidal SRM Using the Rate of Change of Current (전류변화율을 이용한 토로이달 SRM의 초기위치 경출 방법)

  • Yang Hyong-Yeol;Lim Young-Cheol
    • The Transactions of the Korean Institute of Electrical Engineers D
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    • v.54 no.1
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    • pp.26-32
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    • 2005
  • Rotor position information is essential in the operation of the switched reluctance motor(SRM) drive for generation the phase current switching signals. When an incremental encoder is used as a rotor position sensor, the initial rotor position can not be detected. Some sensorless rotor position estimation methods also have the same problem. In these systems, to initially align the rotor, the forced alignment method has a delay and reverse rotation before the motor can start. Therefore it can not be acceptable for unidirectional drive systems. So the forced alignment method is not desirable in all drive systems and the research on the SRM drives should be directed to a system without rotor alignment. In this paper, a new detection method of initial rotor position using the rate of change of current is suggested. Firstly, di/dt versus θ/sub R/ reference table, which is the relation between the rate of change of current and rotor position, is generated and then the squared Euclidean distance method is used to estimate the rotor position based on the table. The simulated and experimental results are presented demonstrating the feasibility and accuracy of this method.

Calibration of index tables using electric comparators (전기 마이크로미터를 이용한 회전 눈금원판의 교정)

  • Nam, Ki-Chul;Woo, In-Hun;Kim, Jong-Su;Lim, Jae-Sun;Chung, Myung-Se
    • Journal of the Korean Society for Precision Engineering
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    • v.4 no.4
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    • pp.36-42
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    • 1987
  • Very accurate calibration is needed to index tables which are necessary for precision angle measurement. The repeatability of index table is less than 0.2 second, so that attentions should be paid to choosing devices to be used in the calibration of index tables. The auto- collimators have been used in the calibration of index tables, but the repeatability of auto- collimators is bad compared with that of index table. In place of autocollimators, we described a method which uses electric comparators which are possessed by most precision measurement laboratories. Electric comparators are set to measure small angle displacement without interrupting the rotation of index tables and the signals of two electric comparators are added to remove the run-out errors of the shafts of index tables. Two index tables have been calibrated simulataneously by this method and the measurement data have been analyzed by the least squares method. We compare the calibration results with those of methods using autocollimator and auto- matic autocollimator and are able to know that the data of electric comparator method lie between the data of autocollimator methods. The repeatability of measurement is less than 0.02 second. The electric comparator method is economical and capable of reducing the uncertainty of the measurement.

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