• Korean Journal of Materials Research
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• v.18 no.3
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• pp.148-152
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• 2008

A new cost-effective atomic layer deposition (ALD) technique, known as Proximity-Scan ALD (PS-ALD) was developed and its benefits were demonstrated by depositing $Al_2O_3$ and $HfO_2$ thin films using TMA and TEMAHf, respectively, as precursors. The system is consisted of two separate injectors for precursors and reactants that are placed near a heated substrate at a proximity of less than 1 cm. The bell-shaped injector chamber separated but close to the substrate forms a local chamber, maintaining higher pressure compared to the rest of chamber. Therefore, a system configuration with a rotating substrate gives the typical sequential deposition process of ALD under a continuous source flow without the need for gas switching. As the pressure required for the deposition is achieved in a small local volume, the need for an expensive metal organic (MO) source is reduced by a factor of approximately 100 concerning the volume ratio of local to total chambers. Under an optimized deposition condition, the deposition rates of $Al_2O_3$ and $HfO_2$ were $1.3\;{\AA}/cycle$ and $0.75\;{\AA}/cycle$, respectively, with dielectric constants of 9.4 and 23. A relatively short cycle time ($5{\sim}10\;sec$) due to the lack of the time-consuming "purging and pumping" process and the capability of multi-wafer processing of the proposed technology offer a very high through-put in addition to a lower cost.

• Journal of Industrial Technology
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• v.17
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• pp.87-93
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• 1997

A Special purpose program, based on the dimensional analysis, was developed to estimate the wide band turbulent noise in the blower of vehicle airhandling system. Acoustic power level was measured at 4 rating points around the operating condition. The experiment was performed on the reference blower model using international standard chamber, which could measure acoustic power according to the air-handling performance. Analytical model of the blower noise was determined by the measured data. Using the analytical acoustic model, it was possible to estimated the effect by the change of the operating condition, such as flow rate, static pressure and wheel rotating speed, furthermore, the diameter and the width of blower.

• Journal of Mechanical Science and Technology
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• v.18 no.6
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• pp.1036-1041
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• 2004

A newly designed pressure-scanning slit viscometer is developed to combine an optical device without refraction while measuring blood viscosity over a range of shear rates. The capillary tube in a previously designed capillary viscometer was replaced with a transparent slit, which is affordable to mount optical measurement of flowing blood cells. Using a pressure transducer, we measured the change of pressure in a collecting chamber with respect to the time, p(t), from which the viscosity and shear rate were mathematically calculated. For water, standard oil and whole blood, excellent agreement was found between the results from the pressure-scanning slit viscometer and those from a commercially available rotating viscometer. This new viscometer overcomes the drawbacks of the previously designed capillary viscometer in the measuring whole blood viscosity. First, the pressure-scanning slit viscometer can combine an optical instrument such as a microscope. Second, this design is low cost and simple (i.e., ease of operation, no moving parts, and disposable).

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.3
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• pp.201-207
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• 2004

High speed rotating airflow inside a HDD chamber causes sub-micron scale disk vibration that could generate significant TMR problems in most of current HDD products. Many publications are presented for the reduction of airflow excitation. One of the most effective methods widely adopted in high-end HDD products is SqueezeAir Bearing Plate (SABP). However, because of its tight assembly clearance between the damper and disk, this method could not be easily implemented in volume production. This article presents a disk damper design that is modified to be feasible for volume production by virtue of a new airflow modeling method.

• Journal of the Korean Vacuum Society
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• v.8 no.4A
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• pp.432-437
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• 1999

We have fabricated an in situ ellipsometer operating at He-Ne wavelength. It can be applied to the real-time, in-situ tracking of the ellisometric change which occurs during various sample treatments. As a rotating analyzer type, all optical elements and related parts are designed to share a common hollow-axis configuration, and hence the ellipsometer is compact in shape and simple in design. It is mountable on the spare ports of vacuum chamber with ease. Using this ellipsometer, we observed the effective density variation of previously grown $TiO_2$ thin films by using electron beam evaporation. The packing density of the as-grown film was 82%. When exposed to atomsphere, the micro-void of the film was filled with water vapor. This water-filled $TiO_2$ thin film was subject to heating/cooling cycles in vacuum and the ellipsometric variation versus temperature and cycling number was measured in real time using this in situ He-Ne ellipsometer.

• The KSFM Journal of Fluid Machinery
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• v.6 no.2 s.19
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• pp.15-22
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• 2003

Comprehensive study on a centrifugal blower for air-purifier involving a few physical filters for percolation process has been accomplished for an optimal design of the air handling system. The filtering media causes a flow resistance for induced flows by a rotating impeller. The present methodology is to adopt PIV system for velocity measurements and wind tunnel connected with an anechoic chamber for total performance test of the blower. Trial prototypes for the blades of a rotor and casing are presented for satisfaction of both flow rate and noise level set by design objectives. Tapered blades with a special casing for a fan show good performance data. The results of velocity fields also explain the reason of improvements of the blower performance.

• Proceedings of the KIEE Conference
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• 2001.05a
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• pp.301-304
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• 2001

This paper considers the research of the hybrid interrupter which adopts both rotating arc and thermal expansion technology. The operating principle of this device defends on rapid arc rotation due to the magnetic field created by the fault current through a coil which is mounted on contacts and also relies on the principle of thermal expansion created by arc energy in extinguishing chamber and finally causes pressure rise in expansion volume. In this research, the principle of the interrupting techniques are given and experimental results of hybrid interrupter which is developed by new technology is introduced.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.05a
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• pp.1156-1161
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• 2001

A significant trial has been performed for estimation of noise level of a cross flow fan for air conditioning system. In general, measurements of noise level of machinery require rigorous equipment involving an anechoic chamber with precision gauges. The apparatus is expensive to utilize and is not easy to construct. In this work, we adopt static pressure sensing from an ordinary pressure transducer for prediction of noise level of a rotating fan. The present procedure is finding sound pressure from the static pressure by manipulating Light-Curle equation depicts noisy energy in terms of pressure on surfaces of noise generators. Sound power level near core unit of the fan is evaluated with the present methodology in a normal laboratory room without any sound absorbers. The method is easy and shows good prediction results compared with precise measurements by using microphones.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2003.11a
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• pp.50-55
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• 2003

Tribological testing of DLC films was conducted using a rotating type ball on a disk friction tester in a dry chamber. This study made use of four kinds of mating balls that were made with stainless steel but subjected to diverse annealing conditions in order to achieve different levels of hardness. In all load conditions using martensite mating balls, the test results demonstrated that the friction coefficient was lower when the mating materials were harder. The high friction coefficient found in soft martensite balls appeared to be caused by the larger contact areas. The wear track on the mating balls indicated that a certain amount of material transfer occurs from the DLC film to the mating ball during the high friction process. Raman Spectra analysis showed that the transferred materials were a kind of graphite and that the contact surface of the DLC film seemed to undergo a phase transition from carbon to graphite during the high friction process.

• Proceedings of the KIEE Conference
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• 2001.04a
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• pp.44-46
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• 2001

This paper describes the use of the PHOENICS CFD package for the simulation of the high-current period of the arcing process in a hybrid rotating arc/auto expansion by interrupter. The operating principle of this device depends on rapid arc rotation due to the magnetic field created by the fault current through a coil which is mounted on contacts and also relies on the principle of thermal expansion created by arc energy in extinguishing chamber and finally causes pressure rise in expansion volume. This paper is divided into three main sections. The first gives a brief overview of the interrupter. The second section gives a full description of the methods used in the calculation. The final section presents some sample results for the hybrid interrupter.