• Industrial Engineering and Management Systems
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• v.14 no.4
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• pp.392-400
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• 2015

Monitoring of plasma etch processes for fault detection is one of the hallmark procedures in semiconductor manufacturing. Optical emission spectroscopy (OES) has been considered as a gold standard for modeling plasma etching processes for on-line diagnosis and monitoring. However, statistical quantitative methods for processing the OES data are still lacking. There is an urgent need for a statistical quantitative method to deal with high-dimensional OES data for improving the quality of etched wafers. Therefore, we propose a robust relevance vector machine (RRVM) for regression with statistical quantitative features for modeling etch rate and uniformity in plasma etch processes by using OES data. For effectively dealing with the OES data complexity, we identify seven statistical features for extraction from raw OES data by reducing the data dimensionality. The experimental results demonstrate that the proposed approach is more suitable for high-accuracy monitoring of plasma etch responses obtained from OES.

• Geomechanics and Engineering
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• v.15 no.6
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• pp.1207-1217
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• 2018

Geomechanics parameters are critical to numerical simulation, stability analysis, design and construction of geotechnical engineering. Due to the limitations of laboratory and in situ experiments, back analysis is widely used in geomechancis and geotechnical engineering. In this study, a hybrid back analysis method, that coupling numerical simulation, response surface (RS) and relevance vector machine (RVM), was proposed and applied to identify geomechanics parameters from hydraulic fracturing. RVM was adapted to approximate complex functional relationships between geomechanics parameters and borehole pressure through coupling with response surface method and numerical method. Artificial bee colony (ABC) algorithm was used to search the geomechanics parameters as optimal method in back analysis. The proposed method was verified by a numerical example. Based on the geomechanics parameters identified by hybrid back analysis, the computed borehole pressure agreed closely with the monitored borehole pressure. It showed that RVM presented well the relationship between geomechanics parameters and borehole pressure, and the proposed method can characterized the geomechanics parameters reasonably. Further, the parameters of hybrid back analysis were analyzed and discussed. It showed that the hybrid back analysis is feasible, effective, robust and has a good global searching performance. The proposed method provides a significant way to identify geomechanics parameters from hydraulic fracturing.