• Proceedings of the Materials Research Society of Korea Conference
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• 2009.05a
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• pp.26.2-26.2
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• 2009

이 논문은 반응성 $BCl_3$ 플라즈마로 GaAs의 건식 식각을 진행한 후 그 결과에 대하여 연구 분석 한 것이다. 이 때 사용한 식각 공정 변수는 $BCl_3$ 플라즈마에서의 가스유량, 공정 압력과 RIE 척 파워의 변화이다. 먼저 공정 압력을 75 mTorr 고정시킨 후 $BCl_3$ 유량을 변화 (2.5~10 sccm)해서 실험하였다. 또한 BCl3의 유량을 5 sccm으로 고정시킨 후 공정압력을 변화(47~180 mTorr)해서 식각 실험을 실시하였다. 마지막으로 47 mTorr와 100 mTorr 의 각각의 공정압력에서 RF 척 파워를 변화시켜 (50~200 W) 실험하였다. GaAs 플라즈마 식각이 끝난 후 표면단차 측정기 (Surface profiler)를 사용하여 표면의 단차와 거칠기를 분석하였다. 그 후 그 결과를 이용하여 식각율 (Etch rate), 식각 표면 거칠기 (RMS roughness), 식각 선택비 (Selectivity) 등의 식각 특성평가를 하였다. 또한 식각 공정 중에 샘플 척에 발생하는 자기 바이어스와 $BCl_3$ 플라즈마 가스를 광학 발광 분석기 (Optical Emission Spectroscopy)를 이용하여 플라즈마의 상태를 실시간으로 분석하였다. 이 실험 결과에 따르면 공정 압력의 증가는 샘플 척의 자기 바이어스의 값을 감소시켰다. $BCl_3$ 압력 변화에 의한 GaAs의 식각 결과를 정리하면 5 sccm의 $BCl_3$ 가스유량과 RF 척 파워를 100 W로 고정시켰을 때 식각율은 47 mTorr에서 가장 높았으며, 그 값은 $0.42{\mu}m/min$ 이었다. GaAs의 식각 속도는 공정압력이 증가할수록 감소하였으며 180 mTorr에서는 식각율이 $0.03{\mu}m/min$로 거의 식각되지 않았다. 또한 공정압력을 75 mTorr, RF 척 파워를 100 W로 고정시키고, $BCl_3$ 가스유량을 2.5 sccm에서 10 sccm까지 변화시켰을 때, 10 sccm 의 $BCl_3$ 가스유량에서 가장 높은 식각율인 $0.87{\mu}m/min$이 측정되었다. 압력에 따른 GaAs의 식각 후 표면 거칠기는 최대 2 nm 정도로 비교적 매끈하였으며, 거의 식각되지 않은 180mTorr의 조건에서는 약 1 nm로 낮아졌다. 본 실험 조건에서 GaAs의 감광제에 대한 식각 선택비는 최대 약 3:1 이내였다.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.05a
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• pp.39.1-39.1
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• 2009

본 실험은 연성과 광 투명도가 뛰어난 아크릴 (PMMA) 과 폴리카보네이트 (Polycabonate) 기판의 축전 결합형 플라즈마 (CCP) 건식 식각 연구에 관한 것이다. 특히 식각 반응기 내부의 압력 변화에 따른 두 기판의 건식 식각 특성 분석에 초점을 맞추었다. 실험에 사용된 기판은 두께 1mm의 아크릴 (PMMA) 과 폴리카보네이트 (Polycabonate)를 $1.5\times1.5\;cm^2$로 절단하여 Photo-lithography 공정을 통하여 감광제 (Photo-resist)로 패턴하였다. 식각 반응기 내부에 패턴 된 아크릴(PMMA) 과 폴리카보네이트 (Polycabonate)를 넣은 후 반응기 내부 진공 상태로 만들었다. 그 후 5 sccm $O_2$ 가스를 유량조절기 (Mass flow controller)를 통하여 식각 반응기 내부로 유입하여 실험을 하였다. 이때 식각 공정 변수는 식각 반응기 내부 압력과 샘플 척 파워이다. 특성평가 항목은 식각 후 기판 (Substrate)의 식각율 (Etch rate), 식각 선택비 (Selectivity) 그리고 기판 표면 거칠기 (RMS roughness)이다. 실험 결과는 표면 단차 분석기(Surface profiler)를 이용하여 기판 (Substrate)의 표면을 분석 하였다. 또한 OES (Optical Emission Spectroscopy) 를 이용하여 식각 중 내부 플라즈마의 상태를 분석하였다. 본 실험 결과에 따르면 5 sccm $O_2$ 가스와 100 W 척 파워를 고정한 후 반응기 내부의 압력을 25 mTorr에서 180 mTorr까지 변화시켜 실험한 결과 40 mTorr의 반응기 내부 압력에서 실험 자료 중 가장 높은 식각율로 아크릴 (PMMA)은 $0.46\;{\mu}m/min$, 폴리카보네이트 (Polycabonate)는 $0.28\;{\mu}m/min$의 결과를 얻었다. 또한 이 자료를 바탕으로 5 sccm $O_2$ 가스와 반응기 내부 압력을 40 mTorr로 고정시키고 RIE 척 파워를 25 W에서 150 W로 증가시켰을 때 아크릴 (PMMA)의 식각율은 $0.15\;{\mu}m/min$에서 $0.72\;{\mu}m/min$까지 증가하였고, 폴리카보네이트 (Polycabonate) 의 식각율은 $0.1\;{\mu}m/min$에서 $0.36\;{\mu}m/min$까지 증가하였다.

• The Journal of Korean Obstetrics and Gynecology
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• v.18 no.3
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• pp.192-202
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• 2005

Purpose : To investigate relation between Heart rate variability(HRV) and Kupperman's index. Methods : From 2004, 3, 15 to 2004, 4, 10, a total 18 female patients(age 40-61) was recruited. but 2 patients was excluded. one was under hormone raplacement therapy, the other was under drug treatment. We measured patient's HRV by SA-2000E(Medicore Co., Ltd., Korea), and they fulfilled kupperman's index and　qustionnaire.　Results : The mean age of patient was 50.13${\pm}$5.78 years. 6 of 16 patients was menopause, 12 of 16 patients had menstruation. half of 16 patients had a understanding about climacteric syndrome. Investigating relation between HRV and kupperman's index, kupperman's index had positive correlation with heart rate significantly. Kupperman's index had negative correlation with SDNN significantly. Kupperman's index had negative correlation with RMS-SD significantly. Conclusion : In this study, we presented relation between HRV and kupperman's index. Furthermore, large scale study is required.

• Korean Journal of Optics and Photonics
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• v.4 no.1
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• pp.28-35
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• 1993

In the case of an imaging system affected by aberrations which are not precisely known, the effect of aberrations can be minimized and near-diffraction-limited images can be restored by introducing artificial random phase fluctuations in the exit pupil of the imaging system and using bispectral speckle imaging. In order to determine the optimum value of the correlation length for Gaussian random phase model, computer simulation is performed for 50 image frames of a point object in the presence of defocus, spherical aberration, coma, astigmatism of 1 wave, respectively. In terms of the criterion of performance, the FWHM of the point spread function, normalized peak intensity, MTF and visual inspection of the restored object are employed. The optimum value for the rms difference $\sigma$ of aberration on the exit pupil in the interval of Fried parameter ${\Upsilon}_0$ is given by 0.27-0.53 wave for spherical aberration, and 0.24-0.36 wave for defocus and astigmatism, respectively. It is found that the bispectral speckle imaging technique does not give good results in the case of coma.

• Journal of Korean Society of Archives and Records Management
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• v.20 no.2
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• pp.41-65
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• 2020

Organizations always face the risk of litigation; thus, they should actively prepare for it. In particular, public enterprises must respond to lawsuits carefully to avoid any management risk and possible damage of publicity. Given this, this study aims to identify the relationship between efficient litigation response and record management, determine problems related to record management while utilizing records as evidence, and propose measures to improve record management that uses records as legal evidence. For records to be deemed as legal evidence, RMS is essential to ensure authenticity. Moreover, the ability to secure potential evidence and awareness of the importance of records management needs to be validated. The Commission also stressed the importance of cooperation between archivists and the legal team to efficiently respond to lawsuits.

• Geophysics and Geophysical Exploration
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• v.17 no.2
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• pp.95-103
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• 2014

This paper presents a practical inversion method for recovering a three-dimensional (3D) resistivity model and static shifts simultaneously. Although this method is based on a Gauss-Newton approach that requires a sensitivity matrix, the computer time can be greatly reduced by implementing a simple and effective procedure for updating the sensitivity matrix using the Broyden's algorithm. In this research, we examine the approximate inversion procedure and the weighting factor ${\beta}$ for static shifts through inversion experiments using synthetic MT data. In methods using the full sensitivity matrix constructed only once in the iteration process, a procedure using the full sensitivity in the earlier stage is useful to produce the smallest rms data misfit. The choice of ${\beta}$ is not critical below some threshold value. Synthetic examples demonstrate that the method proposed in this paper is effective in reconstructing a 3D resistivity structure from static-shifted MT data.

• Journal of the Korean Vacuum Society
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• v.21 no.4
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• pp.193-198
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• 2012

In this study, we have fabricated the polymer insulator and diamond-like carbon (DLC) thin films by using plasma enhanced chemical vapor deposition methods. we fabricated the DLC films with various thicknesses as the passivation layer on plasma polymer and investigated the structural, physical, and electrical properties of DLC/plasma polymer films. The plasma polymer synthesized in this work had the low leakage current and low dielectric constant. The values of hardness and elastic modulus in DLC/plasma polymer films are increased, and the value of rms surface roughness is decreased, and contact angle value is increased with increasing DLC film thickness. In the electrical properties of DLC/plasma polymer, the value of the dielectric constant is increased, however the leakage current property of the DLC/plasma polymer is improved than that of plasma polymer film with increasing DLC film thickness.

• Journal of the Korean Society for Railway
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• v.7 no.4
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• pp.332-338
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• 2004

The two projects about the high speed train have been performed in Korea, one project is the commercial run of high speed train(KTX) from Seoul to Busan and the other is the development of original high speed train(HSR 350x). As the successful results, the service run of KTX had been launched on the 1st of April, 2004 and HSR 350x had been fabricated in June, 2002 and has been tested in the Kyoungbu line and Honam line since then. The railway has the track irregularities which cause vibrations, such as rail joints, turnout, level crossing, transition curves and super-elevation ramps, and variations in the track level(z-axis) and the gauge(y-axis). Generally, the ride comfort for railway is evaluated by using the vibrations. In this paper, the ride comfort indices according to mc 513R and ISO 10056 have been reviewed when the high-speed trains are operated on both Kyoungbu line and Honam line. Also, the ride characteristics for KTX and HSR 350x on the high speed line and the conventional line have been analyzed and evaluated. The results show that the high-speed train has no problem from the viewpoint of the comfort ride on the high speed line and the conventional line and the ride index for HSR 350x is same as that for KTX in the high speed(300 km/h).

• Journal of rehabilitation welfare engineering & assistive technology
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• v.10 no.3
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• pp.221-228
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• 2016

In this paper, we introduce our simulation software for EEG signal accuracy improvement. Users can check and train own EEG signal accuracy using our simulation software. Subjects were shown emotional imagination condition with landscape photography and logical imagination condition with a mathematical problem to subject. We use that EEG signal data, and apply Independent Component Analysis algorithm for noise removal. So we can have beta waves(${\beta}$, 14-30Hz) data through Band Pass Filter. We extract feature using Root Mean Square algorithm and That features are classified through Support Vector Machine. The classification result is 78.21% before EEG signal accuracy improvement training. but after successive training, the result is 91.67%. So user can improve own EEG signal accuracy using our simulation software. And we are expecting efficient use of BCI system based EEG signal.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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• v.22 no.3
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• pp.277-284
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• 2004

The subject of this study is to apply experimentally In resolution stereo imagery of IKONOS to producing 1:50,000 scale maps for Munsan area in Paju, being near the Military Demarcation Line, is inaccessible for aerial photography. Ground control points were acquired from GPS surveying to perform geometric corrections on images. Digital maps were produced from IKONOS stereo imagery on the digital photographic workstation. From field investigation, RMS errors of the plane and vertical positions are estimated respectively at $\pm$1.706m and $\pm$1.231m, respectively. These plane and vertical accuracies are within the tolerance limits of those provided in the NGIS Digital Topographic Map Production Rules. Therefore this suggested method is recommended for producing the large scale digital maps of 'No flight' zone near the M.D.L.