• 제목/요약/키워드: Residual pattern

검색결과 360건 처리시간 0.025초

열 나노임프린트 공정에서 가압조건이 패턴전사에 미치는 영향 (Effects of Pressurization Conditions on the Pattern Transfer in the Thermal Nanoimprint Lithography)

  • 이우영;이기연;김국원
    • 반도체디스플레이기술학회지
    • /
    • 제12권4호
    • /
    • pp.15-20
    • /
    • 2013
  • Nanoimprint lithography (NIL) is the next generation photolithography process in which the photoresist is dispensed onto the substrate in its liquid form and then imprinted and cured into a desired pattern instead of using traditional optical system. There have been considerable attentions on NIL due to its potential abilities that enable cost-effective and high-throughput nanofabrication to the display device and semiconductor industry. In this paper, a pressure vessel type imprinting system was used to imprint patterns with two type pressure values (25 bar, 30 bar) and two type pressure keeping times (5 min, 10 min). The height of transferred pattern and the thickness of residual layer were measured and effects of pressurization conditions - pressure and pressure keeping time - on the pattern transfer in thermal NIL were investigated.

트레드 블록을 고려한 타이어의 잔류 복원 토크 및 마찰 에너지에 대한 유한 요소 해석 (Finite Element Analysis on Residual Aligning Torque and Frictional Energy of a Tire with Detailed Tread Blocks)

  • 김기운;정현성;조진래;양영수
    • 한국자동차공학회논문집
    • /
    • 제12권4호
    • /
    • pp.173-180
    • /
    • 2004
  • The tread pattern of a tire has an important effect on tire performances such as handling, wear, noise, hydroplaning and so on. However, a finite element analysis of a patterned tire with detailed tread blocks has been limited owing to the complexity of making meshes for tread blocks and the huge computation time. The computation time has been shortened due to the advance in the computer technology. The modeling of tread blocks usually requires creating a solid model using a CAD software. Therefore it is a very complicated and time-consuming job to generate meshes of a patterned tire using a CAD model. A new efficient and convenient method for generating meshes of a patterned tire has been developed. In this method, 3-D meshes of tread pattern are created by mapping 2-D meshes of tread geometry onto 3-D tread surfaces and extruding them through tread depth. Then, the tread pattern meshes are assembled with the tire body meshes by the tie contact constraint. Residual aligning torque and frictional energy are calculated by using a patterned tire model and compared to the experimental results. It is shown that the calculated results of a patterned tire model are in a good agreement with the experimental ones.

자유체적이론을 고려한 플라스틱의 급냉시 잔류응력의 분포 (The Distribution of Residual Stresses in Quenched Plastic Parts including Fee Volume Theory)

  • 김종선
    • 한국소성가공학회:학술대회논문집
    • /
    • 한국소성가공학회 2000년도 춘계학술대회논문집
    • /
    • pp.106-111
    • /
    • 2000
  • The residual stresses in molded plastic parts can be divided into the flow induced residual stresses produced in flowing stages and the thermally induced residual stresses produced in cooling state. Reducing residual stresses in the final parts is one of the goals in recent study. The present study focused on comparing the predicted values for thermal residual stresses in freely and constrained quenched plastic plates with and without free volume theory. As a result the final residual stresses showed the opposite pattern in thickness direction. furthermore by applying free volume theory the predicted residual stress at the center showed about 50% of the values without free volume theory for constrained quenched case.

  • PDF

무잔류 응력상태 결정을 통한 표면 잔류응력장 평가에의 레이저 간섭계 적용 (Application of Laser Interferometry for Assessment of Surface Residual Stress by Determination of Stress-free State)

  • 김동원;이낙규;나경환;권동일
    • 반도체디스플레이기술학회지
    • /
    • 제3권2호
    • /
    • pp.35-40
    • /
    • 2004
  • The total relaxed stress in annealing and the thermal strain/stress were obtained from the identification of the residual stress-free state using electronic speckle pattern interferometry (ESPI). The residual stress fields in case of both single and film / substrate systems were modeled using the thermo-elastic theory and the relationship between relaxed stresses and displacements. We mapped the surface residual stress fields on the indented bulk Cu and the 0.5 $\mu\textrm{m}$ Au film by ESPI. In indented Cu, the normal and shear residual stress are distributed over -1.7 GPa to 700 MPa and -800 GPa to 600 MPa respectively around the indented point and in deposited Au film on Si wafer, the tensile residual stress is uniformly distributed on the Au film from 500 MPa to 800 MPa. Also we measured the residual stress by the x-ray diffractometer (XRD) for the verification of above residual stress results by ESPI...

  • PDF

Change of transmission characteristics of FSSs in hybrid composites due to residual stresses

  • Hwang, In-Han;Chun, Heoung-Jae;Hong, Ik-Pyo;Park, Yong-Bae;Kim, Yoon-Jae
    • Steel and Composite Structures
    • /
    • 제19권6호
    • /
    • pp.1501-1510
    • /
    • 2015
  • The frequency selective surface (FSS) embedded hybrid composite materials have been developed to provide excellent mechanical and specific electromagnetic properties. Radar absorbing structures (RASs) are an example material that provides both radar absorbing properties and structural characteristics. The absorbing efficiency of an RAS can be improved using selected materials having special absorptive properties and structural characteristics and can be in the form of multi-layers or have a certain stacking sequence. However, residual stresses occur in FSS embedded composite structures after co-curing due to a mismatch between the coefficients of thermal expansion of the FSS and the composite material. In this study, to develop an RAS, the thermal residual stresses of FSS embedded composite structures were analyzed using finite element analysis, considering the effect of stacking sequence of composite laminates with square loop (SL) and double square loop (DSL) FSS patterns. The FSS radar absorbing efficiency was measured in the K-band frequency range of 21.6 GHz. Residual stress leads to a change in the deformation of the FSS pattern. Using these results, the effect of transmission characteristics with respect to the deformation on FSS pattern was analyzed using an FSS Simulator.

기둥과 보-기둥 구조물의 비탄성 좌굴거동 (Inelastic Buckling Behavior of Column and Beam-Column)

  • 이동식;오순택
    • 한국강구조학회 논문집
    • /
    • 제16권2호통권69호
    • /
    • pp.215-224
    • /
    • 2004
  • 에너지법을 이용하여 보-기둥 및 기둥의 비탄성 좌굴거동을 해석하였다. 미국에서 생산되는 I 형강에 적용되는 단순형 잔류응력 모델을 우리나라에서 생산되는 I 형강에 적용하였다. 먼저, 집중 압축 축하중과 균등 휨을 동시에 받는 I 형강에 대하여 비탄성 횡-비틀림 좌굴거동을 알아보고 보-기둥에서의 잔류응력의 영향을 해석하였다. 또한 기둥의 경우에 대하여 해석하였으며 얻어진 결과를 강구조편람에 의한 설계 시의 값과 비교하였다. 결론적으로 강구조편람에 의한 설계는 과설계가 됨을 알 수 있었다.

백목련의 분지형에 관한 Computer Simulation (Computer Simulation of Branching Pattern in Magnolia denudata Desr.)

  • Park, Bong-Kyu
    • The Korean Journal of Ecology
    • /
    • 제6권4호
    • /
    • pp.1-9
    • /
    • 1983
  • The observation of branching pattern on Magnolia denudata Desr. was performed from July 1982 to September 1983 and then computer simulation was carried out. Tree crown pattern depends on not genetic factors but also environmental factors and the determination of branchin pattern which characterized it appears to properly explain the relationships such as branching pattern and allocation of materials through the analysis of influence branches under several assumptions. Now that computer simulated simulated pattern was considered as the accumulation of two factors which controled the growth, it was represented as the stimulated tree which differs in branching rate that described allocation of material necessary for the growth of each branch. There was a tendency of allocation ratio of nutrients, i.e. subbranch to main branch to decrease by the passage of year. Under assumption that branch was branched when accumulated material reached 1, it was possible to represent the allocation of nutrients are residual $nutrient{\times}\frac{1}{1+F};in main; branch, ; residual; nutrient{\times}\frac{F}{1+F}$ in subbranch, A(iA, iC)+$F^(iA-1)$ in current twig. Like this, the basic minute difference of the allocation of nutrients according to the branch resulted in complicated patterns in the tree crown.

  • PDF

A three dimensional numerical model of tide and tidal current in the bay of Cheonsu in Korea

  • Moon Seup Shin;Tet
    • 한국수자원학회:학술대회논문집
    • /
    • 한국수자원학회 1998년도 학술발표회 논문집
    • /
    • pp.632-637
    • /
    • 1998
  • The purpose of this study of this study is to find tide and tidal current variation by three dimensional numerical model of tide and tidal current in the bay of Cheonsu in Korea. On the basis of the observed data on water temperature and salinity data and wind data of summer(July) in the bay of Cheonsu in Korea, water circulation in the bay of Cheonsu is investigated with use of a robust diagnostic numerical model, including calculated co-range and co-tidal charts of M2 tide are similar to the observed ones. The residual flow Pattern at the surface layer during summer formed clockwise circulation in the front coastal the dike of the Sosam A zone(Ganwor island) and Taeju island. The residual flow pattern at the 15m layer during formed clockwise circulation in the front Taeju island. The residual flow Pattern at the surface layer formed anti-clockwise circulation in the upper Sangmok and Naepasu island.

  • PDF

광탄성을 이용한 투명한 사출성형품의 잔류응력측정 및 광학적 특성의 컴퓨터 모사 (Measurement of Residual Stress Using Photoelasticity and Computer Simulation of Optical Characteristics in a Transparent Injection Molded Article)

  • 홍진수;박서리;류민영
    • 폴리머
    • /
    • 제35권1호
    • /
    • pp.1-6
    • /
    • 2011
  • 사출성형은 고온의 수지를 고압으로 금형에 충전하고 냉각하여 제품을 만드는 공정으로 큰 온도차이와 고압에 의해 성형품에 잔류응력이 형성된다. 이러한 잔류응력은 시간이 지남에 따라 이완되면서 제품에 변형을 일으켜 형상 품질을 저하시킨다. 본 연구에서는 광탄성 장치를 이용하여 투명한 사출성형품의 잔류응력을 측정하는 방법을 연구하였다. 빛은 전자파처럼 진행하는데 편광필름을 통과하면 하나의 파장만이 진행하게 된다. 그 파장이 시편을 통과하면서 시편에 존재하는 잔류응력 때문에 복굴절이 형성되고 두 번째 편광필름을 통과하면서 다양한 색의 패턴을 보이게 된다. 이 색의 패턴을 이용하여 사출성형으로 제작된 사각평판의 잔류응력을 정량적으로 측정하였다. 또한 컴퓨터 해석을 통해 사출성형품의 광학적 특성을 예측하였으며 실험과 비교하였다.

대면적 UV 임프린팅 공정에서 잔류층 두께 예측 (Prediction of Residual Layer Thickness of Large-area UV Imprinting Process)

  • 김국원
    • 반도체디스플레이기술학회지
    • /
    • 제12권2호
    • /
    • pp.79-84
    • /
    • 2013
  • Nanoimprint lithography (NIL) is the next generation photolithography process in which the photoresist is dispensed onto the substrate in its liquid form and then imprinted and cured into a desired pattern instead of using traditional optical system. There have been considerable attentions on NIL due to its potential abilities that enable cost-effective and high-throughput nanofabrication to the display device and semiconductor industry. Although one of the current major research trends of NIL is large-area patterning, the technical difficulties to keep the uniformity of the residual layer become severer as the imprinting area increases more and more. In this paper, with the rolling type imprinting process, a mold, placed upon the $2^{nd}$ generation TFT-LCD glass sized substrate($370{\times}470mm^2$), is rolled by a rubber roller to achieve a uniform residual layer. The prediction of residual layer thickness of the photoresist by rolling of the rubber roller is crucial to design the rolling type imprinting process, determine the rubber roller operation conditions-mpressing force & feeding speed, operate smoothly the following etching process, and so forth. First, using the elasticity theory of contact problem and the empirical equation of rubber hardness, the contact length between rubber roller and mold is calculated with consideration of the shape and hardness of rubber roller and the pressing force to rubber roller. Next, using the squeeze flow theory to photoresist flow, the residual layer thickness of the photoresist is calculated with information of the viscosity and initial layer thickness of photoresist, the shape of mold pattern, feeding speed of rubber roller, and the contact length between rubber roller and mold previously calculated. Last, the effects of rubber roller operation conditions, impressing force & feeding speed, on the residual layer thickness are analyzed with consideration of the shape and hardness of rubber roller.