• Journal of the Semiconductor & Display Technology
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• v.23 no.2
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• pp.129-134
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• 2024

This study aims to talk about the necessity of solving the PFC gas emission problem raised by the recent development of the semiconductor industry and the remote plasma source method monitoring system used in the semiconductor industry. The 'monitoring system' means that the researchers applied machine learning to the existing monitoring technology and modeled it. In the process of this study, Residual Gas Analyzer monitoring technology and linear regression model were used. Through this model, the researchers identified emissions of at least 12700mg CO2 to 75800mg CO2 with values ranging from ion current 0.6A to 1.7A, and expect that the 'monitoring system' will contribute to the effective calculation of greenhouse gas emissions in the semiconductor industry in the future.

• Aerospace Engineering and Technology
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• v.2 no.2
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• pp.45-49
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• 2003

A Bake-Out test for STSAT-1 FM(Flight Model) was performed in a Bake-Out Chamber at SITC(Satellite Integration & Test Center) in KARI(Korea Aerospace Research Institute). The purpose of this test is to measure and analyze the outgassing rate to affect the optical equipment(FIMS) and to eliminate contaminants through the high temperature bake-out. This Bake-Out test is composed of three parts which are honeycomb panels & harnesses(Batch 1), an assembled satellite(Batch 2), and a disassembled satellite(Batch 3). For each test, quantitative and qualitative measurements and analysis were performed using TQCM(Thermoelectric Quartz Crystal Microbalance) and RGA(Residual Gas Analyzer.)

• Journal of the Korean Vacuum Society
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• v.17 no.1
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• pp.1-8
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• 2008

We analyzed the characteristics of water leakage from cooling components of the storage ring in the Pohang Light Source. The water leaks led localized pressure bumps and abnormal pressure changes. The leakage also changed the residual gas compositions depending not only on the position between leakage place to gas analyzer but also on on/off switching of ion pump and electron beam. We found that the residual gas analysis of $CH_4$, CO, NO was useful in determining water leaks.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.11
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• pp.961-968
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• 2009

In this work, transparent conductive oxide(TCO) films such as $In_2O_3-SnO_2$(ITO) and $In_2O_3-ZnO$(IZO) were prepared on polyethylene naphthalene(PEN) and glass substrates by using rf-magnetron sputtering system. The TCO films deposited on PEN substrate show very poor conductivity as compared to that of the TCO films deposited on glass substrates. From the results of the residual gas analysis(RGA) test, this poor stability of plastic substrate is presumed to be caused by the deteriorated adhesion between the TCO films and the plastic substrate due to outgassing from the plastic substrate during deposition of TCO films. From our experiment, it is found that the vaporization of some defects in the plastic substrates deteriorate the adhesion of the TCO films to the plastic substrate, because the most plastic substrates containing the water vapor and/or other adsorbed particles such as organic solvents. Mixing of these gases vaporized in the sputtering process will also affect the electrical property of the deposited TCO films. Inorganic thin composite $(SiO_2)_{40}(ZnO)_{60}$ film as a gas barrier layer is coated on the PEN substrate to protecting the diffusion of vapors from the substrate, so that the TCO films with an improved quality can be obtained.

• Journal of the Korean Chemical Society
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• v.44 no.5
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• pp.415-421
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• 2000

Volatile organic compounds(VOCs) emitted from PC/Monitor set and chemical parts com-prising of PC/Monitor set were analyzed aran, and xylene of VOCs based on qualitative analysis. As a result of these analyses, when the Wedge Rub-ber of rubber product was heated from 60$^{\circ}C$ to 80$^{\circ}C$, the emission rate(%) of xylene was increased about 2.5 times. But it was evaluated that the left of chemical parts were not affected by temperature except Wedge Rub-ber. The results of qualitative analyses between RGA and GC-MS were a little different respectively. With quantitative analysis, concentration of xylene emitted from cabinet was measured to be maximum as 6029.3 ug/ m$^3$(1.3ppm). The concentrations of toluene, xylene, and benzofuran derived from PC/Monitor set were 10.25${\mu}g/m^3$, 690${\mu}g/m^3$, and 180 ${\mu}g/m^3$, and these concentrations were relatively high levels which can bring on the risk to human health.

• Journal of the Korean Chemical Society
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• v.44 no.4
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• pp.343-349
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• 2000

Volatile Organic Compounds(VOCs) emitted form electronicSince toluene, xylene, cyclohexanone, and benzofuran will bring on the deleterious smell and the health risk, eventhough very small amount of these areexposed to human body, quantitative analysis was achieved by GC-MS system. As a result of these analyses, except PCB(CEM-1) of which is one of the electronic parts, the left of electronic parts represented, imme-diately form 30 minutes to 1 hour after heating, the trends that toluene, xylene, cyclohexanone and phenol were consecuticely emitted very high. and toluene, xylene, phenol, cyclohexanone, and benzofuran from most of the electronic parts were emitted very frequently within the measuring period. Finally, Trans of electronic parts showed the highest concentration of emission, and xylene(550~2482 ${\mu}g/m^2$) was the most noticeably emitting compound of VOCs.