• Title/Summary/Keyword: Removal device

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Decontamination of Simulated Test Piece by Dry Ice Pellet Blasting (드라이아이스 펠렛 분사에 의한 모의 시편의 제염)

  • Shin Jin-Myeong;Park Jang-Jin;Yang Myung-Seung
    • Journal of environmental and Sanitary engineering
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    • v.19 no.2
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    • pp.30-36
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    • 2004
  • Dry decontamination technique is required for maintaining nuclear material handling equipment contaminated with highly radioactive material in a hot cell. In order to determine the optimum blasting conditions of dry ice pellet blasting device, the basic experiments have been conducted on the simulated test specimens of four types of metals. The removal efficiency of test piece was evaluated by the XRF analysis and the change of the surface condition before and after blasting. The removal efficiency of cesium on loose contamination was 100% under blasting pressure; 3 kg/$cm^2$, blasting distance; 10 cm, blasting time: 10 sec. In case of fixed contamination, the removal efficiency of cesium was almost 96% under blasting pressure; 4kg/$cm^2$, blasting distance; 10 cm, blasting time; 30 sec.

CMP properties of $SnO_2$ thin film ($SnO_2$ 박막의 CMP 특성)

  • Choi, Gwon-Woo;Lee, Woo-Sun;Ko, Pil-Ju;Kim, Tae-Wan;Seo, Yong-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.04b
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    • pp.93-96
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    • 2004
  • As the integrated circuit device shrinks to the smaller dimension, the chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric(IMD) layer with free-defect. The effect of alternative commerical slurries pads, and post-CMP cleaning alternatives are discuess, with removal rate, scratch dentisty, surface roughness, dishing, erosion and particulate density used as performance metrics. we investigated the performance of $SnO_2$-CMP process using commonly used silica slurry, ceria slurry, tungsten slurry. This study shows removal rate and nonuniformity of $SnO_2$ thin film used to gas sensor by using Ceria, Silica, W-Slurry after CMP process. This study also shows the relation between partical size and CMP with partical size analysis of used slurry.

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The NURBS Human Body Modeling Using Local Knot Removal

  • Jo, Joon-Woo;Han, Sung-Soo
    • Fibers and Polymers
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    • v.6 no.4
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    • pp.348-354
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    • 2005
  • These days consumers' various demands are accelerating research on apparel manufacturing system including automatic measurement, pattern generation, and clothing simulation. Accordingly, methods of reconstructing human body from point-clouds measured using a three dimensional scanning device are required for apparel CAD system to support these functions. In particular, we present in this study a human body reconstruction method focused on two issues, which are the decision of the number of control point for each sectional curve with error bound and the local knot removal for reducing the unusual concentration of control points. The approximation of sectional curves with error bounds as an approximation criterion leads all sectional curves to their own particular shapes apart from the number of control points. In addition, the application of the local knot removal to construction of human body sectional curves reduces the unusual concentration of control points effectively. The results may be used to produce an apparel CAD system as an automatic pattern generation system and a clothing simulation system through the low level control of NUBS or NURBS.

반도체 장비 부품의 Ti/TiN 흡착물 세정 공정 연구

  • 유정주;배규식
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2004.05a
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    • pp.92-96
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    • 2004
  • Scales, accumulated on semiconductor equipment parts during device fabrication processes, often lower equipment lifetime and production yields. Thus, many equipments parts have be cleaned regularly. In this study, an attempt to establish an effective process for the removal of scales on the sidewall of collimators in the chamber of sputter is made. The EDX analysis revealed that the scales are composed of Ti and TiN with the colummar structure. It was found that the heat-treatment at 700 for 1 min. after the oxide removal in the HF solution, and then etching in the HNO3 : H2SO4 : H2O =4:2:4 solution for 5.5 hrs at 67 was the most effective process for the scale removal.

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CMP properties of $SnO_2$ thin film by different slurry (슬러리 종류에 따른 $SnO_2$ 박막의 광역평탄화 특성)

  • Lee, Woo-Sun;Choi, Gwon-Woo;Ko, Pil-Ju;Kim, Wan-Tae;Seo, Yong-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07a
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    • pp.389-392
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    • 2004
  • As the integrated circuit device shrinks to the smaller dimension, the chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric(IMD) layer with free-defect. The effect of alternative commerical slurries pads, and post-CMP cleaning alternatives are discuess, with removal rate, scratch dentisty, surface roughness, dishing, erosion and particulate density used as performance metrics. we investigated the performance of $SnO_2$-CMP process using commonly used silica slurry, ceria slurry, tungsten slurry. This study shows removal rate and non-uniformity of $SnO_2$ thin film used to gas sensor by using Ceria, Silica, W-Slurry after CMP process. This study also shows the relation between particle size and CMP with particle size analysis of used slurry.

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CMP properties of $SnO_2$ thin film ($SnO_2$ 박막의 CMP 특성)

  • Lee, Woo-Sun;Choi, Gwon-Woo;Ko, Pil-Ju;Hong, Kwang-Jun;Seo, Young-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.184-187
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    • 2003
  • As the integrated circuit device shrinks to the smaller dimension, the chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric(IMD) lyaer with free-defect. The effect of alternative commerical slurries pads, and post-CMP cleaning alternatives are discuess, with removal rate, scratch dentisty, surface roughness, dishing, erosion and particulate density used as performance metrics. we investigated the performance of $SnO_2-CMP$ process using commonly used silica slurry, ceria slurry, tungsten slurry. This study shows removal rate and nonuniformity of $SnO_2$ thin film used to gas sensor by using Ceria, Silica, W-Slurry after CMP process. This study also shows the relation between partical size and CMP with partical size analysis or used slurry.

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A NEW POST REMOVAL TECHNIQUE USING ATD TUGGING DEVICE (ATD automatic bridge remover를 이용한 새로운 포스트 제거 방법)

  • Park, Yun-Woo;Park, Se-Hee;Shin, Hye-Jin;Cho, Kyung-Mo;Kim, Jin-Woo
    • Restorative Dentistry and Endodontics
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    • v.30 no.3
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    • pp.215-220
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    • 2005
  • It is common for clinicians to encounter endodontically tl·treated teeth that contain posts within their roots. If endodontic treatment is failed, these posts must be removed to facilitate successful nonsurgical retreatment. There have been many techniques such as ultrasonic instrument, Ruddle post removal system, Eggler post remover and Masserann kit developed to facilitate removal of posts from the root canal space. But these methods may be disadvantageous because long length of time required for post removal and fracture of post or teeth. In now days new post removal technique using ATD automatic bridge remover was introduced. Advantages of this method are simple and short time consuming compare to others. This article served as a successful case report of post removal using ATD automatic bridge remover.

Simultaneous monitoring of motion ECG of two subjects using Bluetooth Piconet and baseline drift

  • Dave, Tejal;Pandya, Utpal
    • Biomedical Engineering Letters
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    • v.8 no.4
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    • pp.365-371
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    • 2018
  • Uninterrupted monitoring of multiple subjects is required for mass causality events, in hospital environment or for sports by medical technicians or physicians. Movement of subjects under monitoring requires such system to be wireless, sometimes demands multiple transmitters and a receiver as a base station and monitored parameter must not be corrupted by any noise before further diagnosis. A Bluetooth Piconet network is visualized, where each subject carries a Bluetooth transmitter module that acquires vital sign continuously and relays to Bluetooth enabled device where, further signal processing is done. In this paper, a wireless network is realized to capture ECG of two subjects performing different activities like cycling, jogging, staircase climbing at 100 Hz frequency using prototyped Bluetooth module. The paper demonstrates removal of baseline drift using Fast Fourier Transform and Inverse Fast Fourier Transform and removal of high frequency noise using moving average and S-Golay algorithm. Experimental results highlight the efficacy of the proposed work to monitor any vital sign parameters of multiple subjects simultaneously. The importance of removing baseline drift before high frequency noise removal is shown using experimental results. It is possible to use Bluetooth Piconet frame work to capture ECG simultaneously for more than two subjects. For the applications where there will be larger body movement, baseline drift removal is a major concern and hence along with wireless transmission issues, baseline drift removal before high frequency noise removal is necessary for further feature extraction.