Characteristic of the Wear and Lubrication using the Friction Froce Measurement in CMP Process (CMP 공정에서 마찰력 측정을 통한 마멸 및 윤활 특성에 관한 연구)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2004.07a
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- pp.231-234
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- 2004