• 한국광학회지
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• 제3권2호
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• pp.101-104
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• 1992

물질 내에서의 열효과의 정도를 나타내는 계수 중의 하나인 열광학계수는 온도 변화에 따른 굴절률의 변화로, 이미 일반 간섭계에 의한 측정 방법이 개발되어 있으나, 본 연구에서는 일반 간섭계의 단점을 보완한 전자 스펙클 무늬 간섭계를 이용한 광학계를 새로이 개발하여 그 사용 가능성을 실험적으로 확인하였다.

• 한국광학회:학술대회논문집
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• 한국광학회 1990년도 제5회 파동 및 레이저 학술발표회 5th Conference on Waves and lasers 논문집 - 한국광학회
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• pp.237-241
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• 1990

A detailed theoretical and experimental study of k-na exchange in soda lime silicate glasses by RTP is presented. Concentration profiles i.e. index profiles are given by complementary error function added Gaussian function. The estimated diffusion coefficient is 1.54${\mu}{\textrm}{m}$2/min.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.339-339
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• 2013

We study on the optical and electrical properties of indium-free ZTO(ZnSnO)/Ag/ZTO (ZAZ) multilayer electrodes for the low-cost transparent electrode. In the first step, each single layer was deposited using rf magnetron in-line sputter with various working pressure based on $O_2$/$Ar+O_2$ ratio (0~3%) and power at room temperature. Secondly, we studied the optical and electrical properties by analyzing the refractive index, extinction coefficient, transmittance and resistivity of each layer. Finally, we optimized the thickness of each layer using macleod simulation program based on the analyzed optical properties and fabricated the multilayer electrode. As a result, We achieved a low sheet resistance of $11{\Omega}$/sq and anaverage transmittance of 80% in the visible region of light (380~780 nm). This indicates that indium-free ZAZ multilayer electrode is a promising low-cost and low-temperature processing electrode scheme.

• 태양에너지
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• 제14권2호
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• pp.29-37
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• 1994

본 연구에서는 다공성 물질을 이용한 공기용 태양열 집열기에서 사용될 수 있는 유리덮개 및 다공성 매질의 파장에 따른 투과율(transmittance)을 UV-visible spectrophotometer및 FT-IR spectrometer을 이용하여 측정하였다. 유리의 경우에는 전자기 이론으로 유도된 투과율과 실험적 투과율을 비교하여 유리의 복소굴절율(complex refractive index)을 구하였다. 또한 분산이론(classical dispersion theory)으로부터 구한 이론적 복소굴절율과 비교하였다. 다공성 매질은 15 메쉬의 stainless steel wire screen을 여러 겹으로 겹쳐 이에 대한 투과율을 측정하였다. 그리고 two-flux모델을 사용하여 흡수계수(absorption coefficient) 및 후면산란 계수(backscattering coefficient)를 구하였다.

• 한국세라믹학회지
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• 제31권2호
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• pp.206-212
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• 1994

Effects of the film deposition process parameters on the properties such as deposition rate, etch rate, refractive index, stress and step coverage of plasma enhanced chemical vapor deposited (PECVD) tetraethylorthosilicate glass (TEOS) SiO2 film were investigated and analysed using SEM, FTIR and SIMS techniques. Increasing TEOS flow or decreasing O2 flow increased the deposition rate and the compressive stress of the oxide film but produced a less denser film. The deposition rate decreased owing to the decrease in the sticking coefficient of the TEOS and the O2 molecules onto the substrate Si with increasing the substrate temperature. Increasing the substrate temperature produced a denser film with a lower etch rate and the higher refractive index by lowering SiOH and moisture contents. Increasing the rf power increases the ion bombardment energy. This increase in energy, in turn, increases the deposition rate and tends to make the film denser. No appreciable changes were found in the deposition rate but the refractive index and the stress of the film decreased with increasing the deposition pressure. The carbon content in the plasma TEOS CVD oxide film prepared under our standard deposition conditions were very low according to the SIMS analysis results.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.381.1-381.1
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• 2014

In this study, we investigated the deposition behavior and the etch resistivity of plasma polymerized carbon hardmask (ppCHM) film with the variation of process temperature. The etch resistivity of deposited ppCHM film was analyzed by thickness measurement before and after direct contact reactive ion etching process. The physical and chemical properties of films were characterized on the Fourier transform infrared (FT-IR) spectroscope, Raman spectroscope, stress gauge, and ellipsometry. The deposition behavior of ppCHM process with the variation of temperature was correlated refractive index (n), extinction coefficient (k), intrinsic stress (MPa), and deposition rate (A/s) with the hydrocarbon concentration, graphite (G) and disordered (D) peak by analyzing the Raman and FT-IR spectrum. From this experiment we knew an optimal deposition condition for structure of carbon hardmask with the higher etch selectivity to oxide. It was shown the density of ppCHM film had 1.6~1.9 g/cm3 and its refractive index was 1.8~1.9 at process temperature, $300{\sim}600^{\circ}C$. The etch selectivity of ppCHM film was shown about 1:4~1:8 to undoped siliconoxide (USG) film (etch rate, 1300 A/min).

• 한국광학회지
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• 제22권4호
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• pp.170-178
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• 2011

기층의 후면에서 반사한 빛이 미치는 영향을 고려하여 반투명한 기층 위에 박막이 있는 시료의 분광타원상수를 모델링 분석하였다. 후면반사가 타원상수에 미치는 영향을 기층의 복소굴절률과 두께를 사용하여 나타내었고 이를 모델링 분석에 적용하였다. 유리 기층 위에 ITO 박막이 있는 시료에 대해 후면반사를 고려한 표현들을 사용하여 박막의 두께와 복소굴절률 등을 구한 결과가 후면에서 반사된 빛을 제거하여 측정, 분석하는 통상적인 타원법에 의한 결과와 일치함을 보였다.

• 한국재료학회지
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• 제31권7호
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• pp.382-385
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• 2021

Well-crystallized vanadium pentoxide V₂O₅ thin films are fabricated on MgO single crystal substrates by using pulsed-laser deposition technique. The linear optical transmission spectra are measured and found to be in a wavelength range from 300 to 800 nm; the data are used to determine the linear refractive index of the V₂O₅ films. The value of linear refractive index decreases with increasing wavelength, and the relationship can be well explained by Wemple's theory. The third-order nonlinear optical properties of the films are determined by a single beam z-scan method at a wavelength of 532 nm. The results show that the prepared V₂O₅ films exhibit a fast third-order nonlinear optical response with nonlinear absorption coefficient and nonlinear refractive index of 2.13 × 10^-10 m/W and 2.07 × 10^-15 cm²/kW, respectively. The real and imaginary parts of the nonlinear susceptibility are determined to be 3.03 × 10^-11 esu and 1.12 × 10^-11 esu, respectively. The enhancement of the nonlinear optical properties is discussed.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2005년도 춘계학술발표대회 논문집
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• pp.37-41
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• 2005

The curing of thermoset resin is accompanied with the changes in chemical and physical properties. The cure monitoring techniques can be designed by tracing these property changes. This paper presents the cure monitoring technique with fiber optic sensors to detect the change of refractive index during the polymerization process of engineering epoxy resin. The fiber optic sensor system was developed to measure the reflection coefficient at the interface between the fiber optic and the resin. The correlation between the sensor output and the degree of cure was performed following Lorentz-Lorenz law. The isothermal data from the sensors are compared with the data from differential scanning calorimeter.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.430-433
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• 2004

The ophthalmic lens manufacturing processes need to extract the aspherical surface equation from the unknown surface since its real profile can be adjusted by the process variables to make the ideal curve without the optical aberration. This paper presents a procedure to get the aspherical surface equation of an aspherical ophthalmic lens. Aspherical form generally consists of the Schulz formula to describe its profile. Therefore, the base curvature, conic constant, and high-order polynomial coefficient should be set to the original design equation. To find an estimated aspherical profile, firstly lens profile is measured by a contact profiler, which has a sub-micrometer measurement resolution. A mathematical tool is based on the minimization of the error function to get the estimated aspherical surface equation from the scanned aspherical profile. Error minimization step uses the Nelder-Mead simplex (direct search) method. The result of the refractive power measurement is compared with the curvature distribution on the estimated aspherical surface equation