• 한국전기전자재료학회논문지
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• 제23권3호
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• pp.228-233
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• 2010

We studied the optical characteristics correlated with low dielectric constants of low-k SiOCH thin films through ellipsometry. The low-k SiOCH thin films were prepared by CCP-PECVD method using BTMSM(Bis-trimethylsilylmethane) precursors deposited on p-Si wafer. The Si-O-CHx, Si-O-Si, Si-CHx, CHx and Si-H bonding groups were specified by FTIR spectroscopic spectra, and the groups coupled with the nano-porous structural organic/inorganic hybrid-type of SiOCH thin films which has extremely low dielectric constant close to 2.0. The structural groups includes highly dense pore as well as ions in SiOCH thin films affecting to complex refraction characteristics of single layer on the p-Si wafer. The structural complexity originate the complex refractive constants of the films, and resulted the elliptical polarization of the incident linearly polarized light source of Xe-light source in the range from 190 nm to 2100 nm. Phase difference and amplitude ratio between s wave and p wave propagating through SiOCH thin film was studied. After annealing, the amplitude of p wave was reduced more than s wave, and phase difference between p and s wave was also reduced.

• Transactions on Electrical and Electronic Materials
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• 제15권3호
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• pp.159-163
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• 2014

More accurate CD (Critical Dimension) control is required for the nanometer-scaled devices. However, since the reflectivity between substrate and PR (Photoresist) becomes higher, the CD (Critical Dimension) swing curve was intensified. The higher reflectivity also causes PR notching due to the pattern of sub-layer. For this device requirement, it was optimized for the thickness, refractive index(n) and absorption coefficient(k) in the bottom anti-reflective coating(BARC; SiON) and photoresist with the minimum reflectivity. The computational simulated conditions, which were determined with the thickness of 33 nm, n of 1.89 and k of 0.369 as the optimum condition, were successfully applied to the experiments with no standing wave for the 0.13um-device. At this condition, the lowest reflectivity was 0.44%. This optimum condition for BARC SiON film was applied to the process for 0.13um-device. The optimum SiON film as BARC to PR and sub-layer could be formed with the accurate CD control and no standing waver for the nanometer-scaled semiconductor manufacturing process.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.179.1-179.1
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• 2014

Si nanowires have exhibited unique optical characteristics, including nano-antenna effects due to the guided mode resonance, significant optical absorption enhancement in wide wavelength and incident angle range due to resonant optical modes, graded refractive index, and scattering. Since Si poor optical absorption coefficient due to indirect bandgap, all such properties have stimulated proposal of new optoelectronic devices whose performance can surpass that of conventional planar devices. We have carried out finite-difference time-domain simulation studies to design optimal Si nanowire array for solar cell applications. Optical reflectance, transmission, and absorption can be calculated for nanowire arrays with various diameter, length, and period. From the absorption, maximum achievable photocurrent can be estimated. In real devices, serious recombination loss occurring at the surface states is known to limit the photovoltaic performance of the nanowire-based solar cells. In order to address such issue, we will discuss how the geometric parameters of the array can influence the spatial distribution of the optical field (resulting optical generation rate) in the nanowires.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1985년도 추계학술대회 논문집
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• pp.21-23
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• 1985

By adding La$_2$O$_3$ to optical multicomponent glass composition, after making mother glass and core fiber that enable to enlarge the infrared transmittance region, then surveyed the optical properties. Through thermal analysis of the glass abstained by melt-quenching after selecting stable basic composition on devitrification and replace SiO$_2$ by 4-12wt% La$_2$O$_3$. As La$_2$O$_3$ increases up to l2wt% transition temperature, refractive index, density, deformation temperature increased, whereas thermal expansion coefficient decreased. As a result of inspectig transmittance in UV/VIS/IR region, visable region indicated the decrease of transmittance by increasing the La$_2$O$_3$ and transmittance region was enlarged by increasing the La$_2$O$_3$ in IR region. Also, fabricate core fiber at 820$^{\circ}C$ and severy the optical loss we could fact that La$_2$O$_3$ composition added 12wt% showed the minimum optical loss.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1996년도 추계학술대회 논문집
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• pp.128-134
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• 1996

In this study, the thermal and optical properties of multicomponent glass optical fiber by adding heavy metal oxide Ga$_2$O$_3$were investigated. The fiber samples were made by rod in tube method. The optical loss of fiber was measured in 0.3~1.8${\mu}{\textrm}{m}$ wavelength region. As Ga$_2$O$_3$increased up to 20wt%, the transition and softening temperature of bulk glass were increased from 495$^{\circ}C$ to 579$^{\circ}C$ and from 548$^{\circ}C$ to 641$^{\circ}C$respectively. Whereas the thermal expansion coefficient was decreased from 102 to 79.1$\times$10$^{-7}$ $^{\circ}C$. The refractive index was increased from 1.621 to 1.665, and IR cut-off wavelength was enlarged from 4.64${\mu}{\textrm}{m}$ to 6.1${\mu}{\textrm}{m}$. The optical loss of fiber was decreased and more remarkably decreased in 1.146${\mu}{\textrm}{m}$~1.8${\mu}{\textrm}{m}$ wavelength region.

• 한국광학회지
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• 제8권1호
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• pp.37-41
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• 1997

Ar 이온 보조 증착(IAD)에 의해 제작된 ZnS 박막의 광학적 특성, 환경적 안정성, 결정성을 기존의 보통 박막과 비교 분석하였다. IAD 박막은 보통 박막에 비해 상대적으로 높은 굴절률과 낮은 소멸 계수를 나타내었고, 습도(85%)와 온도(150.deg. C)에 대한 안정성 테스트 결과 수분 감도와 온도 의존성이 현저히 감소되어 이들 환경에 대하여 안정성을 갖는 것으로 나타났다. 이러한 결과는 이온 충격에 의해 박막의 조밀도가 증가되어 내부 미세구조가 개선되므로 대기중의 수분 흡착 감소에 기인한 것으로 분석된다. 또한 X선 회절 실험 결과 보통 박막은 전형적인 박막의 비정질 구조를 나타낸 반면 IAD 박막은 결정질의 구조를 나타내었다.

• Bulletin of the Korean Chemical Society
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• 제31권10호
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• pp.2909-2912
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• 2010

Hydrogenated microcrystalline silicon (${\mu}c$-Si:H) thin film for solar cells is prepared by plasma-enhanced chemical vapor deposition and physical properties of the ${\mu}c$-Si:H p-layer has been investigated. With respect to stable efficiency, this film is expected to surpass the performance of conventional amorphous silicon based solar cells and very soon be a close competitor to other thin film photovoltaic materials. Silicon in various structural forms has a direct effect on the efficiency of solar cell devices with different electron mobility and photon conversion. A Raman microscope is adopted to study the degree of crystallinity of Si film by analyzing the integrated intensity peaks at 480, 510 and $520\;cm^{-1}$, which corresponds to the amorphous phase (a-Si:H), microcrystalline (${\mu}c$-Si:H) and large crystals (c-Si), respectively. The crystal volume fraction is calculated from the ratio of the crystalline and the amorphous phase. The results are compared with high-resolution transmission electron microscopy (HR-TEM) for the determination of crystallinity factor. Optical properties such as refractive index, extinction coefficient, and band gap are studied with reflectance spectra.

• 한국세라믹학회지
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• 제27권8호
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• pp.979-990
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• 1990

The possible use of bioglass as implant materials is due to its biocompatibility to human body. Even if many animal studies for the bioglasses have been performed, their structures and physical properties are not fully understood. In the present work, several investigations such as Raman spectroscopic analysis, density, thermal expansion coefficient, softening temperature, and refractive index measurement were carried out to find the structures and physical properties of bioglasses, where MgO is substituted for CaO in bioglass composition (46.1%SiO2, 24.4%Na2O, 26.9%CaO, 2.6%P2O5 ; mole%). Hydroxyapatite formation on the glass surface reacted in Tris-buffer solution was also examined. When CaO was replaced by MgO, nonbridging oxygen in glass structuer was diminished but the degree of disorder increased. Thermal expansion and softening properties showed the mixed oxide effect. Hydroxyapatite were formed on the surface of 0~11mole% of MgO containing bioglasses, and the thickness of SiO2-rich layer as well as hydroxyapatite layer were unchanged with MgO content. However, the hydroxyapatite was not formed on the surface of the bioglasses containing over 11 mole percent MgO, even if the glasses were reacted for long period.

• E2M - 전기 전자와 첨단 소재
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• 제9권10호
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• pp.1047-1052
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• 1996

In this study, the thermal and optical proper-ties of multicomponent oxide glass fiber for IR sensor by adding heavy metal oxide Ga$_{2}$O$_{3}$ were investigated. The fiber samples were made by rod-in tube method. The optical loss of fiber was measured in 0.3-1.8/M wavelength region. As Ga$_{2}$O$_{3}$ increased up to 12wt%, the transition and softening temperature of bulk glass were increased from 495.deg. C to 564.deg. C and from 548.deg. C to 612.deg. C respectively. Whereas the thermal expansion coefficient was decreased from 102 to 88.2*10$^{-7}$ /.deg. C. The refractive index was increased from 1.621 to 1.662, and IR cut-off wavelength was enlarged from 4.64.mu.m to 5.22.mu.m. The optical loss of fiber was decreased and more remarkably decreased in 1.146.mu.m-1.8.mu.m wavelength region.

• 한국세라믹학회지
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• 제31권4호
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• pp.389-398
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• 1994

Calcium aluminate glasses transmit light at relatively long wavelengths up to 6 ㎛ and exhibit also low Rayleigh scattering values. However they have a tendency to get devitrified easily, which limits their use as routine optical materials. Here, the ternary system CaO-Al2O3-SiO2 glasses with low-silica (<30 mol%) were prepared to prevent the devitrification of CaO-Al2O3 glasses and the properties were investigated as functions of composition. The addition of SiO2 to calcium aluminate glasses promoted their stability, which was due to the decrease of non-bridging oxygens and the reconnection of network. As SiO2 was added, density, refractive index, molar volume of oxygens and thermal expansion coefficient decreased continuously. But the glass transition temperatures with increasing SiO2 contents were raised and then lowered. It was postulated that the anomaly was related to the changes of the middle range order as well as the short range order. As the amount of SiO2 in the glass was increased, the IR cut-off values moved to shorter wavelength owing to 'Si-O' antisymetric stretching vibration. The IR cut-off wavelength of the glasses with 5 and 30 mol% SiO2 was 4.90, 4.55 ㎛, respectively.