• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.12
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• pp.915-918
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• 2010

In this work, the etching characteristics of ZnO thin films were investigated using an inductively coupled plasma(ICP) of HBr/Ar/$CHF_3$ gas mixtures. The plasma characteristics were analyzed by a quadrupole mass spectrometer (QMS) and double langmuir probe (DLP). The surface reaction of the ZnO thin films was investigated using X-ray photoelectron spectroscopy (XPS). The etch rate of ZnO was measured as a function of the $CHF_3$ mixing ratio in the range of 0-15% in an HBr:Ar=5:2 plasma at a fixed gas pressure (6mTorr), input power (700 W), bias power (200 W) and total gas flow rate(50sccm). The etch rate of the ZnO films decreased with increasing $CHF_3$ fraction due to the etch-blocking polymer layer formation.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.12
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• pp.1051-1056
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• 2008

In this study, the investigations of the TiN etching characteristics were carried out with addition of $Cl_2$ gas in an inductively coupled $BCl_3$-base plasma system. Dry etching of the TiN was studied by varying the etching parameters including $Cl_2$ gas addition ratio, RF power, DC-bias voltage and pressure. The etch rate of TiN thin film was maximum when the $Cl_2$ gas addition flow was 2 sccm with fixed other conditions. As the RF power DC-bias voltage were increased, the etch rate of TiN thin film showed increasing tendency. $BCl_3/Cl_2$/Ar plasmas were characterized by optical emission spectroscopy (OES) analysis. The chemical reaction on the surface of the etched TiN films was investigated with X-ray photoelectron spectroscopy (XPS).

• 한국신재생에너지학회:학술대회논문집
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• 2007.06a
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• pp.45-48
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• 2007

Thermochemical 2-step methane reforming, involving the reduction of metal oxide with methane to produce syn-gas and the oxidation of the reduced metal oxide with water to produce pure hydrogen, was investigated on ferrite-based metal oxide mediums and $WO_{3}/ZrO_{2}$. Thermochemical 2-step methane reforming were accomplished at 900 $^{\circ}C$(syn-gas production step) and 800 $^{\circ}C$(water-splitting step). In syn-gas production step, it appeared carbon deposition on metal oxides with increasing react ion time. Various mediums showed the different starting point of carbon deposition each other. To minimize the carbon deposition, the reaction time was controlled before the starting point of carbon deposition. As a result, $CO_{x}$ were not evolved in water-splitting step, Among the various metal oxides, $Mn-ferrite/ZrO_{2}$ showed high reactivity, proper $H_{2}/CO$ ratio, high selectivity of undesired $CO_{2}$ and high evolution of $H_{2}$.

• Journal of the Korean Institute of Telematics and Electronics
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• v.26 no.11
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• pp.1691-1698
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• 1989

Gas sensing effects produced by adsorptive reaction between specimen surface and gases are expected to be influenced greatly by the state of the speimen surface. In this study, Co1-xMgxO ceramics oxygen sensors were prepared by pressing at 0.3-1.5ton/cm\ulcornerwith or without binder, intending to change porosity and average grain size on the surface purposely. The composition ratio of CoO to MgO was fixed at 1:1(mol.%). Microstructure of prepared Co0.5Mg0.5O ceramics were observed, the electrical properties and the sensitivity characteristics for oxygen gas were investigated in the device temperature range of 700-1000\ulcorner and for oxygen partical pressure range of 1-10**-4 atm. Temperature dependence of the resistivity of the specimen showed NTC behavior, average grain size increased and porosity decreased with increasing compaction pressure. The slope of the resistivity of the specimen on the oxygen partial pressure decreased with increasing average grain size and with decreasing porosity. Particularly, specimen pressed by 0.3 and 0.5 ton/cm\ulcornershowed the highest sensitivity to oxygen gas.

• Journal of Hydrogen and New Energy
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• v.20 no.5
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• pp.397-403
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• 2009

The catalysis of carbon black was investigated for the production of hydrogen by the catalytic decomposition of propane-butane mixture gas in this study. The thermal and the catalytic decompositions of hydrocarbons were performed at the temperature range of 500 - $1100^{\circ}C$, respectively. The conversions of hydrocarbons and the mole traction of hydrogen increased with increasing the reaction temperature and the conversion of hydrocarbons in the catalytic decomposition process was approximately liked with that obtained by the thermal decomposition. However, the mole traction of hydrogen produced in the catalytic decomposition process was higher than that obtained from the thermal decomposition. Therefore, it was concluded that the catalysis for the decomposition of hydrocarbons is occurred over carbon black used as catalyst. The mole traction of hydrogen produced by the catalytic decomposition of hydrocarbons also increased with increasing the mole ratio of $C_3H_8/C_4H_{10}$ in propane and butane mixture gas at $700^{\circ}C$. Therefore, it was concluded that the catalytic decomposition of the high propane mixture gas is more effectively for the production of hydrogen.

• 한국연소학회:학술대회논문집
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• 2006.04a
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• pp.79-85
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• 2006

In this study, to increase the mixing between flue gas and reducing agent, new shapes of $NH_3$ ejection nozzles are designed and experimentally and numerically tested. The nozzles have six holes perpendicular to the ambient flue gas flow and the tilting angle between direction of ambient flow and the hole axis is varied. To evaluate the mixing efficiency of the proposed nozzles, numerical and experimental tests are applied to several flow conditions comparing with single hole nozzle, which is commonly used in conventional SCR process. From the results the nozzle with tilted multi-holes has the large region of high turbulent intensity compared with conventional single hole nozzle. This is originated from the high vorticity near the upstream of the jet flow issuing from the hole. The high turbulent intensity and vorticity magnitude lead to enhanced mixing between flue gas and reducing agent. Hence, the most suitable moral ratio between NOx and reducing agent for the catalytic reaction can be obtained on behalf of the intensified scalar mixing within shorter physical mixing length.

• Korean Chemical Engineering Research
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• v.45 no.5
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• pp.448-454
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• 2007

Hydrothermal synthesis was conducted with starting material as Barium hydroxide and hydrous titania ($TiO_2{\cdot}xH_2O$) to obtain barium titanate fine Powder. The conversion, crystal structure and properties of as-prepared powder were investigated according to reaction temperature, time and concentration. The effect of variables on conversion was in order of time < temperature < concentration and the maximum conversion reached to 99.5% in the case of hydrothermal synthesis at $180^{\circ}C$ for 2 h with 2.0 M reactant concentration. At low concentration such as 0.25 M, formation of unreacted $BaCO_3$ and $TiO_2$ was not inevitable at even high reaction temperature and these components converted into $BaTi_2O_5$ at high temperature and remained as impurity. As concentration of reactant increased, the size of as-synthesized $BaTiO_3$ powder deceased and Ba/Ti molar ratio approached into 1, showing Ba/Ti ratio of $1{\pm}0.005$ for reaction at $180^{\circ}C$ for 2 h with 2.0 M concentration.

• Korean Journal of Materials Research
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• v.26 no.9
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• pp.486-492
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• 2016

Tungsten (W) thin film was deposited at $400^{\circ}C$ using pulsed chemical vapor deposition (pulsed CVD); film was then evaluated as a nucleation layer for W-plug deposition at the contact, with an ultrahigh aspect ratio of about 14~15 (top opening diameter: 240~250 nm, bottom diameter: 98~100 nm) for dynamic random access memory. The deposition stage of pulsed CVD has four steps resulting in one deposition cycle: (1) Reaction of $WF_6$ with $SiH_4$. (2) Inert gas purge. (3) $SiH_4$ exposure without $WF_6$ supply. (4) Inert gas purge while conventional CVD consists of the continuous reaction of $WF_6$ and $SiH_4$. The pulsed CVD-W film showed better conformality at contacts compared to that of conventional CVD-W nucleation layer. It was found that resistivities of films deposited by pulsed CVD were closely related with the phases formed and with the microstructure, as characterized by the grain size. A lower contact resistance was obtained by using pulsed CVD-W film as a nucleation layer compared to that of the conventional CVD-W nucleation layer, even though the former has a higher resistivity (${\sim}100{\mu}{\Omega}-cm$) than that of the latter (${\sim}25{\mu}{\Omega}-cm$). The plan-view scanning electron microscopy images after focused ion beam milling showed that the lower contact resistance of the pulsed CVD-W based W-plug fill scheme was mainly due to its better plug filling capability.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.190-194
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• 2002

In this study, the etching of Au thin films have been performed in an inductively coupled CF4/Cl2/Ar plasma. The etch properties were measured as the CF4 adds from 0 % to 30 % to the Cl2/(Cl2 + Ar) gas mixing ratio of 0.2. Other parameters were fixed at a rf power of 700 W, a dc bias voltage of 150 V, a chamber pressure of 15 mTorr, and a substrate temperature of $30^{\circ}C$. The highest etch rate of the Au thin film was 370 nm/min at a 10 % additive CF4 into Cl2/(Cl2 + Ar) gas mixing ratio of 0.2. The surface reaction of the etched Au thin films was investigated using x-ray photoelectron spectroscopy (XPS) analysis. From x-ray photoelectron spectroscopy (XPS) analysis, the intensities of Au peaks are changed. There is a chemical reaction between Cl and Au. Au-Cl is hard to remove on the surface because of its high melting point and the etching products can be sputtered by Ar ion bombardment. We obtained the cleaned and steep profile.

• Proceedings of the Korea Association of Crystal Growth Conference
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• 1997.06a
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• pp.53-60
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• 1997

The roasting of pyrite with a cyclone reactor have been studied in terms of investigating the reaction behavior of pyrite. The development of a fundamental model for pyrite oxidation and lime sulfation in a vertical cyclone reactor. The model assumes a chemical control shrinking core behavior for the pyrite and a fluid film control shrinking core behavior for the lime. The oxygen and sulphur dioxide concentrations and the energy balance for the gas, pyrite and lime particles are solved. The model was solved and characterized numerically. Experiments have been performed to study the influence of reaction parameters such as reactor temperatures, pyrite particle sizes, air flow rates, feeding rates, and mixing ratio of pyrite and lime. The oxidation and sulfation products were characterized chemically and physically.