• 대한기계학회논문집B
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• 제23권10호
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• pp.1248-1253
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• 1999

This study is concerned about the combustion characteristics of methane-air and methane/hydrogen-air mainly the behavior of burning velocity including the effect of the ignition energy. The experiments were conducted in a spherical combustion bomb designed in this laboratory. The burning velocities were measured by the pressure-time history and the reaction rates were estimated theoretically. The experimental results showed that the burning velocity increased by 25 to 50 percent when hydrogen is added to methane by 20 percent.

• 한국전기전자재료학회논문지
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• 제15권12호
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• pp.1011-1015
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• 2002

In this study, Au thin films were etched with a Cl$_2$/Ar gas combination in an inductively coupled plasma. The highest etch rate of the Au thin film was 3500 A/min at a Cl$_2$/(Cl$_2$+Ar) gas mixing ratio of 0.2. The surface reaction of the etched Au thin films was investigated using x-ray photoelectron spectroscopy (XPS) analysis. There is Au-Cl bonding by chemical reaction between Cl and Au. During the etching of Au thin films in Cl$_2$/Ar plasma, Au-Cl bond is formed, and these products can be removed by the physical bombardment of Ar ions[l].

• Transactions on Electrical and Electronic Materials
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• 제4권5호
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• pp.33-37
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• 2003

This study was performed to investigate the deposition mechanism of SiO$_2$ by ArF excimer laser(l93nm) CVD with Si$_2$H$\_$6/ and N$_2$O gas mixture and evaluate laser CVD quantitatively by modeling. With ArF excimer laser CVD, thin films can be deposited at low temperature(below 300$^{\circ}C$), with less damage and good uniformity owing to generation of conformal reaction species by singular wavelength of the laser beam. In this study, new model of SiO$_2$ deposition process by laser CVD was introduced and deposition rate was simulated by computer with the basis on this modeling. And simulation results were compared with experimental results measured at various conditions such as reaction gas ratio, chamber pressure, substrate temperature and laser beam intensity.

• 한국에너지공학회:학술대회논문집
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• 한국에너지공학회 1999년도 추계 학술발표회 논문집
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• pp.171-180
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• 1999

In this study, the burning velocity of LFG and LFG mixing fuels related with flame stabilization have been analyzed numerically using C3 reaction mechanism which consists of 92 species and 621 reaction for using LFG. The results show that the burning velocities of LFG and LFG mixing fuels are obtained as a function of CH$_4$ and LFG percent in stoichiometric conditions. Also, a correlation of the burning velocities LFG and LFG mixing fuels are obtained over a wide range of equivalence ratio. The comparison of burning velocity from correlation with that calculated numerically show good agreements. From these results, the proposed burning velocity correlations for LFG and LFG mixing fuels can be applied for the practice of LFG.

• 대한기계학회논문집B
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• 제33권5호
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• pp.365-372
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• 2009

The influence of combustor pressure on the local reaction characteristics of $CH_4$/air flames was investigated by measurements of local chemiluminescence intensity. Induced flow flames are often applied to the industrial boiler systems and incinerator in order to improve heat transfer and prevent exhaust gas leakage. In order to investigate combustion characteristics in the induced flow pattern, the combustor pressure index($P^*$) was controlled in the range of $0.7{\sim}1.3$ for each equivalence ratio in the present combustion system, where $P^*$ is defined as the ratio of absolute pressure to atmospheric one. Relationship between local reaction intensity and pressure index have been investigated by simultaneous $CH^*$, $C^*_2$ and $OH^*$ intensity measurements. It could be observed that flame length became longer with decreasing $P^*$ from $CH^*$ chemiluminescence intensity of axial direction. The mean value of $C^*_2$ and $CH^*$ chemiluminescence intensities, which indicates reaction intensity in the $CH_4$/air flames, decreased with decreasing pressure index for ${\Phi}{\leq}1$, but increased with decreasing pressure index for ${\Phi}$>1. $C^*_2/CH^*$ intensity ratio, which can be a good marker to demonstrate local equivalence ratio, was almost same for ${\Phi}{\leq}1$ regardless of pressure index change, while they showed high level for lower pressure index for ${\Phi}$>1 conditions.

• 한국수소및신에너지학회논문집
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• 제19권5호
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• pp.386-393
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• 2008

The Sulfur-iodine(SI) thermochemical cycle is one of the most promising methods for massive hydrogen production. For the purpose of continuous operation of SI cycle, phase separation characteristics into two liquid phases ($H_2SO_4$-rich phase and $HI_x$-rich phase) were directly investigated via Bunsen reaction. The experiments for Bunsen reaction were carried out in the temperature range, from 298 to 333 K, and in the $I_2/H_2O$ molar ratio of $0.109{\sim}0.297$ under a continuous flow of $SO_2$ gas. As the results, solubility of $SO_2$, decreased with increasing the temperature, had considerable influence on the global composition in the Bunsen reaction system. The amounts of impurity in each phase(HI and $I_2$ in $H_2SO_4$-rich phase and $H_2SO_4$ in $HI_x$-rich phase) were decreased with increasing $H_2SO_4$ molar ratio and temperature. To control the amounts of impurity in $HI_x$-rich phase, temperature is a factor more important than $I_2/H2_O$ molar ratio. On the other hand, the affinity between $HI_x$ and $H_2O$ was increased with increasing $I_2/H2_O$molar ratio.

• 전기학회논문지
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• 제66권2호
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• pp.370-378
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• 2017

A fluid model of 2D axis-symmetry based on inductively coupled plasma (ICP) reactor using $N_2/NH_3/SiH_4$ gas mixture has been developed for hydrogenated silicon nitride ($SiN_x:H$) deposition. The model was comprised of 62 species (electron, neutral, ions, and excitation species), 218 chemical reactions, and 45 surface reactions. The pressure (10~40 mTorr) and gas mixture ratio ($N_2$ 80~96 %, $NH_3$ 2~10 %, $SiH_4$ 2~10 %) were considered simulation variables and the input power fixed at 1000 W. Different distributions of electron, ions, and molecules density were observed with pressure. Although ionization rate of $SiH_2{^+}$ is higher than $SiH_3{^+}$ by electron direct reaction with $SiH_4$, the number density of $SiH_3{^+}$ is higher than $SiH_2{^+}$ in over 30 mTorr. Also, number density of $NH^+$ and $NH_4{^+}$ dramatically increased by pressure increase because these species are dominantly generated by gas phase reactions. The change of gas mixture ratio not affected electron density and temperature. With $NH_3$ and $SiH_4$ gases ratio increased, $SiH_x$ and $NH_x$ (except $NH^+$ and $NH_4{^+}$) ions and molecules are linearly increased. Number density of amino-silane molecules ($SiH_x(NH_2)_y$) were detected higher in conditions of high $SiH_x$ and $NH_x$ molecules density.

• 에너지공학
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• 제8권4호
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• pp.560-566
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• 1999

가압 조건하에서의 석탄가스화 특성을 규명하기위해 , 온도 압력 , 산소/석탄비, 수증기/석탄비 등을 변화시켜가며 로토탄(sub A)에 대하여 PDTF(Pressuized drop tube furnace)실험을 수행하였다. 실험결과, 상압 조건에서보다 가압조건에서의 가스화가 탄소전환율과 냉가스효율의 측면에서 더 유리한 것으로 측정되었다. 최대의 냉가스효율을 보이는 산소/석탄비의 증가가 냉가스효율의 증가를 가져왔다. 압력이 증가할수록 열분해에 의한 탄소전환의 비중은 감소하고 대신 기고반응에 의한 탄소전환의 비중이 증가하였다.

• 에너지공학
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• 제22권2호
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• pp.226-236
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• 2013

고온개질기를 이용한 수증기 메탄 개질반응에 대해 실험 및 전산해석 기법을 이용하여 실제 개질기의 효율 및 개질기의 형상의 변화에 따른 열 분포 및 내부 유동에 대해서 연구하였다. 수증기 개질에 대한 반응모델은 Xu & Froment에 의해 개발된 수증기 반응 모델을 사용하였고, 그 결과로 고온개질기내에서 일어나는 화학반응은 Steam Reforming(SR), Water Gas Shift(WGS), Direct Steam Reforming(DSR) 반응이 다른 반응을 지배한다고 가정하였다. 고온개질기를 이용한 수증기 메탄 개질 반응 실험 결과로는 Steam Carbon Ratio(SCR)이 증가함에 따라 수소 수득율 또한 증가하고 일산화탄소와 메탄은 감소하는것을 알 수 있었다. 또한 입구가 한 개인 디자인과 두 개인 디자인을 비교, 분석하였을 때 입구가 두 개인 개질기보다 입구가 한 개인 개질기에서 열 분포 및 내부유동, 수소 수득율이 우수하다는 결과를 얻게 되었다.

• 청정기술
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• 제19권1호
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• pp.51-58
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• 2013

니켈 촉매 상에서 에탄의 수증기 개질 반응과 수성가스 전환반응 반응에 대한 반응속도 데이터를 얻기 위하여 반응온도와 반응물의 분압을 변화시키면서 반응 실험을 수행하였다. 반응속도 데이터를 사용하여 거듭제곱 속도식 모델(power law kinetic model)과 랭미어-힌쉘우드 모델(Langmuir-Hinshelwood model)의 매개변수를 구하였다. 또한 반응 속도 모델식을 적용하여 PRO/II를 이용한 공정 모사를 통해서 에탄의 수증기 개질 반응기 사이징(sizing)을 수행하였다. 에탄을 반응물로 하여 수증기 개질 반응을 수행한 결과, 단순한 거듭제곱 속도식 모델보다 표면반응에 의하여 반응속도가 결정되는 랭미어-힌쉘우드 모델이 보다 적합하였고, 수성가스 전환반응에 대한 반응속도식은 거듭제곱 속도식 모델이 적합함을 보였다. PRO/II 시뮬레이션을 통해서 수소 생산량에 필요한 반응기의 크기를 결정할 수 있었다.