• Title/Summary/Keyword: Reaction System

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Fabrication of ZrO2 Nano Tube by Atomic Layer Deposition with Exposure Time Control System (전구체 노출 시간을 조절하는 원자층 증착기술에 의한 ZrO2 나노 튜브 제조)

  • Shin, Woong-Chul;Ryu, Sang-Ouk;Seong, Nak-Jin;Yoon, Soon-Gil
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.39-39
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    • 2007
  • 원자층 증착(Atomic Layer Deposition: ALD) 방법은 반응물질들을 펄스형태로 챔버에 공급하여 기판표면에 반응물질의 표면 포화반응에 의한 화학적 흡착과 탈착을 이용한 박막증착기술이다. ALD법은 기존의 화학적 기상증착(Chemical Vapor Deposition: CVD)과 달리 자기 제한적 반응(self-limiting reaction) 에 의하여 반응가스가 기판 표면에서만 반응하고 가스와 가스 간에는 반응하지 않는다. 따라서 박막의 조성 정밀제어가 쉽고, 파티클 발생이 없으며, 대면적의 박막 증착시 균일성이 우수하고, 박막 두께의 정밀 조절이 용이한 장점이 있다. 이러한 ALD 방식으로 3차원의 반도체 장치 구조물에 산화막 등을 형성하는 공정에서 중요한 요소 중의 하나는 전구체의 충분한 공급이다. 따라서 증기압이 높은 전구체를 선호하는 경향이 있다. 그러나 증기압이 낮은 전구체를 사용할 경우, 공급량이 부족하여 단차 도포성(step coverage)이 떨어지는 문제가 있다. 원자층 증착 공정에서 전구체를 충분히 공급하기 위해전구체 온도를 증가시키거나 전구체의 공급시간을 늘리는 방법을 사용한다. 그러나 전구체 온도를 상승시키는 경우, 전구체의 변질이나 수명을 단축시키는 문제점을 발생시킬 수 있으며. 전구체를 충분히 공급하기 위하여 전구체의 공급시간을 늘이는 방법을 사용하면, 원하는 박막을 형성하기 위하여 소요되는 공정시간과 전구체 사용량이 증가된다. 본 논문에서는 이러한 문제점을 해결하기 위해 반응기 안에서 전구체 노출 시간을 조절하는 새로운 ALD 공정을 소개한다. 특히 이러한 기술을 적용하면 나노튜브를 성장시키는데 매우 유리하다. 본 연구에서 전구체 노출 시간을 조절하기 위하여 사용된 ALD 장비는 Lucida-D200-PL (NCD Technology사)이며 (TEMA)Zr와 H2O를 사용하여 ZrO2 나노튜브를 폴리카보네이트 위에 성장시켰다. 전구체의 노출 시간은 반응기의 Stop 밸브를 이용하여 조절하였으며, SEM, TEM 등을 이용하여 나노튜브의 균일성과 단차피복성 등의 특성을 관찰하였다. 그 결과 전구체 노출시간을 조절함으로써 높은 종횡비를 갖는 나노튜브를 성장 시킬 수 있음을 확인하였다. 또한 낮은 증기압을 가지는 전구체를 이용하여도 우수한 특성의 나노튜브를 균일하게 성장시킬 수 있었다.

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Photoluminescence Properties of CaNb2O6:RE3+ (RE = Dy, Eu, Dy/Eu) Phosphors (CaNb2O6:RE3+ (RE = Dy, Eu, Dy/Eu) 형광체의 발광 특성)

  • Cho, Hyungchel;Cho, Shinho
    • Korean Journal of Materials Research
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    • v.27 no.6
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    • pp.339-344
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    • 2017
  • A series of $CaNb_2O_6:Dy^{3+}$, $CaNb_2O_6$:$Eu^{3+}$ and $CaNb_2O_6:Dy^{3+}$, $Eu^{3+}$ phosphors were prepared by solid-state reaction process. The effects of activator ions on the structural, morphological and optical properties of the phosphor particles were investigated. XRD patterns showed that all the phosphors had an orthorhombic system with a main (131) diffraction peak. For the $Dy^{3+}$-doped $CaNb_2O_6$ phosphor powders, the excitation spectra consisted of one broad band centered at 267 nm in the range of 210-310 nm and three weak peaks; the main emission band showed an intense yellow band at 575 nm that corresponded to the $^4F_{9/2}{\rightarrow}^6H_{13/2}$ transition of $Dy^{3+}$ ions. For the $Eu^{3+}$-doped $CaNb_2O_6$ phosphor, the emission spectra under ultraviolet excitation at 263 nm exhibited one strong reddish-orange band centered at 612 nm and four weak bands at 536, 593, 650, and 705 nm. For the $Dy^{3+}$ and $Eu^{3+}$-codoped $CaNb_2O_6$ phosphor powders, blue and yellow emission bands due to the $^4F_{9/2}{\rightarrow}^6H_{15/2}$ and $^4F_{9/2}{\rightarrow}^6H_{13/2}$ transitions of $Dy^{3+}$ ions and a main reddish-orange emission line at 612 nm resulting from the $^5D_0{\rightarrow}^7F_2$ transition of $Eu^{3+}$ ions were observed. As the concentration of $Eu^{3+}$ ions increased from 1 mol% to 10 mol%, the intensities of the emissions due to $Dy^{3+}$ ions rapidly decreased, while those of the emission bands originating from the $Eu^{3+}$ ions gradually increased, reached maxima at 10 mol%, and then slightly decreased at 15 mol% of $Eu^{3+}$. These results indicate that white light emission can be achieved by modulating the concentrations of the $Eu^{3+}$ ions incorporated into the $Dy^{3+}$-doped $CaNb_2O_6$ host lattice.

Study on the Improved Abrasion Resistance of Polycarbonate Substrate by UV-curable Organic/Inorganic Hybrid Coatings (자외선 경화형 유기/무기 복합코팅에 의한 폴리카보네이트의 내마모성 향상 연구)

  • 윤석은;우희권;김동표
    • Polymer(Korea)
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    • v.24 no.3
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    • pp.389-398
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    • 2000
  • Transparent, abrasion resistant coatings with 4~13 ${\mu}{\textrm}{m}$ thickness were prepared by spin-coating on polycarbonates with organic/inorganic hybrid solutions, followed by UV curing and heat treatment at 12$0^{\circ}C$ for 12 hours. The coating solutions were composed of inorganic phase and organic phase in 0:100, 20:80, 30:70, 50:50, 80:20 wt% ratios, respectively, mixed with photoinitiator, senaitizer and surfactant. The inorganic phase was formed by sol-gel reaction of TEOS and silane coupling agent MPTMS in 1 : 2 or 2 : 1 molar ratios, the organic phase consisted of difunctional urethane acrylate oligomeric resin, multifunctional acrylate TMPTA and HDDA in 4 : 3 : 3 wt% ratio. The coating systems were investigated by FT-IR, $^{29}$ Si-NMR spectra. In addition, TGA/DSC for thermal analysis and SEM, AFM observation for coated surface were examined. Gererally, the homogeneity of phases, the surface smoothness of coating and abrasion resistance were improved with the higher content of inorganic component. Namely, coating system with below 10 $\AA$ surface roughness and T$_{g}$ of 15$0^{\circ}C$ showed only 10% decrease in light transmittance after abrasion test, whereas uncoated polycarbonate substrate exhibited 46% decrease..

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Effects of Crosslinking Agent and Flame Retardant on the Dielectric Properties of Poly(phenylene ether)-based Polymer Substrate Material (폴리페닐렌에테르계 고분자 기판 소재의 유전특성에 대한 가교제 및 난연제의 영향)

  • Kim, Dong-Kook;Park, Seong-Dae;Yoo, Myong-Jae;Lee, Woo-Sung;Kang, Nam-Kee;Lim, Jin-Kyu;Kyoung, Jin-Bum
    • Polymer(Korea)
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    • v.33 no.1
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    • pp.39-44
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    • 2009
  • Polymer substrates were fabricated by using poly (phenylene ether) as a base resin, N,N'-m-phenylenedimaleimide (PDMI) as a crosslinking agent and decabromodiphenylethane as a flame retardant. The effects of crosslinking agent and flame retardant on physical properties such as dielectric property of the substrate were investigated. Thermal curing feature of PDMI with or without an initiator was analyzed by DSC, and then, PPE-PDMI test compositions were designed based on this result. Composite sheets were cast by film coater, laminated under vacuum and pressure, and then, the changes of dielectric constant, dielectric loss, peel strength, solder heat resistance and inflammability according to increasing amount of PDMI and flame retardant were evaluated, Dielectric constant and dielectric loss showed increasing trend with increasing amount of PDMI and flame retardant, but solder heat resistance and inflammability were improved. Peel strength was obtained higher than 1 kN/m when PDMI above 10 wt% was added, but slightly decreased as the amount of flame retardant increased. From the measured gel contents, the reaction mechanism of PPE-PDMI system was deduced to the formation of network structure by crosslinking PDMI with PPE rather than the formation of semi-IPN structure. In conclusion, the polymer composite substrate materials with dielectric constant of 2.52$\sim$2.65 and dielectric loss below 0.002 at 1 GHz were obtained and they will be proper for high frequency applications.

Immunohistochemical study on the antigenicity of each organ structure of Clonorchis sinensis (간흡충 충체의 부위별 항원성에 대한 면역조직화학적 연구)

  • Jin Kim;Jong-Yil Chai;Weon-Gyu Kho;Kyu-Hyuk Cho;Soon-Hyung Lee
    • Parasites, Hosts and Diseases
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    • v.29 no.1
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    • pp.21-30
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    • 1991
  • An immunohistochemical study was performed to demonstrate comparative antigenicity of each body structure of the liver fluke, Clonorchis sinensis, such as the digestive tract, reproductive organs, excretory system, tegument and suckers. Indirect immunoperoxidase technique was applied, rising formalin-fixed and paraffin-embedded sections of C. sinensis as the antigen. Pooled cat sera obtained 10 weeks after an experimental infection with C. sinensis and peroxidase-conjugated goat anti-cat IgG were used as the primary and secondary antibodies, respectively. The intensity of immunohistochemical stain was very sensitive upon the titers of the primary and secondary antibodies, and their optimum dilutions were found to be 1:1,000∼1:2,000 and 1:1,000, respectively. The intestinal epithelial cells, intestinal content and excretory bladder showed strong positive coloring reactions even at lower titer (1 : 2,000) of the primary antibody, whereas the uterine wall and eggs, vitelline glands, and male reproductive organs showed only weak positive reactions despite an increase in the antibody titer (1:1,000). On the other hand, the suckers, tegument, subtegumental cells and other parenchyme portions did not reveal any positive immunoperoxidase reaction at the same antibody titers. From the above results, it is highly suggested that the most potent antigenicity of C. sinensis occur from their excretory-secretory substances originated from the digestive and excretory organs.

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Feldspar Diagenesis and Reseuoir History of the Miocene Temblor Formation, Kettleman North Dome, California, U.S.A. (미국 캘리포니아주 케틀만 노스돔의 마이오세 템블러층에서 장석의 속성작용과 저류암의 발달사)

  • Lee Yong Il;Boles James R.
    • The Korean Journal of Petroleum Geology
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    • v.3 no.1 s.4
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    • pp.16-27
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    • 1995
  • The Early Miocene Temblor Formation forms an important sandstone reservoir at Kettleman North Dome oil field, California. Sandstones are mostly arkosic in composition except deepest sandstones containing much volcanic rock fragments. Arranged in paragenetic sequence prior to feldspar alteration, the Temblor sandstones contain cements of early calcite, dolomite, quartz, albite, mixed-layer ohloriteismectite (C/S) and smectite, and anhydrite. Diagenetic changes associated with feldspar are albitization of plagioclase, late calcite and laumontite cementation and grain replacement, plagioclase dissolution, and kaolinite cementation. Plagioclase albitization and late calcite and laumontite cementation in Temblor sandstones occurred at the time of maximum burial with temperatures up to $130^{\circ}C$. Volcanic plagioclases were selectively albitized. Most diagenetic changes are interpreted to have occurred before the maior uplift which occurred within the last one million years ago. Since then to the time of hydrocarbon emplacement plagioclase dissolution and kaolinite cementation occurred. This reaction occurred in relatively closed system due to the occurrence of kaolinite next to the site of plagioclase dissolution. Unaltered part of volcanic plagioclase and plutonic plagioclase which escaped albitization during maximum burial were preferentially dissolved to make plagioclase porosity. Secondary porosity resulting from dissolution of plagioclase and carbonate and anhydrite cements was mainly produced by formation waters containing organic acids released during atagenesis of organic matter.

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A Study of Carry Over Contamination in Chematology (이월오염에 대한 연구)

  • Chang, Sang-Wu;Kim, Nam-Yong;Lyu, Jae-Gi;Jung, Dong-Jin;Kim, Gi-You;Park, Yong-Won;Chu, Kyung-Bok
    • Korean Journal of Clinical Laboratory Science
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    • v.37 no.3
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    • pp.178-184
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    • 2005
  • Carry over contamination has been reduced in some systems by flushing the internal and external surfaces of the sample probe with copious amount of diluent. It between specimens should be kept as small as possible. A built-in, continuous-flow wash reservoir, which allows the simultaneous washing of the interior and exterior of the syringe needles, addresses this issue. In addition, residual contamination can further be prevented through the use of efficient needle rinsing procedures. In discrete systems with disposable reaction vessels and measuring cuvets, any carry over is entirely caused by the pipetting system. In analyzers with reuseable cuvets or flow cells, carry over may arise at every point through which high samples pass sequentially. Therefore, disposable sample probe tips can eliminate both the contamination of one sample by another inside the probe and the carry over of in specimen into the specimen in the cup. The results of the applicative carry over experiment studied on 21 items for total protein (TP), albumin (ALB), total bilirubin (TB), alkaline phosphatase (ALP), aspratate aminotranferase (AST), alanine aminotranferase (ALT), gamma glutamyl transferase (GGT), creatinine kinase (CK), lactic dehydrogenase (LD), creatnine (CRE), blood urea nitrogen (BUN), uric acid (UA), total cholesterol (TC), triglyceride (TG), glucose (GLU), amylase (AMY), calcium (CA), inorganic phosphorus (IP), sodium (Na), potassium (K), chloride (CL) tests in chematology were as follows. Evaluation of process performance less than 1% in all tests was very good, but a percentage of ALB, TP, TB, ALP, CRE, UA, TC, GLU, AMY, IP, K, Na, and CL was 0%, implying no carry over. Other tests were ALT(-0.08%), GGT(-0.09%), CK(0.08%), LD(0.06%), BUN(0.12%), TG (-0.06%), and CA(0.89%).

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A Study on the Sensory Characteristic of Yogurt and Antimicrobial Activity of Lactobacillus plantarum LHC52 Isolated from Kimchi (김치에서 분리한 Lactobacillus plantarum LHC52의 항균활성과 요구르트의 관능성 연구)

  • Lee, Seung-Gyu;Han, Ki-Sung;Jeong, Seok-Geun;Oh, Mi-Hwa;Jang, Ae-Ra;Kim, Dong-Hun;Bae, In-Hyu;Ham, Jun-Sang
    • Food Science of Animal Resources
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    • v.30 no.2
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    • pp.328-335
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    • 2010
  • The aim of our study was to develop a new starter culture for fermented milk. Polymerase chain reaction screening of 103 acid-producing isolates from Kimchi identified 72 Lactobacillus strains. The ability of the strains to inhibit the growth of the food-borne human pathogens (Escherichia coli, Salmonella Enteritidis, Staphylococcus aureus) was measured, using a conventional paper disk method. Among the 72 strains, strain LHC52 displayed potent antagonistic activity. Use of 16S rDNA sequencing and the API 50CHL system identified the strain as Lactobacillus plantarum and it was designated L. plantarum LHC52. Biochemical analyses revealed especially high antibacterial activity against E. coli. Yogurt produced using L. plantarum LHC52 did not show different microbiological and physicochemical properties compared to conventionally-prepared yogurt, implicating L. plantarum LHC52 as a useful, potently antibacterial starter culture for yogurt preparation.

Microbial Changes of Salted and Fermented Shrimp by High Hydrostatic Pressure Treatment (초고압처리에 의한 새우젓의 미생물변화)

  • Mok, Chul-Kyoon;Song, Ki-Tae;Lee, Sang-Ki;Park, Jong-Hyun;Woo, Gun-Jo;Lim, Sang-Bin
    • Korean Journal of Food Science and Technology
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    • v.32 no.2
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    • pp.349-355
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    • 2000
  • This study was conducted to enhance the storage stability of fermented shrimp with different salt contents using a high hydrostatic pressure. The effects of the magnitude of pressure and treatment time on the microorganisms of the fermented shrimp were investigated. The highest microbial counts with respect to the salt levels were observed at 18% salt, showing $3.4{\times}10^5\;CFU/g$ for general bacteria, $6.4{\times}10^4\;CFU/g$ for halophilic bacteria, $4.2{\times}10^5\;CFU/g$ for yeast and $3.0{\times}10^4\;CFU/g$ for halophilic yeast. The degree of sterilization increased with the magnitude of pressure and treatment time, and the sterilization could be analyzed by the first order reaction kinetics. The sterilization rate constants $(k_p)$ of the halophilic bacteria was lower than that of general bacteria. The $log(k_p)$ increased linearly with pressure and the slope of the regression line of the halophilic bacteria was greater than that of general bacteria, indicating that the sterilization of the halophilic bacteria was more dependent on the pressure. High hydrostatic pressure treatment was an effective non-thermal sterilization method for the salted and fermented shrimp, and the optimum treatment condition was for 10 min at 6,500 atm.

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Effect of Acetylene Mixing Rate on Synthesis of Carbon Nanotube (탄소나노튜브의 합성에 대한 아세틸렌 혼합 비율의 영향)

  • Kim, Jae-Hyun;Lee, Joo-Hee;Choi, Jae-Hyuk
    • Journal of the Korean Society of Marine Environment & Safety
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    • v.20 no.6
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    • pp.768-773
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    • 2014
  • In this study, experimental and numerical studies for the synthesis of carbon nanotube(CNT) in methane counterflow diffusion flame have been performed. Methane mixed with acetylene($C_2H_2$) was used as a fuel gas and ferrocene was used as a catalyst for synthesis of CNT. The major parameters was $C_2H_2$ mixing rate and mixing rates were 2 %, 6 %, and 10 %. Characteristics of CNT formation on grid were analyzed from SEM images. the chemical reaction mechanism adopted is GRI-MECH 3.0. Numerical results showed that flame temperature and CO mole fraction were increased with increasing acetylene mixing rate. Experimental results showed that the CNT synthesis in 2% acetylene mixture flame better than that of 6% and 10% acetylene mixture flames. It can be considered that 6% and 10% acetylene mixture flames generated the excessive carbon source and then it interrupted the supplement of the carbon source into ferrocene catalyst. It can be found that the supply of appropriate quantity of carbon source can make effect to synthesis of high purity of CNT.