• Journal of the Korean institute of surface engineering
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• v.32 no.3
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• pp.239-243
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• 1999

At Present, 200mm wafer technology is being applied for commercial fabrications of 64, 128, and 256 M DRAM devices, and 300mm technology will be evolved for 1G DRAM devices in the early 21th century, recognizing limitations of several process technologies. In particular recognition has been realized in harmful effects of surface contamination of trace metals introduced during devicing processes. Such a guide line for surface metal contamination has been proposed as 1E9 and 1E10 atoms/$\textrm{cm}^2$ of individual metal contamination for wafering and devicing of 1G DRAM, respectively, and so its measurement limit should be at least 1E8 atoms/$\textrm{cm}^2$. The detection limit of present measurement systems is 2E9 atoms/$\textrm{cm}^2$ obtainable with TRXFA(Total Reflection X-Ray Fluorescence Analysis). TRXFA is nondestructive and the simplest in terms of operation, and it maps the whole wafer surfaces but needs detection improvement. X-Ray intensity produced with synchrotron accelerator is much higher than that of conventional X-ray sources by order of 4-5 magnitudes. Hence theoretically its reactivity with silicon surfaces is expected to be much higher than the conventional one, realizing improvement of detection limit. X-ray produced with synchrotron accelerator is illuminated at a very low angle with silicon wafer surfaces such as 0.1 degree and reflects totally. Hence informations only from surface can be collected and utilized without overlapping with bulk informations. This study shows the total reflection phenomenon and quantitative improvement of detection limit for metallic contamination. It is confirmed that synchrotron X-ray can be a very promising alternative for realizing improvement of detection limit for the next generation devices.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.10
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• pp.889-893
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• 2006

Chemical mechanical polishing (CMP) achieves surface planrity through combined mechanical and chemical means. The role of slurry is very important in metal CMP. Slurry used in metal CMP normally consists of oxidizers, complexing agents, corrosion inhibitors and abrasives. This paper investigates the effects of citric acid as a complexing agent for Cu CMP with $H_2O_2$. In order to study chemical effects of citric acid, X-ray photoelectron spectroscopy (XPS) was peformed on Cu sample after etching test. XPS results reveal that CuO, $Cu(OH)_2$ layer decrease but $CU/CU_2O$ layer increase on Cu sample surface. To investigate nanomechanical properties of Cu sample surface, nanoindentation was performed on Cu sample. Results of nanoindentation indicate wear resistance of Cu surface decrease. According to decrease of wear resistance on Cu surface removal rate increases from $285\;{\AA}/min\;to\;8645\;{\AA}/min$ in Cu CMP.

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2003.11a
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• pp.195-195
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• 2003

Combustion generated fine particles, defined as those with aerodynamic diameters less than 2.5 m, have come under increased regulatory scrutiny because of suspected links to adverse human health effects. Transition metals are of particular interest due to the results of a number of studies that have shown cardiopulmonary damage associated with exposure to these elements and their presence in coal, residual fuel oils, sewage sludge, and other combusted fuels and wastes. This lecture will review results from multi-di sciplinary studies being conducted at EPA and elsewhere examining the physical, chemical, and toxicological characteristics of combustion generated particles. The research describes how collaborative work between combustion engineers and health scientists can provide insight on how combustion processes affect particle properties and subsequent health effects as measured by a combination of in-vitro and in-vivo studies using a variety of animal models. The focus of this lecture is on the interdisciplinary approach required to address the problem. Difficulties are discussed. Engineering aspects involved in this approach are described in detail. Physical and chemical characterizations are performed using a variety of analytical approaches including new techniques of x-ray absorption fine structure (XAFS) spectroscopy and x-ray absorption near-edge structure (XANES) deconvolution of these spectra to gather metal speciation information.

• Journal of the Korean Ceramic Society
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• v.47 no.5
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• pp.433-438
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• 2010

Fe-carbon/$TiO_2$ composites were prepared by a sol-gel method using AC, ACF, CNT and $C_{60}$ as carbon precursors and were characterized by means of BET surface area, X-ray diffraction (XRD), scanning electron microscopy (SEM), Transmission Electron Microscopy (TEM) and energy dispersive X-ray spectroscopy (EDX). The activity of the prepared photocatalysts was investigated by degradation reaction of methylene blue (MB) irradiated with UV lamp. Effects of different carbon sources and irradiation time on photocatalytic activity were also investigated. The results showed that the photocatalytic activity of the Fe-carbon/$TiO_2$ composites was much higher than that of pristine $TiO_2$ and Fe/$TiO_2$ composites. The prominent photocatalytic activity of Fecarbon/$TiO_2$ composites could be attributed to both the effects of photo-adsorption and electron transfer by carbon substrate. In addition, the higher photocatalytic activity of Fe-carbon/$TiO_2$ composites can be compared with that of carbon/$TiO_2$ and Fe /$TiO_2$ composites due to cooperative effects between Fe and carbon.

• Nuclear Engineering and Technology
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• v.54 no.11
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• pp.4062-4071
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• 2022

Long-term aluminum (Al) corrosion tests were designed to investigate the condition that would generate severe Al corrosion and precipitation. Buffer agents of sodium tetraborate (NaTB), trisodium phosphate (TSP) and sodium hydroxide (NaOH) were adopted. The insulation materials, fiberglass and calcium silicate (Ca-sil), were examined to explore their effects on Al corrosion. The results show that significant precipitates were formed in both NaTB/TSP-buffered solutions at high pH. The precipitates formed in NaTB solution raise more concerns on chemical effects in GSI-191. A passivation layer formed on the surfaces of coupon in solution with the presence of insulations could effectively mitigate Al corrosion. The Fe-enriched intermetallic particles (IPs) embedded in coupon appeared to serve as seeds to readily induce precipitation via providing extra area for heterogeneous Al hydroxide precipitation. X-ray spectroscopy (EDS) and X-ray diffraction (XRD) analyses indicate that the precipitates are mainly boehmite (γ-AlOOH) and no direct evidence confirms the presence of sodium aluminum silicate or calcium phosphate.

• Journal of Astronomy and Space Sciences
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• v.21 no.4
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• pp.329-342
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• 2004

In this paper, we present preliminary feasibility studies on three types of solar observation payloads for future Korean Science and Technology Satellite (STSAT) programs. The three candidates are (1) an UV imaging telescope, (2) an UV spectrograph, and (3) an X-ray spectrometer. In the case of UV imaging telescope, the most important constraint seems to be the control stability of a satellite in order to obtain a reasonably good spatial resolution. Considering that the current pointing stability estimated from the data of the Far ultraviolet Imaging Spectrograph (FIMS) onboard the Korean STSAT-1, is around 1 arc minutes/sec, we think that it is hard to obtain a spatial resolution sufficient for scientific research by such an UV Imaging Telescope. For solar imaging missions, we realize that an image stabilization system, which is composed of a small guide telescope with limb sensor and a servo controller of secondary mirror, is quite essential for a very good pointing stability of about 0.1 arcsec. An UV spectrograph covering the solar full disk seems to be a good choice in that there is no risk due to poor pointing stability as well as that it can provide us with valuable UV spectral irradiance data valuable for studying their effects on the Earth's atmosphere and satellites. The heritage of the FIMS can be a great advantage of developing the UV spectrograph. Its main disadvantage is that two major missions are in operation or scheduled. Our preliminary investigations show that an X-ray spectrometer for the full disk Sun seems to be the best choice among the three candidates. The reasons are : (1) high temporal and spectral X-ray data are very essential for studying the acceleration process of energetic particles associated with solar flares, (2) we have a good heritage of X-ray detectors including a rocket-borne X-ray detector, (3) in the case of developing countries such as India and Czech, solar X-ray spectrometers were selected as their early stage satellite missions due to their poor pointing stabilities, and (4) there is no planned major mission after currently operating Reuven Ramaty High-Energy Solar Spectroscopic Imager (RHESSI) mission. Finally, we present a preliminary design of a solar X-ray spectrometer covering soft X-ray (2 keV) to gamma ray (10 MeV).

• Journal of the Korean Wood Science and Technology
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• v.34 no.1
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• pp.15-22
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• 2006

ln order to manage efficiently many ancient wooden buildings, which have been preserved as cultural properties in Korea, the internal state of wood members should be evaluated exactly and periodically by a NDE (non-destructive evaluation) method. A research project was planned to develop an X-ray CT (computed tomography) system as a NDE method for wood, which could be easily applied in field. This paper includes the first part of this project. First of all, to establish a measuring procedure of wood density using X-ray radiography, the correlation between X-ray intensity and the film brightness was evaluated. Also, initial X-ray intensity was quantified with various radiate conditions controlled by the tube voltage and tube current. And then, the effects of density, annual ring angle, and thickness on the mass attenuation coefficient of wood were examined. Finally, Beer's law was modified with the above results and adopted to calculate the density of wood. As a result of this study, the measuring procedure of wood density was established using a portable soft X-ray device and this procedure was verified with some small wood specimens. This results will he used valuably for the following researches to develop a portable X-ray CT system.

• The Korean Journal of Zoology
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• v.1 no.2
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• pp.17-24
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• 1958

Since Kesser first described in 1934 the functional change of the autonomic nervous system caused by certain visible rays many researchers have unanimously approved that animals flashed with a red visible ray develop parasympathicotony while those flashed with a blue visible ray develop sympathicotony. On the other hand through studies made by our colleagues it is now well known that the inner-movement of the retinal pigments of frogs is stimulated in sympathicotony and is in reverse inhibited in parasimpathicotony. It is almost evident that the mechanism by which the inner-movement of the retinal pigments is due to sympathicotony derived from the excessive secretion of adrenalin. In addition , through may recent experiments on the pharmacological action of various medicines on the retinal pigments reaction of tadpoles , ranging from the excessive secretion of adrenalin. In addition , through my recent experiments on the pharmacologtical action of various medicines on the retinal pigments reaction of tadploes, raging from every developmental stage , Ifound that the movement of the retinal pigments by adrenalin is predominant in the earlier developmental stages of taopoles around 11 mm of body length, whereas other medicines fail to give any responce to the retinal pigments in such an earlier stage. When tadpoles grown to body length of 15-16m the retinal pigments move to the complete light position while kept in adrenalin solution. Based on these facts it might be well to consider that if tadpoles were grown under the visible rays for a given period, they might show a functional change of the autonomic nervous system and thereby cause of certain change in the physciological phases of the retinal reaction. Experiments were undertaken to find this matter and also to discover the simultaneous effects of the visible radiations on the developmental process of tadpoles. The results summarized as follows ; 1. The longest wave of visible rav has an effective reaction on the growth of body length of taopoles, while the shortest wave of visible ray causes the same for the metamorphoric differentiation of tadpoles. 2. When keeping two groups of tadpoles the first group of 15 mm body length grown for the period of one week and the latter group of 20 mm body length grown for two weeks under the various visible rays. swimming in adrenalin solution, the inner-movement of the retinal pigment occurs in both groups. The movement of pigments of the first group is accelerated in a sequence of blue ray \ulcorner green ray > brown ray> red ray, and that of the latter group is also accelerated in a sequence of blue ray>green ray > brown ray and red ray. 3. When keeping tow groups of tadpoles, the first group of 20 mm body length grown for the period of two weeks, the latter group of 25 m body length grown for three wheeks, under the various visible rays in sunlight, the inner-movement of the retinal pigments occurs in both groups. The movement of pigments of the first group is accelerated in a sequence of blue ray> green ray>brown ray and red ray, and that of the latter group is also accelerated in a sequence of blue ray > brow ray>red ray. 4. In order words, there facts manifest that tadpoles grown under the various visible rays reveal functional disturbances of the autonomic nervous system, at the time of 15 mm body length by adrenalin solution, which is a unique indicator illustrating the status of sympathicotony, and at the time of 20 mm body length by sunlight. This means that the longest visible ray cause sympathicotony, while the shortest visible ray causes parasympathicotony.

• Food Science of Animal Resources
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• v.30 no.1
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• pp.124-132
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• 2010

This study evaluated the effects of gamma ray and electron beam (E-beam) to improve the safety of spices for meat processing. The spices (garlic powder, curry powder, turmeric powder, black pepper, white pepper, oregano, parsley, laurel leaf powder, basil, and rosemary) were irradiated by gamma ray and E-beam at 0, 2, 4, 6, 8, and 10 kGy. Total bacterial populations were then enumerated on total plate count agar, and bacteria isolated from the samples were identified by polymerase chain reaction (PCR). In addition, $D_{10}$ values for Bacillus cereus and Staphylococcus aureus inoculated in spices was determined, and the Ames test was conducted for genotoxicity analysis. The contaminated total bacterial populations in spices ranged from 1.5 to 3.8 Log CFU/g, and most of identified bacteria were Bacillus spp., and Staphylococcus spp. However, the bacterial populations decreased below the detection limit (2 Log CFU/g) after irradiation at 4 kGy except for parsley, which required 6 kGy in gamma ray and 8 kGy in E-beam to decrease total bacterial populations below detection limit. $D_{10}$ values were also higher (p<0.05) in E-beam treated samples than gamma-ray treated samples. No genotoxicity was observed in both conditions with and without metabolic activation. These results indicate that gamma ray (>4 kGy and <6 kGy) could be more useful to improve food safety of meat processing spices compared to E-beam.

• Journal of the Korean Society of Radiology
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• v.14 no.4
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• pp.477-486
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• 2020

The purpose of this study was to evaluate the effects of reconstruction filters, X-ray source trajectories and intervals in the quality of digital tomosynthesis (DT) images, and the results was clinically validated. The filtered back-projection was implemented by using Ramp, Shepp-Logan, Cosine, Hamming, Hann and Blackman filters, and the X-ray source trajectories were simulated with 1 × 36, 2 × 18, 3 × 12, 4 × 9 and 6 × 6 arrays. The X-ray source intervals were 5, 10, 20, 30 and 40 mm. The depth resolution, spatial resolution and noise of DT image were evaluated by measuring artifact spread function (ASF), full width at half maximum (FWHM) and signal-to-noise ratio (SNR), respectively. The results showed that the spatial resolution and noise properties of DT images were maximized by the Ramp and Blackman filters, respectively, and the depth resolution and noise properties of the DT images obtained with a 1 × 36 X-ray source trajectory were superior to the other trajectories. The depth resolution and noise properties of DT images improved with an increase of X-ray source intervals, and the high X-ray source intervals degraded the spatial resolution of DT images. Therefore, the characteristics of DT images are highly dependent on reconstruction filters, X-ray source trajectories and intervals, and it is necessary to use optimal imaging parameters in accordance with diagnostic purpose.