• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.463-463
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• 2012

ITRS (international technology roadmap for semiconductors)에 따르면 MOS(metal-oxide-semiconductor)의 CD (critical dimension)가 45 nm node이하로 줄어들면서 poly-Si/$SiO_2$를 대체할 수 있는 poly-Si/metal gate/high-k dielectric이 대두된다고 보고하고 있다. 일반적으로 high-k dielectric를 식각시 anisotropic 한 식각 형상을 형성시키기 위해서 plasma를 이용한 RIE (reactive ion etching)를 사용하고 있지만 PIDs (plasma induced damages)의 하나인 PIED (plasma induced edge damage)의 발생이 문제가 되고 있다. PIED의 원인으로 plasma의 direct interaction을 발생시켜 gate oxide의 edge에 trap을 형성시키므로 그 결과 소자 특성 저하가 보고되고 있다. 그러므로 본 연구에서는 이에 차세대 MOS의 high-k dielectric의 식각공정에 HDP (high density plasma)의 ICP (inductively coupled plasma) source를 이용한 원자층 식각 장비를 사용하여 PIED를 줄일 수 있는 새로운 식각 공정에 대한 연구를 하였다. One-monolayer 식각을 위한 1 cycle의 원자층 식각은 총 4 steps으로 구성 되어 있다. 첫 번째 step은 Langmuir isotherm에 의하여 표면에 highly reactant atoms이나 molecules을 chemically adsorption을 시킨다. 두 번째 step은 purge 시킨다. 세 번째 step은 ion source를 이용하여 발생시킨 Ar low energetic beam으로 표면에 chemically adsorbed compounds를 desorption 시킨다. 네 번째 step은 purge 시킨다. 결과적으로 self limited 한 식각이 이루어짐을 볼 수 있었다. 실제 공정을 MOS의 high-k dielectric에 적용시켜 metal gate/high-k dielectric CMOSFETs의 NCSU (North Carolina State University) CVC model로 구한 EOT (equivalent oxide thickness)는 변화가 없으면서 mos parameter인 Ion/Ioff ratio의 증가를 볼 수 있었다. 그 원인으로 XPS (X-ray photoelectron spectroscopy)로 gate oxide의 atomic percentage의 분석 결과 식각 중 발생하는 gate oxide의 edge에 trap의 감소로 기인함을 확인할 수 있었다.

• 한국방사선학회논문지
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• 제13권5호
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• pp.757-763
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• 2019

최근 넓은 동적 범위 특성을 제공하는 평판 디텍터 개발을 바탕으로 의료보건 환경이 디지털화되고 있는 현 시점에서 적절한 필터 두께의 재설정이 요구되고 있으나, 현 임상에서는 기존 아날로그 시스템에서 연구된 정보를 바탕으로 NCRP에서 제안한 권고 기준을 이용하고 있다. 이에 본 연구에서는 디지털방사선 촬영에서 알루미늄 필터를 이용하여 환자선량 최적화와 더불어 선량크리프의 최소화 가능성을 고찰하였다. 연구 결과, 알루미늄 필터의 두께를 증가함에 따라 유사한 선예도를 가지는 의료영상을 획득 시 피폭되는 피부입사선량을 최대 19.3% 저감할 수 있는 것으로 나타났으나, 영상학적 관점에서 중요한 해상력이 1.01 lp/mm의 큰 변화가 분석되었다. 이러한 해상력의 변화는 X선 빔 경화 현상으로 인하여 피사체에서 발생하는 산란선이 증가하기 때문으로 사료되며, 산란 열화 인자를 통하여 산란선량에 의한 영향이 증가하는 것을 정량적으로 검증하였다. 하지만, 최근 개발되어 광범위하게 적용되고 있는 평판 디텍터는 방사선에 대한 민감도가 높고 넓은 동적 범위 특성을 가지므로 필터 두께에 따라 산란선의 비율에 대한 증가분과 대응하여 적정한 해상력을 유지할 수 있을 것으로 사료되며, 더 나아가 피폭선량 저감을 통해 선량크리프를 최소화 할 수 있을 것으로 기대된다.

• 한국의학물리학회지:의학물리
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• 제23권2호
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• pp.71-80
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• 2012

최신 방사선 치료 및 수술 기법에는 복잡한 3차원적 선량분포를 정확히 측정하는 실용적 선량분석 기기 및 기술이 필요하다. 본 연구에서는 실험실에서 제작한 겔을 방사선 치료 영역에서 선량계로 활용하기 위해 최적화된 자기공명영상 변수 조건에 대해 연구하였다. 이를 위해 각 자기공명영상 획득 조건에서 TE 시간 TR 시간, 영상 두께, 코일 등을 달리하여 조건 별로 획득한 영상을 이용하여 비교 평가하였고, 선량불확도 및 선량 분해능을 도입하여 본 연구에서 찾은 조건에 대해 평가하였다. 8% 젤라틴(300 bloom, Sigma-Aldrich, USA), 8% MAA (Metaacrylic acid, Sigma-Aldrich, USA), 10 mM THPC (tetrakis hydroxymethyl phosphonium, Sigma-Aldrich, USA), 그리고 0.05 mM HQ (Hydroquinone, Sigma-Aldrich, USA) 농도의 조성비를 가진 정상산소 중합체 겔을 실험실에서 합성하였다. 방사선 선량 전달은 Co-60 감마선 조사기 (Theratron-780; AECL, Ottawa, Canada)를 사용하였고 고체 팬텀을 사용하여 중합체 겔에 각각 0, 2, 4, 6, 8, 10, 12, 14 Gy의 선량을 전달하였다. 자기공명영상 장치의 특성상 T2 시간을 얻기 위해서는 fast spin echo 파형을 사용하였다. 일반적으로 Head Coil이 SNR이 Body coil 보다 낮아 선량 불확도가 우수할 것으로 예측하였으나, 일부 문헌에서는 Body coil이 영상 균일도가 우수하다고 하였다. 하지만 본 연구에서는 Head coil이 선량 불확도 및 선량 분해능이 모든 선량 영역에서 Body coil 보다 우수한 것을 확인하였다. TR 시간 연구에서 TR 1,500 ms와 TR 2,000 ms 간의 차이는 선량분해능에서 모두 큰 차이가 없으나 TR 1,500 ms가 조금 낮은 선량 불확도 값을 갖는 것을 보았다. MR 영상 두께가 2.5 mm일 경우 모든 TE 시간에 대해 4 Gy에서 가장 낮은 선량 불확도 값을 가졌다. 특히 TE 12 ms 경우 4 Gy 이후에는 가장 낮은값의 결과를 얻었다. 선량 불확도의 경우 6 Gy까지는 TE 시간에 따른 차이는 없으나 이후에는 TE 12 ms가 가장 나은 결과를 얻었다. 선량 불확도의 겨우 6 Gy까지는 모든 TE 시간에 대해 차이가 미미하나 8 Gy 이상에는 20 ms가 가장 우수한 선량 분해능 값을 가졌다. 선량 분해능 값 역시 NEX 3에서 가장 우수한 값을 가졌고 2 NEX일 때 가장 높은 분해능 값을 가졌다. 본 연구 결과 영상 두께와 NEX의 결과는 영상 두께가 얇은 경우 NEX가 높을수록 우수한 결과를 얻었고 영상 두께가 두꺼워 질수록 NEX가 낮아야 함을 확인했다.

• Maxillofacial Plastic and Reconstructive Surgery
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• 제22권1호
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• pp.1-14
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• 2000

The purpose of this study was to evaluate the efficacy of adding autogenous bone to the toothash-plaster mixture in the healing process of bone. Full-thickness round osseous defects with the diameter of 20mm were made at the calvarial bone of adult dogs (n=19) bilaterally, which were thought to be critical size defect. The right defects were repaired with the toothash-plaster mixture plus autogenous bone (compressed volume 0.3cc) and the left defects with only toothash-plaster mixture. At 2-, 4-, 8-, 12- and 20- week after implantation, dogs were sacrificed and evaluated the osseous healing of bony defects clinically, radiographically, and microscopically. The results were as follows; 1. At the clinical observation, the wound healed very well without any problem except severe swelling in the early period after operation. Slight depression was recognized at the both sides when the portions of cranial defect were palpated. 2. There were statistically significant differences between toothash-plaster mixture groups and autogenous bone added groups at the same period, and among the groups in the bone density of the digital radiograms (P<0.001). There was a tendency that bone density was increasing with time. 3. In light microscopic examination, new bone formation was more active in the autogenous bone added groups than toothash-plaster mixture groups at the early period after implantation but there is little difference at 20-week after implantation. 4. In fluorescent microscopic examination, the fluorescent band could be observed at the area of active bone formation and the band was more distinct in the autogenous bone added groups then toothash-plaster mixture groups. 5. In transmitted electron microscopic examination, organelles such as rER, Golgi complex and secretory granule and osteoblast were observed. In summary higher volume ratio of autogenous bone is needed to improve the bone healing in that there is little difference between toothash-plaster mixture group and autogenous bone added group at the 20-week after implantation in spite of new bone formation was more active in the autogenous bone added groups than toothash-plaster mixture groups at the early period after operation.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.24-25
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• 2006

SmBCO coated conductors were successfully fabricated using EDDC (Evaporation using Drum in Dual Chambers) deposition system that is a bath type co-evaporation system for fabrication of superconducting tape and divided into two chambers named evaporation chamber and reaction chamber. To obtain long and high quality superconducting coated conductor, it is very important to secure the uniformity of all the deposition parameters m the deposition system such as deposition temperature, oxygen partial pressure, compositional ratios and so on. Therefore, we investigated the distribution of the parameters along the axis of the drum m EDDC on which tapes were wound helically. When the temperature on the middle point of deposition zone was $700^{\circ}C$, that on the edge of deposition zone was $675^{\circ}C$. When the thickness of SmBCO layer on the middle point of deposition zone was 1063 nm, that on the edge of deposition zone was 899 nm. The partial pressure of oxygen was 5 mTorr in the reaction chamber while that was $7{\times}10^{-5}$Torr in the evaporation chamber. The composition ratio of Sm:Ba:Cu, that was measured by EDX, was very uniform along the axis of the drum. Under these deposition conditions, critical current distribution along the drum axis was 175 A/cm, 190A/cm, 217.5 A/cm, 182.5 A/cm, 175 A/cm with the interval of 9 cm between samples. It means that the EDDC system has the potential of fabricating (100m, 200A) class coated conductor.

• Maxillofacial Plastic and Reconstructive Surgery
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• 제28권5호
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• pp.375-395
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• 2006

Purpose: Lingual nerve (LN) damage may be caused by either tumor resection or injury such as wisdom tooth extraction, Although autologous nerve graft is sometimes used to repair the damaged nerve, it has the disadvantage of necessity of another operation for nerve harvesting. Moreover, the results of nerve grafting is not satisfactory. The nerve growth factor (NGF) is well-known to play a critical role in peripheral nerve regeneration and its local delivery to the injured nerve has been continuously tried to enhance nerve regeneration. However, its application has limitations like repeated administration due to short half life of 30 minutes and an in vivo delivery model must allow for direct and local delivery. The aim of this study was to construct a well-functioning $rhNGF-{\beta}$ adenovirus for the ultimate development of improved method to promote peripheral nerve regeneration with enhanced and extended secretion of hNGF from the injured nerve by injecting $rhNGF-{\beta}$ gene directly into crush-injured LN in rat model. Materials and Methods: $hNGF-{\beta}$ gene was prepared from fetal brain cDNA library and cloned into E1/E3 deleted adenoviral vector which contains green fluorescence protein (GFP) gene as a reporter. After large scale production and purification of $rhNGF-{\beta}$ adenovirus, transfection efficiency and its expression at various cells (primary cultured Schwann cells, HEK293 cells, Schwann cell lines, NIH3T3 and CRH cells) were evaluated by fluorescent microscopy, RT-PCR, ELISA, immunocytochemistry. Furthermore, the function of rhNGF-beta, which was secreted from various cells infected with $rhNGF-{\beta}$ adenovirus, was evaluated using neuritogenesis of PC-12 cells. For in vivo evaluation of efficacy of $rhNGF-{\beta}$ adenovirus, the LNs of 8-week old rats were exposed and crush-injured with a small hemostat for 10 seconds. After the injury, $rhNGF-{\beta}$ adenovirus($2{\mu}l,\;1.5{\times}10^{11}pfu$) or saline was administered into the crushed site in the experimental (n=24) and the control group (n=24), respectively. Sham operation of another group of rats (n=9) was performed without administration of either saline or adenovirus. The taste recovery and the change of fungiform papilla were studied at 1, 2, 3 and 4 weeks. Each of the 6 animals was tested with different solutions (0.1M NaCl, 0.1M sucrose, 0.01M QHCl, or 0.01M HCl) by two-bottle test paradigm and the number of papilla was counted using SEM picture of tongue dorsum. LN was explored at the same interval as taste study and evaluated electro-physiologically (peak voltage and nerve conduction velocity) and histomorphometrically (axon count, myelin thickness). Results: The recombinant adenovirus vector carrying $rhNGF-{\beta}$ was constructed and confirmed by restriction endonuclease analysis and DNA sequence analysis. GFP expression was observed in 90% of $rhNGF-{\beta}$ adenovirus infected cells compared with uninfected cells. Total mRNA isolated from $rhNGF-{\beta}$ adenovirus infected cells showed strong RT-PCR band, however uninfected or LacZ recombinant adenovirus infected cells did not. NGF quantification by ELISA showed a maximal release of $18865.4{\pm}310.9pg/ml$ NGF at the 4th day and stably continued till 14 days by $rhNGF-{\beta}$ adenovirus infected Schwann cells. PC-12 cells exposed to media with $rhNGF-{\beta}$ adenovirus infected Schwann cell revealed at the same level of neurite-extension as the commercial NGF did. $rhNGF-{\beta}$ adenovirus injected experimental groups in comparison to the control group exhibited different taste preference ratio. Salty, sweet and sour taste preference ratio were significantly different after 2 weeks from the beginning of the experiment, which were similar to the sham group, but not to the control group.