• 반도체디스플레이기술학회지
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• 제20권3호
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• pp.27-31
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• 2021

VI probe, which is one of various in-situ plasma monitoring sensor, is frequently used for in-situ process monitoring in mass production environment. In this paper, we correlated the plasma etch results with VI probe data with the small amount of gas flow rate changes to propose usefulness of the VI probe in real-time process monitoring. Several different sized contact holes were employed for the etch experiment, and the etched profiles were measured by scanning electron microscope (SEM). Although the shape of etched hole did not show satisfactory relationship with VI probe data, the chamber status changed along the incremental/decremental modification of the amount of gas flow was successfully observed in terms of impedance monitoring.

• 한국지진공학회논문집
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• 제5권4호
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• pp.97-105
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• 2001

고무제품에 근간을 둔 면진장치는 상당한 저온효과와 약간의 변형도 속도효과를 보여준다. 면진장치의 비탄성거동에 영향을 미치는 이들의 속성은 면진장치의 거동을 정확히 모델링하기 위해 반드시 고려되어져야 하기 때문에, 고무와 납 모두에 영향을 미치는 저온효과와 변형도 속도효과를 고려할 수 있는 해석모델을 제시하였다. 얼린 면진장치를 일정 수직하중에서 수평방향 반복하중을 가한 실험결과들로부터 시스템 식별(SI : system identification)을 적용하여 해석모델에 필요한 고무와 납의 매개변수들을 구하였다. 제안된 해석모델은 면진장치의 거동을 유사하게 표현할 수 있음을 보여준다.

• 한국연소학회지
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• 제21권4호
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• pp.48-60
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• 2016

Experimental and numerical studies were conducted to investigate flame behaviors near flammable limits for downstream-interacting SNG-air premixed flames in a counter-flow configuration. The SNG fuel consisted of a methane, a propane, and a hydrogen with volumetric ratios of 91, 6, and 3%, respectively. The most appropriate priority for some reliable reaction mechanisms examined was given to the mechanism of UC San diego via comparison of lean extinction limits attained numerically with experimental ones. Flame stability map was presented with a functional dependencies of lower and upper methane concentrations in terms of global strain rate. The results show that, at the global strain rate of $30s^{-1}$, lean extinction boundary is slanted while rich extinction one is relatively less inclined because of the dependency of such extinction boundary shapes on deficient reactant Lewis number governed by methane mainly. Further increase of global strain rate forces both extinction boundaries to be more slanted and to be shrunk, resulting in an island of extinction boundary and subsequently one flame extinction limit. Extinction mechanisms for lean and rich, symmetric and asymmetric extinction boundary were identified and discussed via heat losses and chemical interaction.

• 대한기계학회논문집
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• 제19권8호
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• pp.1940-1949
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• 1995

A numerical study for a two dimensional multi-jet with crossflow of the spent fluid has been carried out. Three different distributions of mass-flow rate at 5 jet exits were assumed to see their effects upon the flow characteristics, especially in the jet-flow region. For each distribution, various Reynolds numbers ranging from laminar to turbulent flows were considered. Results show that a fully developed laminar flow exists above a certain Reynolds number whose exact value depends upon the mass flow rate distribution. AS the Reynolds number increases, the flow becomes transitional from downstream and finally a fully developed turbulent flow forms in the jet-flow region. The critical Reynolds number where the fully developed turbulent flow forms is quite dependent upon the distribution of mass-flow rate. One interesting result is that the distribution of the skin friction coefficient along the inpingement plate in the jet-flow region shows a consistent dependency on the Reynolds number, i.e. inversely proportional to the square root of the Reynolds number, regardless of flow regime.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 추계학술대회 논문집 학회본부 C
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• pp.879-881
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• 1999

Radical and ion densities in a CF4 plasma have been calculated as a function of input power density. 9as pressure and feed gas flow rate using simple 0 dimensional global model. Fluorine atom is found to be the most abundant neutral particle. Highly fragmented species such as CF and CF+ become dominant neutral and ionic radical at the high power condition. As the pressure increases. ion density increases but ionization rate decreases due to the decrease in electron temperature. The fractional dissociation of CF4 feed gas decreases with pressure after increasing at the low pressure range. Electron density and temperature are almost independent of flow rate within calculation conditions studied. The fractional dissociation of CF4 monotonically decreases with flow rate. which results in increase in CF3 and decrease in CF density. The calculation results show that the SiO2 etch selectivity improvement correlates to the increase in the relative density of fluorocarbon ion and neutral radicals which has high C/F ratio.

• 한국정밀공학회지
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• 제30권10호
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• pp.1009-1015
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• 2013

Ultra-short laser pulses are effective, when high requirements concerning accuracy, surface roughness and heat affected zone are demanded for surface structuring. In particular, picosecond laser systems that are suited to be operated in industrial environments are of great interest for many practical applications. This paper focused on inducing optimum process parameters for higher volume ablation rate by analyzing a relationship between crater diameter and optical spot size. In detail, the dependency of the volume ablation rate, penetration depth and threshold fluence on the pulse duration 8 ps and wavelength of 515 nm was discussed. The experimental results showed that wavelength of 515 nm resulted in less threshold fluence ($0.075J/cm^2$) on copper than IR wavelength ($0.3J/cm^2$). As a result, it was possible that optimum fluence for higher volume ablation rate was achieved with $0.28J/cm^2$.

• Nuclear Engineering and Technology
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• 제53권6호
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• pp.1991-1999
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• 2021

The response changes of the specific growth rate of Lemna minor duckweed was modeled using the logarithms of frond numbers on tritium activity concentration and gamma radiation dose from cobalt 60. The concept of average specific growth rate depends on the general exponential growth pattern, where toxicity is estimated based on the effect on the growth rate. One of the main questions of the effect of the radiation dose on duckweed is how to correlate the effect of beta radiation with the effect of any other radiation for modeling radiation on Lemna minor. Experimental data were extrapolated by utilizing the OECD guidelines. A linear relationship of absorbed dose and activity concentration was obtained for the average dependency growth rate of Lemna minor as D = (0.1257)·A^0.585. The dose rate of gamma irradiation from ⁶⁰Co increases with tritium activity dependence, on the specific growth rate of the Lemna minor duckweed. An increase in the tritium activity causes a decrease in the specific growth rate of the Lemna minor duckweed. It indicates that as the quantity of the beta radiation dose increase in Lemna minor duckweed, a higher quantity of gamma radiation will be required to cause the same effect in the specific growth rate of Lemna minor duckweed. The relation between the inhibition of the Lemna minor seedling growth and gamma and beta radiation dosage agrees roughly with that between the decrease of survival rate or fertility and dosage.

• Elastomers and Composites
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• 제49권2호
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• pp.110-116
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• 2014

디에틸렌글리콜(DEG, 분자량 106.1)과 폴리에틸렌글리콜600(PEG600, 분자량 603.3)을 아디프산(AA)과 반응시켜 폴리(옥시에텔렌-아디페이트)-디올 공중합체를 합성하는 에스테르 반응에서, stannous 2-ethylhexanoate 촉매의 농도가 반응속도에 주는 영향을 연구하였다. 반응에 사용되는 AA의 카르복실기 당량 대비 폴리올의 히드록실기의 당량비를 2로 맞추어서 합성된 폴리(에테르-에스테르)의 양말단이 OH기로 결합되도록 유도하였다. 반응은 $170^{\circ}C$에서 촉매농도 0.15 ~ 2.0 wt.%로 수행하였다. 합성된 폴리(옥시에텔렌-아디페이트)-디올의 수평균 중합도는 약 3 이었다. DEG와 AA로부터 폴리(옥시에텔렌-아디페이트)-디올이 합성되는 반응의 겉보기속도상수($k_{app}$) 값은 촉매의 농도가 커짐에 따라 $k_{app}=0.88[C_{cat}]$의 관계를 가지며 선형적으로 증가한 반면에, PEG600과 AA의 에스테르 반응의 $k_{app}$ 값은 촉매농도와 $k_{app}=0.123[C_{cat}]^{0.55}$의 관계로 증가하며 포화되는 경향을 나타내었다. DEG와 AA사이의 합성반응에서도 반응속도의 촉매농도에 대한 의존성이 비선형 관계로 바뀌는 것이 예상되며, 이때의 촉매농도는 [$Sn(C_8H_{15}O_2)_2$ mole/mole of AA mole] 값이 0.066([$C_{cat}$]=0.22M)에 가까운 영역에 있을 것으로 추정된다.

• 한국수산과학회지
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• 제25권3호
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• pp.189-196
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• 1992

고급 횟감으로 많이 소비되고 있는 넙치의 사후 조기 변화의 온도 의존성을 검토하여 횟감의 신선도 연장을 위한 최적의 조건을 찾아서 산업에 이용하고자, 각종 저장 온도에 넙치를 저장하면서 사후 경직도, 근육중의 ATP 관련 물질의 분해 및 유산의 축적 정도 그리고 K값 등의 온도 의존성 및 이들의 상관 관계에 대하여 검토한 결과는 다음과 같다. 1. 사후 경직의 개시 시간은 $0^{\circ}C$ 및 $-3^{\circ}C$ 저장보다 $-5^{\circ}C$ 및 $10^{\circ}C$ 에서 연장되었고, 저장 온도가 낮을수록 경직도가 높았으며 완전 경직의 유지 시간도 길었다. 2. ATP 분해 속도는 $-3^{\circ}C$ 에서 가장 빨랐으며 다음으로 $0^{\circ}C$ 였고, $5^{\circ}C$및 $10^{\circ}C$에서는 ATP 분해 속도가 상당히 억제되어 약 35시간을 전후하여 전부 분해되었다. 3. 유산 축적량의 온도 의존성은 ATP 분해 속도의 온도 의존성과 약간 다른 경향을 나타내었다. 즉, $-3^{\circ}C$ 저장에서 가장 높은 반면, $5^{\circ}C$ 저장에서v 가장 낮았다. 4. 경직의 진행과 ATP의 분해, 경직의 진행과 유산의 축적 그리고 ATP의 분해와 유산의 축적사이의 상관 계수(r)는 각각 -0.981946, 0.965044 및 -0.964728이었다. 5. 신선도 지표인 K값이 $20\%$에 달하는 시간은 저장 온도별로 $10^{\circ}C$ 22시간, $5^{\circ}C$ 71시간, $^{\circ}C$ 96시간 그리고 $-3^{\circ}C$ 240시간으로, ATP 분해 속도의 온도 의존성과 반대의 결과였다 6. 경직의 진행 속도, ATP 분해 속도, 유산의 축적 그리고 K값의 온도 의존성을 Arrhenius식을 이용하여 구한 결과, 반응 속도는 $-3^{\circ}C$에서 현저히 촉진되었으며, 다음으로$0^{\circ}C$ 그리고 $5^{\circ}C$ 및 $10^{\circ}C$에서 지연되었으나 K값의 반응 속도는 이와 반대였다. 7. Arrhenius식에서 구한 $Q_{10}$값, 활성화 에너지(Ea) 및 반응 속도 상수를 비교해 볼 때, 경직의 진행 속도, ATP 분해 속도 및 유산 축적의 온도 의존성은 K값의 온도 의존성과 상반되었다.

• 한국연소학회지
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• 제19권4호
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• pp.1-7
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• 2014

An experimental study on downwardly spreading flame over slanted electrical wire, which is insulated by Polyethylene (PE), was conducted with applied AC electric fields. The result showed that the flame spread rate decreased initially with increase in inclination angle of wire and then became nearly constant. The flame shape was modified significantly with applied AC electric field due to the effect of ionic wind. Such a variation in flame spread rate could be explained by a thermal balance mechanism, depending on flame shape and slanted direction of flame. Extinction of the spreading flame was not related to angle of inclination, and was described well by a functional dependency upon the frequency and voltage at extinction.