• International journal of advanced smart convergence
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• 제10권2호
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• pp.64-72
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• 2021

XML message brokers have a lot of importance because XML has become a practical standard for data exchange in many applications. Message brokers covered in this document store many users. This paper is a study of the processing of twig pattern queries in XML documents using branching node streams in XML message broker structures. This work is about query processing in XML documents, especially for query processing with XML twig patterns in the XML message broker structure and proposed a method to reduce query processing time when parsing documents with XML twig patterns by processing information. In this paper, the twig pattern query processing method of documents using the branching node stream removes the twigging value of the branch node that does not include the labeling value of the branch node stream when it receives a twig query from the client. In this paper, the leaf node discovery time can be reduced by reducing the navigation time of nodes in XML documents that are matched to leaf nodes in twig queries for client twig queries. Overall, the overall processing time to respond to queries is reduced, allowing for rapid question-answer processing.

• 전기전자학회논문지
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• 제3권1호
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• pp.109-117
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• 1999

본 논문에서는 급속 열처리 공정에서 필수적인 빠르고 정밀한 웨이퍼의 온도제어기법을 제안하였다. Bang- Bang/PID 제어기법은 빠른 온도상승률을 만족하고, 오버슈트와 정상상태 오차를 줄이도록 한다. 즉 초기에 허용 가능한 최대전력을 공급하는 일종의 Bang-Bang 방식의 제어를 하고, 설정온도와 출력에서 측정되는 온도와의 차이가 어느 정해진 범위보다 작을 때 PID 제어를 수행한다. 또한 PID 이득을 정하기 위해 ARX 모델로 식별된 플랜트에 Kappa-Tau 동조법이 사용되었다. 개발된 제어기는 실험용 RTP 장비에 적용하여 그 성능을 평가하였다.

• 대한전자공학회논문지SD
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• 제45권8호
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• pp.11-16
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• 2008

본 논문에서는 먼저 RTP(Rapid Thermal Processor) 장치를 스트레스 측정에 용이한 구조로 제작하고 PC에서 통합 공정관리 시스템을 설계하였다. 다음으로는 Large deformation 이론을 바탕으로 반도체 웨이퍼 표면의 변형검사를 위한 레이져 인터페로미터리를 구성하였다. 궁극적으로 이러한 레이져장치로부터 웨이퍼 표면의 영상을 추출하고 세선화, 블록화 그리고 스트레스 분포도의 순서로 영상처리 하여 스트레스로 인한 웨이퍼 표면의 변형을 검사하였다. 실험을 하기 위해 변형이 이루어지도록 웨이퍼의 후면을 1mm정도 갈아낸 후 약 1000도에서 $3\sim4$회 열처리를 수행하였으며, 열처리를 가한 영상과 가하지 않은 영상을 통하여 웨이퍼 열처리 후 심각한 변형이 이루어졌음을 알 수 있었다.

• 한국정밀공학회지
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• 제15권2호
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• pp.154-161
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• 1998

Prototypes of a design are always needed for the purpose of visualization and evaluation in the aspect of manufacturability functionality, and aesthetic appearance. Since the prototyping process requires a significant amount of cost and time, various rapid prototyping processes are recently being introduced in the process. However, it is usually necessary for a part built up by a rapid prototyping system to be refined by a post-processing process, in which the stair steps on the surfaces, the support structures (if they exist), and the unprocessed material are eliminated. This post-processing is usually done manually and is a time-consuming task. Especially, eliminating the trapped volumes, the volume of the unprocessed material entrapped by the solidified portion, is sometimes impossible in some processes. This study provides a designer with a tool to detect the existence and to calculate the quantity of the trapped volumes at the given build-up direction, so that the proper build-up direction is chosen or the part is built by pieces to avoid the problems caused by the trapped volumes in advance. Since the proposed algorithm can efficiently calculate the amount of the trapped volumes at any build-up direction, it has the potential of such application as optimizing the build-up direction to minimize the trapped volumes.

• 한국전기전자재료학회논문지
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• 제29권2호
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• pp.95-100
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• 2016

We fabricated a tin sulfide (SnS) layer with Sn/Mo/glass layers followed by a RTP (rapid thermal processing), and studied the film growth and structural characteristics as a function of annealing temperature and time. The elemental sulfur (S) was cracked thermally and applied to form SnS polycrystalline film out of the Sn percursor at pre-determined pressures in the RTP tube. The sulfurization was done at the temperature from $200^{\circ}C$ to $500^{\circ}C$ for a time period of 10 to 40 min. At ${\leq}300^{\circ}C$, 20 min., p-type SnS thin films was grown and showed the best composition of at.% of [S]/[Sn] $${\sim_=}$$ 1 and [111] preferred orientation as investigated from using XRD (X-ray diffraction) analysis and EDS (energy dispersive spectroscopy) and SEM (scanning electron microscopy), and optical absorption by a UV-VIS spectrometer. In this paper, we report the details of growth characteristics of single phase SnS thin film as a function of annealing temperature and time associated with the pressure and ambient gas in the RTP tube.

• Journal of Information Processing Systems
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• 제13권3호
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• pp.518-532
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• 2017

Due to the rapid growth of the amount of data, research on bigdata processing has been highlighted. For bigdata processing, CUBRID Shard is able to support query processing in parallel way by dividing the database into a number of CUBRID servers. However, CUBRID Shard can answer a user's query only when the query is required to gain accesses to a single CUBRID server, instead of multiple ones. To solve the problem, in this paper we propose a CUBRID based distributed parallel query processing system that can answer a user's query in parallel and distributed manner. Finally, through the performance evaluation, we show that our proposed system provides 2-3 times better performance on query processing time than the existing CUBRID Shard.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1997년도 한국자동제어학술회의논문집; 한국전력공사 서울연수원; 17-18 Oct. 1997
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• pp.1508-1511
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• 1997

In this paper, design parameters of Rapid Thermal Processing(RrW) to minimize the wafer tempera ture uniformity errors are proposed. 1,anip ling positions and the wafer height are important parameters for waf er temperature uniformity in R'I'P. We propose the method to seek lamp ling positions and the wafer height for optimal temperature uniformity. l'he ~~roposed method is applied to seek optimal lamp ling positions and the waf er height of 8 inch wafer. 'I'o seek the optimal lamp ling positions and the wafer height, we var\ulcorner. lamp ling 110s itions and the wafer height and then formulate the wafer temperature uniformity problem to the linear programmi ng problem. Finally, it is shown that the wafer temperature uniformity in RI'I' designed by optimal prarneters is improved to comparing with Ii'l'P designed by the other method.

• 제어로봇시스템학회논문지
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• 제5권4호
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• pp.481-488
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• 1999

A thermal model based on the chamber geometry of the industry-standard AST SHS200MA rapid thermal processing system has been developed for the study of thermal uniformity and process repeatability thermal model combines radiation energy transfer directly from the tungsten-halogen lamps and the steady-state thermal conducting equations. Because of the difficulties of solving partial differential equation, calculation of wafer temperature was performed by using finite-difference approximation. The proposed thermal model was verified via titanium silicidation experiments. As a result, we can conclude that the thermal model show good estimation of wafer surface temperature distribution.

• Journal of Biosystems Engineering
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• 제31권6호
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• pp.535-540
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• 2006

For a biosensor development, an enzyme-linked immunosorbent assay (ELISA) of the fungicide iprovalicarb was developed by minimizing the processing time. The time for whole incubation process was reduced from 135 minutes to 15 minutes. The concentration of antibody was varied to improve sensitivity. The total processing time was reduced from 2.5 hours to 20 minutes, the final sensitivity ($IC_{50}$ value) of 7.93 ng/mL and the lowest detection limit of 0.045 ng/mL were obtained. This ELISA was applied to potatoes and onions, and the recoveries were in the range of 98.85 $\sim$ 101.20% and 87.97 $\sim$ 102.70%, respectively. Accordingly, this method can be used as basis for a biosensor for rapid monitoring of iprovalicarb residues in crops.

• 열처리공학회지
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• 제9권4호
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• pp.229-233
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• 1996

This work has been carried out to reduce the softening of heat affected zone on laser surface alloying. Iron based rapid solidification material with $Cr_{5-10}$, $V_{1-3}$, $Mo_{3-7}$, $W_{2-5}$, $B_{7-8}$, $C_{2-3}$, $Si_{0.5-1}at%$ was alloyed on the surface of SM45C steel. The excellent softening resistance in alloyed and heat affected zone showed, which could be attributed to the formation of stable high temperature precipitates.