• 제목/요약/키워드: Rapid processing

검색결과 1,368건 처리시간 0.024초

최적 반복 학습 제어기법을 이용한 RTP의 웨이퍼 온도균일제어 (Control of Wafer Temperature Uniformity in Rapid Thermal Processing using an Optimal Iterative teaming Control Technique)

  • 이진호;진인식;이광순;최진훈
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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    • pp.358-358
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    • 2000
  • An iterative learning control technique based on a linear quadratic optimal criterion is proposed for temperature uniformity control of a silicon wafer in rapid thermal processing.

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후처리를 최소화하는 판재적층방식 쾌속조형기의 개발 (Development of Sheet Deposition Type Rapid Prototyping System Minimizing Post Processing)

  • 조인행;이건우;송용억
    • 한국정밀공학회지
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    • 제16권7호
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    • pp.210-218
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    • 1999
  • Sheet deposition type rapid prototyping system have many advantages : high build speed, low operating cost, large part size, no phase change, no need for support generation, and forth. However, those sheet deposition type rapid prototyping system require an additional post processing to remove excessive material attached to the part. This post processing is time consuming and labor intensive. Moreover, it is difficult for those system to fabricate parts with hollow cores and internal cavities. A new sheet deposition type rapid prototyping system that minimizes the post processing is proposed. The proposed system automatically removes excessive material in a peeling-off process between two cutting processes. In this way, the proposed system can reduce the post-processing time and cost as well as the limitation of the feasible geometric shapes in the conventional sheet deposition system.

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초신속궤도력을 이용한 신속한 고정밀 GPS 데이터 처리 (Rapid and Accurate GPS Data Processing with Ultra-rapid Orbits)

  • 박관동;조정호;하지현;임형철
    • 한국측량학회지
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    • 제21권4호
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    • pp.309-316
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    • 2003
  • 측량을 비롯한 여러 GPS응용분야에서 GPS 수신기에서 수집한 데이터를 빠른 시간 내에 처리하여 정밀 좌표를 산출할 필요성이 발생한다 GPS 데이터 처리에는 현재 네 종류의 GPS 위성궤도력을 이용할 수 있는데, 본 연구에서는 신속한 고정밀 데이터 처리에 가장 적합한 궤도력을 찾기 위해, 각 궤도력을 이용할 경우 성취할 수 있는 좌표성과의 정확성과 정밀도를 비교하였다. GPS 위성에서 제공되는 방송궤도력(broadcast orbits)과 ICS 등의 국제기관에서 제공하는 초신속궤도력(ultra-rapid orbits), 신속궤도력(rapid orbits), 그리고 정밀궤도력(precise orbits)을 이용하였다. 초신속궤도력을 이용하여 GIPSY로 데이터 처리를 하였을 때 일주일 평균 좌표 성과의 정확성이 1.5cm 이내였다. 본 연구를 통하여 GIPSY와 초신속궤도력을 이용하면, 신속한 데이터 처리가 가능한 동시에 고정밀 좌표성과를 얻을 수 있음을 알 수 있었다.

광조형을 이용한 마이크로가공에 관한 기초적인 연구

  • 김동욱
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1996년도 춘계학술대회 논문집
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    • pp.161-165
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    • 1996
  • Recently, with a great interest in micromachine, it is more and more important to promote the way of manufacturing micromachine. The silicon process or the LIGA process was the main way to manufacture micromachine in the past. Because these processing method was 2.5-dimensional, there was the limit in processing perfect three-dimensional micromachine. In this study, we developed the rapid prototyping system for micromachine and tested its property. We also realized .mu. m - order processing and three-dimensional structure processing. The results showed the possibility of manufacturing micromachine with the rapid prototyping system

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부품방향의 선정을 통한 광조형물의 후가공면적 최소화 (Minimization of Post-processing area for Stereolithography Parts by Selection of Part Orientation)

  • 김호찬;이석희
    • 대한기계학회논문집A
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    • 제26권11호
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    • pp.2409-2414
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    • 2002
  • The surfaces of prototypes become rough due to the stair-stepping which is the inevitable phenomenon in the Rapid Prototypes are not used only for the verification of feature. The grinding, coating, or the composition of them is a main operation in post-processing in which lots of costs and long build time are needed. The solution is proposed to increase the efficiency of rapid prototyping by minimizing or removing the composition of them is a main operation in post-processing in which lots of costs and long build time are needed. the solution is proposed to increase the efficiency of rapid prototyping by minimizing or removing the regions for post-processing. the factors to cause the surface roughness and their effects are analyzed through the experiments. Software modules are developed to predict the surface roughness of each face in the prototyping with the result. An experimental compensation method is developed to apply the modules to various RP equipments, materials and build styles. The build direction is searched with use of genetic algorithm to maximize the total areas of the surface of which roughness is better than the user-defined value.

삼일주와 삼일 기이내로 빚어지는 우리나라의 속성주 I. 쌀로 빛은 속성주 (Analytical Study on Traditional Rapid-brew Alcoholic Beverages of Three Days or More I. About Brewing from Regular Rice)

  • 전정일;신민자;최영진;김현숙;이혜정;정재홍;백숙은
    • 동아시아식생활학회지
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    • 제9권3호
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    • pp.267-276
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    • 1999
  • This study was carried out to understand the brewing and processing methods of rapid-brew alcoholic beverages. In the contents of 45 classical records, there were 68 items about rapid-brew alcoholic beverages. and single and double-brew alcoholic beverages. Those alcoholic beverages. of the 68 items studied, were made iron green grown at that time-rice, glutinous rice, regular rice. Selected 38 items among those brew, alcoholics glution rice, were distributed into 34 patterns. Four patterns, grounded on rapid-brewing and processing methods, were set one thing to another and analyzed.

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삼일주와 삼일 기이내로 빚어지는 우리나라의 속성주 II. 참쌀로 빛은 속성주 (Analytical Study on Traditional Rapid-brew Alcoholic Beverages of Three Days or More II. About Brewing from Glutinous Rice)

  • 전정일;신민자;최영진;김현숙;이혜정;정재홍;백숙은
    • 동아시아식생활학회지
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    • 제9권3호
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    • pp.277-288
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    • 1999
  • This study was carried out to understand the brewing and processing methods of rapid-brew alcoholic beverage. In the contents of 45 classical records, there were 68 items about rapid-brew alcoholic beverage and sin91e and double brew alcoholic beverage. Those alcoholic beverage of 68 items above, were made from green grown at that time-rice, glutinous rice. regular rice. Selected 38 items among those brewages. alcoholics from glutinous rice, were distributed into 4 patterns. Four patterns, grounded on rapid-brewing and processing methods, were set one thing to another and analyzed.

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Delaunay삼각형 분할법의 RP에의 응용 (Application of Delaunay Triangulation on RP)

  • 명태식;채희창;김옥현
    • 한국생산제조학회지
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    • 제8권3호
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    • pp.35-41
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    • 1999
  • STL which is used in Rapid Prototyping is composed of a lot of triangular facets. The number of triangles and the shapes of these triangles determine the quality of STL. Therefore, proper algorithm is necessary to enhance the quality of triangular patch. In this paper we used the Delaunay triangulation method to apply to following processes. 1) On processing for reducing sharp triangles which cause errors on intersection. 2) On processing for connecting two or more collinear edges. 3) On processing for deleting unnecessarily inserted points in coplanar polygon.

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A robust controller design for rapid thermal processing in semiconductor manufacturing

  • Choi, Byung-Wook;Choi, Seong-Gyu;Kim, Dong-Sung;Park, Jae-Hong
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1995년도 Proceedings of the Korea Automation Control Conference, 10th (KACC); Seoul, Korea; 23-25 Oct. 1995
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    • pp.79-82
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    • 1995
  • The problem of temperature control for rapid thermal processing (RTP) in semiconductor manufacturing is discussed in this paper. Among sub=micron technologies for VLSI devices, reducing the junction depth of doped region is of great importance. This paper investigates existing methods for manufacturing wafers, focusing on the RPT which is considered to be good for formation of shallow junctions and performs the wafer fabrication operation in a single chamber of annealing, oxidation, chemical vapor deposition, etc., within a few minutes. In RTP for semiconductor manufacturing, accurate and uniform control of the wafer temperature is essential. In this paper, a robustr controller is designed using a recently developed optimization technique. The controller designed is then tested via computer simulation and compared with the other results.

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