• Journal of the Korean institute of surface engineering
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• v.36 no.5
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• pp.418-422
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• 2003

평판형 유도결합 플라즈마 식각장비(inductively coupled plasma etcher)를 이용하여 각종 공정조건들에 따른 GaAs의 식각특성을 연구하였다. 공정변수들은 ICP 소스파워(0-500 W), RIE 척파워(0-150 W), 가스 종류($BCl_3$, $BCl_3$/Ar, $BCl_3$/Ne) 및 가스혼합비였다. $BCl_3$ 가스만을 이용하여 GaAs를 식각한 경우보다 25%의 Ar이나 Ne같은 불활성 기체를 혼합한 $15BCl_3$/5Ar, $15BCl_3$/5Ne 가스를 이용한 경우의 식각률이 더 우수한 것을 확인하였다. 그리고 50% 이하의 Ar이 혼합된 $BCl_3$/Ar의 경우는 높은 식각률 (＞4,000 $\AA$/min)과 평탄한 표면(RMS roughness : ＜2 nm)을 얻을 수 있었지만 지나친 양(＞50%)의 Ar의 혼합은 오히려 표면을 거칠게 하거나 식각률을 떨어뜨리는 결과를 가져왔다. 그리고 20 sccm $BCl_3$, 100 W RIE 척파워, 300 W ICP 소스파워, 공정압력이 7.5 mTorr인 조건에서의 GaAs의 식각결과는 아주 우수한 특성(식각률: ∼ 4,000, $\AA$/min, 우수한 수직측벽도: ＞$87^{\circ}$, 평탄한 표면: RMS roughness : ∼0.6 nm)을 나타내었다.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.2
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• pp.203-212
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• 2010

Water spray cooling has been widely used in a variety of industrial applications. The present study concentrated on quantitative measurements of the heat flux and heat transfer coefficient by water spray as it impinges on the rough surface of a hot steel plate at $900^{\circ}C$. A novel experimental technique was developed for a hightemperature heat flux gauge with a test block, cartridge heaters, and thermocouples that was used to measure the surface heat flux information on the hot steel plate for local heat flux measurements. The roles of the surface roughness on heat transfer are presented in this paper for well-characterized four rough surfaces with average rms roughness heights of $40-80{\mu}M$. The results show that the local heat transfer for rough surfaces is higher than that for a smooth surface. Heat transfer can be significantly increased by the presence of surface roughness elements, which can disrupt the thin thermal boundary layer. In addition, the heat transfer enhancement mechanism on a rough surface can be investigated by a different boiling regime.

• Journal of the Korean Vacuum Society
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• v.17 no.4
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• pp.353-358
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• 2008

In order to increase extraction efficiency of AlGaInP-based vertical RED LEDs, chemical wet etching technique was produced by using a roughened surface with triangle-like morphology. A commonly used $H_3PO_4$-based solution was applied for chemical wet etching. The light extraction of AlGaInP LED was related to the n-side roughed surface morphology. The morphology of roughed surface is analyzed by the atomic force microscope (AFM). As a result, the roughed surface AlGaInP LED has a root-mean-square (RMS) roughness of 44 nm. The brightness shows 41% increase after roughening n-side surface, as compared to the ordinary flat surface LED.

• Applied Science and Convergence Technology
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• v.25 no.2
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• pp.32-35
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• 2016

Using conventional deposition techniques, we demonstrate a method to fabricate ultra-smooth 10 nm silver films without using a wetting layer or co-depositing another material. The argon working pressure plays a crucial role in achieving an excellent surface flatness for silver films deposited by DC magnetron sputtering on an InP substrate. The formation of ultra-smooth silver thin films is very sensitive to the argon pressure. At the optimum deposition condition, a uniform silver film with an rms surface roughness of 0.81 nm has been achieved.

• Journal of the Korean Vacuum Society
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• v.8 no.3A
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• pp.218-223
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• 1999

We investigated the interfacial reactions between the $Y_2O_3$ film deposited by ICB processing and p-type (100) Si substrates upon annealing treatments in $O_2$ and Ar gas ambients. we also investigated the evolution of surface morphology of ICB deposited $Y_2O_3$ films upon annealing treatments. We observed that the root-mean-square(RMS) value of surface roughness measured by AFM increased with annealing time at $800^{\circ}C$ in $O_2$ ambient, while the change of surface roughness was not observed in Ar ambient. We also found the growth of $SiO_2$ layer and the formation of yttium silicate layer. From the capacitance values $(C_{acc})$ measured by C-V measurements, the relative didldctric constant of $Y_2O_3$ film in metal-insulator-semiconductor(MIS) structure was estimated to be about 9.

• Korean Journal of Metals and Materials
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• v.46 no.4
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• pp.217-222
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• 2008

Characteristics of etching and induced surface morphology variation by wet-etching of n-face n-type GaN were investigated using KOH solutions. It was observed that hexagonal pyramids were formed on the etched surface regardless of etching conditions. However, the size of the hexagonal pyramids was changed as the etching time and temperature increased, respectively. Initially, as the etching time and concentration of KOH solution increased, the hexagonal pyramid was observed to be dissociated into smaller pyramids. However, as the etching time increased further, the size of the hexagonal pyramids increased again, indicating that the etching of N-face n-type GaN by KOH solutions proceeded through the evolution of hexagonal pyramids, such as formation, dissociation and enlargement of pyramids. Furthermore, it was also observed that there is a correlation between the photoluminescence intensity of the etched surface and the value of root-mean-square roughness. The intensity of PL increased as the roughness value increased due to the enhancement of the extraction efficiency of the generated photons.

• Journal of the Korean Society for Heat Treatment
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• v.36 no.4
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• pp.193-197
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• 2023

Transparent and conducting titanium (Ti) doped indium oxide (TIO) thin films were deposited on the poly-imide (PI) substrate with radio frequency magnetron sputtering and then electron irradiation was conducted on the TIO film's surface to investigate the effect electron irradiation on the crystallization and opto-electrical properties of the films. All x-ray diffraction (XRD) pattern showed two diffraction peaks of the In₂O₂ (431) and (444) planes with regardless of the electron beam irradiation energy. In the AFM analysis, the surface roughness of as deposited films was 3.29 nm, while the films electron irradiated at 700 eV, show a lower RMS roughness of 2.62 nm. In this study, the FOM of as deposited TIO films is 6.82 × 10^-3 Ω^-1, while the films electron irradiated at 500 eV show the higher FOM value of 1.0 × 10^-2 Ω^-1. Thus, it is concluded that the post-deposition electron beam irradiation at 500 eV is the one of effective methods of crystallization and enhancement of opto-electrical performance of TIO thin film deposited on the PI substrate.

• Structural Engineering and Mechanics
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• v.12 no.4
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• pp.409-428
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• 2001

The characteristics of dynamic wheel loads of heavy vehicles running on bridge and rigid surface are investigated by using three-dimensional analytical model. The simulated dynamic wheel loads of vehicles are compared with the experimental results carried out by Road-Vehicles Research Institute of Netherlands Organization for Applied Scientific Research (TNO) to verify the validity of the analytical model. Also another comparison of the analytical result with the experimental one for Umeda Entrance Bridge of Hanshin Expressway in Osaka, Japan, is presented in this study. The agreement between the analytical and experimental results is satisfactory and encouraging the use of the analytical model in practice. Parametric study shows that the dynamic increment factor (DIF) of the bridge and RMS values of dynamic wheel loads are fluctuated according to vehicle speeds and vehicle types as well as roadway roughness conditions. Moreover, there exist strong dominant frequency resemblance between bounce motion of vehicle and bridge response as well as those relations between RMS values of dynamic wheel loads and dynamic increment factor (DIF) of bridges.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.18-24
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• 1999

ThisPaper investigates the feasibility of using acoustic emission signal analysis for the detection of built-up edge during machining. Experiments were conducted on a CNC-lathe using conventional carbide insert tools under various cutting conditions. The cutting forces were also measured for comparisons. Experimental evidence is presented which indicates that the presence of a built-up edge can significantly affect the generation of acoustic emission in metal cutting. It is shown that under conditions in which a built-up edge is generated, the variation of $AE_{rms}$ signal with cutting speed can be quite different from the generally accepted linear, monotonic increase as previously reported. The feasibility of utilizing $AE_{rms}$ in built-up edge sensing is suggested.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.28 no.10
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• pp.788-793
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• 2017

This paper presents the verification of accuracies of theoretical models for calculating the microwave reflections from rough sea surfaces. First of all, the Pierson-Moskowitz ocean spectrum was used to generate the rough sea surfaces. Then the relationship between the significant wave heights, root-mean-square(RMS) heights and wind speed was derived by estimating the significant wave heights and RMS heights of the generated sea surfaces according to various wind speeds, and compared the derived relationship with other measurement data sets. The reflection coefficients of the sea surfaces were calculated by using a numerical method(the moment method). Then, the numerical results were compared with Ament model, PO(Physical Optics) model, GO(Geometrical Optics) model and B-M(Brown-Miller) model for various roughness conditions(wind speed) and incidence angles. It was found that the Ament model is not accurate except for a very low roughness conditions($kh_{rms}$<0.4, k is wavenumber and $h_{rms}$ is RMS height). It was also found that at incidence angles lower than $70^{\circ}$, the PO and the GO models agree well with the numerical results, while the B-M model agrees well with the numerical analysis results at incidence angles higher than $80^{\circ}$ for very rough sea surfaces with $kh_{rms}$>10.