• Journal of Satellite, Information and Communications
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• v.6 no.1
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• pp.28-31
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• 2011

In this paper, a new set of structural and sacrificial material that is diamond like carbon (DLC)/photoresist for high performance piezoelectric RF-MEMS switches which are actuated in d33 mode is suggested. To avoid curing problem of photoresist sacrificial layer, DLC structure layer is deposited at room temperature by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method. And lead zirconate titanate (PZT) piezoelectric layer is deposited on structure layer directly at room temperature by rf magnetron sputtering system and crystallized by rapid thermal annealing (RTA) equipment. Particular attention is paid to the annealing of PZT film in order to crystallize into perovskite and the variation of mechanical properties of DLC layer as a function of annealing temperature. The DLC layer shows good performance for structure layer in aspect to Young's modulus and hardness. The fabrication becomes much simpler and cheaper with use of a photoresist.

• Korean Journal of Optics and Photonics
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• v.14 no.4
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• pp.466-472
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• 2003

In this paper, we proposed an optical true time-delay (TTD) feeder system for phased array antennas (PAAs). The system possesses high-speed beam scan capability since, in this scheme, different lengths of fiber delay-lines are selected by optical 2${\times}$2 MEMS switches at high speed. An optical TTD capable of beam scanning in one of eight different directions has been built for 10 GHz linear PAA systems. Experimental results on time delay measurements show that the maximum time delay error is less than 0.2 ps corresponding to a scan angle error of less than 0.84o. We have also designed a 10 GHz linear PAA composed of eight micro-strip patch antenna elements driven by the proposed TTD, and the radiation patterns of this PAA have been analyzed by simulation.

• IEIE Transactions on Smart Processing and Computing
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• v.5 no.3
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• pp.164-168
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• 2016

A low insertion-loss, high-isolation switch based on single pole double throw (SPDT) for a 2.4GHz Bluetooth low-energy transceiver is presented in this paper. In order to increase isolation, the body floating technique is implemented. Based on characteristics whereby the ratio of the sizes of the shunt and the series transistors significantly affect the performance of the switches, the device sizes are optimized. A simple matching network is also designed to enhance the insertion loss. Thus, the SPDT switch has high isolation and low insertion loss without increasing the complexity of the circuit. The proposed SPDT is designed and simulated in a complementary metal-oxide semiconductor 65nm process. The switch has a $530{\mu}m{\times}270{\mu}m$ area and achieves 0.9dB, 1.78dB insertion loss and 40dB, 41dB isolation of transmission, reception modes, respectively.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.21 no.8
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• pp.880-885
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• 2010

In this paper, we propose a reconfigurable beam steering antenna using a dipole and a loop. The radiation patterns of the two antennas were cancelled or compensated, and head for the specific direction when a dipole and a loop antenna are combined at the reasonable ratio. The structure of the antenna is very simple and planar. By changing on/ off states of switches, the proposed antenna can steer the beam direction in the x-y plane. Simulation results confirmed the steering characteristic by using two imaginary switches. The proposed antenna can change the direction of the maximum gain in the x-y plane($0^{\circ}$, ${\pm}50^{\circ}$). The proposed antenna operates in 2.5~2.56 GHz(VSWR<2). It showed that peak gain of the antenna is 1.96~2.48 dBi and overall beam width of the reconfigurable antenna covers about $125^{\circ}$.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.19 no.2
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• pp.174-180
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• 2008

The pulsed amplifier which switches the main supply voltage of RF amplifier according to input pulse signal has good efficiency and low noise level between pulses. And it has simple structure because it doesn't need a pulse modulator at input port. The pulsed amplifier using the conventional switching circuit has slow fall time compared to rise time. We proposed the novel switching circuit for improving the fall time of pulsed amplifier The proposed switching circuit is implemented by replacing FET of conventional circuit with BJT. As a result of appling this circuit to RF pulsed amplifier, the rise and fall time are 5.7 ns and 21.9 ns at 27 dBm output power, respectively.

• Proceedings of the IEEK Conference
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• 1999.11a
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• pp.203-207
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• 1999

In this paper we report new integration technology developed for three-dimensional metallic microstructures in an arbitrary shape. We have developed the two fabrication methods: Multi-Exposure and Single-Development (MESD) and Sacrificial Metallic Mold(SMM) techniques. Three-dimensional photoresist mold can be formed by the MESD method while unlimited number of structural levels can be realized by the SMM technique. Using these two techniques we have fabricated solenoid inductors and levitated spiral inductors for RF applications. We have achieved peak Q- factors over 40 in the 2-10㎓ range, the highest number among the inductors reported to date. Finally, we propose "On-Chip Passives" as a post IC process for monolithic integration of inductors, tunable capacitors, microwave switches, transmission lines, and mixers and filters toward future single-chip transceiver integration.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.10 no.6
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• pp.889-899
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• 1999

A technique to obtain an exact frequency characteristics of desired targets in radar measurements is presented. The pulsing network composed of two RF switches was installed between the Network Analyzer and the antenna, and the backscattering from a metal sphere was measured at X-band. It is shown that the pulsing effectively eliminated undesired returns from antenna and other circuitry of the systems. The antenna return was suppressed by more than 60 dB, and the signal-to-noise ratio was improved drastically. The pulsed frequency data were processed to extract the responses of the desired target. The result agrees well with the theoretical backscattering characteristics of the sphere. The methods presented here are applicable to RCS measurements in compact ranges, and also to the backscattering measurements of distributed targets outdoors.

• Korean Journal of Optics and Photonics
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• v.15 no.4
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• pp.385-390
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• 2004

In this paper, we designed a 4-bit optical true time-delay(TTD) for phased array antennas(PAAs), which is composed of a wavelength-fixed optical source, 2 ${\times}$ 2 optical MEMS switches, and fiber-optic delay lines. A 4-bit TTD with a unit time delay difference of 6 ps for 10-GHz PAAs has been implemented. Measurement results on time delay show an error of -0.4 ps at maximum, corresponding to a radiation angle error of less than 1.63$^{\circ}$. Thus, the TTD implemented in this research performs in excellent agreement with theory. Each TTD line, composed of MEMS switches and fiber-optic delay lines, connected to the corresponding antenna element has insertion loss in between 1.36 ㏈ and 2.40 ㏈ depending upon the setup of the switches. On the other hand, the insertion loss difference between TTD lines was 0.32 ㏈ at maximum for a fixed radiation angle. The TTD structure proposed in this paper might be more reliable and economical than those previously proposed using tunable wavelength sources if proper power equalization either with gain control of RF amplifiers or variable attenuators is achieved.

• Transactions on Electrical and Electronic Materials
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• v.17 no.2
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• pp.92-97
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• 2016

This paper presents design and simulation of wide band RF microswitch that uses electrostatic actuation for its operation. RF MEMS devices exhibit superior high frequency performance in comparison to conventional devices. Similar techniques that are used in Very Large Scale Integration (VLSI) can be employed to design and fabricate MEMS devices and traditional batch-processing methods can be used for its manufacturing. The proposed switch presents a novel design approach to handle reliability concerns in MEMS switches like dielectric charging effect, micro welding and stiction. The shape has been optimized at actuation voltage of 14-16 V. The switch has an improved restoring force of 20.8 μN. The design of the proposed switch is very elemental and primarily composed of electrostatic actuator, a bridge membrane and coplanar waveguide which are suspended over the substrate. The simple design of the switch makes it easy for fabrication. Typical insertion and isolation of the switch at 1 GHz is -0.03 dB and -71 dB and at 85 GHz it is -0.24 dB and -29.8 dB respectively. The isolation remains more than - 20 db even after 120 GHz. To our knowledge this is the first demonstration of a metal contact switch that shows such a high and sustained isolation and performance at W-band frequencies with an excellent figure-of merit (fc=1/2.pi.Ron.Cu =1,900 GHz). This figure of merit is significantly greater than electronic switching devices. The switch would find extensive application in wideband operations and areas where reliability is a major concern.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.34D no.8
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• pp.1-7
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• 1997

In ahigh power amplifier design, power combiner/divider is used to connect low power amplifiers in parallel. The raidal structure of the powe combiner/divider has not only a good characteristics of port-to-port isolation but also an advantage of giving a redundancy to the structure itself by using RF switches. The parastics of a power resistor, that would be a problem in design process, are removed by both slot lines and cavity resonators, and the comon node in the circuit is rdesigned as a planar topology, and thus a new type of 4-way radial power combiner/divider is accomplished at 1840 ~ 1870 MH PCS frequency band. The insertion loss, reflection, and isolation characteristics of 40way radial power combiner/divider which can be adaptable to PCS system in this thesis are -0.3dB, -24dB,a dn -27dB respectively.