• 한국통신학회논문지
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• 제32권12A호
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• pp.1346-1353
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• 2007

본 논문에서는 필터함수의 감쇄극점(poles)과 반사손실(Return Loss)로부터 전송계수($S_{21}$)와 반사계수($S_{11}$)를 도출하고, 이 값들로부터 대역통과필터 설계를 위한 결합계수행렬 계산법을 제시하였다. 계산된 결합계수행렬에 유사변환을 적용하여서 결합계수행렬을 접힌 표준형 필터 구조의 커플링계수 행렬로 변환하였다. 그 결과를 이용하여 접힌 표준형 필터를 설계하였다.

• ETRI Journal
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• 제38권5호
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• pp.988-995
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• 2016

In this paper, we present a new specific and customized interface tool with parameter identification of Modified Butterworth-Van Dyke models for ladder bulk acoustic wave filters. The aforementioned tool is easy to use and flexible because it allows simulations and reengineering to be conducted in an application. A modular design approach is applied to simplify the extension of the proposed tool for different topologies. The proposed tool was validated using measurements from an aluminum-nitride based ladder BAW filter dedicated to the frequency ranges of the Universal Mobile Telecommunications Service and standards and Wideband Code Division Multiple Access.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2003년도 추계학술대회 발표 논문집
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• pp.54-58
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• 2003

본 연구에서는 $SiO_2/Si$ 기판 위에 $1.1\mu\textrm{m}$ 두께의 ZRO 압전층을 다양한 조건 하에서 증착하고, 그 특성을 분석하고, film bulk acoustic wave resonator 소자에 적용하였다. 증착조건으로 $Ar/O_2$ 유량비를 25-75 %로 변화시켰으며, working pressure는 3~15 mtorr, RF power는 213~300 W로 변화시켜가며 실험을 하였다. 증착된 ZnO 박막은 XRD (X-ray diffractomter)와 SEM (scanning electron microscopy)을 통해 특성이 분석되었다. LFE모드의 BAW 공진기는 $50\times50\mu\textrm{m}^2$ 공진면적을 가지며, $W/SiO_2$의 5층 Bragg reflector와 상하부 전극으로 $1800{\AA}$의 Al-3% Cu, 그리고 $1.4\mu\textrm{m}$ 두께의 ZnO 압전박막으로 구성되었다. 2.128-2.151 GHz 주파수 사이에서 공진이 일어났으며, Q factor는 400으로 측정되었다.

• 한국전기전자재료학회논문지
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• 제11권4호
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• pp.261-266
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• 1998

In developing the high density memory device, the etching of fine pattern is becoming increasingly important. Therefore, definition of ultra fine line and space pattern and minimization of damage and contamination are essential process. Also, the high density plasma in low operating pressure is necessary. The candidates of high density plasma sources are electron cyclotron resonance plasma, helicon wave plasma, helical resonator, and inductively coupled plasma. In this study, planar type magnetized inductively coupled plasma etcher has been built. The density and temperature of Ar plasma are measured as a function of rf power, flow rate, external magnetic field, and pressure. The oxide etch rate and selectivity to polysilicon are measured as the above mentioned conditions and self-bias voltage.

• 센서학회지
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• 제17권6호
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• pp.425-428
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• 2008

This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the $100{\sim}40{\mu}m$ long cantilevers, the fundamental frequency appeared at $147.2kHz{\sim}856.3kHz$. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5.kHz and 1.14.MHz, respectively. Therefore, polycrystalline 3C-SiC resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• 한국ITS학회:학술대회논문집
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• 한국ITS학회 2004년도 제3회 정기총회 및 추계학술대회
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• pp.224-227
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• 2004

• 전자통신동향분석
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• 제34권5호
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• pp.91-98
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• 2019

Optical frequency comb generators have been investigated as a signal source capable of generating highly stabilized ultrafast pulse lasers. The precise control of the optical frequency comb spacing by RF clock signals has led to a revolutionary paradigm shift in the precise measurement of time and frequency. Optical frequency combs also have advantages such as stable frequency spacing, stable number of lines, and robustness. Owing to these characteristics, optical frequency combs have been applied to the fields of high precision optical clock, communication, spectroscopy, waveform generation, and astronomy. In this article, we introduce the properties (i.e., generation methods, advantages, and so on) of various optical frequency combs, and discuss the expected future technological trends and applications.

• 대한기계학회논문집A
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• 제33권9호
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• pp.878-885
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• 2009

One of important factors in designing MEMS resonators for RF filters is obtaining a desired frequency response function (FRF) within a specific frequency range of interest. Because various array-type MEMS resonators have been recently introduced to improve the filter characteristics such as bandwidth, pass-band, and shape factor, the degrees of freedom (DOF) of finite elements for their FRF calculation dramatically increases and therefore raises computational difficulties. In this paper the Krylov subspace-based model order reduction using moment-matching with non-zero expansion points is represented as a numerical solution to perform the frequency response analyses of those array-type MEMS resonators in an efficient way. By matching moments at a frequency around the specific operation range of the array-type resonators, the required FRF can be efficiently calculated regardless of their operating frequency from significantly reduced systems. In addition, because of the characteristics of the moment-matching method, a minimal order of reduced system with a prearranged accuracy can be determined through an error indicator using successive reduced models, which is very useful to automate the order reduction process and FRF calculation for structural optimization iterations. We also found out that the presented method could obtain the FRF of a $6\times6$ array-type resonator within a seventieth of the computational time necessary for the direct method and in addition FRF calculation by the mode superposition method could not even be completed because of a data overflow with a half after calculation of 9,722 eigenmodes.

• 한국통신학회논문지
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• 제37권8C호
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• pp.637-644
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• 2012

본 논문에서는 새로운 소형 전력 분배기를 제안한다. 기존의 Wilkinson 전력 분배기에서 ${\lambda}/4$ 길이의 분기선로 대신 ${\lambda}/12$ 길이의 CRLH 전송선 0차 공진 대역통과 여파기를 사용하여 전체구조의 물리적 크기를 줄였다. 분기 선로의 위상을 만족하면서 원하는 주파수를 중심으로 대역을 형성하고 전력 분배가 이뤄지는 기능을 가진다. 설계방법의 타당성 확인을 위해 군위성 통신 시스템의 L-대역을 적용예로 선택하여 등가 모델과 3차원 모의실험의 성능과 함께 분산도와 ZOR 전계분포로써 CRLH의 특성이 제시된다. 모의실험 결과는 측정결과와 비교하였으며 제안기법의 소형화 효과가 논의된다.

• 한국초전도학회:학술대회논문집
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• 한국초전도학회 2000년도 High Temperature Superconductivity Vol.X
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• pp.201-206
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• 2000

Effects of the post-annealing temperature of CeO$_2$ buffer layers on the properties of YBCO films on CeO$_2$-buffered sapphire were investigated. 45 nm-thick CeO$_2$ buffer layer was prepared in-situ on r-cut sapphire using an on-axis rf magnetron sputtering method, which was later post-annealed at temperatures between 950$^{\circ}$C and 1100$^{\circ}$C in an oxygen-flowing environment. YBCO films were prepared on CeO$_2$-buffered sapphire (CbS), for which the surface morphology, crystal structures and electrical properties of the YBCO films were studied. YBCO films on post-annealed CbS appeared to have better properties than those on as-grown CbS with regard to the morphological, structural and electrical properties when the YBCO films were prepared on CeO$_2$ buffer layer post-annealed at temperatures of 1000 - 1050$^{\circ}$C. A TE$_{011}$ mode rutileloaded cylindrical cavity resonators was fabricated with the YBCO films placed as the endplates, for which the unloaded Q of the resonator was measured. It turned out that the resonator with the endplates prepared from the YBCO films on postannealed CbS at 1000 $^{\circ}$C showed the highest unloaded Q with the value more than 8 ${\times}$ 10$^5$ at 30 K and 8.6 CHz, revealing that the YBCO films on post-annealed CbS at 1000$^{\circ}$C the temperature could be the lowest among the YBCO films on post-annealed CbS.