• 대한기계학회:학술대회논문집
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• 대한기계학회 2005년도 창립60주년 기념 추계 학술대회
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• pp.131.1-131.1
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• 2005

• JSTS:Journal of Semiconductor Technology and Science
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• 제7권3호
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• pp.166-176
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• 2007

Radio frequency (RF) microelectromechanical systems (MEMS) have been pursued for more than a decade as a solution of high-performance on-chip fixed, tunable and reconfigurable circuits. This paper reviews our research work on RF MEMS switches and switching circuits in the past five years. The research work first concentrates on the development of lateral DC-contact switches and capacitive shunt switches. Low insertion loss, high isolation and wide frequency band have been achieved for the two types of switches; then the switches have been integrated with transmission lines to achieve different switching circuits, such as single-pole-multi-throw (SPMT) switching circuits, tunable band-pass filter, tunable band-stop filter and reconfigurable filter circuits. Substrate transfer process and surface planarization process are used to fabricate the above mentioned devices and circuits. The advantages of these two fabrication processes provide great flexibility in developing different types of RF MEMS switches and circuits. The ultimate target is to produce more powerful and sophisticated wireless appliances operating in handsets, base stations, and satellites with low power consumption and cost.

• 한국정보통신설비학회:학술대회논문집
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• 한국정보통신설비학회 2004년도 하계학술대회
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• pp.11-14
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• 2004

In this paper, a novel tunable bandpass filter using tunable series inductors and MEMS switches for wireless LAN applications was proposed. The proposed tunable filter was fabricated using a micromachining technology and performances of the fabricated filter were estimated. The filter consists of spiral inductors, MIM capacitors and direct-contact type MEMS switches, and its frequency tunability is achieved by changing the inductance that is induced by ON/OFF actuations of the MEMS switches. The actuation voltage of the MEMS switches was 58 V, and the measured center frequencies were 2.55 GHz and 5.1 GHz, respectively. The passband insertion loss and 3-dB bandwidth were 4.2 dB and 22.5 % at 2.55 GHz, and 5.2 dB and 23.5 % at 5.1 GHz, respectively.

• ETRI Journal
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• 제38권5호
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• pp.988-995
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• 2016

In this paper, we present a new specific and customized interface tool with parameter identification of Modified Butterworth-Van Dyke models for ladder bulk acoustic wave filters. The aforementioned tool is easy to use and flexible because it allows simulations and reengineering to be conducted in an application. A modular design approach is applied to simplify the extension of the proposed tool for different topologies. The proposed tool was validated using measurements from an aluminum-nitride based ladder BAW filter dedicated to the frequency ranges of the Universal Mobile Telecommunications Service and standards and Wideband Code Division Multiple Access.

• 한국멀티미디어학회논문지
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• 제22권9호
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• pp.1011-1019
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• 2019

In this paper, we propose a system that can more precisely identify and monitor the position of the tool used in the assembling workplace such as automobile production. The proposed positioning monitoring system is a combination of UWB communication module and MEMS IMU sensor. Since UWB does not need modulation and demodulation function and has low power density, UWB is widely used in indoor positioning field. However, it may cause positioning error due to errors in RF transmission and reception process, which may cause positioning accuracy. Therefore, in this paper, we propose an algorithm that uses IMU as an auxiliary means to compensate for errors that may occur in positioning using only UWB. The tag and anchor of UWB module measure the transmission / reception time by transmitting signals to each other and then estimate the distance between tag and anchor. The MEMS IMU sensor serves to provide positioning calibration information. The tag, which is a mobile node and attached to a moving tool, measures the three-dimensional position of the tool and transfers the coordinate data to the anchor. Thus, it is possible to confirm whether or not the specific tool is properly used according to the prescribed regulations.

• 한국전자파학회논문지
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• 제14권12호
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• pp.1292-1299
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• 2003

본 논문에서는 MEMS(Micro Electro Mechanical System) 기술을 이용하여 Microstrip 구조의 저 손실 전송라인을 제작하고, 제작되어진 전송라인을 이용하여 Ka-band 대역의 저역통과 여파기(Low Pass Filter)를 제작하였다. 저 손실 전송라인의 제작은 surface micromachining 공정기법을 사용하고 저 손실 및 넓은 범위의 특성 임피던스 값을 얻기 위하여 신호선을 유전체 지지대를 이용하여 공기 중으로 위치시켜 substrate에 의한 손실을 최소화시켰다. 제작된 전송선로를 이용하여 LPF에 적용하면 유전체 손실의 최소화로 인한 insertion loss를 줄일 수 있는 장점이 있다는 것을 확인하였다. 또한 LPF를 다른 능동소자와 함께 구현하기 위하여서는 소형화가 필수적인데 LPF의 소형화를 위하여 접지면 부분에 slot을 형성하여 제작하였으며 제작된 결과를 그렇지 않은 경우와 서로 비교 분석하였다.

• 한국ITS학회 논문지
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• 제3권2호
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• pp.85-93
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• 2004

In this paper, microstrip stepped-impedance hairpin resonator (SIR) lowpass filter f.PF) by surface rnicromachining on GaAs substrate is sugsested. This filter has the advantages of compact side, easy fabrication, and sharp cutoff frequency response. The new SIR LPF shows the 3 dB passband of dc to 33 GHz, the insertion loss of 0.82 dB, and the return loss of better than 17 dB up to 25.57 GHz. This filter is useful for many microwave system applications.

• 대한기계학회논문집A
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• 제33권9호
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• pp.878-885
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• 2009

One of important factors in designing MEMS resonators for RF filters is obtaining a desired frequency response function (FRF) within a specific frequency range of interest. Because various array-type MEMS resonators have been recently introduced to improve the filter characteristics such as bandwidth, pass-band, and shape factor, the degrees of freedom (DOF) of finite elements for their FRF calculation dramatically increases and therefore raises computational difficulties. In this paper the Krylov subspace-based model order reduction using moment-matching with non-zero expansion points is represented as a numerical solution to perform the frequency response analyses of those array-type MEMS resonators in an efficient way. By matching moments at a frequency around the specific operation range of the array-type resonators, the required FRF can be efficiently calculated regardless of their operating frequency from significantly reduced systems. In addition, because of the characteristics of the moment-matching method, a minimal order of reduced system with a prearranged accuracy can be determined through an error indicator using successive reduced models, which is very useful to automate the order reduction process and FRF calculation for structural optimization iterations. We also found out that the presented method could obtain the FRF of a $6\times6$ array-type resonator within a seventieth of the computational time necessary for the direct method and in addition FRF calculation by the mode superposition method could not even be completed because of a data overflow with a half after calculation of 9,722 eigenmodes.

• 한국전자파학회논문지
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• 제19권1호
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• pp.61-70
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• 2008

본 논문에서는 멤스 기술의 하나인 연성 인쇄 회로 기판을 이용하여 임의의 형태로 변형이 가능한 초고주파 멤스 송신기를 제안하였다. 연성 인쇄 회로 기판은 그 무게가 가볍고 두께가 얇아 경량 소형화 모듈을 만드는데 유리한 장점이 있다. 또한, 연성 인쇄 회로 기판은 종이와 같이 유연한 특성을 가지고 있어 평면이 아닌 임의의 곡면 등에 실장할 수 있는 장정을 가지고 있다. 본 논문에서는 근거리 센서 네트워크 구성을 위한 직교 주파수 분할 다중 전송 방식을 위한 선형 무선 송신기를 설계 제작하였다. 송신 모듈의 능동 회로는 전력효율이 높고 선형성이 우수하여 전력 증폭기에 많이 사용되고 있는 InGaP/GaAs HBT 공정을 사용하여 설계 및 제작하였으며, 매칭 회로 및 필터 등의 수동 회로는 연성 인쇄 회로 기판에 직접 집적화 하여 제작하였다. 제작된 멤스 송신기는 EVM 특성을 통하여 시스템 성능을 분석하였다.

• 한국ITS학회 논문지
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• 제8권6호
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• pp.64-72
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• 2009

본 논문에서는 마이크로스트립 패치 안테나와 2차 및 3차 고조파가 억압된 이중모드 대역통과 여파기를 이용하여 고효율의 2.45 GHz 렉테나를 설계 및 제작하였다. 입사전력밀도가 0.3 mW/cm2 일 때 1.66 mW 의 전력을 수신하였고, 41.6%의 RF-to-DC 변환효율의 실험 결과를 얻었다. 이는 입사 전력이 작기 때문에 다른 논문의 결과와 비교하여 고효율이라고 볼 수 있다. 또한 무선전력 전송을 통하여 다양한 응용기술 개발에 활용이 가능할 것으로 예측되며, USN(Ubiquitous Sensor Network)용 저전력 소자의 대기전원 공급 및 MEMS용 Sensor 등의 구동전압공급을 위한 무선 전력전송이 가능하게 될 것으로 기대된다.