• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.06a
• /
• pp.78-79
• /
• 2008

In this paper, poly 3C-SiC thin films were grown on $SiO_2$/Si by atmospheric pressure chemical vapor deposition (APCVD) using HMDS, $H_2$, and Ar gas at $1100^{\circ}C$ for 30 min, respectively. And then, palladium films were deposited on poly 3C-SiC by RF magnetron sputter. Thickness, uniformity, and quality of these samples were performed by SEM. Crystallinity and preferred orientationsof palladium were analyzed by XRD. And Pd/poly 3C-SiC schottky diodes were fabricated and characterized by current-voltage measurements. Its electric current density Js and barrier height voltage were measured as $2\times10^{-3}$ A/$cm^2$, 0.58 eV, respectively. And these devices operated about $350^{\circ}C$. From results, Pd/poly 3C-SiC devices are promising for high temperature hydrogen sensor and applications.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.16 no.8
• /
• pp.705-710
• /
• 2003

MoO$_3$thin films were deposited on electrode of alumina substrates in $O_2$atmosphere by RF reactive sputtering using molybdenum metal target. The deposition was performed at 30$0^{\circ}C$ with 350 W of a forward power in an Ar-O$_2$atmosphere. The working pressure was maintained at 3$\times$10$^{-2}$ torr and all deposited films were annealed at 50$0^{\circ}C$ for 5 hours. The surface morphology of films was observed by using a SEM and crystalline phases were analyzed by using a XRD. To investigate gas sensing characteristics of the doped MoO$_3$thin film, Co, Ni and Pt were used as dopants. The sensing properties were investigated in term of gas concentration under exposure of reducing gases such as H$_2$, NH$_3$and CO at optimum working temperature. Co-doped MoO3 thin film shows the maximum 46.8 % of sensitivity in NH$_3$ and Ni-doped MoO$_3$thin film exhibits 49.7 % of sensitivity in H$_2$.

• Journal of Institute of Control, Robotics and Systems
• /
• v.18 no.8
• /
• pp.713-718
• /
• 2012

Lumber spine range of motion has been used to measure of physical and functional impairment by various tools from a ruler to 3D kinematic devices. However, pre-existing tools have problems in either movement or accuracy and reliability limitations. Accurate devices are limited by fixed space whereas simple devices are limited in measuring complex movements with less accuracy. In order to solve the location, movement and accuracy limitations at once, we have developed a novice measurement device equipped with accelerometer sensor and gyroscope sensor for getting three-dimensional information of motion. Furthermore, Kalman filter was applied to the algorithm to improve accuracy. In addition, RF wireless communication was added for the user to conveniently check measured data in real time. Finally, the measurement method was improved by considering the movement by a reference point. An experiment was conducted to test the accuracy and reliability of the device by conducting a test-retest reliability test. Further modification will be conducted to used the device in various joints range of motion in clinical settings in the future.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
• /
• v.2
• /
• pp.541-546
• /
• 2006

Zigbee를 이용한 실내 위치 측정 기법에서는 수신신호세기(RSSI) 측정치를 거리측정치로 활용하여 삼각측량법이나 DB 검색법을 이용하여 위치를 구한다. RSSI 측정치는 Zigbee 통신에서 기본적으로 제공하는 값으로 하드웨어 추가 없이 거리 측정에 사용할 수 있지만 정확도가 떨어진다. 이를 해결하기 위해 초음파 센서를 장착하고 RF와 초음파의 속도차이를 이용하여 정확한 거리를 측정할 수 있다. 이렇게 구해진 거리를 이용하면 정확한 위치를 구할 수 있다. 이를 구현하는 방법으로 본 논문에서는 고정된 위치의 비컨들이 순차적으로 신호를 전송하여 노드의 위치를 구하는 경우 발생하는 비컨의 전송 스케줄, 추가 및 동기 유지의 어려움을 해결할 수 있도록 노드에서 신호를 전송하고 비컨에서 구한 거리를 다시 노드로 Zigbee 통신을 이용하여 전달하여 위치를 구하는 기법을 제시하였다. 추가로 본 논문에서는 비컨 수의 제약으로 위치를 구할 수 없는 경우에 초음파 측정치에 추가하여 RSSI 측정치를 동시에 이용하는 위치측정기법을 제시하고, 실제 정적, 동적 실험을 통하여 그 유용성을 보였다. 3개 이상의 초음파 신호가 수신되는 경우 cm 급의 정확도로 위치를 10Hz 이상으로 구할 수 있었으며, 2개 이하의 초음파 신호가 수신되는 경우에도 RSSI 측정치가 있으면 수십 cm 급의 정확도로 위치를 구할 수 있음을 확인하였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.21 no.5
• /
• pp.481-485
• /
• 2008

In stator windings of 6.6 kV rotating machine, corona discharge, surface discharge and internal discharge are caused mainly by internal voids and insulation degradation. Also, if partial discharge occurs in inner-part of stator windings, it will be happened electromagnetic pulses at wide frequency range. In case of discharge spark, electromagnetic pulse generated from discharge source, and we can detect it by using various RF resonators as an EM sensor. In order to detect these kind of electromagnetic sources, we have designed and fabricated planar patch sensor using CST MWS simulation, and also PD signals from artificial defected cable were measured by our proposed sensor. Furthermore, HFCT was used as a reference sensor and compared with our proposed new planar patch sensor.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.56 no.8
• /
• pp.1430-1435
• /
• 2007

We developed a 440MHz surface acoustic wave (SAW) microsensor integrated with pressure-temperature sensors and ID tag. Two piezoelectric substrates were bonded, in which ${\sim}150\;{\mu}m$ cavity was structured. Four sides were completely sealed by JSR photoresist (PR). Pressure sensor was placed on the top substrate, whereas ill tag and temperature sensor were placed on the bottom substrate. Using network analyzer, the developed microsensor was wirelessly tested. Sharp reflection peaks with high S/N ratio, small signal attenuation, and small spurious peaks were observed. All the reflection peaks were well matched with the coupling of mode (COM) simulation results. With a 10mW RF power from the network analyzer, a ${\sim}1$ meter readout distance was observed. Eight sharp ON reflection peaks were observed for ID tag. Temperature sensor was characterized from $20^{\circ}C$ to $200^{\circ}C$. A large phase shift per unit temperature change was observed. The evaluated sensitivity was ${\sim}10^{\circ}/^{\circ}C$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2007.11a
• /
• pp.175-176
• /
• 2007

This paper describes on the characteristics of Pd thin films deposited on poly-crystalline 3C-SiC buffer layers for microsensors, in which the poly 3C-SiC was grown on Si, $SiO_2$, and AlN substrates, respectively, by APCVD using HMDS, $H_2$, and Ar gas at $1100^{\circ}C$ for 30 min. In this work, a Pd thin film was deposited on the poly 3C-SiC film by RF magnetron sputter. The thickness, uniformity, and quality of these samples were evaluated by SEM. Crystallinity and orientation of the Pd film were analyzed by XRD. Finally, Pd/poly 3C-SiC schottky diodes were fabricated and characterized by current-voltage measurements. From these results, Pd/poly 3C-SiC devices are promising for high temperature hydrogen sensors and other microsensors.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.08a
• /
• pp.223.2-223.2
• /
• 2013

비정질 실리콘은 태양전지, 트랜지스터, 이미지 센서 등 다양한 분야에서 응용되고 있으며 새로운 박막 소자 개발을 위한 소재로서 많은 연구가 진행되고 있다. 하지만 소자개발에 있어 공정상에서 발생하는 비정질 실리콘 박막의 높은 응력(stress)은 소자의 특성을 떨어뜨리는 문제점을 갖는다. 따라서 우수한 특성의 소자 개발을 위해서는 보다 낮은 응력을 갖는 비정질 실리콘 박막 증착 및 공정 조건에 따른 응력 조절이 필요하다. 저응력의 비정질 실리콘 박막 증착은 보다 낮은 반응온도에서 증착속도를 최소로 하여 성장되어야 하는데 이는 플라즈마기상증착(Plasma enhanced chemical vapor deposition, PECVD) 시스템에 의해 가능하다. 따라서 본 연구에서는 PECVD 시스템을 사용하여 비정질 실리콘 박막을 증착하였고 그 특성을 분석하였다. 이 때 증착 온도, rf 파워, 공정 압력은 실험결과로부터 얻어진 낮은 박막 증착속도 하에서 안정적으로 증착이 가능한 조건으로 일정하게 유지하여 실험하였다. 공정 가스는 SiH4/He/N2의 혼합가스를 사용하였고 응력 조절을 위해 SiH4/He 가스비를 일정한 비율로 변화하여 비정질 실리콘 박막을 증착하였다. 증착된 박막의 두께 및 표면 특성은 field emission scanning electron microscopy 및 atomic force microscopy를 이용하여 분석하였고, energy dispersive X-ray 분석을 통하여 정량 및 정성적 분석을 수행하였다. 그리고 stress measurement system을 이용하여 박막의 응력을 측정하였고 X-ray diffraction 측정 및 ellipsometry 측정으로부터 증착된 박막의 결정성, 굴절률 및 oiptical bandgap을 분석하였다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.08a
• /
• pp.234-234
• /
• 2013

VOx 박막은 마이크로볼로미터 적외선 센서의 감지재료로 주로 사용된다. 일반적으로 VOx 박막은 RF sputtering 방법으로 증착이 되며, 이 때 저항 값은 수 kohm~수 Mohm, TCR 값은 -1.5~-2.0%/K까지 다양하게 변화되어 나타난다. 이는 산소의 phase가 여러가지로 변화되기 때문에 재현성이 떨어지는 단점이 있으며, 결정성있는 박막을 증착하기 어려운 문제들이 있다. 본 연구에서는 VOx 박막의 재현성 및 재료의 안정성을 위해 ZnO 물질을 첨가하여 sandwich 구조의 나노박막을 증착하여 산소 열처리를 통해 산소의 phase가 어떻게 변화되는가를 XRD 측정을 통해 조사하였다. ZnO 나노박막을 첨가함으로써 갓 증착되었을 때의 XRD는 V2O5 주된 상을 이루고 있었으며, 산소열처리에 의해 VO2상이 나타남을 알 수 있었다. 또한 V2O5 phase가 표면쪽의 얇은 층에서 주로 나타나고, 중간층은 V2O5와 VO2 phase 가 혼합된 형태로 존재함을 X-ray diffraction 분석을 통해 알 수 있었다. 또한 GIXRD 측정을 통해 깊이에 따른 혼합 phase가 주로 VO2에 의해 형성된 것임을 확인할 수 있었다. 또한 산소열처리의 온도 및 시간에 따라 XRD 특성을 조사하였으며, 최적의 열처리 조건을 XRD 피크를 통해 찾고자 하였다.

• Journal of Korea Multimedia Society
• /
• v.22 no.9
• /
• pp.1011-1019
• /
• 2019

In this paper, we propose a system that can more precisely identify and monitor the position of the tool used in the assembling workplace such as automobile production. The proposed positioning monitoring system is a combination of UWB communication module and MEMS IMU sensor. Since UWB does not need modulation and demodulation function and has low power density, UWB is widely used in indoor positioning field. However, it may cause positioning error due to errors in RF transmission and reception process, which may cause positioning accuracy. Therefore, in this paper, we propose an algorithm that uses IMU as an auxiliary means to compensate for errors that may occur in positioning using only UWB. The tag and anchor of UWB module measure the transmission / reception time by transmitting signals to each other and then estimate the distance between tag and anchor. The MEMS IMU sensor serves to provide positioning calibration information. The tag, which is a mobile node and attached to a moving tool, measures the three-dimensional position of the tool and transfers the coordinate data to the anchor. Thus, it is possible to confirm whether or not the specific tool is properly used according to the prescribed regulations.