• Journal of the Microelectronics and Packaging Society
• /
• v.25 no.4
• /
• pp.53-58
• /
• 2018

Since the scaling-down of IC devices has been reached to their physical limitations, several innovative packaging technologies such as 3D packaging, embedded packaging, and fan-out wafer level packaging (FOWLP) are actively studied. In this study the fabrication of organic-inorganic dielectric material was evaluated for the use of multi-structured redistribution layers (RDL) in FOWLP. Compared to current organic dielectrics such as PI or PBO an organic-inorganic hybrid dielectric called polysilsesquioxane (PSSQ) can improve mechanical, thermal, and electrical stabilities. polysilsesquioxane has also an excellent advantage of simultaneous curing and patterning through UV exposure. The polysilsesquioxane samples were fabricated by spin-coating on 6-inch Si wafer followed by pre-baking and UV exposure. With the 10 minutes of UV exposure polysilsesquioxane was fully cured and showed $2{\mu}m$ line-pattern formation. And the dielectric constant of cured polysilsesquioxane dielectrics was ranged from 2.0 to 2.4. It has been demonstrated that polysilsesquioxane dielectric can be patterned and cured by UV exposure alone without a high temperature curing process.

• Journal of the Microelectronics and Packaging Society
• /
• v.30 no.2
• /
• pp.52-59
• /
• 2023

The effects of dielectric curing temperature and temperature/humidity treatment conditions on the interfacial adhesion energies between Ti diffusion barrier/polybenzoxazole (PBO) dielectric layers were systematically investigated for Cu redistribution layer applications of fan-out wafer level package. The initial interfacial adhesion energies were 16.63, 25.95, 16.58 J/m² for PBO curing temperatures at 175, 200, and 225 ℃, respectively. X-ray photoelectron spectroscopy analysis showed that there exists a good correlation between the interfacial adhesion energy and the C-O peak area fractions at PBO delaminated surfaces. And the interfacial adhesion energies of samples cured at 200 ℃ decreased to 3.99 J/m² after 500 h at 85 ℃/85 % relative humidity, possibly due to the weak boundary layer formation inside PBO near Ti/PBO interface.

• Journal of radiological science and technology
• /
• v.38 no.2
• /
• pp.163-170
• /
• 2015

The interest of the people in the radioactive contamination of the water has increased significantly and the study about analysis and management of radioactive materials are being actively conducted. And monitoring spots have been expanded to the range of public water as well as drinking water by publishing the rule of drinking water quality standards and examination in the Environmental Enforcement Ordinance No. 553 of Korea. In this study, US EPA was investigated as the foreign advanced cases and the way that is appropriate for the Korea was sought by analyzing investigate radionuclide, interval and management. As a result, in the selection part of investigate radionuclide, geological survey, status of nuclear power plants and the presence of the use of artificial radionuclides of the Korea should be investigated and additionally after the selection of a few radionuclides, the systems should be extended to cover all possible radionuclides by considering radioactive pollution levels in humans may be exposed due to the annual drinking water. In the part of the investigate interval, the concept(MCL, DL) should be set up for preventing concentration detection of above MCL and it needs to the maintenance and management. For example, when the concentration is more than MCL, it should be investigated on a quarterly and when the concentration is lower than MCL, it should be investigated to each different interval and management. And the US EPA divided the management area and make the roadmap for managing drinking water. The each classified area has been organized to match the state budget and labor force and the individual data have been managed effectively by HPGe, the NaI, TLD and so on.