• Journal of the Korean Society for Precision Engineering
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• v.18 no.11
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• pp.51-57
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• 2001

A light beam reflected from a machined surface generally containes information concerning about its surface roughness. This study examines and proposes a surface roughness measurement technique for on-machine measurement of machined surfaces. The technique is based on the measurement of a reflected laser beam pattern and the statistical analysis of its light intensity distribution. The surface roughness was found to be closely related to the standard deviation of the light intensity on the primary axis of the reflected pattern. An image acquisition device is made up of a laser diode, a half mirror, a screen, and a CCD camera. The exact image with the primary and secondary axes of a reflected laser beam pattern is calculated through such image processing algorithm as thresholding, edge detection, image rotation, segmentation, etc. A median filter and a surrounding light correction algorithm are improve the image quality and reduce the measuring error. Using the developed measuring device the effect of screen materials and workpiece and workpiece materials was investigated. Experimental results regarding to relatively high-quality surfaces machined by grinding, polishing, lapping processes have shown the measurement error is within 10% in the range of $0.1{mu}m~0.8{\mu}m R_q.$Therefore, the proposed method is thought to be effectively used when quick measurements is needed with workpieces fixed on the machine.

• Wind and Structures
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• v.31 no.4
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• pp.363-371
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• 2020

Proper understanding of offshore wind speed variability is of essential importance in practice, which provides useful information to a wide range of coastal and marine activities. In this paper, long-term wind speed data recorded at various offshore stations are analyzed in the framework of fractal dimension analysis. Fractal analysis is a well-established data analysis tool, which is particularly suitable to determine the complexity in time series from a quantitative point of view. The fractal dimension is estimated using the conventional box-counting method. The results suggest that the wind speed data are generally fractals, which are likely to exhibit a persistent nature. The mean fractal dimension varies from 1.31 at an offshore weather station to 1.43 at an urban station, which is mainly associated with surface roughness condition. Monthly variability of fractal dimension at offshore stations is well-defined, which often possess larger values during hotter months and lower values during winter. This is partly attributed to the effect of thermal instability. In addition, with an increase in measurement interval, the mean and minimum fractal dimension decrease, whereas the maximum and coefficient of variation increase in parallel.

• Journal of Astronomy and Space Sciences
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• v.18 no.3
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• pp.239-248
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• 2001

Far-ultraviolet IMaging Spectrograph (FIMS) is the main payload of the first Korean scientific satellite, KAISTSAT-4, which will be launched in 2002. Among the optical parts, parabolic cylinder mirror does not have any heritage from previous astronomical missions, so the manufacturing and testing process itself is a challenging issue. We describe the method of manufacturing and measuring of the off-axis parabolic cylinder mirror and our initial experiments to establish the entire manufacturing process. Using the method, the profile error can meet the specification of $lambda$ per cm which is closely related with the astronomical performances. In case of the surface roughness, temperature controlled pitch polishing reduces $R_{q}$ under 1 nm implying that scattering in the entire spectral range of FIMS is less than 2% of the incident UV light.

• Journal of the Microelectronics and Packaging Society
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• v.28 no.3
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• pp.9-15
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• 2021

Miniaturization of semiconductor devices has recently faced a physical limitation. To overcome this, 3D packaging in which semiconductor devices are vertically stacked has been actively developed. 3D packaging requires three unit processes of TSV, wafer grinding, and bonding, and among these, copper bonding is becoming very important for high performance and fine-pitch in 3D packaging. In this study, the effects of Ti nanolayer on the antioxidation of copper surface and low-temperature Cu bonding was investigated. The diffusion rate of Ti into Cu is faster than Cu into Ti in the temperature ranging from room temperature to 200℃, which shows that the titanium nanolayer can be effective for low-temperature copper bonding. The 12nm-thick titanium layer was uniformly deposited on the copper surface, and the surface roughness (R_q) was lowered from 4.1 nm to 3.2 nm. Cu bonding using Ti nanolayer was carried out at 200℃ for 1 hour, and then annealing at the same temperature and time. The average shear strength measured after bonding was 13.2 MPa.