• Journal of the Korean Society for Precision Engineering
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• v.28 no.1
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• pp.19-23
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• 2011

Recently, focused ion beam (FIB) applications have been investigated for the modification of VLSI circuit, the MEMS processing, and the localized ion doping, A multi aperture FIB system has been introduced as the demands of FIB applications for high speed and large area processing increase. A liquid metal ion source has problems, a large angular divergence and a metal contamination into a substrate. In this study, a gas ion source was introduced to replace a liquid metal ion source. The gas ion source generated inductively coupled plasma (ICP) in a quartz tube (diameter: 45 mm). Ar gas fed into the quartz was ionized by a 2 turned radio frequency antenna. The Ar ions were extracted by 2 extraction grids. The maximum extraction voltage was 10 kV. A numerical simulation was used to optimize the design of extraction grids and to predict an ion trajectory. As a result, the maximum ion current density was 38 $mA/cm^2$ and the spread of ion energy was 1.6 % for the extraction voltage.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.435-435
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• 2010

A inclined slot-excited plasma source is newly designed and constructed for higher flux HNB(Hyperthermal Neutral Beam) generation. The present source is different from the vertical SLAN(SLot ANtenna) sources [1] in two aspects. One is that the slots are inclined, and the other is that the magnetic field is configured to a cusp type. These modifications are intended to make the source plasma operated in sub-milli-torr pressure regime and as thin as possible, both of which is to get higher HNB flux by decreasing the re-ionization rate of the reflected atoms from the neutralizer [2]. The plasma is generated in a quartz tube of internal diameter 170 mm enclosed in a aluminum application chamber of larger diameter 250 mm. The microwave power is fed to the plasma chamber by 8 inclined slots cut into the application chamber wall. The slots are coupled the chamber to a WR280 waveguide wound around it to form a ring resonator. In order to make two slots $\lambda_g/2$ apart in phase, the adjacent slots are rotated in opposite directions. The rotation angle of the slots are set to $60^{\circ}$ from the chamber axis. Between the quartz chamber and the aluminum cylindrical chamber 8 NdFeB magnets are equally spaced and fixed to form the cusp magnetic field confinement and ECR (Electron Cyclotron Resonance) field. In this presentation, the magnetic and electromagnetic simulations, and the measured plasma parameters are given for both the inclined and the vertical slot-excited plasma sources. We also discuss how the sources can be tailored to suit better-performing HNB sources.

• Journal of the Korean Vacuum Society
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• v.17 no.6
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• pp.538-543
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• 2008

Recently a nano-scale diamond is possible to manufacture forms of powder(below 100 nm) by new processing of explosion or deposition method. Using a sintering of nano-scale diamond is possible to manufacture of grinding tools. We have need of a processing development of coated uniformly inorganic to prevent an abnormal grain growth of nano-crystal and bonding obstacle caused by sintering process. This paper, in order to improve the sintering property of nano-scale diamond, we coated ZnO thin films(thickness: $20{\sim}30\;nm$) in a vacuum by ALD(atomic layer deposition) Economically, in order to deposit ZnO all over the surface of nano-scale diamond powder, we used a new modified fluidized bed processing replaced mechanical vibration effect or fluidized bed reactor which utilized diamond floating owing to pressure of pulse(or purge) processing after inserted diamond powders in quartz tube(L: 20 mm) then closed quartz tube by porosity glass filter. We deposited ZnO thin films by ALD in closed both sides of quartz tube by porosity glass filter by ALD(precursor: DEZn($C_4H_{10}Zn$), reaction gas: $H_2O$) at $10^{\circ}C$(in canister). Processing procedure and injection time of reaction materials set up DEZn pulse-0.1 sec, DEZn purge-20 sec, $H_2O$ pulse-0.1 sec, $H_2O$ purge-40 sec and we put in operation repetitive 100 cycles(1 cycle is 4 steps) We confirmed microstructure of diamond powder and diamond powder doped ZnO thin film by TEM(transmission electron microscope) Through TEM analysis, we confirmed that diamond powder diameter was some $70{\sim}120\;nm$ and shape was tetragonal, hexagonal, etc before ALD. We confirmed that diameter of diamond powders doped ZnO thin film was some $70{\sim}120\;nm$ and uniform ZnO(thickness: $20{\sim}30\;nm$) thin film was successfully deposited on diamond powder surface according to brightness difference between diamond powder and ZnO.

• Korean Journal of Microbiology
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• v.37 no.2
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• pp.130-136
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• 2001

The killing effects of two types(one-phase reactor and two-phase reactor) of UV-TiO$_2$photocatalytic system on the microorganisms have been studied. The UV-lamp which emits maximum 39 watts at 254 nm was prepared in these system. Three types of $TiO_2$ coating method were adopted. One type is thin film coated form on the quartz tube in the reactor and another one is surface rough coated form on the glass bead. The other one is $TiO_2$-mixed alginate bead form. UV irradiation was carried out for 1 min. In case of one phase reactor, the bactericidal efficiencies of E. coli by $TiO_2$-coated quartz tube and $TiO_2$-coated glass bead were 63.2% and 89.9%, respectively. In the air-bubbling system, the bactericidal efficiency was 95%, however, the efficiency decreased to 90.6% in the non-bubbling system. In the $TiO_2$-mixed alginate bead system, bactericidal efficiency was 86%. When $H_2O$$_2$ was treated (10, 15, 20, and 25 mg/ι) to the $TiO_2$-coated glass bead reactor, bactericidal efficiency significantly increased according to the concentration of $H_2$$O_2$. Two phase reactor showed more elevated efficiency. E. coli was more sensitive to the reaction than S. cerevisiae.

• Journal of Environmental Health Sciences
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• v.38 no.3
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• pp.251-260
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• 2012

Objectives: The purpose of this study was evaluating the applicability of the circulation dielectric barrier plasma process (DBD) for efficiently treating non-biodegradable wastewater, such as phenol. Methods: The DBD plasma reactor system in this study consisted of a plasma reactor (discharge, ground electrode and quartz dielectric tube, external tube), high voltage source, air supply and reservoir. Effects of the operating parameters on the degradation of phenol and $UV_{254}$ absorbance such as first voltage (60-180 V), oxygen supply rate (0.5-3 l/min), liquid circulation rate (1.5-7 l/min), pH (3.02-11.06) and initial phenol concentration (12.5-100 mg/l) were investigated. Results: Experimental results showed that optimum first voltage, oxygen supply rate, and liquid circulation rate on phenol degradation were 160 V, 1 l/min, and 4.5 l/min, respectively. The removal efficiency of phenol increased with the increase in the initial pH of the phenol solution. To obtain a removal efficiency of phenol and COD of phenol of over 97% (initial phenol concentration, 50.0 mg/l), 15 min and 180 minutes was needed, respectively. Conclusions: It was considered that the absorbance of $UV_{254}$ for phenol degradation can be used as an indirect indicator of change in non-biodegradable organic compounds. Mineralization of the phenol solution may take a relatively longer time than that required for phenol degradation.

• Journal of Environmental Health Sciences
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• v.38 no.2
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• pp.159-165
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• 2012

Objectives: This experiment was carried out to elucidate the effect of discharged water on the disinfection of $Phytophthora$ $capsici$ and evaluate the water characteristics. Methods: The dielectric barrier discharges (DBD) plasma reactor system used in this study consisted of a plasma component [discharge, ground electrode and quartz dielectric tube], high voltage source, and air supply. The effects of water characteristics such as pH, ORP and conductivity and the disinfection effect of discharged water were investigated. Results: Experimental results showed that in the process of discharge, the pH decreased, whereas ORP and electric conductivity increased. When the discharge time was 30 min, $Phytophthora$ $capsici$ of 2.94 log was disinfected within 300 seconds. Disinfection performance of stored discharged water was maintained for three days; however the disinfection effect vanished after five days. When $Phytophthora$ $capsici$ was injected into the discharged water, the disinfection effect decreased after two days. Conclusions: It is considered that the main disinfection parameters of the discharged water were chemically active species such as $H_2O_2$ and $O_3$ and high ORP.

• Journal of Environmental Science International
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• v.23 no.5
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• pp.985-993
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• 2014

For the field application of dielectric barrier discharge plasma reactor, a multi-plasma reactor was investigated for the inactivation of microorganisms in sewage. We also considered the possibility of degradation of non-biodegradable matter ($UV_{254}$) and total organic carbon (TOC) in sewage. The multi-plasma reactor in this study was divided into high voltage neon transformers, gas supply unit and three plasma modules (consist of discharge, ground electrode and quartz dielectric tube). The experimental results showed that the inactivation of microorganisms with treated water type ranked in the following order: distilled water > synthetic sewage effluent >> real sewage effluent. The dissolved various components in the real sewage effluent highly influenced the performance of the inactivation of microorganisms. After continuous plasma treatment for 10 min at 180 V, residual microorganisms appeared below 2 log and $UV_{254}$ absorbance (showing a non-biodegradable substance in water) and TOC removal rate were 27.5% and 8.5%, respectively. Therefore, when the sewage effluent is treated with plasma, it can be expected the inactivation of microorganisms and additional improvement of water quality. It was observed that the $NH_4{^+}$-N and $PO{_4}^{3-}$-P concentrations of sewage was kept at the constant plasma discharging for 30 min. On the other hand, $NO_3{^-}$-N concentration was increased with proceeding of the plasma discharge.

• Journal of the Korean Applied Science and Technology
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• v.22 no.1
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• pp.35-42
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• 2005

Aligned multi-wall carbon nanotubes (MWNTs) were synthesized through the catalytic decomposition of hydrocarbons in a quartz tube reactor. In this study, we investigated the influence of gas flow rate of feedstock on the structure and growth rate of vertically aligned carbon nanotubes produced by the floating catalyst method. As the flow rate of feedstock increased, the nanotube diameter became smaller and the length became longer. Although the growth rate also increased with the raise of flow rate, the optimum flow rate of feedstock existed for the crystallinity of carbon nanotubes.

• Journal of the Korean Magnetics Society
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• v.21 no.3
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• pp.108-115
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• 2011

Principles in the synthesis of small-sized high-quality crystals for the experimental condensed matter physics will be discussed in this paper. Synthesis process and cautions will be introduced especially for the synthesis methods which can be easily accessible to researchers. Starting from the solid state reaction which is the most common synthesis method, I will explain the quartz tube sealing that is crucial for making polycrystalline materials as well as single crystals in various conditions. Finally, basics of single crystal growth and various techniques will be introduced on the whole for the researchers who are not familiar with the material synthesis.

• Bulletin of the Korean Chemical Society
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• v.35 no.6
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• pp.1687-1691
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• 2014

This study reports on the synthesis of carbon nanofibers via chemical vapor deposition using Co and Cu as catalysts. In order to investigate the suitability of their catalytic activity for the growth of nanofibers, we prepared catalysts for the synthesis of carbon nanofibers with Cobalt nitrate and Copper nitrate, and found the optimum concentration of each respective catalyst. Then we made them react with Aluminum nitrate and Ammonium Molybdate to form precipitates. The precipitates were dried at a temperature of $110^{\circ}C$ in order to be prepared into catalyst powder. The catalyst was sparsely and thinly spread on a quartz tube boat to grow carbon nanofibers via thermal chemical vapor deposition. The characteristics of the synthesized carbon nanofibers were analyzed through SEM, EDS, XRD, Raman, XPS, and TG/DTA, and the specific surface area was measured via BET. Consequently, the characteristics of the synthesized carbon nanofibers were greatly influenced by the concentration ratio of metal catalysts. In particular, uniform carbon nanofibers of 27 nm in diameter grew when the concentration ratio of Co and Cu was 6:4 at $700^{\circ}C$ of calcination temperature; carbon nanofibers synthesized under such conditions showed the best crystallizability, compared to carbon nanofibers synthesized with metal catalysts under different concentration ratios, and revealed 1.26 high amorphicity as well as $292m^2g^{-1}$ high specific surface area.