• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.671-672
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• 2006

We have investigated the behavior of the ultrafast laser ablation of chromium films (200nm) on the silicon and pyrex-glass(corning 7740) substrate with respect to the laser fluence and the number of laser pulses. In addition, several experiments about ITO thin film were carried out with femto-second Ti:Sapphire laser (150fs). Finally, we introduce the ablation characteristic in accordance with materials of thin film and substrate.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.333-336
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• 2002

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation was studied with numberical method by ABAQUS S/W. Polymer (PMMA) and brittle materials (Si, Pyrex glass) were used as specimens, and forming conditions to reduce the elastic restoration and bur was proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1-l0nm. The result of the investigation will be applied to the fabrication of the hyper-fine pattern and mold.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.20 no.10
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• pp.94-99
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• 2006

Ozone concentration and flow rate of discharge tube were measured using LabVIEW program in data acquisition part and it was saved. In addition, quantities of ozone generation was adjusted by the collected data, which was performed at control part. Therefore, energy efficiency was improved by suppling quantities of ozone generation according to environmental conditions.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.05b
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• pp.150-154
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• 2005

본 논문에서는 LabVIEW program을 사용하여 크기가 다른 파이렉스 글라스 방전관의 오존 농도를 연속적으로 측정하여 특성을 분석하였다. 또한 Flux-2D program을 사용하여 파이렉스 방전관의 전계를 분석하였다. 실험 결과에 따르면 1[$\ell$/min]에서 가장 오존 농도가 높았으며, 파이렉스 글라스 방전관 I 에서는 약 62[g/$m^3$]. 파이렉스 글라스 방전관II 에서는 약 48[g/$m^3$]으로 나타났다. 또한 고압 펄스 전원에 따른 오존농도 변화를 3D분석을 통해 확인 할 수 있었다. 확인된 분석을 통해 오존농도를 요구하는 만큼 생성한다면, 에너지 손실을 감소시키고 전극 수병을 최대화 할 수 있다.

• Transactions of Materials Processing
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• v.12 no.4
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• pp.382-387
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• 2003

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behaviors of the materials during indentation were studied with numerical method by ABAQUS S/W. Brittle materials (Si, Pyrex glass 7740) were used as specimens, and forming conditions to reduce the elastic recovery and pile-up were proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1-10nm. Comparisons between the experimental data and numerical result demonstrated that the finite element approach is capable of reproducing the loading-unloading behavior of a nanoindentation test.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.5 no.3
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• pp.11-16
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• 2006

A new method to fabricate metal electrodes on side wall of the microchannel is presented. Electrical signal can be measured by the metal electrodes on channel side wall when microparticles pass through a polymer microchannel. 3 dimensional metal electrodes on channel side wall could be fabricated by local deposition of metal through a shadowmask and inclined evaporation. The polymer microchannel with side wall electrodes could be precisely aligned onto metal contact patterns on pyrex glass. The impedance measurement test showed possibility of electrical signal measurement using the fabricated device.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2002.11a
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• pp.15-19
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• 2002

기존 형상의 미세 가열기를 이용한 마이크로 시스템 패키징의 문제점을 해결하기 위해 새로운 형상의 미세 가열기를 제작하여 패키징 실험을 실시하였다. 기존 형상의 미세 가열기와 새로운 미세 가열기의 형상을 각각 제작하여 접합시에 미세 가열기에 발생하는 열분포를 IR 카메라를 이용하여 실험하였다. 기존 형상의 미세 가열기가 불균일하게 가열되는 반면, 새로운 형상의 미세 가열기는 매우 균일하게 가열되는 형상을 나타내었다. IR 카메라 실험을 바탕으로 접합 실험을 실시하였다. 접합 실험시 사용한 미세 가열기는 폭 50$\mu\textrm{m}$, 두께 2$\mu\textrm{m}$로 제작하였으며, 0.2 Mpa의 압력을 Pyrex glass cap에 가한 상태에서 150 mA의 전류를 공급함으로서 접합을 완료하였다. 접합이 완료된 시편들에 대해서 IPA를 통한 leakage 실험을 실시하였으며, 기존 형상의 미세 가열기를 이용한 시편들은 66%가 테스트를 통과한 반면 새로운 형상의 미세 가열기를 이용한 시편들은 85% 이상이 테스트를 통과하였다. Leakage 실험을 통과한 각각의 시편들에 대해서 접합력 측정을 실시한 결과, 기존 형상의 미세 가열기를 이용한 시편들은 15~21 Mpa의 접합력을 나타내었고, 새로운 형상의 미세 가열기를 이용한 시편들은 25~30 Mpa의 우수한 접합력을 나타내었다.

• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.2392-2394
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• 2005

This paper presents a tuneable bandstop resonator with two possible configurations, it can be used to tune its center frequency, or it can be used to tune its bandwidth. The tuneable bandstop resonator has potential application in microwave communications receivers, where it can be used to tune out interfering signals. The proposed resonator is comb actuated, where the resonator's displacement produces different values of frequency or bandwidth, this is achieved by decoupling electromagnetic energy from a main transmission line. The proposed fabrication process for the resonator is by anodic bonding pyrex glass and tow resistivity silicon, where the comb resonator structure is patterned by deep reactive ion etching (DRIE). This paper presents the resonator and actuator design in both configurations, as well as the fabrication process intended for its development.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.05a
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• pp.225-228
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• 2005

The purpose of this study is to investigate effects of the plastic/elastic deformation energy on wet etching characterization on the surface of material by using the nanoindentation and HF wet etching technique. Indents were made on the surface of Pyrex 7740 glass by the hyperfine indentation process with a Berkovich diamond indenter, and they were etched in $50\;wt\%$ HF solution. After etching process, convex structure was obtained due to the deformation-induced hillock phenomena. In this study, effects of indentation process parameters (normal load, loading rate) on the morphologies of the indented surfaces after isotopic etching were investigated from an angle of deformation energies.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.05a
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• pp.229-232
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• 2005

This paper presents the design and fabrication of backflow prevented Micropump using the metal membrane. The Micropump is consisted of the lower plate, metal membrane, upper plate and the piezoelectric-element. The lower plate includes the micro channel and the inlet, outlet of the Micropump. The upper plate includes the micro channel and connects the piezoelectric-element. These plate are fabricated on the Pyrex glass wafer by sandblasting process. The metal membrane does roll of check valve that is prevented backflow of the Micropump. The metal membrane is fabricated on the stainless steel by laser machining. Piezoelectric-element is actuated the Micropump and controlled flowing of fluid. The Micropump is fabricated by bonding process of these multi-layer.