• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.6
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• pp.479-485
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• 2002

We have investigated the effects of various wafers cleaning on glass/Si bonding using 4 inch Pyrex glass wafers and 4 inch silicon wafers. The various wafer cleaning methods were examined; SPM(sulfuric-peroxide mixture, $H_2SO_4:H_2O_2$ = 4 : 1, $120^{\circ}C$), RCA(company name, $NH_4OH:H_2O_2:H_2O$ = 1 : 1 : 5, $80^{\circ}C$), and combinations of those. The best room temperature bonding result was achieved when wafers were cleaned by SPM followed by RCA cleaning. The minimum increase in surface roughness measured by AFM(atomic force microscope) confirmed such results. During successive heat treatments, the bonding strength was improved with increased annealing temperatures up to $400^{\circ}C$, but debonding was observed at $450^{\circ}C$. The difference in thermal expansion coefficients between glass and Si wafer led debonding. When annealed at fixed temperatures(300 and $400^{\circ}C$), bonding strength was enhanced until 28 hours, but then decreased for further anneal. To find the cause of decrease in bonding strength in excessively long annealing time, the ion distribution at Si surface was investigated using SIMS(secondary ion mass spectrometry). tons such as sodium, which had been existed only in glass before annealing, were found at Si surface for long annealed samples. Decrease in bonding strength can be caused by the diffused sodium ions to pass the glass/si interface. Therefore, maximum bonding strength can be achieved when the cleaning procedure and the ion concentrations at interface are optimized in glass/Si wafer direct bonding.

• Journal of the Korean Society of Food Science and Nutrition
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• v.34 no.1
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• pp.131-134
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• 2005

The effect of far-infrared (FIR) irradiation on the antioxidant activity of extracts from rice hulls was evaluated. Rice hulls (9 g) were placed in Pyrex petri dishes (8.0 cm diameter) and irradiated at 80, 90, 100, 110, 120, 130 or 14$0^{\circ}C$ for 10,20,30,40,50 or 60 min with a FIR heater, respectively. After FIR irradiation, methanol extract of rice hulls was prepared, and total phenol contents (TPC) and radical scavenging activity (RSA) of the extracts were determined. FIR irradiation of rice hulls at 11$0^{\circ}C$ for 60 min increased TPC of the methanol extract from 51.6 $\mu$M to 104.3 $\mu$M compared to those of non-irradiated control. The irradiation at 12$0^{\circ}C$ for 60 min also increased RSA of the extract from 16.23% to 69.40%. These results indicated that appropriate FIR irradiation onto rice hulls could liberate the covalently bound phenolic compounds that have antioxidant activities.

• Journal of the Korean Society of Food Science and Nutrition
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• v.33 no.9
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• pp.1580-1583
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• 2004

The effect of far-infrared (FIR) radiation on the antioxidant activity of extracts from Citrus unshiu peels (CPs) was evaluated. CPs (5 g) were placed in Pyrex petri dishes (8.0 cm diameter) and irradiated at 150$^{\circ}C$ for 10, 20, 30, 40 or 50 min with a FIR heater. After FIR irradiation, 70% ethanol extract of CPs were prepared and total phenol contents (TPC), radical scavenging activity (RSA) and reducing power of the extracts were determined. FIR radiation of CPs at 150$^{\circ}C$ for 30 min increased the TPC and RSA of ethanol extract from 71.9${\mu}$M to 133.9 ${\mu}$M and from 29.64% to 51.27%, respectively, and reducing power was increased from 0.451 to 0.675, compared to those of non-irradiated control. These results indicated that FIR radiation onto CPs could liberate and activate covalently bound phenolic compounds that have antioxidant activities.

• Journal of the Korean Vacuum Society
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• v.1 no.3
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• pp.360-370
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• 1992

HWE(Hot-Wall Epitaxy) 방법에 의하여 pyrex 유리기판 위에 CdS 다결정 박막을 성장하였다. X-선 회절실험 결과 CdS 박막은 육방정이었는데 (0002)면보다 91013)면이 강 하게 성장됨을 알 수 있었다. 전자현미경으로 표면을 분석한 결과 입자의 크기는 기판의 온 도가 48$0^{\circ}C$, 증발원의 온도가 $610^{\circ}C$일 때 1~1.5$mu extrm{m}$로서 가장 컸다. 박막의 표면저항은 4-point probe로서 측정한 결과 10-8$\Omega$/\ulcorner이상이었다. 성장된 CdS 다결정 박막의 photoluminesence을 20K에서 측정하였는데 bound exciton, donor acceptor pair에 의한 발광이 관측되었다. Spectral response의 peak는 505nm이었다. CdS 다결정 박막의 표면 저항을 줄이기 위하여 여러 가지 온도에서 Indium을 확산시켰다. 그 결과 표면저항은 ~ $\times$ 101에서 ~ $\times$ 103$\Omega$/\ulcorner 정도 감소되었다. 50$0^{\circ}C$에 In을 1시간 확산시켰을 때 표면저항은 1300$\Omega$/\ulcorner이었다. 이 때 CdS : In의 운반자 농도는 1.2 $\times$ 1018cm-3, 이동도는 1.8cm-2/V-sec, 비저항은 1.3 $\times$ 10-2$\Omega$-cm이었다. CdS : In의 photoluminescence는 20K 에서 Gaussian curve를 보여 주었으며 peak의 위치는 510nm이었다. CdS : In 박막의 spectral response의 peak는 상온에서 500nm이다. CdS : In 광전도 cell의 sensitivity ${\gamma}$ =0.77이고, 최대 허용소비전력은 p=120mW, 100lux에서 rise time은 8 msec, decay time 은 6 msec이다.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.36 no.8
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• pp.774-779
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• 2008

An experimental study on the micro-supersonic jet flow fields has been carried out. A sonic nozzle of 440 ${\mu}m$-exit diameter and a Laval nozzle of 800 ${\mu}m$ exit diameter with the nozzle exit Mach number 2.0 were fabricated by stretching a micro Pyrex glass tube for the present experiments. Schlieren flow visualization and Pitot pressure distribution of the jet flow field were obtained. Representative characteristics of the jet flow fields such as, supersonic length, jet core length, similarity of the velocity field, and jet spreading rates, have been observed. All the results were compared to previous observations of larger supersonic jets of higher Reynolds numbers, and it was found that overall characteristics of the micro supersonic jet are qualitatively similar as those of the higher Reynolds number jets, except the jet core length and the jet spreading rate.

• Journal of the Korean Society of Combustion
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• v.10 no.2
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• pp.26-34
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• 2005

The performance of oxygen combustion with $CO_2$ feeding was investigated in a pyrex tube furnace. The inverse type multi-hole burner was used for improving mixing and wide operating range. It introduced oxygen, fuel, and oxygen, respectively, from center tube to outer tubes. Oxygen combustion characteristics with excess oxygen ratio, oxygen feeding ratio, and $CO_2$ feeding flow rate were studied to optimize the operating condition and to apply the oxygen combustion with recirculation of flue gas to a real furnace. This paper presents results on the effect of $CO_2$ feeding flow rate on the structure of the flames and concentrations of NO and CO emissions. The visible flame length was shortest due to well mixing between fuel and oxygen when the oxygen feeding ratio was 0.25. The NO emission was reduced drastically regardless of excess oxygen ratio when the $CO_2$ feeding flow rate was larger than 15 lpm. The CO emission is varied by changing the $CO_2$ feeding flow rate but the CO emission characteristics is highly affected by excess oxygen ratio. When the excess oxygen ratio is below $\lambda=1.1$, the CO emission increased as the $CO_2$ feeding flow rate increased.

• Analytical Science and Technology
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• v.7 no.2
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• pp.201-204
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• 1994

Cation exchange column chromatography of lithium was carried out to investigate the lithium isotope separation in aqueous ion exchange system. A Pyrex glass column of $50cm{\times}6mm$ inner radius with a water jacket was used as the separation column in experiment. Upon column chromatography using hydrochloric and succinic acid mixtures as an elunent, single separation factor, ${\alpha}$, 1.0068 was obtained. From the experiment, it was found that $^6Li$ was enriched in the resin phase and $^7Li$ in the solution phase.

• 한국연소학회:학술대회논문집
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• 2005.10a
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• pp.162-169
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• 2005

The performance of oxygen combustion with $CO_2$ feeding was investigated in a pyrex tube furnace. The inverse type multi-hole burner was used for improving mixing and wide operating range. It introduced oxygen, fuel, and oxygen, respectively, from center tube to outer tubes. Oxygen combustion characteristics with excess oxygen ratio, oxygen feeding ratio, and $CO_2$ feeding flow rate were studied to optimize the operating condition and to apply the oxygen combustion with recirculation of flue gas to a real furnace. This paper presents results on the effect of $CO_2$ feeding flow rate on the structure of the flames and concentrations of NO and CO emissions. The visible flame length was shortest due to well mixing between fuel and oxygen when the oxygen feeding ratio was 0.25. The NO emission was reduced drastically regardless of excess oxygen ratio when the $CO_2$ feeding flow rate was larger than 15 lpm. The CO emission is varied by changing the $CO_2$ feeding flow rate but the CO emission characteristics is highly affected by excess oxygen ratio. When the excess oxygen ratio is below ${\lamda}=1.1$, the CO emission increased as the $CO_2$ feeding flow rate increased.

• Journal of Korean Society of Environmental Engineers
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• v.37 no.2
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• pp.92-98
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• 2015

The physical effect induced by acoustic cavitation was investigated to accumulate basic data for the design of ultrasonic soil washing processes using aluminum foil erosion tests. A square aluminum foil was placed on the glass beads in the pyrex vessel submerged in the sonoreactor equipped with a 36 kHz ultrasound transducer module at the bottom. Cavitational erosion of foils was quantitatively analyzed for various glass bead diameter conditions (1, 2, and 4 mm), glass bead height conditions (5, 10, 15, and 20 mm), and water height conditions (5, 10, 15, and 20 mm). It was found that aluminum foil erosion significantly increased as the glass bead diameter increased and water height over the glass bead increased due to less attenuation of ultrasound and the optimization of sound field for cavitation. Moreover mechanical mixing was suggested to move constantly particles to the bottom area where the acoustic cavitation occurs most violently. It was because aluminium foil erosion by ultrasound transmitted through glass beads was relatively too weak.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1921-1923
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• 2001

In this work, an array of resistance temperature detector(RTD) was fabricated inside the microchannel in order to investigate in-situ flow characteristics. A rectangular straight microchannel, integrated with RTD's for temperature sensing and a heat source for generating the temperature gradient along the channel. were fabricated with the dimension of $200{\mu}m(W){\times}{\mu}m(D){\times}$48mm(L), while RTD measured precise temperatures at the inside-channel wall. 4" $525{\pm}25{\mu}m$ thick P-type <100> Si wafer was used as a substrate. For the fabrication of RTDs. 5300$\AA$ thick Pt/Ti layer was sputtered on a Pyrex glass wafer. Finally, glass wafer was bonded with Si wafer by anodic bonding, therefore RTD was located inside the microchannel. The temperature distribution inside the fabricated microchannel was obtained from 4 point probe measurements and Dl water is used as a working fluid. Temperature distribution inside the microchannel was measured as a function of mass flow rate and heat flux. As a result, precise temperatures inside the microchannel could be obtained. In conclusion, this novel temperature distribution measurement system will be very useful to the accurate analysis of the flow characteristics in the microchannel.