• Journal of the Semiconductor & Display Technology
• /
• v.4 no.4 s.13
• /
• pp.19-26
• /
• 2005

The process optimization of ozone concentration and half life time was investigated in ultra pure water and alkaline solutions for the wet cleaning of silicon wafer surface at room temperature. In the ultra pure water,. the maximum concentration (35 ppm) of ozone was measured at oxygen flow rate of 3 liters/min and ozone generator power over 60%. The half life time of ozone increased at lower power of ozone generator. Additive gases such as $N_2$ and $CO_2$ were added to increase the concentration and half life time of ozone. Although the maximum ozone concentration was higher with the addition of $N_2$ gas, a longer half life time was observed with the addition of $CO_2$. When $NH_4OH$ of 0.05 or 0.10 vol% was added in DI water, the pH of the solution was around 10. The addition of ozone resulted in the half life time less than 1 min. In order to maintain high pH and ozone concentration, ozone was continuously supplied in 0.05 vol% ammonia solutions. 3 ppm of ozone was dissolved in ammonia solutions. The static contact angle of silicon wafer surface became hydrophilic. The particle removal was possible alkaline ozone solutions. The organic contamination can be removed by ozonated ultra pure water and then alkaline solution containing ozone can remove the particles on silicon surface at room temperature.

• Journal of Sensor Science and Technology
• /
• v.14 no.1
• /
• pp.52-55
• /
• 2005

Ni oxide thin films with thermal sensitivity superior to Pt and Ni thin films were formed through annealing treatment after Ni thin films were deposited by a r.f. magnetron sputtering method. Resistivity values of Ni oxide thin films were in the range of $10.5{\mu}{\Omega}cm$ to $2.84{\times}10^{4}{\mu}{\Omega}cm$ according to the degree of Ni oxidation. Also temperature coefficient of resistance(TCR) values of Ni oxide thin films depended on the degree of Ni oxidation from 2,188 ppm/$^{\circ}C$ to 5,630 ppm/$^{\circ}C$ in the temperature range of $0{\sim}150^{\circ}C$. Because of the high linear TCR and resistivity characteristics, Ni oxide thin films exhibit much higher sensitivity to flow and temperature changes than pure Ni thin films and Pt thin films.

• Korean Journal of Materials Research
• /
• v.26 no.12
• /
• pp.741-750
• /
• 2016

Nanofibers(NFs), because of their high surface area and nanosized grains, have appropriate morphologies for use in chemiresistive-type sensors for gas detection applications. In this study, a highly sensitive and selective CO gas sensing material based on Au-decorated $SnO_2$ NFs was fabricated by electrospinning. $SnO_2$ NFs were synthesized by electrospinning and subsequently decorated with various amounts of Au nanoparticles(NPs) by sputtering; this was followed by thermal annealing. Different characterizations showed the successful formation of Au-decorated $SnO_2$ NFs. Gas sensing tests were performed on the fabricated sensors, which showed bell-shaped sensing behavior with respect to the amount of Au decoration. The best CO sensing performance, with a response of ~20 for 10 ppm CO, was obtained at an optimized amount of Au (2.6 at.%). The interplay between Au and $SnO_2$ in terms of the electronic and chemical sensitization by Au NPs is responsible for the great improvement in the CO sensing capability of pure $SnO_2$ NFs, suggesting that Au-decorated $SnO_2$ NFs can be a promising material for fabricating highly sensitive and selective chemiresistive-type CO gas sensors.

• Journal of Korean Society for Atmospheric Environment
• /
• v.33 no.1
• /
• pp.1-10
• /
• 2017

Adsorption is a plausible technology using solid adsorbents for dry capture of carbon dioxide ($CO_2$). In general, narrow size distribution of tiny pores and surface chemical functionalities of solid adsorbents enhance the adsorption capacity of gaseous $CO_2$ molecules. In order to utilize the advantages of fibrous adsorbents, this work prepared activated carbon nanofibers (ACNFs) via the electrospinning process using a polymer precursor of polyacylonitrile (PAN). The spun fibers were 390 nm to 580 nm in thickness with an average surface area of $27.3m^2/g$. The surface structure was improved by a programmed thermal activation at $800^{\circ}C$ in $CO_2$ atmosphere. It was also found that the nitrogen-groups including pyrrole and pyridine were created during the activation facilitaing the selective adsorption as forming enhanced active sites. The finally obtained adsorption capacities were 2.74 mmol/g for pure $CO_2$ flow and 0.74mmol/g for 3000 ppm.

• Journal of the Korean Ceramic Society
• /
• v.36 no.5
• /
• pp.504-512
• /
• 1999

The high-quality carbon nanofibers were prepared by chemical vapor deposition of gas mixtures of CO-H2 and C3H8-H2 over Fe-Cu and Ni-Cu bimetallic catalysts. The yield and structure of carbon nanofiber produced were altered by the change of catalyst composition and reaction temperature. The high yields were obtained around 500$^{\circ}C$ with e-Cu catalyst and around 700-750$^{\circ}C$ with Ni-Cu catalyst and the relatively higher yields were obtained with the bimetallic catalyst containing 50-90% of Ni and Fe respectively in comparison with the pure metals. The carbon nanofibers produced over the Fe-Cu catalyst at around 500$^{\circ}C$ with the maximum yields had the highest surface ares of 160-200 m2/g around 650$^{\circ}C$ which was slightly lower than the temperature for maximum yields. In order to examine the characteristics of carbon nanofibers as catalyst support Ni and Co metals were supporte on the carbon nanofibers and CO hydrogenation reaction was performed with the catalysts. The particle size distribution of Ni and Co supported over the carbon nanofibers were 6-15 nm and the CO hydrogenation reaction rate with the carbon-nanofiber supported catalysts was much higher than that over the other supports.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.11 no.4
• /
• pp.288-292
• /
• 1998

In this paper, we fabricated $SnO_2$ composite ceramics doped with 0~20mol% $SnO_2$ of bulk type to investigate the CO and $H_2$ gas sensitivity in various composition, temperature, and concentration of CO and $H_2$ gas. At the temperature range from $100^{\circ}C\sim425^{\circ}C$, the measured 1000ppm and 250ppm CO gas sensitivities of $SiO_2-SnO_2$composite ceramics were about 1.0~7.6 and 1.0~5.6, respectively. These values were about 1.0~1.5 times larger than pure $SnO_2$. The maximum 1000ppm CO gas sensitivity of $SiO_2-SnO_2$composites were measured around $325^{\circ}C$. At the temperature range from $270^{\circ}C\sim380^{\circ}C$, the 1000ppm and 500ppm $H_2$gas sensitivities of $SiO_2-SnO_2$ composites were about 2.9~21.2 and 2.1~11.3, respectively. Also the maximum 1000, 500 ppm $H_2$ gas sensitivities of samples were measured around.

• Journal of the Korean Vacuum Society
• /
• v.7 no.3
• /
• pp.176-186
• /
• 1998

Pure Pt, Co and their alloy thin films with three different compositions (Pt66-Co34, Pt40-Co60 and Pt18-Co82) were deposited on Si(100) wafers and proposed as a set of certified reference materials (CRM) for the quantification and standardization of surface compositional analysis. The compositions of the binary alloy thin films were controlled by in-situ XPS analyses and the certified compositions of the films have been determined by ICP-AES and RBS analyses after thin film growth. Through comparison of the compositions determined by in-situ XPS with those by ICP, relatively accurate compositions could be obtained with a matrix effect correction. Standard deviations of XPS and AES round robin tests with the Pt-Co alloy thin films were large up to about 4%. On the other hand, the average compositions of the Pt-Co alloy thin films by two methods were in a good agreement within 1%. The formation of a Pt rich surface layer by ion beam sputtering indicates that the surface modification by preferential sputtering must be understood for a better compositional analysis.

• Membrane Journal
• /
• v.32 no.5
• /
• pp.325-335
• /
• 2022

In this study, zeolitic imidazolate framework-9 (ZIF-9) was synthesized and Pebax/ZIF-9 mixed membranes were prepared by varying the content in poly(ether-b-amide)-1657 (Pebax-1657), and then a single gas (N₂, CO₂) was permeated to investigate the gas permeation characteristics of the mixed membrane. As the ZIF-9 content incorporated into the pure Pebax membrane increased, the N₂ permeability gradually decreased, and the CO₂ permeability increased up to the Pebax/ZIF-9 3 wt% mixed membrane, and then decreased at the content thereafter. And among the mixed membranes, the Pebax/ZIF-9 3 wt% mixed membrane showed the highest selectivity of 69.3 by selectively accepting CO₂ as the gate-opening phenomenon occurred for the polar gas, CO₂. In addition, both the CO₂ permeability and the CO₂/N₂ selectivity increased, resulting in the closest Robeson upper-bound.

• Membrane Journal
• /
• v.14 no.3
• /
• pp.250-257
• /
• 2004

PEG(poly(ethylene glycol)) acrylate/PPG(poly(propylene glycol)) acrylate (PEG/PPG) was prepared using UV induced photopolymerization method to investigate gas permeation properties of the membrane. The effect of PPG content on the solubility, diffusivity, and permeability of $CO_2$, $O_2$, and $N_2$ in PEG/PPG membrane is reported at $25^{\circ}C$ and $35^{\circ}C$. PEG/PPG (9:1) membrane exhibits $CO_2$ permeability coefficient of 28.9 barrer and $CO_2$/$N_2$ pure gas selectivity of 57.9 at $25^{\circ}C$. Permeability coefficient of increased with increasing with PPG content in the membrane. PEG/PPG (5:5) membrane shows $CO_2$ permeability coefficient of 78.9 barrer and $CO_2$/$N_2$ pure gas selectivity of 33.2 at $25^{\circ}C$.

• Membrane Journal
• /
• v.21 no.2
• /
• pp.177-192
• /
• 2011

Hollow fiber membrane using CTA polymers were prepared by the phase separation method for the separation and purification of biogas and the hollow fiber gas separation membrane modules with the effective surface area of 0.17 $m^2$ were prepared. The pure gas permeation properties of membrane modules for methane, oxygen and carbon dioxide were measured. The permeance of $CO_2$ and $CH_4$were 0.46 GPU and 18.52 GPU, respectively, therefore, the high $CO_2$/$CH_4$ selectivity of 40.4 was obtained. The separation and purification test for 4 different simulated mixed gases were carried out after the pure gas test and the gas concentration and flux of the permeate at the various stage-cut were measured from the 1 stage, 2 stage, and 3 stage cascade of membrane modules. In the 1 stage test, the concentration of $CH_4$ increased as the increase of the stage-cut, while the $CH_4$ recovery efficiency ratio decreased. In the 2 stage test, the $CH_4$ recovery efficiency ratio increased compared to the 1 stage. The 3 stage test was employed to reduce the loss of $CH_4$ in biogas and the result showed less than 5% of $CH_4$ recovery loss.