• 제목/요약/키워드: Pulsed discharge

검색결과 198건 처리시간 0.022초

Pulsed Magnet ron Sputtering Deposit ion of DLC Films Part II : High-voltage Bias-assisted Deposition

  • Chun, Hui-Gon;Lee, Jing-Hyuk;You, Yong-Zoo;Ko, Yong-Duek;Cho, Tong-Yul;Nikolay S. Sochugov
    • 한국표면공학회지
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    • 제36권2호
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    • pp.148-154
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    • 2003
  • Short ($\tau$=40 $mutextrm{s}$) and high-voltage ($U_{sub}$=2~8 kV) negative substrate bias pulses were used to assist pulsed magnetron sputtering DLC films deposition. Space- and time-resolved probe measurements of the plasma characteristics have been performed. It was shown that in case of high-voltage substrate bias spatial non-uniformity of the magnetron discharge plasma density greatly affected DLC deposition process. By Raman spectroscopy it was found that maximum percentage of s $p^3$-bonded carbon atoms (40 ~ 50%) in the coating was attained at energy $E_{c}$ ~700 eV per deposited carbon atom. Despite rather low diamond-like phase content these coatings are characterized by good adhesion due to ion mixing promoted by high acceleration voltage. Short duration of the bias pulses is also important to prevent electric breakdowns of insulating DLC film during its growth.wth.

Observations of Pulsed Bi-polar Discharges in Saline Solutions with Pin to Plate Electrodes

  • Shin, Bhum Jae;Seo, Jeong-Hyun;Collins, George J.
    • Journal of Electrical Engineering and Technology
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    • 제13권5호
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    • pp.2011-2016
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    • 2018
  • In this study, we have been investigated pin to plate pulsed bi-polar discharges in saline solutions, where bubble generation occurs. We integrate basic I-V-t electrical characteristics with the ICCD shadowgraph images, and finally instant and time averaged I-V waveforms. We observed that the bubble formation phase dynamics is quite different corresponding to the polarity applied to the pin electrode. When the pin electrode is a cathode, the bubble tends to be periodically detached from the pin electrode and the numerous tiny voltage spikes occur related to the electron emission from a pin cathode casing via, we judge from, direct dissociation of water molecules by energetic electrons. On the contrary, the bubble tends to stick to the pin electrode, when the pin electrode is anode; the bubble grows in size throughout the pulse duration. The dynamic electrical characteristics relative to the applied polarity of a pin electrode are presented and discussed by analysis of time averaged I-V waveforms.

수중에서 펄스초음파 신호에 대한 Sagnac 간섭형 광섬유센서의 특성 연구 (A Study on Characteristics of Sagnac Interferometric Optical Fiber Sensor to Pulsed Ultrasonic Signal in Underwater)

  • 이준호;신대용
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제53권1호
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    • pp.15-19
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    • 2004
  • In this paper, we present the fabrication and characteristic analysis of Sagnac interferometric optical fiber senior(OFS) system for detecting pulsed ultrasonic signal in underwater. The hollow cylindrical mandrel wound round by single mode optical fiber is used as sensing component. The ultrasonic signal source is simulated by the PZT actuator operated by an function generator. The distance dependency of the OFS's sensitivity was measured. The sensitivity has been shown to be inversely propotional to the square-root of distance between ultrasonic source and sensing component. It has also been shown that the OFS could detect the signals less affected by ultrasonic path comparing to conventional acousto-electric sensor. and accurate location of ultrasonic signal could be carried out using two OFSs.

중첩회로를 적용한 펄스형 Nd:YAG 레이저의 2차 SHG 변환효율에 관한 특성연구 (A study on the Second-Harmonic Generation(SBG) Conversion Characteristics of Nd:YAG Laser adopted Differential Superposition Mesh)

  • 김휘영;박두열
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2001년도 하계종합학술대회 논문집(5)
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    • pp.215-218
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    • 2001
  • A pulsed Nd:YAG laser is used widely for materials processing and medical instrument. It's very important to control the laser energy density in those fields using a pulsed Nd:YAG laser. A pulse repetition rate and a pulse width are regarded as the most dominant factors to control the energy density of laser beam. In this paper, the alternating charge and discharge system was designed to adjust a pulse repetition rate. This system is controlled by microprocessor and allows to frequence an expensive condenser for high frequency to cheap one for low frequency. In addtion, The microcontroller monitors the flow of cooling water, short circuit, and miss firing and so on. We designed Nd:YAG laser firmware with smart microcontroller, and want to explain general matters about the firmware from now.

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반응성 증착용 펄스 플라즈마 공정의 진단 (A Diagnostic Study of Pulsed Plasma Process for Reactive Deposition)

  • 주정훈
    • 한국표면공학회지
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    • 제45권4호
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    • pp.168-173
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    • 2012
  • A real-time monitoring of an immersed antenna type inductively coupled plasma (ICP) was done with optical emission spectroscopy (OES) to check the reports that sputtered atom density is decreasing as the ICP power is increased. At 10 mTorr pressure of Ar, Mg was sputtered by a bipolar pulsed power supply into 2 MHz ICP which has an insulator covered 2.5 turn antenna. Emitted light was collected in two different positions: above the target and inside the ICP region. With 100 W of Mg sputtering power, the intensities of Mg I (285.06 nm), Mg II (279.48 nm), Ar I (420.1 nm) were increased constantly with ICP power from 100 W to 600 W. At 500 W, the intensity of $Mg^+$ exceeded that of Mg under PID controlled discharge voltage of 180 V. The ratio of Mg II/Mg I was increased from 0.45 to 2.71 approximately 6 times.

유전체장벽방전효과를 이용한 공해물질 제거 효율에 미치는 공간전하의 영향 분석 (Analysis of Effects of Space Charge in Removal efficiency of Pollutant using Dielectric Barrier Discharges)

  • 남석현;전승익;이동영;이준호;한민구
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1998년도 하계학술대회 논문집 D
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    • pp.1441-1443
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    • 1998
  • In this work, the effects of space charge was analyzed in removal efficiency of pollutant using dielectric barrier discharges. In order to investigate effects of space charge, two dielectrics(XLPE and TR-XLPE) was chosen which are different in space charge distribution. The simultaneously measurement of space charge and discharge current was carried out in XLPE and TR-XLPE with air gap by Pulsed-Electro-Acoustic Method in ac. Also, the removal efficiency is measured by classical ozone generator(von Siemens 1875). From the experimental results, we knew that the space charge distribution affects the discharge patterns. The more space charge is in surface, the quickly discharge initiates and the magnitude of discharge is increased when polarity changes. And these affect the removal efficiency of pollutant.

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벽면에 충돌하는 펄스 플라즈마 제트 유동특성에 대한 수치적 연구 (A NUMERICAL STUDY ON JET IMPINGEMENT OF PULSED PLASMA DISCHARGE ON A FLAT PLATE)

  • 김경진;곽호상;박중윤
    • 한국전산유체공학회지
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    • 제14권1호
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    • pp.70-77
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    • 2009
  • In this study, time-dependent numerical analysis was carried out to investigate the plasma jet impingement on a flat plate, and a compressible form of two-dimensional inviscid gas dynamics equations were solved using the flux corrected transport algorithm. The mathematical modeling of Joule heating in the polycarbonate capillary bore and the mass ablation from the bore wall was incorporated in the numerical analysis and the series of computation was performed for three cases depending on the distance of the opposing plate from the capillary exit. The computational results reveal that the presence of the opposing plate does not affect the flow conditions inside the capillary when compared to the case of open-air plasma discharge. In the exterior region, the flow structure shows the typical supersonic underexpanded jet which consists of the strong Mach disk in front of the opposing plate and the barrel shock at the side of the jet. It is found that the shock evolution becomes more quasi-steady when the plate distance decreases. Also, the effects of the distance between the capillary bore exit and the opposing plate on the flow conditions along the opposing plate are investigated and the pressure variation on the plate shows more complicated interaction between the plasma discharge and the opposing plate when the location of plate becomes closer to the capillary exit.

FFL(Flat Fluorescent Lamp)의 방전 특정 (Discharge characteristics of Flat Fluorescent Lamp)

  • 권순석;류장렬
    • 전자공학회논문지 IE
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    • 제44권1호
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    • pp.1-5
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    • 2007
  • 본 논문에서는 FFL에 대한 기초 방전특성의 일부분으로 인가전압을 정현파와 구형파로 변화시켜 V-Q Lissjous 도형을 이용하여 FFL의 방전형태를 분석하고, 인가전압의 듀티비(duty ratio)의 면화에 의한 radiation transition에 대하여 고찰하였다. FFL을 정현파와 펄스파을 이용하였고, 절연층으로 둘러 쌓여 있는 전극을 갖는 FFL의 방전 특성을 V-Q 리사쥬 도형을 이용하여 방전 특성을 고찰하였다. FFL은 펄스파로 구동하였을 때 방전 전류는 전압의 상승 순간에 방전 전류가 흐른다. 듀티비가 증가하면 준안정 준위의 Xe 원자들은 증가하며 172nm의 자외선 방사량이 증가하고 있음을 확인할 수 있었다.

기체 방전관의색상 제어에 관한 연구 (A Study on Color Control in Gas Discharge Tube)

  • 이종찬;청야정명;박대희
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1996년도 추계학술대회 논문집 학회본부
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    • pp.285-288
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    • 1996
  • The electronic operation of the gas discharge tube is controlled by the electrical energy as sinusoidal waveform in arbitrary frequency range, or as a sequence of pulses at a wide range of duty cycle, the gas composition, the kind of electrode and the vessel geometry. In this paper, the pulsed mode operated gas discharge tube is composed with mixed gas of IIg-Ne ( 10 Torr ), in the tube of 15.0 mm outer diameter and has variable color from red to blue with changing frequency and pulse width in high voltage. As increasing pulse width and frequency in the gas discharge tube, the phenomenons that the electron temperature in the positive column increases and the radiation from atoms of higher upper state energy levels increases, exist. The color have the locus from red (0.4972, 0.3128) to blue (0.2736, 0.2619) in CIE chromacity diagram with increasing pulse width and frequency. The changing method of pulse width and frequency has been shown to be suitable for the luminous color control.

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Optical Diagnostics for Pulse-discharged Plasma by Marx Generator and Its Application for Modifications of Hemoglobin and Myoglobin Proteins

  • Park, Ji Hoon;Attri, Pankaj;Hong, Young June;Park, Bong Sang;Jeon, Su Nam;Choi, Eun Ha
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.176.2-176.2
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    • 2013
  • Property of optical diagnostics for pulse-discharged plasma in liquid and its biological applications to proteins are investigated by making use of high voltage Marx generator. The Marx generator has been consisted of 5 stages, where each charging capacitor is 0.5 ${\mu}F$, to generate a high voltage pulse with rising time of $1{\mu}s$. We have applied an input voltage of 6 kV to the each capacitor of 0.5 ${\mu}F$. High voltage pulsed plasma has been generated inside a polycarbonate tube by a single-shot operation, where the breakdown voltage is measured to be 7 kV, current of 1.2 kA, and pulse width of ~ 1 ${\mu}s$ between the two electrodes of anode-cathode whose material is made of tungsten pin, which are immersed into the liquids. We have investigated the emitted hydrogen lines for optical diagnostics of high voltage pulsed plasma. The emission line of 656.3 nm from $H-{\alpha}$ and 486.1 nm from $H-{\beta}$ have been measured by a monochromator. If we assumed that the focused plasma regions satisfy the local thermodynamic equilibrium conditions, the electron temperature and density of the high voltage pulsed plasma in liquid could be obtained by the Stark broadening of optical emission spectroscopy. For the investigation of the influence of pulsed plasma on biological proteins, we have exposed it onto the proteins such as hemoglobin and myoglobin. The structural changes in these proteins and their analysis have also been obtained by circular dichroism (CD) and ultraviolet (UV) visible spectroscopy.

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