• 제목/요약/키워드: Pulse plasma

검색결과 497건 처리시간 0.029초

실리콘 함유 DLC 박막의 내열특성 (Thermal Stability of Silicon-containing Diamond-like Carbon Film)

  • 김상권;김성완
    • 열처리공학회지
    • /
    • 제23권2호
    • /
    • pp.83-89
    • /
    • 2010
  • Diamond-like carbon (DLC) coating was studied to be a good tribological problem-solver due to its low friction characteristics and high hardness. However, generally hydrogenated DLC film has shown a weak thermal stability above $300^{\circ}C$. However, the silicon doping DLC process by DC pulse plasma enhanced chemical vapor deposition (PECVD) for the new DLC coating which has a good characterization with thermal stability at high temperature itself has been observed. And we were discussed a process for optimizing silicon content to promote a good thermal stability using various tetramethylsilane (TMS) and methane gas at high-temperature. The chemical compositions of silicon-containing DLC film was analyzed using X-ray photoelectron spectroscopy (XPS) before and after heat treatment. Raman spectrum analysis showed the changed structure on the surface after the high-temperature exposure testing. In particular, the hardness of silicon-containing DLC film showed different values before and after the annealing treatment.

지백지황환가미(知柏地黃丸加味)가 monocrotaline으로 유발된 흰쥐의 고혈압 병태모델에 미치는 영향 (The Effects of Jibeakjihwanghwangami(JJHG) on Monocrotaline-induced Hypertensive Rats)

  • 김종원;안정조;조현경;유호룡;설인찬;김윤식
    • 대한한방내과학회지
    • /
    • 제29권3호
    • /
    • pp.684-702
    • /
    • 2008
  • This experiment was performed to determine the effect of Jibeakjihwanghwangami(JJHG) on hypertension in monocrotaline-induced hypertensive rats. The results obtained were as follows : 1. JJHG showed a safety in cytotoxicity and toxicity of liver. 2. JJHG showed scavenging activity on DPPH free radicals and SOD-like activity. 3. JJHG showed an inhibitory effect on ACE. 4. JJHG significantly decreased blood pressure and pulse in monocrotaline-induced hypertensive rats. 5. JJHG significantly decreased the levels of plasma aldosterone in monocrotaline-induced hypertensive rats. 6. JJHG significantly decreased the levels of potassium in monocrotaline-induced hypertensive rats. 7. JJHG significantly decreased the levels of uric acid. BUN, and creatinine in monocrotaline-induced hypertensive rats. These results suggest that JJHG might be effective in treatment and prevention of hypertension.

  • PDF

Cu 금속배선을 위한 카본-질소-텅스텐 확산방지막 특성 (Characteristics of W-C-N Thin Diffusion Barrier for Cu Interconnection)

  • 이창우
    • 마이크로전자및패키징학회지
    • /
    • 제12권4호통권37호
    • /
    • pp.345-349
    • /
    • 2005
  • 300 mW-cm의 낮은 비저항을 갖는 카본-질소$\_$텅스텐 (W-C-N) 확산방지막을 원자층 증착법으로 제조하였으며, 반응기체로 $WF_6-N_2-CH_4$를 사용하였다. $N_2$$CH_4$ 반응기체를 주입 할 때는 고주파 펄스를 인가하여 플라즈마에 의한 반응물의 분리가 일어나도록 하였다. 다층금속배선에 사용하는 층간 절연층 (TEOS) 위에서 W-C-N 박막은 원자층 증착기구를 따르며, 10에서 100 사이클 동안 증착율이 0.2nm/cycles 로 일정한 값을 가진다. 또한 Cu 배선을 위한 확산방지막으로써 W-C-N 박막은 비정질 상을 가지며, $800^{\circ}C$에서 30분간 열처리해도 Cu의 확산을 충분히 방지할 수 있음을 확인하였다.

  • PDF

저온 플라즈마와 광촉매에 의한 NO/SO2 제거 (Removal of NO/SO2 by the low temperature plasmas and photocatalysts)

  • 김동주;김교선
    • 산업기술연구
    • /
    • 제26권A호
    • /
    • pp.181-188
    • /
    • 2006
  • In this study, we analyzed the effects of several process variables on the removal efficiencies of NO and $SO_2$ by the dielectric barrier discharge process combined with photocatalysts. The $TiO_2$ photocatalysts were coated onto the spherical-shaped glass beads as dielectric materials by the dip-coating method to analyze the effects of photodegradation reaction on the NO and $SO_2$ removal. As the voltage applied to the plasma reactor increases, or as the pulse frequency of applied voltage increases, the NO and $SO_2$ removal efficiencies increase. Also as the residence time increases, or as the initial concentration of NO decreases, the NO and $SO_2$ removal efficiencies increase. The higher the amount of $TiO_2$ particles coated onto the glass bead is, the larger the surface area of $TiO_2$ particles for the photodegradation reaction is and the NO and $SO_2$ are removed more quickly by the faster photodegradation reactions.

  • PDF

Study on quench detection of the KSTAR CS coil with CDA+MIK compensation of inductive voltages

  • An, Seok Chan;Kim, Jinsub;Ko, Tae Kuk;Chu, Yong
    • 한국초전도ㆍ저온공학회논문지
    • /
    • 제18권1호
    • /
    • pp.55-58
    • /
    • 2016
  • Quench Detection System (QDS) is essential to guarantee the stable operation of the Korea Superconducting Tokamak Advanced Research (KSTAR) Poloidal Field (PF) magnet system because the stored energy in the magnet system is very large. For the fast response, voltage-based QDS has been used. Co-wound voltage sensors and balanced bridge circuits were applied to eliminate the inductive voltages generated during the plasma operation. However, as the inductive voltages are hundreds times higher than the quench detection voltage during the pulse-current operation, Central Difference Averaging (CDA) and MIK, where I and K stand for mutual coupling indexes of different circuits, which is an active cancellation of mutually generated voltages have been suggested and studied. In this paper, the CDA and MIK technique were applied to the KSTAR magnet for PF magnet quench detection. The calculated inductive voltages from the MIK and measured voltages from the CDA circuits were compared to eliminate the inductive voltages at result signals.

노출전극 대기압 저온 마이크로 플라즈마의 개발 및 전기광학적 특성 (Electro-optical characteristics of low temperature atmospheric pressure micro plasma using dielectric-free parallel electrodes)

  • 하창승;송인철;임왕선;김동현;이해준;이호준;박정후
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 2008년도 제39회 하계학술대회
    • /
    • pp.1350-1351
    • /
    • 2008
  • 대기압 플라즈마를 발생시키는 것은 종래의 저기압 플라즈마를 발생시키는 것 보다 대단히 어렵다. 하지만, 대기압 플라즈마는 진공장치가 필요 없고, 제작방식이 비교적 간편하며 살균, 의료, 표면처리 등 다양한 응용이 가능해서 그 잠재력이 매우 크다. 본 연구에서는 유전체가 없는 두 전극사이에서 대기압 저온 마이크로 플라즈마를 발생시켰으며, submicrosecond pulse 파형으로 glow discharge를 유지할 수 있었다. 플라즈마 소스의 전극 간격은 200[${\mu}m$]이고 방전개시전압은 약 450${\sim}$600[V]이다. 플라즈마를 발생시키기 위한 feeding gas는 He 100%이다. 본 연구에서 개발된 대기압 플라즈마는 소비전력이 2[W]미만으로 온도는 조건에 따라 40$^{\circ}C$미만으로 발생 가능하다. 또한 스펙트럼 분석 시 777nm인 산소원자의 peak이 다른 원자 혹은 분자들의 peak보다 월등히 높다.

  • PDF

무차원 변수 해석을 이용한 LSP 공정변수 영향 분석 (Study on Effect of LSP Process Parameters Using Dimensionless Analysis)

  • 김주희;김태양;김윤재
    • 대한기계학회논문집A
    • /
    • 제37권9호
    • /
    • pp.1141-1149
    • /
    • 2013
  • 복잡한 물리적 현상에 대한 수학적 모델을 만들기 위해 적용되는 차원해석은 LSP 공정변수의 영향을 이해하는데 중요한 도구가 된다. 본 연구에서는 버킹검(Buckingham) ${\prod}$이론을 이용한 차원해석을 통해 레이저 충격 피닝의 잔류응력 결과에 영향을 미치는 변수를 확인하고, 유한요소법을 이용하여 LSP 공정변수인 최대압력파, 압력파 지속시간, 레이저 샷 크기 및 다중 LSP 에 대한 잔류응력 결과를 확인하였다.

가미천마구등음이 고혈압 병태모델에 미치는 영향 (Effect of Kamicheonmagudeungeum on Hypertension)

  • 송병용;홍석;김동희;전상윤
    • 동의생리병리학회지
    • /
    • 제21권2호
    • /
    • pp.504-510
    • /
    • 2007
  • Kamicheonmagudeungeum(KCGE), a traditional herbal medicine, has been used as a therapeutic agent for the treatments of acute stage of hypertension. We evaluated the effects of KCGE on hypertension induced by DOCA-salt in rats. The systolic blood pressure and pulse rate significantly lowered by oral administration with KCGE. The levels of plasma hormones including dopamine, epinephrine and norepinephrine, and serum electrolyte were also reduced in KCGE treated rats. In addition, the production of reactive oxigen species (ROS) were greatly decreased by the treatment with KCGE in cultured bovine endothelial cells and angiotensine converting enzyme (ACE) activites were also inhibited by KCGE in a dose dependent manner. This study indicated that KCGE is a safe and effective treatment for hypertension.

펄스코로나 방전에서 프로핀($C_3H_6$)이 NO-$NO_2$ 변환에 미치는 영향에 관한 연구 (Effect of Propene($C_3H_6$) ON NO-$NO_2$ Conversion Process in a Pulsed Corona Discharge)

  • 박광서;전배혁;전광민
    • 한국자동차공학회논문집
    • /
    • 제8권5호
    • /
    • pp.67-77
    • /
    • 2000
  • Investigated was the effect of propene(C3H6) on the NO-NO2 conversion in dry exhaust gases from lean burn engine using a pulsed corona discharge. A kinetic model was developed to characterize the plasma chemistry in simulated exhausts containing propene. The model uses ELENDIF program to solve Boltzmann equation for electron energy distribution function, and CHEMKIN-II program to solve stiff ODE(ordinary differential equation) problems for species concentrations. The corona discharge energy per pulse and the time-space averaged E/N were obtained by fitting the model to experimental data. The model calculation shows good agreement for NO and NO2 concentrations with the experimental data, and predicts the formation of byproducts such as CH2O, CH3HCO, CO AND CH3NO2 Propene enhances the NOx conversion enormously at lower energy density and the NOx conversion increases with the increase of initial propene and oxygen concentration, and temperature.

  • PDF