• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 추계학술대회 논문집
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• pp.339-342
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• 1998

Ferroelectric L $a_2$ $Ti_2$ $O_{7}$(LTO) thin films were prepared by chemical solution deposition processes. Acetylacetone was used as chelating agent and nitric acid was added in the stock solution to control hydrolysis and condensation reaction rate. The LTO thin films were spin-coated on Pt/Ti/ $SiO_2$/(100)Si and Pt/Zr $O_2$/ $SiO_2$/(100)Si substrates. After multiple coating, dried thin films were heat-treated for decomposition of residual organics and crystallization. The role of acetylacetone in Ti iso-propoxide stabilization by possibly substituting $O^{i}$Pr ligand was studied by H-NMR. B site-rich impurity phase, i.e. L $a_4$ $Ti_{9}$ $O_{24}$, was found after annealing, where its appearance was dependent on process temperature indicating the possible reaction with substrate. Dielectric and other relevant electrical properties were measured and the results were compared between modified sol-gel and MOD processes.s.s.

• 한국재료학회:학술대회논문집
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• 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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• pp.42.3-42
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• 1998

• 한국전기전자재료학회논문지
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• 제15권11호
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• pp.933-938
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• 2002

(Ba,Sr)TiO$_{4}$ (BST) thin films on Pt/Ti/SiO$_{2}$/Si substrates were deposited by a sol-gel method and the etch characteristics of BST thin films have been investigated as a function of gas mixing ratio. The maximum etch rate of the BST films was 440 $AA$/min under such conditions as: CF$_{4}$(CF$_{4}$＋Ar) of 0.2, RF-power of 700 W, DC-bias voltage of -200 V, pressure of 15 mTorr and substrate temperature of 30 $^{circ}C$. The selectivities of BST to Pt, SiO$_{2}$ and PR were 0.38, 0.25 and 0.09, respectively. In the XPS (X-ray photoelectron spectroscopy) analysis, Barium (Ba) and Strontium (Sr) component in BST thin films formed low volatile compounds such as BaFx, SrFx, which are forms by the chemical reaction with F atoms and is removed by Ar ion bombardment. Titanium (Ti) is removed by chemical reaction such as TiF with ease. The result of secondary ion mass spectrometry (SIMS) analysis confirmed the existence of the BaFx, SrFK, TiFx.

• 한국세라믹학회지
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• 제42권5호
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• pp.299-303
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• 2005

The crystal structure and ferroelectricity of the $(1-x)BiFeO_3\;(BF)-xPbTiO_3$ (PT) ceramic system with the addition of $DyFeO_3$ (DF) have been investigated for attaining a high temperature piezoelectric material. This study is focused on the relation between crystal structure and ferroelectric property with the addition of DF over the phase boundary in the (1-x)BF-xPT system. Hysteresis curves of polarization-electric field at room temperature have been measured. The X-ray and neutron diffraction data were analyzed by the rietveld refinement method. The addition of 0.1 mole DF into BF-PT system greatly increases the ferroelectric remanant polarization Pr values, e.g. 17 ${\mu}C/cm^2$ in 0.6BF-yDF-(0.4-y)PT and 31${\mu}C/cm^2$ in 0.5BF-yDF-(0.5.y)PT, respectively. The improved Pr value has been discussed in relation with crystal structure and electrical property.

• 마이크로전자및패키징학회지
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• 제5권2호
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• pp.59-64
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• 1998

Pt/SiO2/Si 기판구조위에 스크린인쇄법과 졸-겔법에 의해 (Pb, La)TiO3(PLT) 후막 과 박막을 도포시켜 $650^{\circ}C$후속열처리 온도에서 결정화한후 결정특성과 전기적 특성을 조사 하였다. $650^{\circ}C$ 온도에서 후속열처리된 PLT 시료의 경우 전형적인 perovskite 결정구조를 보 여주었다. SEM 단면형상으로부터 Pt 전극과 PLT막 사이에는 비교적 평활한 계면형상을 보여주었다. PLT 후막과 박막시료의 잔류분극(2Pr) 값은 약 1$\mu$C/cm2 으로각각 나타났으며 이와같이 후막 PLT시료에 비해 박막시료의 잔류분극값이 큰이유는 박막시료가 보다 양호 한 결정성을 지니기 때문이었다. 상온부근에서 후막과 박막시료의 초전계수값은 약 1.5nC/cm2.$^{\circ}C$와 4.0nC/cm2.$^{\circ}C$의 값을 각각 나타내었으며 누설전류의 크기는 약 0.3~0.8$\mu$ A/cm2의 비교적 양호한 누설전류 특성을 얻었다.

• 마이크로전자및패키징학회지
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• 제2권1호
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• pp.35-48
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• 1995

마이크로회로내에서 티탄산바륨 중 바륨의 일부가 납으로 치환됨에 따른 전기적 특 성의 변화를 확인하기 위하여 MOD(금속유기화합물 분해법)공정에 의 barum 2-ethylhexanoate, barium neodecanoate, lead 2-ethylhexanoate 및 titanium dimethoxy 야 -2-ethylhexanoate 와 같은 MOC(금속 유기화합물) 들을 합성하고 공통 용매에 대한 용해 도를 시험하였다. 그 결과 barium 2-ethylhexanoate 만 p-xylene에 대한 용해도가 낮았으며 그 외의 다른 MOC들은 모두 p-xylene 단일 용매에 매우 잘 용해되었다. 바륨의 일부가 납 으로 치환된 티탄산 납바륨 박막은 MOC 혼합용액을 ITO/glass, Pt/SiO2/Si 및 Pt/Ti/SiO2/Si 웨이퍼 기판 위에 spin coating 하고 소성하여 얻었다. 이와 같이 얻어진 박막 의 전기적 특성을 측정하고 그 결과를 비교 고찰하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.474-475
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• 2007

The $Sr_{0.8}Bi_{2.2}Ta_2O_9$(SBT) thin films are deposited on Pt-coated electrode(Pt/$TiO_2/SiO_2$/Si) using RF magnetron sputtering method. The aging properties of SBT capacitor with top electrodes represents a favorable properties in Pt electrode. The dielectric constant and leakage current density with Pt electrode is 340 and $6.81{\times}10^{-10}\;A/cm^2$ respectively. The maximum remanent polarization and the coercive electric field with Pt electrode are $12.40{\mu}C/cm^2$ and 30kV/cm respectively.

• Bulletin of the Korean Chemical Society
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• 제31권1호
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• pp.120-124
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• 2010

Monometallic, bimetallic and trimetallic particles consisting of different weight compositions of Pt-Pd-Rh over pure alumina wash coats have been synthesized and their catalytic performance on methane conversion was studied from 150 to $600^{\circ}C$. Different catalyst formulations with variable Pt, Pd and Rh contents for bimetallic and trimetallic systems were tried and $Pt_{(1.5)}Rh_{(0.3)}/Al_2O_3$ and $Pt_{(1.0)}Pd_{(1.0)}Rh_{(0.3)}/Al_2O_3$ shows low $T_{50}$ and $T_{90}$ temperatures. Bimetallic and trimetallic particle synergism acts as three way catalysts and therefore, all the catalysts show 100% methane conversion. The effect of supports such as $ZrO_2$ and $TiO_2$ on methane combustion was investigated; from $T_{50}$ and $T_{90}$ results both $Al_2O_3$ and $ZrO_2$ are suitable supports for low temperature methane combustion.

• Bulletin of the Korean Chemical Society
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• 제22권11호
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• pp.1183-1191
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• 2001

The metallorganic chemical vapor deposition (MOCVD) method has been used to prepare TiO2 thin films for the degradation of hazardous organic compounds, such as 2-chlorophenol (2-CP). The effect of supporting materials and metal doping on the photocatalytic activity of TiO2 thin films also has been studied. TiO2 thin films were coated onto various supporting materials, including stainless steel cloth(SS), quartz glass tube (QGT), and silica gel (SG). Transition metals, such as Pd(II), Pt(IV), Nd(III) and Fe(III), were doped onto TiO2 thin film. The results indicate that Nd(Ⅲ) doping improves the photodegradation of 2-CP. Among all supporting materials studied, SS(37 ${\mu}m)$ appears to be the best support. An optimal amount of doping material at 1.0 percent (w/w) of TiO2-substrate thin film gives the best photodegration of 2-CP.

• 대한전기학회논문지
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• 제41권5호
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• pp.517-524
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• 1992

In this study, 0.10Pb(SbS11/2TSnS11/2T)OS13T-(0.90-x)PbZrOS13T (0.25 x 0.40) ceramics were fabricated by the atmospheric method. The sintering temperature and time were 1250[$^{\circ}C$] and 2[2hr], respectively. The structureal, dielectric and piezoelectric properties with composition of PbTiOS13T were studied. As the results of XRD ans SEM, the crystal structure of a specimen was rhombohedral, lattice constant and average grain size were decreased with increasing the contents of PbTiOS13T. Relative dielectric constant and Curie temperature were increased with increasing the contents of PbTiOS13T, 0.10PSS-0.40PT-0.50PZ specimen had the highest values of 904 and 265[$^{\circ}C$], respectively. In increasing of PbTiOS13T contents form 25[mol%] to 40[mol%], piezoelectric charge constant and electromechanical coupling factors were increased form 114[pC/N] to 142[pC/N], 17[%] to 24[%] and mechanical quality factor were decreased with increasing the contents of PbTiOS13T. In the 0.10PSS-0.40PT-0.50PZ specimens, those values were 14.2[kV/cm] and 9.43[x10S0-6TC/cmS02T], resectively.