• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1170-1173
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• 2003

In the semiconductor and the optical industry a new transport system which can replace the common system is required. The common systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches, the optical lens. The ultrasonic wave driven system solve these problem. In this paper the object transport system using the excitation of ultrasonic wave is proposed. the experiments for finding the optimal excitation frequency, finding phase-difference between two ultrasonic wave generators are performed. The effect of transporting speed according to the change of amplification voltage is verified. In addition, the system performance for actual use is evaluated

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2003년도 춘계학술대회 논문집
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• pp.371-375
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• 2003

In recent years, as the semiconductor and the optical industry grows, the necessity of the transporting system for semiconductor and precision optical lens without damage increases. The transport system using ultrasonic wave is very suitable for this area. In this paper the object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal excitation frequency, finding phase-difference between two ultrasonic wave generators are performed. The effect of transporting speed according to the change of weight and amplification voltage are verified. In addition, the system performance for actual use is evaluated.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.1608-1613
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• 2003

In the semiconductor and the optical industry, a new transport system which can replace the conventional sliding system is required. These systems are driven by the magnetic field and the conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problems. In this paper, the object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal excitation frequency, finding phasedifference between two ultrasonic wave generators are performed. The relationship of transporting speed according to the change of flexural beam shape is verified. In addition, the system performance for practical use is evaluated.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 춘계학술대회논문집
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• pp.956-959
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• 2003

In the semiconductor and the optical industry a new transport system which can replace the common system is required. The common systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system solve these problem. In this paper the object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal excitation frequency, finding phase-difference between two ultrasonic wave get orators are performed. The effect of transporting speed according to the change of weight and amplification voltage are verified. In addition, the system performance for actual use is evaluated.