• Title/Summary/Keyword: Profile accuracy

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In-process Measurement of Surface Profile using CCD (CCD를 이용한 인프로세스 표면형상의 계측)

  • 이기용;강명창;김정석;조인순
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1995.10a
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    • pp.255-258
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    • 1995
  • Surface profile is an important paramerer to evaluate accuracy of machined worpiece. It is necessary to acquire this data by in-process measurement. Recent researchers have introduced Machine Vision technique to achieve it. But it is difficult to apply it to industry field yet. In this study, in-process measuring system of surface profile is developed using CCD camera. The effect of illuminance according to incident angle is investigated and surface profile from surface tester and illuminance graph are compared experimentally.

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Prediction of Etch Profile Uniformity Using Wavelet and Neural Network

  • Park, Won-Sun;Lim, Myo-Taeg;Kim, Byungwhan
    • International Journal of Control, Automation, and Systems
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    • v.2 no.2
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    • pp.256-262
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    • 2004
  • Conventionally, profile non-uniformity has been characterized by relying on approximated profile with angle or anisotropy. In this study, a new non-uniformity model for etch profile is presented by applying a discrete wavelet to the image obtained from a scanning electron microscopy (SEM). Prediction models for wavelet-transformed data are then constructed using a back-propagation neural network. The proposed method was applied to the data collected from the etching of tungsten material. Additionally, 7 experiments were conducted to obtain test data. Model performance was evaluated in terms of the average prediction accuracy (APA) and the best prediction accuracy (BPA). To take into account randomness in initial weights, two hundred models were generated for a given set of training factors. Behaviors of the APA and BPA were investigated as a function of training factors, including training tolerance, hidden neuron, initial weight distribution, and two slopes for bipolar sig-moid and linear function. For all variations in training factors, the APA was not consistent with the BPA. The prediction accuracy was optimized using three approaches, the best model based approach, the average model based approach and the combined model based approach. Despite the largest APA of the first approach, its BPA was smallest compared to the other two approaches.

On the Earthwork Volume Decision Using Spline Surfaces (스플라인 곡면을 이용한 토공량 결정에 관한 연구)

  • 류재칠;이승훈;문두열
    • Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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    • v.20 no.1
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    • pp.85-92
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    • 2002
  • The calculation of earthwork plays a major role in plan or design of many civil engineering projects, and thus it has become very important to advanced the accuracy of earthwork calculation. Current methods used for estimating the volume of pit excavation assumes that the ground profile between the grid points is linear(trapezoidal rule), or nonlinear(simpson's formulas). Generally speaking, the nonlinear profile formulas provide better accuracy than the linear profile formulas. However, all the formulas mentioned have a common drawback to ground profile, such as sharp corners or the grid points of any two straight lines. In this paper, we propose an algorithm of finding a spline surface which interpolates the given data and an appropriate method to calculate the earthwork. We present some computational results showing that our proposed method provides better accuracy than Chen and Lin's method.

3-D Surface Profile Measurement Using An Acousto-optic Tunable Filter Based Spectral Phase Shifting Technique

  • Kim, Dae-Suk;Cho, Yong-Jai
    • Journal of the Optical Society of Korea
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    • v.12 no.4
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    • pp.281-287
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    • 2008
  • An acousto-optic tunable filter based 3-D micro surface profile measurement using an equally spaced 5 spectral phase shifting is described. The 5-bucket spectral phase shifting method is compared with a Fourier-transform method in the spectral domain. It can provide a fast measurement capability while maintaining high accuracy since it needs only 5 pieces of spectrally phase shifted imaging data and a simple calculation in comparison with the Fourier transform method that requires full wavelength scanning data and relatively complicated computation. The 3-D profile data of micro objects can be obtained in a few seconds with an accuracy of ${\sim}10nm$. The 3-D profile method also has an inherent benefit in terms of being speckle-free in measuring diffuse micro objects by employing an incoherent light source. Those simplicity and practical applicability is expected to have diverse applications in 3-D micro profilometry such as semiconductors and micro-biology.

Motion Control Algorithm Expanding Arithmetic Operation for Low-Cost Microprocessor (저가형 마이크로프로세서를 위한 연산처리 확장 모션제어 알고리즘)

  • Moon, Sang-Chan;Kim, Jae-Jun;Nam, Kyu-Min;Kim, Byoung-Soo;Lee, Soon-Geul
    • Journal of Institute of Control, Robotics and Systems
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    • v.18 no.12
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    • pp.1079-1085
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    • 2012
  • For precise motion control, S-curve velocity profile is generally used but it has disadvantage of relatively long calculation time for floating-point arithmetics. In this paper, we present a new generating method for velocity profile to reduce delay time of profile generation so that it overcomes such disadvantage and enhances the efficiency of precise motion control. In this approach, the velocity profile is designed based on the gamma correction expression that is generally used in image processing to obtain a smoother movement without any critical jerk. The proposed velocity profile is designed to support both T-curve and S-curve velocity profile. It can generate precise profile by adding an offset to the velocity profile with decimals under floating point that are not counted during gamma correction arithmetic operation. As a result, the operation time is saved and the efficiency is improved. The proposed method is compared with the existing method that generates velocity profile using ring buffer on a 8-bit low-cost MCU. The result shows that the proposed method has no delay in generating driving profile with good accuracy of each cycle velocity. The significance of the proposed method lies in reduction of the operation time without degrading the motion accuracy. Generated driving signal also shows to verify effectiveness of the proposed method.

Corrective machining Algorithm for Improving the Motion Accuracy of Hydrostatic Table (유정압테이블의 정밀도향상을 위한 수정가공 알고리즘)

  • 박천홍;이찬홍;이후상
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1997.10a
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    • pp.380-384
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    • 1997
  • For improving the motion accuracy of hydrostatic table, corrective machining algorithm is proposed in this paper. The algorithm consists of three main processes. Reverse analysis is performed firstly to estimate rail profile from measured linear and angular motion error, in the algorithm. For the next step, correctwe machining information is decided as referring to the estimating rail profile. Finally, motion errors on correctively machined rail are analized by using motion error analysls method proposed in the previous paper. These processes can be rtcrated if the analized motion errors are worse than target accuracy. In order to verify the validity of the algorithm theoretically, motion errors by the estimated rail after corrective machining are compared with motion errors by true rail assumed as the measured value. Estimated motion errors show good agreement with assumed values, and it is confirmed that the algorithm IS effective to acquire the corrective machming information to improve the accuracy of hydrostatic table.

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Rail Profile Matching Method using ICP Algorithm (ICP 알고리즘을 이용한 레일 프로파일 매칭 기법)

  • Yu, Young-Ki;Koo, Ja-Myung;Oh, Min-Soo;Yang, Il-Dong
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.65 no.5
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    • pp.888-894
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    • 2016
  • In this paper, we describe a method for precisely measuring the abrasion of the railway using an image processing technique. To calculate the wear of the rails, we provided a method for accurately matching the standard rail profile data and the profile data acquired by the rail inspection vehicle. After the lens distortion correction and the perspective transformation of the measured profile data, we used ICP Algorithm for accurate profile data matching with the reference profile extracted from the standard rail drawing. We constructed the prototype of the Rail Profile Measurement System for High-speed Railway and the experimental result on the three type of the standard rail used in Korea showed the excellent profile matching accuracy within 0.1mm.

A Study on the Earthwork Volume Decision using the Spline Interpolation (Spline보간법을 이용한 토공량결정에 관한 연구)

  • 문두열
    • Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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    • v.18 no.3
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    • pp.305-313
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    • 2000
  • The calculation of earthwork plays a major role in plan or design of many civil engineering projects, and thus it has become very important to advanced the accuracy of earthwork calculation. Current methods used for estimating the volume of pit excavation assumes that the ground profile between the grid points is linear(trapezoidal rule), or nonlinear(simpson's formulas). Generally speaking. the nonlinear profile formulas provide better accuracy than the linear profile formulas. However, all the formulas mentioned have a common drawback to ground profile, such as sharp corners or the grid points of any two straight lines. In this paper, mathematical model for a searching examination the drawbacks of the current methods is presented. Also, the presented formular, the spot height method, and chamber formulas, chen and lin method are compared with the volumes of the pits in these examples. As a result of this study, algorithm of a proposal area formula by spline method should provide a better accuracy than the spot height method, chamber formulas, chen and lin method. The mathematical model mentioned make an offer maximum accuracy in estimating the volume of a pit excavation.

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A Swing-Arm On-Machine Inspection Method for Profile Measurement of Large Optical Surface in Lapping Process

  • Sung In Kyoung;Oh Chang Jin;Lee Eung Suk;Kim Ock Hyun
    • Journal of Mechanical Science and Technology
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    • v.19 no.8
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    • pp.1576-1581
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    • 2005
  • Generally, the optical components are fabricated by grinding, lapping, and polishing. And, those processes take long time to obtain such a high surface quality. Therefore, in the case of large optical component, the on-machine inspection (OMI) is essential. Because, the work piece is fragile and difficult to set up for fabricating and measuring. This paper is concerned about a swing-arm method for measuring surface profile of large optical concave mirror. The measuring accuracy and uncertainty for suggested method are studied. The experimental results show that this method is useful specially in lapping process with the accuracy of $3\~5\;{\mu}m$. Those inspection data are provided for correcting the residual figuring error in lapping or polishing processes.

Mathematical expression for the Prediction of Strip Profile in hot rolling mill (열연 판형상 예측 수식모델 개발)

  • Cho Y.S.;Hwang S.M.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2004.05a
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    • pp.70-73
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    • 2004
  • The approach in this thesis is for prediction of deformed strip profile in hot rolling mill. This approach shows how to make an expression as a mathematical form in predicting strip profile. This approach is based on the velocity field, shear stress and material flow on the strip edge along width direction and lateral displacement and stress along width are analytically calculated. Roll force is calculated in each section and then combined together to show roll force distribution along width. All the assumptions to make equation form for this approach are supported by FEM simulation result and the result of model is verified by FEM result. So, this model will supply very useful tool to the researcher and engineers which takes less time and has similar accuracy in predicting roll force profile comparing to FEM simulation. This model has to be combined with deformed roll profile model, which include thermal crown prediction and wear prediction model to predict deformed strip profile.

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