• Title/Summary/Keyword: Process Chamber

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A Study of Process factors on the Recycling of Reactive Metal Scraps in Plasma Arc Remelting (Plasma Arc Remelting에서 활성 금속 Scrap 재활용에 미치는 공정인자의 연구)

  • Jung, Jae-Young;Sohn, Ho-Sang
    • Resources Recycling
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    • v.26 no.6
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    • pp.3-9
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    • 2017
  • In this study, plasma arc remelting behaviors according to arc current, arc voltage, and types of plasma gas were investigated using Kroll processed Ti sponges as anode. In the discharge pressure range of vacuum pump ($200{\sim}300kgf/cm^2$), the arc voltage did not vary greatly with the increase of discharge pressure at a given arc length. This means that the pressure in the vacuum chamber during operation hardly changes and the atmospheric pressure maintains. Under various conditions of arc currents (700~900A), the arc voltage slightly increased with arc current. The effects of anode materials and operational variables on the arc length-arc voltage relationship were compared with the results in previous studies. When the atmospheric gas changed from argon to helium, double effect of improvement on the output of the steady state was observed. The increase of output in the plasma arc device was accompanied by an increase in the melting rate of the Ti sponge and the quality of the ingot surface was also improved. The plasma arc remelting of the new scrap titanium and the old scrap zirconium alloy could result in the fabrication of an ingot with high surface quality.

Pressurization Characteristics of Piezoelectric-Hydraulic Pump Adopting a Ball-Thin Plate Spring Type Check Valve (볼-박판 스프링 형 체크밸브가 적용된 압전유압펌프의 가압 특성)

  • Hwang, Yong-Ha;Hwang, Jai-Hyuk;Bae, Jae-Sung
    • Journal of Aerospace System Engineering
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    • v.12 no.2
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    • pp.7-14
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    • 2018
  • In this study, a new check valve was studied to improve the load pressure of a brake system with a small piezoelectric-hydraulic pump. During the pressurization process, the steady-state pressure at the load is affected by the ratio of the cross-sectional area of the check valve the chamber pressure and load pressure. Since the flow path cover of the check valve is made wider than the cross-sectional area of the output flow to prevent backflow, a method of reducing the area ratio is proposed for a higher load pressure by mounting an additional mass to a thin plate spring type check valve. To identify the effect of mounting an additional mass to the existing check valve on the load pressure, a simple brake system with a small piezoelectric-hydraulic pump was modeled using a commercial code AMESim. The AMESim modeling was verified by comparing the simulation results with the experimental results of the pump the existing check valve. The additional mass was added to the verified AMESim modeling and higher load pressure was able to be obtained through simulation. The 35% performance improvement in load pressure identified by carrying out pressurization test of the brake system after adopting the new check valve the small piezoelectric-hydraulic pump.

A Comparative Study on Degradation of BTEX Vapor by O3/UV, TiO2/UV, and O3/TiO2/UV System with Operating Conditions (운전조건에 따른 O3/UV, TiO2/UV 및 O3/TiO2/UV 시스템의 BTEX 증기처리에 관한 비교 연구)

  • Kim, Kyoung-Jin;Park, Ok-Hyun
    • Journal of Korean Society for Atmospheric Environment
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    • v.24 no.1
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    • pp.91-99
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    • 2008
  • A multilayer tower-type photoreactor, in which $TiO_2$-coated glass-tubes were installed, was used to measure the vapor-phase BTEX removal efficiencies by ozone oxidation ($O_3$/UV), photocatalytic oxidation ($TiO_2$/UV) and the combination of ozone and photocatalytic oxidation ($O_3/TiO_2$/UV) process, respectively. The experiments were conducted under various relative humidities, temperatures, ozone concentrations, gas flow rates and BTEX concentrations. As a result, the BTEX removal efficiency and the oxidation rate by $O_3/TiO_2$/UV system were highest, compared to $O_3$/UV and $TiO_2$/UV system. The $O_3/TiO_2$/UV system accelerated the low oxidation rate of low-concentration organic compounds and removed organic compounds to a large extent in a fixed volume of reactor in a short time. Therefore, $O_3/TiO_2$/UV system as a superimposed oxidation technology was developed to efficiently and economically treat refractory VOCs. Also, this study demonstrated feasibility of a technology to scale up a photoreactor from lab-scale to pilot-scale, which uses (i) a separated light-source chamber and a light distribution system, (ii) catalyst fixing to glass-tube media, and (iii) unit connection in series and/or parallel. The experimental results from $O_3/TiO_2$/UV system showed that (i) the highest BTEX removal efficiencies were obtained under relative humidity ranging from 50 to 55% and temperature ranging from 40 to $50^{\circ}C$, and (ii) the removal efficiencies linearly increased with ozone dosage and decreased with gas flow rate. When applying Langmuir-Hinshelwood model to $TiO_2$/UV and $O_3/TiO_2$/UV system, reaction rate constant for $O_3/TiO_2$/UV system was larger than that for $TiO_2$/UV system, however, it was found that adsorption constant for $O_3/TiO_2$/UV system was smaller than that for $TiO_2$/UV system due to competitive adsorption between organics and ozone.

Fabrication of Large Area Transmission Electro-Absorption Modulator with High Uniformity Backside Etching

  • Lee, Soo Kyung;Na, Byung Hoon;Choi, Hee Ju;Ju, Gun Wu;Jeon, Jin Myeong;Cho, Yong Chul;Park, Yong Hwa;Park, Chang Young;Lee, Yong Tak
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.220-220
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    • 2013
  • Surface-normal transmission electro-absorption modulator (EAM) are attractive for high-definition (HD) three-dimensional (3D) imaging application due to its features such as small system volume and simple epitaxial structure [1,2]. However, EAM in order to be used for HD 3D imaging system requires uniform modulation performance over large area. To achieve highly uniform modulation performance of EAM at the operating wavelength of 850 nm, it is extremely important to remove the GaAs substrate over large area since GaAs material has high absorption coefficient below 870 nm which corresponds to band-edge energy of GaAs (1.424 eV). In this study, we propose and experimentally demonstrate a transmission EAM in which highly selective backside etching methods which include lapping, dry etching and wet etching is carried out to remove the GaAs substrate for achieving highly uniform modulation performance. First, lapping process on GaAs substrate was carried out for different lapping speeds (5 rpm, 7 rpm, 10 rpm) and the thickness was measured over different areas of surface. For a lapping speed of 5 rpm, a highly uniform surface over a large area ($2{\times}1\;mm^2$) was obtained. Second, optimization of inductive coupled plasma-reactive ion etching (ICP-RIE) was carried out to achieve anisotropy and high etch rate. The dry etching carried out using a gas mixture of SiCl4 and Ar, each having a flow rate of 10 sccm and 40 sccm, respectively with an RF power of 50 W, ICP power of 400 W and chamber pressure of 2 mTorr was the optimum etching condition. Last, the rest of GaAs substrate was successfully removed by highly selective backside wet etching with pH adjusted solution of citric acid and hydrogen peroxide. Citric acid/hydrogen peroxide etching solution having a volume ratio of 5:1 was the best etching condition which provides not only high selectivity of 235:1 between GaAs and AlAs but also good etching profile [3]. The fabricated transmission EAM array have an amplitude modulation of more than 50% at the bias voltage of -9 V and maintains high uniformity of >90% over large area ($2{\times}1\;mm^2$). These results show that the fabricated transmission EAM with substrate removed is an excellent candidate to be used as an optical shutter for HD 3D imaging application.

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Development of Induction Brazing System for Sealing Instrumentation Feedthrough Part of Nuclear Fuel Test Rig (핵연료조사리그 계장선 통과부위의 밀봉을 위한 유도 브레이징 시스템 개발)

  • Hong, Jintae;Kim, Ka-Hye;Heo, Sung-Ho;Ahn, Sung-Ho;Joung, Chang-Young;Son, Kwang-Jae;Jung, Yang-Il
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.37 no.12
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    • pp.1573-1579
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    • 2013
  • To test the performance of nuclear fuels, coolant needs to be circulated through the test rig installed in the test loop. Because the pressure and temperature of the coolant is 15.5 MPa and $300^{\circ}C$ respectively, coolant sealing is one of the most important processes in fabricating a nuclear fuel test rig. In particular, 15 instrumentation cables installed in a test rig pass through the pressure boundary, and brazing is generally applied as a sealing method. In this study, an induction brazing system has been developed using a high frequency induction heater including a vacuum chamber. For application in the nuclear field, BNi2 should be used as a paste, and optimal process variables for Ni brazing have been found by several case studies. The performance and soundness of the brazed components has been verified by a tensile test, cross section test, and sealing performance test.

An Analysis on Curriculum for Occupational Purpose of the Business Korean Language Curriculum between South Korea and China (한·중 직업교육 중심 비즈니스 한국어 교육 연구)

  • Li, Zhangpei;Park, Changun
    • Asia-pacific Journal of Multimedia Services Convergent with Art, Humanities, and Sociology
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    • v.9 no.2
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    • pp.153-161
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    • 2019
  • The purpose of this study to examine the status of Korean language education, and to examine the future direction between with korean and China. The Korean language course organized by the European Union Chamber of Commerce and Industry, which selects and conducts consignment companies through annual competition every year since 2002, In order to these goals and needs, it is imperative to develop a curriculum that enhances job skills. As Korean language education, a point that is necessary to clarify terms more clearly, which 'vocational education purpose' is widely used in the term of 'business education'. With all languages education, Korean language education is not meant to teach Korean to foreigners, but it is a process by which learners can apply Korean language learned in classroom to various situations, while outside the classroom through teaching and learning. Otherwise, the curriculum in the four-year college Korean language department in China, which is lacking in acquiring the ability to achieve the Korean language education goals and social needs. Korean language education in China is one of foreign language education and it is different from foreign language education such as English education as Minor Languages education.

Study on the Scan Field of Modified Octupole and Quadrupole Deflector in a Microcolumn (마이크로칼럼에서 변형된 4중극 디플렉터와 8중극 디플렉터의 스캔 영역 비교)

  • Kim, Young Chul;Kim, Ho-Seob;Ahn, Seong Joon;Oh, Tae-Sik;Kim, Dae-Wook
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.19 no.11
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    • pp.1-7
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    • 2018
  • In a microcolumn, a miniaturized electrostatic deflector is often adopted to scan an electron beam. Usually, a double octupole deflector is used because it can avoid excessive spherical aberrations by controlling the electron beam path close to the optical axis of the objective lens and has a wide scan field. Studies on microcolumns have been performed to improve the low throughput of an electron column through multiple column applications. On the other hand, as the number of microcolumns increases, the number of wires connected to the components of the microcolumn increases. This will result in practical problems during the process of connecting the wires to electronic controllers outside of the vacuum chamber. To reduce this problem, modified quadrupole and octupole deflectors were examined through simulation analysis by selecting an ultraminiaturized microcolumn with the Einzel lens eliminated. The modified deflectors were designed changing the size of each electrode of the conventional Si octupole deflector. The variations of the scan field and electric field strength were studied by changing the size of active electrodes to which the deflection voltage was to be applied. The scan field increased linearly with increasing deflection voltage. The scan field of the quadrupole deflector and the electric field strength at the center were calculated to be approximately 1.3 ~ 2.0 times larger than those of the octupole deflector depending on the electrode size.

Estimation of Onion Leaf Appearance by Beta Distribution (Beta 함수 기반 기온에 따른 양파의 잎 수 증가 예측)

  • Lee, Seong Eun;Moon, Kyung Hwan;Shin, Min Ji;Kim, Byeong Hyeok
    • Korean Journal of Agricultural and Forest Meteorology
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    • v.24 no.2
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    • pp.78-82
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    • 2022
  • Phenology determines the timing of crop development, and the timing of phenological events is strongly influenced by the temperature during the growing season. In process-based model, leaf area is simulated dynamically by coupling of morphology and phenology module. Therefore, the prediction of leaf appearance rate and final leaf number affects the performance of whole crop model. The dataset for the model equation was collected from SPA R chambers with five different temperature treatments. Beta distribution function (proposed by Yan and Hunt (1999)) was used for describing the leaf appearance rate as a function of temperature. The optimum temperature and the critical value were estimated to be 26.0℃ and 35.3℃, respectively. For evaluation of the model, the accumulated number of onion leaves observed in a temperature gradient chamber was compared with model estimates. The model estimate is the result of accumulating the daily increase in the number of onion leaves obtained by inputting the daily mean temperature during the growing season into the temperature model. In this study, the coefficient of determination (R2) and RMSE value of the model were 0.95 and 0.89, respectively.

Solid-state synthesis of yttrium oxyfluoride powders and their application to plasma spray coating (옥시불화이트륨 분말의 고상합성 및 플라즈마 스프레이 코팅 적용)

  • Lee, Jung-Il;Kim, Young-Ju;Chae, Hui Ra;Kim, Yun Jeong;Park, Seong Ju;Sin, Gyoung Seon;Ha, Tae Bin;Kim, Ji Hyeon;Jeong, Gu Hun;Ryu, Jeong Ho
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.31 no.6
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    • pp.276-281
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    • 2021
  • In order to manufacture a semiconductor circuit, etching, cleaning, and deposition processes are repeated. During these processes, the inside of the processing chamber is exposed to corrosive plasma. Therefore, the coating of the inner wall of the semiconductor equipment with a plasma-resistant material has been attempted to minimize the etching of the coating and particle contaminant generation. In this study, we synthesized yttrium oxyfluoride (YOF) powder by a solid-state reaction using Y2O3 and YF3 as raw materials. Mixing ratio of the Y2O3 and YF3 was varied from 1.0:1.0 to 1.0:1.6. Effects of the mixing ratio on crystal structure and microstructure of the synthesized YOF powder were investigated using XRD and FE-SEM. The synthesized YOF powder was successfully applied to plasma spray coating process on Al substrate.

A Review on Mineralogical and Geochemical Characteristics of Seafloor Massive Sulfide Deposits in Mid-Ocean Ridge and Volcanic Arc Settings: Water-Rock Interaction and Magmatic Contribution (중앙해령 및 섭입대 화산호 지역 해저열수광상의 광물·지구화학적 특성 고찰: 물-암석 상호작용 및 마그마 영향)

  • Choi, Sun Ki
    • Economic and Environmental Geology
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    • v.55 no.5
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    • pp.465-475
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    • 2022
  • The seafloor massive sulfide deposits are important mineral resources for base and precious metals, and their ore genesis and metal contents are mainly controlled by wall-rock leaching process and/or magmatic volatile input from the underlying magma chamber. However, the contribution of two different metal sources to the seafloor hydrothermal mineralization significantly varies in diverse geological settings and thus still remains controversial. In this review, mineralogical and geochemical characteristics of SMS deposits from mid-ocean ridges (MORs) and volcanic arcs were investigated to understand the contribution from different metal sources and to suggest future challenges that need to be addressed. As a result, the genetic occurrences of enargite and cubanite, galena and barite indicate the effects of magmatic input and water-rock interaction, respectively. Also, the distributional behaviors of Co, As, and Hg in pyrite and FeS content of sphalerite could be useful empirical indicators to discriminate the significant roles of different metal sources between MOR and Arc settings. To date, as most studies have focused on sulfide samples recovered from the seabed, further studies on magmatic sulfides and sulfate minerals are required to fully understand the genetic history of SMS deposits.