• 소성∙가공
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• 제12권3호
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• pp.214-220
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• 2003

In the case of hollow cylinder extrusion using porthole die, the effects of extrusion parameters-temperature, the speed of extrusion, the shape of the die and mandrel-on metal flow in porthole die extrusion of aluminum have been investigated. There have been few studies about condenser tube extruded by porthole die. This study was designed to evaluate metal flow, welding pressure, extrusion load, tendency of mandrel deflection according to variation of chamber length in porthole die. The welding chamber height in condenser tube was calculated by using finite element method. Forming analysis results for condenser tube would provide useful information for the optimal design of porthole die.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2002년도 제25회 KOSCI SYMPOSIUM 논문집
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• pp.157-163
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• 2002

Using the CFD method, we investigated the combustion characteristics of grate-rotary kiln incinerator through the residence time, path line of flow and distributions of temperature and CO mass fraction according to the shape of mixing chamber and the existence and nonexistence of baffle at the exit of bypass duct. The results show that the now mixing and residence time could be variable according to the shape of mixing chamber and baffle, and we could know the temperature in the mixing chamber could increase too high if the combustion process on the grate retarded.

• 한국자동차공학회논문집
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• 제9권6호
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• pp.16-23
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• 2001

Spray dispersion in high pressure diesel engines have been simulated experimentally with a special emphasis on the effect of swirl by using a liquid injection technique. A constant volume chamber was designed to be rotatable in order to generate a continuous swirl and to have the flow field closely resembling a solid body rotation. Emulsified fuel was injected into the chamber and the developing process of fuel sprays was visualized. The effect of swirl on the spray dispersion was quantified by calculating non-dimensionalized dispersion area according to the spray tip penetration length. The results show that the effect of swirl on the spray dispersion is different between short and long spray penetrations. For short range of spray tip penetration, the effect of swirl on spray dispersion is quite small. However, as the spray tip is penetrated into longer distance in spray chamber, the effect of swirl on spray dispersion becomes larger. These results can be used as a basic data for designing combustion chamber and injection system of direct injection diesel engine.

• 한국분무공학회지
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• 제2권2호
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• pp.43-50
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• 1997

The purpose of this investigation is to carry out, the influence factor on the fuel spray characteristics for improve the engine combustion performance and exhaust omission in direct injection type diesel engine. The fuel properties, fuel spray structure and the shape or the piston surface of diesel engine play an important role of engine combustion process and exhaust emission. In order to obtain the effect of using auxiliary chamber and emulsified fuel on the fuel spray characteristics the experiment un conduct with single cylinder direct injection type diesel engine to examine the engine performance and gas emission. The results of this investigation showed that the increase auxiliary chamber volume and emulsified fuel give an effect on the fuel spray characteristics by reduced the concentration of nitric oxide emission in the combustion chamber. Also it can improve the combustion characteristics such as cylinder pressure, rate of pressure rise and rate of heat release.

• 반도체디스플레이기술학회지
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• 제2권4호
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• pp.9-12
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• 2003

This paper describes a newly developed simulation environment for analysis and design of a plasma processing chamber based on first principles including complicated physical and chemical interactions of plasma, fluid dynamics of neutrals, and transport phenomena of particles. Capabilities of our simulator, named VIP-SEPCAD (Virtual Integrated Prototyping Simulation Environment for Plasma Chamber Analysis and Design), are demonstrated through a two dimensional simulation of an oxygen plasma chamber. VIP-SEPCAD can provide plasma properties such as spatiotemporal profiles of plasma density and potential, electron temperature, ion flux and energy, etc. By coupling neutral and particle transport models with a three moment plasma model, VIP-SEPCAD can also predict spatiotemporal profiles of chemically reactive species and particles exist in plasma.

• 한국연소학회지
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• 제1권2호
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• pp.21-29
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• 1996

Flame propagation characteristics of propane-air mixtures were experimentally investigated in constant-volume combustion chambers. Flame propagation process was observed as a function of mixture strength, initial mixture temperature and initial mixture pressure in quiescent mixtures. A cylindrical combustion chamber and a spherical combustion chamber contain a pair of parallel windows through which optical access into the chamber can be provided. Laser two beam deflection method was adopted to measure the local flame propagation, which gave information on the flame size and flame propagation speed. Pressure development was also measured by a piezoelectric pressure transducer to characterize combustion in quiescent mixtures. Burning velocity was calculated from flame propagation and pressure measurements. The effect of flow on flame propagation was also investigated under flowing mixture conditions. Laser two beam method was found to be feasible in measuring flame propagation of quiescent mixtures. Flame was observed to propagate faster with higher initial mixture temperature and lower initial pressure. Combustion duration was shortened in the highly turbulent flowing mixtures.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.934-937
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• 2005

It is not efficient and scarcely out of the question to use commercial expensive electron beam lithography system widely used for semiconductor fabrication process for the manufacturing application field of various devices in the small business scope. Then scanning electron microscope based electron beam machining system is maybe regarded as a powerful model can be used for it simply. To get a complete suite of thus proper system, proper chamber with high vacuum condition is necessarily required more than anything else to modify scanning electron microscope. In this study, special chamber unit using rotary pump and diffusion pump to obtain high vacuum degree was designed and manufactured and various evaluation tests fur recognize the vacuum characteristic were accomplished.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2017년도 제48회 춘계학술대회논문집
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• pp.857-863
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• 2017

본 논문은 다단연소사이클 엔진의 연소실 내벽을 고온, 고압의 환경으로부터 보호하기 위한 열차폐 코팅 공정 개발에 관한 내용이다. 기존 연소기 내벽에는 열차폐 특성이 우수한 Zr 기반의 세라믹용사코팅을 적용했지만, 세라믹의 특성상 연소실 내벽(금속)과 열팽창계수 차이로 인해 박리가 발생할 수 있다. 때문에 로켓 선진국에서는 열차폐 효과를 다소 희생 하더라도 밀착력 향상을 위하여 금속계 코팅인 Ni-Cr 도금을 적용하고 있다. 본 연구에서는 연소기에 적용 가능한 상향 순환식 유동셀을 적용한 도금조를 개발했으며, 반복적인 공정 개선을 통해 도금 두께 $100{\mu}m$이상, ${\pm}10%$의 두께 균일도를 만족하는 Ni, Cr 도금 공정조건을 확립했다.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2008년 영문 학술대회
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• pp.680-685
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• 2008

The ejector is a simple device which can transport a low-pressure secondary flow by using a high-pressure primary flow. In general, it consists of a primary driving nozzle, a mixing section, and a diffuser. The ejector system entrains the secondary flow through a shear action generated by the primary jet. Until now, a large number of researches have been made to design and evaluate the ejector systems, where it is assumed that the ejector system has an infinite secondary chamber which can supply mass infinitely. However, in almost all of the practical applications, the ejector system has a finite secondary chamber implying steady flow can be possible only after the flow inside ejector has reached an equilibrium state after the starting process. To the authors' best knowledge, there are no reports on the starting characteristics of the ejector systems and none of the works to date discloses the detailed flow process until the secondary chamber flow reaches an equilibrium state. The objective of the present study is to investigate the starting process of an ejector-diffuser system. The present study is also planned to identify the operating range of ejector-diffuser systems where the steady flow assumption can be applied without uncertainty. The results obtained show that the one and only condition in which an infinite mass entrainment is possible is the generation of a recirculation zone near the primary nozzle exit. The flow in the secondary chamber attains a state of dynamic equilibrium at this point.

• 반도체디스플레이기술학회지
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• 제23권2호
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• pp.114-122
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• 2024

NF₃, Chamber cleaning gas, has a high Global Warming Potential (GWP) of 17,000, causing significant greenhouse effects. Reducing gas usage during the cleaning process is crucial while increasing the cleaning Rate and reducing cleaning standard deviation (Stdev). In a previous study with a 6-inch PECVD chamber, a multiple linear regression analysis showed that Power and Pressure had no significant effect on the cleaning Rate because of their P-values of 0.42 and 0.68. The weight for Flow is 11.55, and the weights for Power and Pressure are 1.4 and 0.7. Due to the limitations of the research equipment, which differed from those used in actual industrial settings, it was challenging to assess the effects in actual industrial environment. Therefore, to show an actual industrial environment, we conducted the cleaning process on a 12-inch PECVD chamber, which is production-level equipment, and quantitatively analyzed the effects of each variable. Power, Pressure, and NF3 Flow all had P-values close to 0, indicating strong statistical significance. The weight for Flow is 15.68, and the weights for Power and Pressure are 4.45 and 5.24, respectively, showing effects 3 and 7 times greater than those with the 6-inch equipment on the cleaning rate. Additionally, we analyzed the cleaning Stdev and derived that there is a trade-off between increasing the cleaning Rate and reducing the cleaning Stdev.