• Title/Summary/Keyword: Process

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A Study on 0.13μm Cu/Low-k Process Setup and Yield Improvement (0.13μm Cu/Low-k 공정 Setup과 수율 향상에 관한 연구)

  • Lee, Hyun-Ki;Chang, Eui-Goo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.20 no.4
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    • pp.325-331
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    • 2007
  • In this study, the inter-metal dielectric material of FSG was changed by low-k material in $0.13{\mu}m$ foundry-compatible technology (FCT) device process based on fluorinated silicate glass (FSG). Black diamond (BD) was used as a low-k material with a dielectric constant of 2.95 for optimization and yield-improvement of the low-k based device process. For yield-improvement in low-k based device process, some problems such as photoresist (PR) poisoning, damage of low-k in etch/ash/cleaning process, and chemical mechanical planarization (CMP) delamination must be solved. The PR poisoning was not observed in BD based device. The pressure in CMP process decreased to 2.8 psi to remove the CMP delamination for Cu-CMP and USG-CMP. $H_2O$ ashing process was selected instead of $O_2$ ashing process due to the lowest condition of low-k damage. NE14 cleaning after ashing process lot the removal of organic residues in vias and trenches was employed for wet process instead of dilute HF (DHF) process. The similar-state of SRAM yield was obtained in Cu/low-k process compared with the conventional $0.13{\mu}m$ FCT device by the optimization of these process conditions.

Adopting Process Management-the Importance of Recognizing the Organizational Transformation

  • Hellstrom, Andreas;Peterson, Jonas
    • International Journal of Quality Innovation
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    • v.7 no.1
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    • pp.20-34
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    • 2006
  • The purpose of this study is to investigate what happens within an organization when a process view of the business is adopted. With the example of an empirical case, we aim to illustrate: how members of the organization make sense of process management; what contributions members of the organization consider to be the result of adopting a process view; and the relationship between the functional and the process structure. The empirical base in this study is one of Sweden's largest purchasing organizations within the public sector. The results are drawn from interviews with the process owners and a survey to all members involved in process teams. The case findings reveal an ambiguous image of process management. At the same time as process management solved specific organizational problems, it generated new dilemmas. It is argued that it is more rewarding to consider the adoption of the process view a 'social negotiation' rather than the result of planned implementation. The study also highlights that the meaning of process management is not anything given but something being created, and its negotiation and translation into organizational practice is open-ended. Furthermore, the study gives an illustration of the conflict between the adopted process view and the existing functional organization.

Minimization of Residual Stress of the Steel Cord for the Tire-reinforcement Using Finite Element Analysis (유한요소해석을 이용한 타이어 보강재용 스틸코드의 잔류응력 최소화)

  • Lee, Jong-Sup;Huh, Hoon;Lee, Jun-Wu;Lee, Byung-Ho
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2008.05a
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    • pp.201-204
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    • 2008
  • In this paper, several process parameter studies of the manufacturing process of the steel cords are carried out to verify the relation between the process parameters and the residual stresses on the steel cords. At first, the finite element analysis of the drawing process is performed and the residual stress distributions with respect to the wire material and the area reduction ratio are obtained. The residual stress of the drawn wire is imported the finite element analysis of the twisting process as an initial stress. After that a parameter study of the twisting process is carried out. The process parameters are the applied tension, the over-twisting angle and the tensile strength of the drawn wire. Based on these studies, the optimum values of the process parameters which can remove or reduce the undesired residual stresses are determined. The optimum value of the process parameters are confirmed by the finite element analysis of the elastic recovery process of the steel cords. Finally, the finite element analysis of the roller straightening process is done to study the variation of the distribution of the residual stress before and after the process.

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Rule-based Process Control System for multi-product, small-sized production (다품종 소량생산 공정을 위한 규칙기반 공정관리 시스템)

  • Im, Kwang-Hyuk
    • Journal of Korea Society of Industrial Information Systems
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    • v.15 no.1
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    • pp.47-57
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    • 2010
  • There have been many problems to apply SPC(Statistical Process Control) which is a traditional process control technology to the process of multi-product, small-sized production because a machine in the process manufactures small numbers, but various kinds of products. Therefore, we need the new process control system that can flexibly control the process by setting up the SPEC rules and the KNOWHOW rules. The SPEC rule contains the combination of diverse conditions to specify the characteristics of various products. The KNOWHOW rule is based on engineers' know-how. The study suggests the Rule-base Process Control that can be optimized to the multi-product, small-sized production. It was validated in the process of semiconductor production.

Development of the ISEP Based on Systems Engineering (시스템엔지니어링을 적용한 ISEP 개발에 관한 연구)

  • Byun, BoSuk;Choi, YoChul;Park, Young T.
    • Journal of Korean Society for Quality Management
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    • v.41 no.4
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    • pp.725-735
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    • 2013
  • Purpose: The purpose of this study is to propose an Integrated Safety Evaluation Process (ISEP) that can enhances the safety aspect of the safety-critical system. This process utilizes the advantages of the iterative Systems Engineering process combined with the safety assessment process that is commonly and well defined in many standards and/or guidelines for railway, aerospace, and other safety-critical systems. Methods: The proposed process model is based on the predefined system lifecycle, in each phase of which the appropriate safety assessment activities and the safety data are identified. The interfaces between Systems Engineering process and the safety assessment process are identified before the two processes are integrated. For the integration, the elements at lower level of Systems Engineering process are combined with the relevant elements of safety assessment process. This combined process model is represented as Enhanced Functional Flow Block Diagram (EFFBD) by using CORE(R) that is commercial modelling tool. Results: The proposed model is applied to the lifecycle and management process of the United States aircraft system. The US aircraft systems engineering process are composed of twelve key elements, among which the requirements management, functional analysis, and Synthesis processes are considered for examplenary application of the proposed process. To synchronize the Systems Engineering process and the safety assessment process, the Systems Engineering milestones are utilized, where the US aircraft system has thirteen milestones. Taking into account of the nine steps in the maturity level, the integrated process models are proposed in some phases of lifecycle. The flows of processes are simulated using CORE(R), confirming the flows are timelined without any conflict between the Systems Engineering process and the safety assessment process. Conclusion: ISEP allows the timeline analysis for identifying activity and data flows. Also, the use of CORE(R) is shown to be effective in the management and change of process data, which helps for the ISEP to apply for the development of safety critical system. In this study, only the first few phases of lifecyle are considered, however, the implementation through operation phases can be revised by combining the elements of safety activities regarding those phases.

A comparative study on the carbon dioxide removal capability between the processes using physical solvent and membrane process (이산화탄소 제거공정에서 물리 흡수제를 사용한 공정과 멤브레인을 사용한 공정 사이의 비교 연구)

  • Kang, Jinjin;Noh, Jaehyun;Ahn, June Shu;Cho, Jungho
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.14 no.12
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    • pp.6590-6596
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    • 2013
  • Carbon dioxide should be removed to increase the productivity of dimethyl ether(DME) from the DME manufacturing process. In this study, carbon dioxide can be removed using a physical absorbent through a solvent absorption method and membrane separation method. After performing the simulation for the carbon dioxide removal process, the energy consumption of the processes was compared. Methanol was used as a physical absorbent for the rectisol process, dimethyl ethers of polyethylene glycol for the Selexol process and N-methyl pyrrolidone for the Purisol process. By performing the simulation for each process, the energy consumption was compared. The Purisol process had the lowest energy consumption, followed in order by the Selexol process, Rectisol process and Membrane process. Therefore, the Purisol process was the most suitable method for the carbon dioxide process in the DME manufacturing process.

Effect of gas hydrate process on energy saving for reverse osmosis process in seawater desalination plant (해수담수화플랜트에서 가스 하이드레이트 공정 도입을 통한 역삼투 공정의 에너지 절감 효과)

  • Kim, Suhan;Lim, Jun-Heok
    • Journal of Korean Society of Water and Wastewater
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    • v.27 no.6
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    • pp.771-778
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    • 2013
  • Gas hydrate (GH) process is a new desalination technology, where GH is a non- stoichiometric crystalline inclusion compounds formed by water and a number of gas molecules. Seawater GH is produced in a low temperature and a high pressure condition and they are separated from the concentrated seawater. The drawback of the GH process so far is that salt contents contained in its product does not meet the fresh water quality standard. This means that the GH process is not a standalone process for seawater desalination and it needs the help of other desalting process like reverse osmosis (RO). The objective of this study is to investigate the effect of GH process on energy saving for RO process in seawater desalination. The GH product water quality data, which were obtained from a literature, were used as input data for RO process simulation. The simulation results show that the energy saving effect by the GH process is in a range of 68 % to 81 %, which increases as the salt removal efficiency of the GH process increases. Boron (B) and total dissolved solids (TDS) concentrations of the final product of the hybrid process of GH and RO were also investigated through the RO process simulation to find relavant salt rejection efficiency of the GH process. In conclusion, the salt rejection efficiency of the GH process should exceed at least 78% in order to meet the product water quality standards and to increase the energy saving effect.

Workflow Process-Aware Data Cubes and Analysis (워크플로우 프로세스 기반 데이터 큐브 및 분석)

  • Jin, Min-hyuck;Kim, Kwang-hoon Pio
    • Journal of Internet Computing and Services
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    • v.19 no.6
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    • pp.83-89
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    • 2018
  • In workflow process intelligence and systems, workflow process mining and analysis issues are becoming increasingly important. In order to improve the quality of workflow process intelligence, it is essential for an efficient and effective data center storing workflow enactment event logs to be provisioned in carrying out the workflow process mining and analytics. In this paper, we propose a three-dimensional process-aware datacube for organizing workflow enterprise data centers to efficiently as well as effectively store the workflow process enactment event logs in the XES format. As a validation step, we carry out an experimental process mining to show how much perfectly the process-aware datacubes are suitable for discovering workflow process patterns and its analytical knowledge, like enacted proportions and enacted work transferences, from the workflow process enactment event histories. Finally, we confirmed that it is feasible to discover the fundamental control-flow patterns of workflow processes through the implemented workflow process mining system based on the process-aware data cube.

Optimization of an Advanced Oxidation with Ozone and Ceramic Membrane Integrated Process for Greywater Reuse (중수 재이용을 위한 오존 고도산화 및 세라믹 분리막 일체형 공정의 최적화 연구)

  • Lee, Jonghun;Rho, Hojung;Park, Kwang Duck;Woo, Yun Chul
    • Journal of Korean Society on Water Environment
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    • v.37 no.6
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    • pp.433-441
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    • 2021
  • The aim of this study was to optimize the ozonation and ceramic membrane integrated process for greywater reclamation. The integrated process is a repeated sequential process of filtration and backwash with the same ceramic membrane. Also, this study used ozone and oxygen gas for the backwashing process to compare backwashing efficiency. The study results revealed that the optimum filtration and backwash time for the process was 10 minutes each when comparing the filtrate flow and membrane recovery rate. The integrated process was operated at three different operating conditions with i) 10 minutes for filtration and 10 minutes for ozonation, ii) 10 minutes for filtration and 10 minute for oxygen aeration, and iii) continuous filtration without any aeration for synthetic greywater. The integrated process with ozone backwashing could produce 0.55 L/min of filtrate with an average of 18.42% permeability recovery, while the oxygen backwashing produced 0.47 L/min and 6.26%, respectively. And without any backwashing, the integrated process could produce 0.29 L/min. This shows that the ozone backwash process is capable of periodically recovering from membrane fouling. The resistance of the fouled membrane was approximately 34.4% for the process with ozone backwashing, whereas the resistance was restored by 10.8% for the process with oxygen backwashing. Despite the periodical ozone backwashing and chemical cleaning, irreversible fouling gradually increased approximately 3 to 4%. Approximately 97.6% and 15% turbidity and TOC were removed by ceramic membrane filtration, respectively. Therefore, the integrated process with ozonation and ceramic membrane filtration is a potential greywater treatment process.