• 한국정밀공학회지
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• 제23권6호
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• pp.166-173
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• 2006

In this study, a probe array has been developed for use in a data storage device that is based on scanning probe microscope (SPM) and MEMS technology. When recording data bits by poling the PZT thin layer and reading them by sensing its piezoresponse, commercial probes of which the tip heights are typically shorter than $3{\mu}m$ raise a problem due to the electrostatic forces occurring between the probe body and the bottom electrode of a medium. In order to reduce this undesirable effect, a poly-silicon probe with a high aspect-ratio tip was fabricated using a molding technique. Poly-silicon probes fabricated by the molding technique have several features. The tip can be protected during the subsequent fabrication processes and have a high aspect ratio. The tip radius can be as small as 15 nm because sharpening oxidation process is allowed. To drive the probe, electrostatic actuation mechanism was employed since the fabrication process and driving/sensing circuit is very simple. The natural frequency and DC sensitivity of a fabricated probe were measured to be 18.75 kHz and 16.7 nm/V, respectively. The step response characteristic was investigated as well. Overshoot behavior in the probe movement was hardly observed because of large squeeze film air damping forces. Therefore, the probe fabricated in this study is considered to be very useful in probe-based data storages since it can stably approach toward the medium and be more robust against external shock.

• 대한교통학회지
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• 제26권4호
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• pp.123-133
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• 2008

최근 교통 물류 분야에서도 유비쿼터스 환경의 정보수집체계 및 이를 응용한 서비스 개발의 필요성이 매년 높아지고 있다. 프로브 차량과 무선통신기술을 활용한 교통정보 수집체계는 그 대표적인 사례로 차량의 기종점 자료를 이용하여 시간대별 OD를 산정하는 것이 가능하다. 그러나 프로브 차량 정보를 활용하여 산정된 OD는 시간적 공간적으로 변동되는 표본OD이기 때문에 이를 정적OD로 전환하기 위해서는 수집정보를 집적하여 적정 표본율을 산정하고, 표본OD를 전수화하는 과정이 필요하다. 본 연구는 제주시를 대상으로 수집된 실제 데이터를 표본OD 산정 및 전수화 알고리즘에 적용하여 표본OD를 산정하고 이를 전수화하였다. 각 링크별 관측교통량과 배분교통량과의 오차를 비교 검토한 결과 링크별 관측교통량 과 배분교통량의 평균 오차율은 22.9%, 상 하위 10%의 이상 자료를 제거한 후의 평균 오차율은 17.6%로 각각 나타났다. 본 연구는 기존OD가 존재하지 않는 지역에서 프로브 차량의 경로정보를 활용하여 정적OD를 산정하였다는 점과 적정 오차율 내 수렴을 위한 적정 표본율을 제시하였다는 점에서 그 의의를 찾을 수 있다.

• Journal of Biosystems Engineering
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• 제22권1호
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• pp.59-67
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• 1997

An experimental apparatus was developed for the rapid determination of thermal conductivity by transient probe method. The theoretical basis for transient probe method has been investigated. The mathematical model for this method is the Carslaw and Jaeger model which is used perfect line source theory. The small needle probe which is equipped with thermocouple and heating element is constructed. A software that performs data analysis and acquisition is programmed. The influence of the power dissipated per unit length of the probe has been assessed for glycerin. The result showed no significant correlation between thermal conductivity and power input. Determination made with this experimental apparatus were found to agree well with the recommended thermal conductivity data.

• 반도체디스플레이기술학회지
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• 제20권3호
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• pp.27-31
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• 2021

VI probe, which is one of various in-situ plasma monitoring sensor, is frequently used for in-situ process monitoring in mass production environment. In this paper, we correlated the plasma etch results with VI probe data with the small amount of gas flow rate changes to propose usefulness of the VI probe in real-time process monitoring. Several different sized contact holes were employed for the etch experiment, and the etched profiles were measured by scanning electron microscope (SEM). Although the shape of etched hole did not show satisfactory relationship with VI probe data, the chamber status changed along the incremental/decremental modification of the amount of gas flow was successfully observed in terms of impedance monitoring.

• Corrosion Science and Technology
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• 제2권2호
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• pp.98-101
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• 2003

The Electrical Resistance Probe of carbon steel and weight loss coupons were exposed in atmosphere and in the lake water of Hanoi. The comparison of data received by two methods after one year exposure was presented. The correspondence of the data of these methods on the exposure time in both environments showed a capacity of using Electrical Resistance Probe in Vietnamese natural corrosion testing of Carbon steel.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.552-555
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• 2004

The reliability issue of the probe tip/recording media interface is one of the most crucial concerns in the Atomic Force Microscope (AFM)-based recording technology. In this work, the tribological characteristics of the probe/media interface were investigated by performing wear tests using an AFM. The ranges of applied normal load and sliding velocity for the wear test were 10 to 50nN and 2 to 20$\mu$m/s respectively. The damage of the probe tip was quantitatively as well as qualitatively characterized by Field Emission Scanning Probe Microscope (FESEM) analysis and calculated based on Archard s wear equation. It was shown that the wear coefficient of the probe tip was in the order of 10$^{-4}$ ~ 10$^{-3}$ , and significant contamination at the end of the probe tip was observed. Thus in order to implement the AFM-based recording technology, tribological optimization of the probe/media interface must be achieved.

• 대한토목학회논문집
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• 제31권1D호
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• pp.43-50
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• 2011

택시 프로브(Probe)를 이용한 구간통행속도 모니터링체계는 지능형교통체계(ITS)의 핵심적인 하부시스템 중 하나이다. 택시 프로브기법을 통해 수집되는 구간통행속도는 도시가로망의 교통상태 모니터링과 통행시간 정보제공에 널리 활용되고 있다. 그러나 택시 Probe기법은 표본수가 적고 교통혼잡으로 인하여 구간통행시간이 자료수집 주기보다 큰 경우, 실시간으로 자료가 수집되지 않는 누락상태가 발생하게 된다. 이러한 누락상태는 단일시간대에서 다중시간대에 걸쳐 발생하게 되며, 기존의 단일시간대 예측기법으로는 다중시간대의 상태를 예측하지 못하는 단점이 있다. 따라서 다중시간대 누락상태에서 실시간 구간통행속도를 예측하기위한 기법이 요구된다. 본 연구에서는 기존의 단일시간대 예측기법의 한계를 극복하면서 단일 및 다중시간대 통행속도를 예측하기위한 기법을 개발하였다. 개발된 모형은 비모수회귀(NPR)을 기반으로 개발되었으며, 다중시간대 예측에도 불구하고 기존의 단일시간대 예측기법보다 우수한 정확도를 보였다.

• 정보저장시스템학회논문집
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• 제1권1호
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• pp.73-77
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• 2005

In this paper, a new silicon nitride cantilever integrated with silicon heater and piezoelectric sensor has been firstly developed to improve the uniformity of the initial bending and the mechanical stability of the cantilever array for thermo-piezoelectric SPM(scanning probe microscopy) -based data storages. This nitride cantilever shows thickness uniformity less than $2\%$. Data bits of 40 nm in diameter were recorded on PMMA film. The sensitivity of the piezoelectric sensor was 0.615 fC/nm after poling the PZT layer. For high speed operation, 128${\times}$128 probe array was developed.

• Genomics & Informatics
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• 제9권1호
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• pp.28-36
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• 2011

Most statistical methods for finding interesting genes are focusing on the summary values with large fold-changes or large variations. Very few methods consider the probe level data. We developed a new measure to detect reliability that incorporates the probe level data. This reliability measure is useful for exploring the microarray data without ignoring the probe level data. It is easy to calculate, and it can be used for all the other statistical methods as a good guideline to find real differentially expressed genes. Instead of filtering out genes before the analysis, we use whole genes in the analysis and make decisions with new reliability measures.

• 한국지반공학회:학술대회논문집
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• 한국지반공학회 2008년도 춘계 학술발표회 초청강연 및 논문집
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• pp.119-126
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• 2008

Ground stiffness(shear wave velocity) is one of the key parameters in geotechnical earthquake engineering. An In-situ seismic technique has its own advantages and disadvantages over the others in stiffness measurements. By combining the crosshole and seismic cone techniques and utilizing favourable features of bender elements, a new hybrid probe has been developed in order to enhance data quality and easiness of testing. The basic structure of the probe, called "MudFork", is a fork composed of two blades, on each of which source and receiver bender elements were mounted respectively. To evaluate the disturbance caused by the penetration of the probe, shear wave velocity measurements were carried out in the Kaolinite slurry in the laboratory. Finally, the probe was penetrated in coastal mud near Incheon, Korea, using SPT(standard penetration test)rods pushed with a routine boring machine and shear wave velocity measurements were carried out. The results were verified with data from laboratory and cone testing. The performance of the probe turns out to be excellent in terms of data quality and testing convenience.