• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.257-257
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• 2010

디스플레이 산업의 발달로 화상 영상폰, 디지털 카메라, MP4, PMP, 네비게이션, LCD TV등의 가전 제품의 수요증가에 따라 이에 장착되는 LCD 패널의 생산력 향상과 원가 절감을 위한 검사 기술이 요구되고 있다. LCD 검사를 위한 Probe unit은 미세전기기계시스템(MEMS) 공정을 이용하여 제작된다. LCD 검사용 Probe unit는 LCD 가장자리 부분에 전기적 신호(영상신호, 등 기신호, 색상신호)가 인가되도록 하는 수 십 내지 수 백개의 접속 단자가 고밀도로 배치되는데, 이러한 LCD는 제품에 장착되기 전에 시험신호를 인가하여 화면의 불량여부를 검사하기 위한 점등용 부품으로 50 um 이하의 Pin간 거리를 유지하면서 정확한 Pin Alignment를 요구하는 초정밀 부품이다. 본 연구에서는 반도체용 Si wafer에 마스크 공정 및 slit etching 공정을 적용하여 목표인 30 um pitch의 Probe unit을 개발하기 위해 Deep Si Etching(DRIE) 장비를 이용하여 식각 공정에 따른 특성을 평가하였다. 마스크 공정은 500 um 두께의 양면 연마된 반도체용 Si wafer를 이용하였으며, thick PR을 사용하여 마스킹하여 식각공정을 수행하였다. Si 깊은 식각은 $SF_6$ 가스와 Passivation용으로 $C_4F_8$ 가스를 교대로 사용하여 수직방향으로 깊은 식각이 이루어지는 원리이다. SEM 측정 결과 30 um pitch의 공정 목표에 도달하였으며, 식각공정 결과 식각율 6.2 um/min, profile angle $89.1^{\circ}$로 측정되었다. 또한 상부 에칭공정과 이면 에칭공정에서 폭과 wall의 간격이 동일하였으며, 완전히 관통된 양면식각이 이루어졌음을 확인하였다. 또한 실제 사용되는 probe unit의 조립에 적합한 slit 공정을 위한 에칭특성을 조사하였다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2591-2596
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• 2007

The effect of incidence angle on the three-dimensional flow and aerodynamic loss in the downstream region of a high-turning turbine rotor blade has been investigated with a straight miniature five-hole probe. The incidence angle is changed to be +10, +5, 0, -10, -20, -30 and -40 degrees. The results show that the positive incidence reinforces the three-dimensional vortical flows within the turbine passage including the passage vortex, but the negative incidence weaken them significantly. A small increment in the positive incidence angle results in a remarkable aerodynamic loss increase, while increasing the incidence angle in the negative range leads to a very small change in the aerodynamic loss.

• Food Science and Biotechnology
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• 제16권2호
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• pp.234-237
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• 2007

Water resistance of three biopolyester films, such as poly-L-lactate (PLA), poly-hydroxybutyrate-co-valerate (PHBV), and Ecoflex, and low density polyethylene (LDPE) film was investigated by measuring contact angle of various probe liquids on the films. The properties measured were initial contact angle of water, dynamic change of the water contact angle with time, and the critical surface energy of the films. Water contact angle of the biopolyester films ($57.62-68.76^{\circ}$) was lower than that of LDPE film ($85.19^{\circ}$) indicating biopolyester films are less hydrophobic. The result of dynamic change of water contact angle also showed that the biopolyester films are less water resistant than LDPE film, but much more water resistant than cellulose-based packaging materials. Apparent critical surface energy for the biopolyester films (35.15-38.55 mN/m) was higher than that of LDPE film (28.59 mN/m) indicating LDPE film is more hydrophobic.

• 한국압력기기공학회 논문집
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• 제9권1호
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• pp.8-14
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• 2013

Steam turbine blades and discs of nuclear power plants are one of the most highly stressed areas of turbine rotor, and periodic inspection of the blade roots is essential for monitoring integrity and preventing turbine failure. Ultrasonic technique is applied for volumetric inspection of blade root. However, the complexity of blade root geometry imposes challenges to inspection of blades and discs. Recently, phased array ultrasonic inspection technology is being applied to numerous power generation inspection applications including turbine rotor. The phased array ultrasonic technique requires customized inspection wedges which are generally necessary to generate effectively higher incident angle. But the usage of this wedge can cause access limitation for the lower stage blades of turbine because of the wedge front length. Therefore, the shear wave phased array probe which can generate high inspection angle without wedge is essentially necessary. In this study, feasibility study is conducted for the shear wave phased array ultrasonic probe application to blade and disc inspection. As results, the experimental results show that the shear wave phased array probe can detect the flaw and measure its size with reliable accuracy. Therefore if this shear wave phased array probe is applied to field inspection of blade and disc, more reliable inspection is expected for turbine having access limitation.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2000년도 유체기계 연구개발 발표회 논문집
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• pp.36-44
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• 2000

The flow at the impeller exit is important to validate engineering design and numerical analysis of pumps. We installed axisymmetric collector instead of the volute casing, so there is no interaction between the impeller and casing. A hot-film probe and a high response pressure transducer are used to investigate the flow at impeller exit and vaneless diffuser region for design and off design flow rate. For a single suction centrifugal pump of low specific speed, the flow field such as velocity, flow angle, and total pressure are measured by traversing the probe across the vaneless diffuser. These data can be used for performance prediction, design, and numerical analysis of pumps.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.169-172
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• 2000

In this paper, an OMM (On-the-Machine Measuring) system has been developed, which can perform measuring and inspection of sculptured surfaces of die and mold, by use of a scanning-type touch probe mounted into the spindle of a NC machine. The calibration procedures of a scanning prove (SP2-1, Renishaw) and an algorithm for measuring surface points by a ball-nosed stylus have been studied. The system has been developed based on commercial CAM software (Z-Master 2000), and tested through measuring a plastic injection molding-die. Also some experimental results of the calibration and measuring for given surface positions are analyzed to verify its accuracy and reliability.

• 대한기계학회논문집
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• 제11권5호
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• pp.746-754
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• 1987

본 연구에서는 X형 프로우브에 Mojolla의 방법을 적용하였으며, 경사프로우브 에는 프로우브의 경사각도와 회전각도에 따른 속도성분과 출력전압과의 관계를 유도하 여 적용하였으며, 이들 방법에 의한 3차원 유동계측의 정확성과 적용법위를 조사하였 다.

• 한국항공우주학회지
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• 제34권5호
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• pp.30-38
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• 2006

기존의 전통적인 회귀분석 기반 교정방법에 비해 높은 교정정밀도를 얻을 수 있는 5-hole pressure probe의 교정방안을 연구하였다. 이 새로운 교정기법은 교정시험으로부터 획득한 데이터와 곡선적합 결과간의 차이를 이용하여 산정한 단일 영역에 대한 오차보간 반응곡면을 사용한다. 끝단의 직경이 4.0 mm인 5-hole probe를 자체 제작하고, 레이놀즈수$4.11{\times}10^6$/m와 흐름각 ${\pm}48$에서 교정시험을 수행하였다. 최소자승 회귀분석모델과 단일영역 오차보간 모델을 적용하여 자료처리를 수행하고 이들 두 교정방안에 대한 비교평가와 분석을 수행하였으며, 아울러 교정 정밀도에 대한 평가도 수행하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.181.2-181.2
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• 2015

Sputtering is one of the most popular physical deposition methods due to their versatility and reproducibility. Synthesis of Cr thin films by DC magnetron sputtering using glancing angle deposition (GLAD) has been reported. Chromium thin films have been prepared at two different working pressure($2.0{\times}10-2$, 30, $3.3{\times}10-3torr$) on Si-wafer substrate using magnetron sputtering with glancing angle deposition (GLAD) technique. The thickness of Cr thin films on the substrate was adjusted about 1 mm. The electrical property was measured by four-point probe method. For the measurement of density in the films, an X-ray reflectivity (XRR) was carried out. The sheet resistance and column angle increased with the increase of glancing angle. However, nanohardness and density of Cr thin films decreased as the glancing angle increased. The measured density for the Cr thin films decreased from 6.1 to 3.8 g/cc as the glancing angle increased from $0^{\circ}$ to $90^{\circ}$ degree. The low density of Cr thin films is resulted from the isolated columnar structure of samples. The evolution of the isolated columnar structure was enhanced at the conditions of low sputter pressure and high glancing angle. This GLAD technique can be potentially applied to the synthesis of thin films requiring porous and uniform coating such as thin film catalysts or gas sensors.

• 한국유체기계학회 논문집
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• 제13권6호
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• pp.5-12
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• 2010

Comparative study on the flow measurement by 5-hole and 7-hole probes was conducted in a linear cascade with tip clearances of 2.3%, 3.1%, and 4.4% of the blade span. Calibration range of the 5-hole and the 7-hole probes were ${\pm}25$ and ${\pm}50$ degrees, respectively. Results show that the secondary flow and total pressure loss measured by the 5e-hole and 7-hole probes were similar at small tip clearance cases. However, at the tip clearance of 3.1% and 4.4% of the blade span cases, flow angles exceeding the calibration range of the 5-hole probe were observed. Because of the wider calibration range, larger flow angle by strong leakage vortex could be measured by the 7-hole probe.