• 한국정밀공학회지
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• 제10권2호
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• pp.54-65
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• 1993

The paper describes and alternative method based on a new idea to measure the circular movement of machining centers. ISO has employed three testing methods for the acceptance tests of machine tools; the first is a rotating one-dimensional probe method, the second is a two-dimensional probe and a master circular ring, and the third is a kinematic ball bar. The last two methods were proposed and introduced by W. Knapp and J. B. Bryan, respectively. The newly developed method is superior to above two methods; the rotating angle can be detected and the rotating radius is variable. Circular movement errors of machining centers were investigated by the analysis of data measured by R- .THETA. method. Followint observations are obtained 1) The errors which depend on positions, i.e., periodical errors by the pitch of ball screws, errors by compensation of backlash and errors by perpendicularity of X and Y-axis, were analyzed. 2) The errors which depend on NC control system, i.e., errors by the unbalance of position-loop-gaians, errors by velocity-loop-gains and errors by feed speeds, were quantiatively analyzed. 3) The method of extracting error information, which uses moving technique of averaging angle and fourier's analysis data mesured by the R- .THETA. method, was proposed.

• 한국기계가공학회지
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• 제20권7호
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• pp.25-32
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• 2021

In the previous study, a study was conducted to improve the exhaust gas intake efficiency by improving the existing soot measurement probe in the shape and angle of the exhaust port. As a result, it can be seen that the smoke measurement performance according to the shape and angle is improved. In previous studies, the performance of the soot probe was not confirmed for the Korean KD 147 mode, which has a low suction flow rate and a long inspection time. So, we would like to confirm the improvement of the smoke probe performance of the Korean KD 147 mode, which is close to the actual driving conditions. The probe used in this study is another type of probe, and has a circular ring shape instead of a rib and variable center position unit, so the probe center hole is located close to the center of the exhaust pipe.

• Journal of Mechanical Science and Technology
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• 제17권6호
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• pp.914-924
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• 2003

The interaction and breakdown of vortices over the Leading Edge Extension (LEX) - Delta wing configuration has been investigated through wing-surface pressure measurements, the off-surface flow visualization, and 5-hole probe measurements of the wing wake section. The description focused on analyzing the interaction and the breakdown of vortices depending on the angle of attack and the sideslip angle. The Effect of angle of attack and sideslip angle on the aerodynamic load characteristics of the model is also presented. The sideslip angle was found to be a very influential parameter of the vortex flow over the LEX-delta wing configuration. The introduction of LEX vortex stabilized the vortex flow, and delayed the vortex breakdown up to a higher angle of attack. The vortex interaction and breakdown was promoted on the windward side, whereas it was suppressed on the leeward side.

• 비파괴검사학회지
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• 제14권2호
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• pp.83-89
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• 1994

고체내를 전파하는 초음파의 지향성과 음압 분포를 아는 일은 초음파탐상시험에 있어서 대단히 중요하다. 초음파의 지향성은 초음파탐상시험에 있어 감도, 주사 간격, 탐촉자의 배치, 결함의 종류 등을 판단하는 지침이 되고 있다. 본 논문에서는 초음파가시화법을 이용해 초음파의 지향성을 측정했다. 사각탐촉자로부터 나온 횡파의 지향성은 초음파의 전파 거리에 따라 변하지 않았다. 2MHz와 4MHz의 사각탐촉자에는 지향성의 차이가 있었다. 지향성의 중심 위치는 사각탐촉자의 입사점으로부터 뒤쪽 및 탐촉자의 내부에 위치하고 있었으며, 초음파의 전파 거리에 따라 변하지 않았다.

• 비파괴검사학회지
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• 제23권6호
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• pp.594-604
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• 2003

A State-of-art methodologies on implementing conventional piezoelectric and flexible PVDF elements for generating ultrasonic guided waves in a tubing are presented. Comb transducers with PVDF can be efficiently applied to selectively excite a guided wave mode by wrapping around any size pipe while a conventional immersion type piezo-elements can be also possibly used with a modification of transducer fabrication. Technical comparisons between the use of angle beam probe and comb one will be also discussed in detail. The presented technique can be easily applied to NDE for a long range inspection of tubular structures.

• Journal of Welding and Joining
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• 제14권6호
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• pp.37-47
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• 1996

An ultrasonic testing uses the directivity of the ultrasonic wave which propagates in one direction. The directivity is expressed as the relationship between the propagate direction and its sound pressure. The directivity of ultrasonic wave is related to determination of testing sensitivity, scanning pitch and defect location. This paper investigated the directivity of ultrasonic wave, which scattered from slit defect located in heat-affected zone (HAZ) in butt joint using visualization method. The directivity of shear waves scattered from slit defect were different according to probe direction (far defect, near defect) and probe position (forward movement, maximum echo position, backward movement). The difference of directivity of reflection wave was existed between 2 MHz and 4 MHz angle probes. In the case of 2 MHz angle probe, the directivity of reflection wave was appeared sharp form because of the relation wave length and defect size.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.277-277
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• 2011

디스플레이의 기술발전에 의해 대면적 고해상도의 LCD가 제작되어 왔다. 이에 따라 LCD 점등검사를 위한 Probe Unit의 기술 또한 급속도로 발전하고 있다. 고해상도에 따라 TFT LCD pad가 미세피치화 되어가고 있으며, panel의 검사를 위한 Probe 또한 30 um 이하의 초미세피치를 요구하고 있다. 따라서, 초미세 pitch의 LCD panel의 점등검사를 위한 Probe Unit의 개발이 시급하가. 본 연구에서는 30 um 이하의 미세피치의 Probe block을 위한 Slit wafer의 식각 공정 조건을 연구하였다. Si 공정에서 식각율과 식각깊이에 따른 profile angle의 목표를 설정하고, 식각조건에 따라 이 두 값의 변화를 관측하였다. 식각실험으로 Si DRIE 장비를 이용하여, chamber 압력, cycle time, gas flow, Oxygen의 조건에 따라 각각의 단면 및 표면을 SEM 관측을 통해 최적의 식각 조건을 찾고자 하였다. 식각율은 5um/min 이상, profile angle은 $90{\pm}1^{\circ}$의 값을 목표로 하였다. 이 때 최적의 식각조건은 Etching : SF6 400 sccm, 10.4 sec, passivation : C4F8 400 sccm, 4 sec의 조건이었으며, 식각공정의 Coil power는 2,600 W이었다. 이러한 조건의 공정으로 6 inch Si wafer에 공정한 결과 균일한 식각율 및 profile angle 값을 보였으며, oxygen gas를 미량 유입함으로써 식각율이 균일해짐을 알 수 있었다. 결론적으로 최적의 Slit wafer 식각 조건을 확립함으로써 Probe Unit을 위한 Pin 삽입공정 또한 수율 향상이 기대된다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.316-316
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• 2012

본 연구에서는 Si wafer에 마스크 공정 및 Slit-etching 공정을 적용하여 25 um 피치의 probe unit을 개발하기 위해 Deep Si Etching 장비를 이용하여 식각공정 조건에 따른 특성을 평가하였다. 25 um pitch는 etch 폭의 크기에 따라 3종류로 설계하였으며, 식각공정은 2수준, 4인자 실험계획법에 의해 8회 실험을 수행하였다. 실험계획법에 의해 미니탭을 활용하여 최적조건을 구한 결과 12.5 um etch 폭에서는 가스유량은 200 sccm, 에칭시간 7 sec, 코일 파워 1500W, 에칭 압력은 43.7 mtorr의 조건이 etch 형태 및 profile angle이 목표치에 근접한 결과를 얻었다. 또한 probe pitch를 30~60 um까지 증가시켰을 경우 Etch depth는 증가하였으며, 식각율 또한 증가한 현상을 보였다. 재현성 실험을 위해 위의 최적조건을 이용하여 2회 반복하여 실험한 경우 모든 시편이 목표치에 도달하였다. 이는 미세피치화 되는 프로브 유닛의 기초데이터로 활용될 수 있다.

• 비파괴검사학회지
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• 제7권2호
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• pp.35-41
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• 1988

The optimum test conditions of measuring the crack height were determined for the two-probe ultrasonic diffraction method. The applicability and the accuracy of the two-probe ultrasonic diffraction method on the inclined artificial cracks and the fatigue cracks were evaluated. It us possible to measure the height of the normal and inclined artificial cracks with the maximum error of ${\pm}\;0.5mm$ with the two-probe ultrasonic diffraction method. It was found, however, that the accuracy of this method in meaasuring the height of the fatigue crack depends on the degree of closure of the crack tip. It was desirable to choose a refraction angle as small as possible, but the angle should not be so small that the distortion of the lateral waveform became appreciable.

• 대한기계학회논문집B
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• 제32권11호
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• pp.863-869
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• 2008

This paper investigated the new calibration algorithm of a straight-type five-hole pressure probe for measuring three-dimensional flow velocity components. This new calibration algorithm was used for velocity data reduction from the calibration map and based on the combination of a look-up, a binary search algorithm and a geometry transformation including the translation and reflection of nodes in a calibration map. The calibration map was expanded up to the application angle, ${\pm}55^{\circ}$ of a probe. This velocity data reduction method showed a perfect performance without any kind of interpolating errors in calculating yaw and pitch angles from the calibration map. Moreover, when it was applied to an actual flow field including a swirling flow, a good result came out on the whole.