• 제어로봇시스템학회논문지
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• 제5권8호
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• pp.941-947
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• 1999

As pressure transducers are employed in many fields such as production facilities, test facilities vehicles and industrial machinery, there is an increasing need for high precision measurement of pressure without any calibration or maintenance. In this paper, we discuss the development of a smart thin film pressure transducer which is highly suitable for a precise measurement of pressure. The smart functions include automatic zero tracking, automatic span adjustment, temperature compenstion, continuous self-diagnostics for faults (open strain gages, abnormal data, incorrect A/D conversion, and overpressure), data memory and multi-drop communication with PC

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2003년도 추계학술발표대회 논문집
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• pp.141-145
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• 2003

The FBG sensors are inserted on the liners of the filament wound pressure tanks. The strains near the welding region of the liners are monitored in the hydro-pressurizing tests. The hydro-pressurizing tests consist of the proof tests at 4500 or 3300 psi and repeated test at the operating pressure, 3000 psi. The FBG sensors work well under $3000\mu\varepsilon$, but the strains calculated from the reflected signals are instable at the high strain level. The transverse compression on the sensor head results in the split of the reflected peaks, and the calculating algorism from the split peaks is not robust under the various signal condition. The FBG sensors fracture near $7500\mu\varepsilon$ level and lose their function permanently.

• 드라이브 ㆍ 컨트롤
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• 제13권1호
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• pp.43-48
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• 2016

This paper presents a preliminary study on the pressure sensing characteristics of smart nano composites made of MWCNT (multi-walled carbon nanotube) to develop a novel pressure sensor. We fabricated the composite pressure sensor by using a solution casting process. Made of carbon smart nano composites, the sensor works by means of piezoresistivity under pressure. We built a signal processing system similar to a conventional strain gage system. The sensor voltage outputs during the experiment for the pressure sensor and the resistance changes of the MWCNT as well as the epoxy based on the smart nano composite under static pressure were fairly stable and showed quite consistent responses under lab level tests. We confirmed that the response time characteristics of MWCNT nano composites with epoxy were faster than the MWCNT/EPDM sensor under static loads.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.229.2-229.2
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• 2014

Graphene, an allotrope of carbon, is a two-dimensional material having a unique electro-mechanical property that shows significant change of the electrical conductance under the applied strain. In addition of the extraordinary mechanical strength [1], graphene becomes a prospective candidate for pressure sensor technology [2]. However, very few investigations have been carried out to demonstrate characteristics of graphene sensor as a device form. In this study, we demonstrate a pressure sensor using graphene double layer as an active channel to generate electrical signal as the response of the applied vertical pressure. For formation of the active channel in the pressure sensor, two single graphene layers which are grown on Cu foil (25 um thickness) by the plasma enhanced chemical vapor deposition (PECVD) are sequentially transformed to the poly-di-methyl-siloxane (PDMS) substrate. Dry and wet transfer methods are individually employed for formation of the double layer graphene. This sensor geometry results a switching characteristic which shows ~900% conductivity change in response to the application of pulsed pressure of 5 kPa whose on and off duration is 3 sec. Additionally, the functional reliability of the sensor confirms consistent behavior with a 200-cycle test.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 춘계합동학술대회 논문집
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• pp.192-196
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• 2002

This paper describes on the fabrication and characteristics of a metal thin-film pressure sensor based on Cr strain-gauges for harsh environment applications. The Cr thin-film strain-gauges are sputter-deposited onto a micromachined Si diaphragms with buried cavity for overpressure protectors. The proposed device takes advantages of the good mechanical properties of single-crystalline Si as diaphragms fabricated by SDB and electrochemical etch-stop technology, and in order to extend the operating temperature range, it incorporates relatively the high resistance, stability and gauge factor of Cr thin-films. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.097~1.21 $mV/V{\cdot}kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS.

• 센서학회지
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• 제14권4호
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• pp.237-243
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• 2005

Strain gauge type load cell is used widely as weight sensor. However, it has problems such as noise, power consumption, high cost and big size. Semiconductor type piezoresistive pressure sensor is practically used in recent for low hysteresis, good linearity, small size, light weight and strong on vibration. In this paper, we have fabricated the piezoresistive pressure sensor and packaged the miniature weight sensor. We packaged the miniature weight sensor by flip-chip bonding between die and PCB for durability, because the weight sensor is directly contacted on a physical solid distinct from air and oil pressure. We measured the characteristics of the weight sensor, which had the output of $10{\sim}80$ mV on the weight range of $0{\sim}2$ kg. In the result, we could fabricate the weight sensor with an accuracy of 3 %FSO linearity.

• 한국마린엔지니어링학회:학술대회논문집
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• 한국마린엔지니어링학회 2005년도 후기학술대회논문집
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• pp.202-203
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• 2005

we present a pressure sensor based on the mechanically formed long-period fiber gratings. The attenuation properties of an output power as a function of an external pressure is able to apply to the in-line fiber pressure sensors for the vessels.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.229.1-229.1
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• 2014

Tactile sensors have widely been researched in the areas of electronics, robotic system and medical tools for extending to the form of bio inspired devices that generate feeling of touch mimicking those of humans. Recent efforts in adapting the tactile sensor have included the use of novel materials with both scalability and high sensitivity [1]. Graphene, a 2-D allotrope of carbon, is a prospective candidate for sensor technology, having strong mechanical properties [2] and flexibility, including recovery from mechanical stress. In addition, its truly 2-D nature allows the formation of continuous films that are intrinsically useful for realizing sensing functions. However, very few investigations have been carrier out to investigate sensing characteristics as a device form with the graphene subjected to strain/stress and pressure effects. In this study, we present a sensor of vertical forces based on single-layer graphene, with a working range that corresponds to the pressure of a gentle touch that can be perceived by humans. In spite of the low gauge factor that arises from the intrinsic electromechanical character of single-layer graphene, we achieve a resistance variation of about 30% in response to an applied vertical pressure of 5 kPa by introducing a pressure-amplifying structure in the sensor. In addition, we demonstrate a method to enhance the sensitivity of the sensor by applying resistive single-layer graphene.

• 세라미스트
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• 제22권1호
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• pp.4-16
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• 2019

Recently, wearable sensors have received considerable attention in a variety of research fields and industries as the importance of wearable healthcare systems, soft robotics and bio-integrated devices increased. However, expensive and complex processes are hindering the commercialization of wearable sensors. Nanoparticle presents some of solutions to these problems as its adjustable for processability and tunable properties. In this paper, the recent development of nanoparticle based pressure and strain sensors was reviewed, and a discussion on their strategies to overcome the conventional limitation and operating principles is presented.

• 센서학회지
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• 제12권5호
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• pp.199-204
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• 2003

본 논문에서는 Ta-N 스트레인게이지를 이용한 극한 환경용 세라믹 박막형 압력센서의 제작 및 특성에 관하여 연구하였다. 압력감지부로 Ta-N 스트레인게이지를 사용하였으며, SDB(Si-wafer Direct Bonding)와 전기화학적 식각정지법을 이용하여 매몰 cavity를 가지는 저가격 고수율의 Si 박막 다이어프램을 제작하였다. 또한, 실리콘 박막 다이어프램상에 박막형 스트레인게이지를 형성하여 세라믹 박막형 압력센서를 제작하였다. 제작된 세라믹 박막형 압력 센서는 기존의 스트레인 게이지를 이용한 로드셀에 비해서 온도특성이 우수하고 재현성, 소형화, 집적화 및 저가격화가 가능하기 때문에 고온, 고압 등의 각한 환경에서도 사용이 가능할 것으로 기대된다.