• 제목/요약/키워드: Pressure sensitive film

검색결과 70건 처리시간 0.039초

압전체 PZT 박막을 이용한 FET형 압력 센서의 제작과 그 특성 (Fabrication and Characteristics of FET-type Pressure Sensor Using Piezoelectric PZT Thin Film)

  • 김영진;이영철;권대혁;손병기
    • 센서학회지
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    • 제10권3호
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    • pp.173-179
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    • 2001
  • 현재 사용되어지는 반도체형 압력센서에는 압저항형과 용량형이 있다. 특히 반도체 마이크로 압력센서는 크기도 작고 신호처리회로를 동일칩 위에 집적화 할 수 있어 많은 관심을 모아왔다. 그러나 이러한 형태의 센서들은 제조공정이 복잡해서 생산성이 낮다. 기존의 센서들이 가지는 단점들을 극복하기 위해 새로운 형태의 FET형 압력센서(PSFET : pressure sensitive field effect transistor)를 제안하고 그 동작특성을 조사하였다. 압력 감지 물질은 PZT(Pb(Zr,Ti)$O_3$)를 사용하였다. RF 마그네트론 스퍼터링법을 사용하여 MOSFET의 게이트 절연막 위에 PZT 압전 박막을 증착하였다. PZT의 안정적 상태인 perovskite 구조를 형성하기 위하여 PbO 분위기에서 열처리하는 기법을 도입하였다. 제작된 PSFET의 감도는 0.38 mV/mmHg이다.

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$NO_2$Gas Detection Characteristics of Octa-dodecyloxy Copper-phthalocyanine Langmuir-Blodgett(LB) Films

  • Koo, Ja-Ryong;Kim, Young-Kwan;Kim, Jung-Soo
    • E2M - 전기 전자와 첨단 소재
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    • 제11권10호
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    • pp.78-80
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    • 1998
  • Metallo-phthalocyanines(MPcs) are very sensitive to toxic molecules such as electron affinitive NO2 gas and also chemically and thermally stable since losts of MPcs have been studied for the potential chemcial gas sensors for $NO_2$ using their electrical conductivity. In this study, thin films of octa-dodecyloxy copper -phthalocyanine were prepared by Langmuir-Blodgett(LB) method and characterized by using UV/Vis absorption spectroscopy, and ellipsometry. It was found that the proper transfer surface pressure for the film deposition was 25mN/m and the limiting area per molecule was $112\AA$/molecule. The film thickness of one layer was $64\AA$. Current-voltage(I-V) characteristics of these films were investigated as a function of film thickness.

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전자선 조사를 통한 편광필름용 아크릴계 고분자의 가교화 반응에 대한 연구 (A Study on the Electron Beam Crosslinking of Acrylic Pressure Sensitive Adhesives for Polarizer Film)

  • 박정진;최홍준;고환순;정은환;육지호
    • 폴리머
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    • 제36권3호
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    • pp.344-350
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    • 2012
  • 전자선 조사 방법을 이용하여 편광필름용 아크릴계 고분자를 가교화시킨 후 이의 점착 특성을 평가하였다. 아크릴 공중합체는 $n$-butylacrylate(BA), 2-hydroxyethyl methacrylate(HEMA), acrylic acid(AA)를 기본 단량체로 하여 다양한 조성으로 중합하였다. 아크릴 공중합체를 25 ${\mu}m$ 두께로 PET 이형필름에 코팅한 후 편광필름에 합지하고 그 위에 전자선을 조사하여 아크릴 공중합체의 가교화 반응을 진행하였다. 모든 아크릴 공중합체는 조사선량 50 kGy에서 93% 이상의 높은 젤분율을 보였으며, 아크릴 공중합체에 도입된 HEMA 단위가 많을수록 높은 가교밀도를 보였다. BA/HEMA/AA(89.5/10/0.5 w/w/w)의 단량체 공급비로 중합된 아크릴 공중합체에 50 kGy로 전자선을 조사하여 얻어진 아크릴 점착제가 가장 우수한 박리력, 내크리프성, 내구신뢰성, 내열빛샘 특성을 보였다. 전자선 조사를 이용한 편광필름용 아크릴계 점착제의 제조 방법을 적용하면 액정 표시장치용 편광필름의 생산성 및 작업성을 크게 개선할 것으로 기대된다.

벌지 실험을 통한 Ti 박막의 크기 효과 관찰 및 기계적 물성 측정 (Observation of Size Effect and Measurement of Mechanical Properties of Ti Thin Film by Bulge Test)

  • 정봉부;이헌기;황경호;박현철
    • 대한기계학회논문집B
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    • 제37권1호
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    • pp.19-25
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    • 2013
  • 본 연구에서는 벌지 실험을 이용하여 티타늄 박막의 기계적 물성을 측정하였다. 벌지 실험은 외적 지지구조를 가지지 않는 박막 시편의 한 면에 일정한 압력을 가하여 박막의 변위를 측정, 압력과 변위의 관계를 이용하여 박막의 기계적 물성을 측정하는 실험이다. 스퍼터링을 이용해 증착된 티타늄 박막의 두께는 1.0, 1.5, $2.0{\mu}m$ 이고, 물성의 열처리 시간에 대한 영향을 알아보기 위해 증착된 시편은 $600^{\circ}C$에서 각각 150, 300, 600 초 동안 열처리 되었다. 박막의 탄성 계수, 잔류 응력, 항복 응력이 벌지 실험을 통해 측정되었고, 실험 결과 항복 응력은 열처리 시간에 의존하는 특성을 확인하였다. 또한 시편 두께가 감소할수록 강도가 증가하는 크기효과를 관찰하였다.

Nb SQUID가 탑재된 초고감도 캔티레버 제작 (Fabrication of Nb SQUID on an Ultra-sensitive Cantilever)

  • 김윤원;이순걸;최재혁
    • Progress in Superconductivity
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    • 제11권1호
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    • pp.36-41
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    • 2009
  • Superconducting quantum phenomena are getting attention from the field of metrology area. Following its first successful application of Josephson effect to voltage standard, piconewton force standard was suggested as a candidate for the next application of superconducting quantum effects in metrology. It is predicted that a micron-sized superconducting Nb ring in a strong magnetic field gradient generates a quantized force of the order of sub-piconewtons. In this work, we studied the design and fabrication of Nb superconducting quantum interference device (SQUID) on an ultra-thin silicon cantilever. The Nb SQUID and electrodes were structured on a silicon-on-insulator (SOI) wafer by dc magnetron sputtering and lift-off lithography. Using the resulting SOI wafer, we fabricated V-shaped and parallel-beam cantilevers, each with a $30-{\mu}m$-wide paddle; the length, width, and thickness of each cantilever arm were typically $440{\mu}m,\;4.5{\mu}m$, and $0.34{\mu}m$, respectively. However, the cantilevers underwent bending, a technical difficulty commonly encountered during the fabrication of electrical circuits on ultra-soft mechanical substrates. In order to circumvent this difficulty, we controlled the Ar pressure during Nb sputtering to minimize the intrinsic stress in the Nb film and studied the effect of residual stress on the resultant device.

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VLCC의 최적 축계정렬해석 연구 (A Study on Optimum Shaft Alignment Analysis for VLCC)

  • 김규창;김준기
    • 대한조선학회 특별논문집
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    • 대한조선학회 2005년도 특별논문집
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    • pp.134-137
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    • 2005
  • Recently, in VLCC, shafting system is stiffer due to large engine power whereas hull structure is more flexible due to scantling optimization, which can be suffered from alignment damage by incompatibility between shafting and hull, In this study, shafting system without stern tube forward bush was adapted for less sensitive system against external factors. Also, shaft alignment analysis was considered with hull deflection at various ship loading conditions and stern tube after bush of long journal bearing was evaluated by static squeezing pressure and dynamic oil film pressure with sloping control. Whirling vibration was also reviewed to avoid resonance with propeller blade order. So, reliable shafting design for VLCC could be achieved through optimized alignment analysis for the system without stern tube forward bush.

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Seed 중합을 이용한 고고형분 수용성 점착제의 합성과 물성 (Property and Polymerization of Hi-solid PSA's using Seeded Polymerization)

  • 정영식;민성기;설수덕
    • 접착 및 계면
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    • 제10권4호
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    • pp.174-181
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    • 2009
  • 고 고형분 점착제의 점도 개선을 위해 seed 중합을 이용하여 수용성 저점도 점착제를 중합하였다. Seed 바인더 중합 중 최적 중합 조건을 산출하고, 점착제 중합 시 seed 바인더와 acrylic acid의 함량을 변화시켜 점도변화와 피착면에 대한 점착박리강도를 측정하여 다음과 같은 결과를 얻었다. 점착제 중합에서 seed 바인더의 함량이 7 wt%/monomer일 때 60%의 고형분에서 2,100 cps의 낮은 점도를 나타내고 평활한 점착제 필름을 제조할 수 있었다. Acrylic acid함량 변화에 따른 기계적 물성 측정에서는 4 wt%/monomer의 acrylic acid를 사용 했을 때 우수한 점착박리강도와 유지력을 나타내었다.

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In-situ spectroscopic studies of SOFC cathode materials

  • 주종훈
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2012년도 춘계학술발표대회
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    • pp.70.1-70.1
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    • 2012
  • In-situ X-ray photoelectron spectroscopy (XPS) and infrared (IR) spectroscopy studies of SOFC cathode materials will be discussed in this presentation. The mixed conducting perovskites (ABO3) containing rare and alkaline earth metals on the A-site and a transition metal on the B-site are commonly used as cathodes for solid oxide fuel cells (SOFC). However, the details of the oxygen reduction reaction are still not clearly understood. The information about the type of adsorbed oxygen species and their concentration is important for a mechanistic understanding of the oxygen incorporation into these cathode materials. XPS has been widely used for the analysis of adsorbed species and surface structure. However, the conventional XPS experiments have the severe drawback to operate at room temperature and with the sample under ultrahigh vacuum (UHV) conditions, which is far from the relevant conditions of SOFC operation. The disadvantages of conventional XPS can be overcome to a large extent with a "high pressure" XPS setup installed at the BESSY II synchrotron. It allows sample depth profiling over 2 nm without sputtering by variation of the excitation energy, and most importantly measurements under a residual gas pressure in the mbar range. It is also well known that the catalytic activity for the oxygen reduction is very sensitive to their electrical conductivity and oxygen nonstoichiometry. Although the electrical conductivity of perovskite oxides has been intensively studied as a function of temperature or oxygen partial pressure (Po2), in-situ measurements of the conductivity of these materials in contact with the electrolyte as a SOFC configuration have little been reported. In order to measure the in-plane conductivity of an electrode film on the electrolyte, a substrate with high resistance is required for excluding the leakage current of the substrate. It is also hardly possible to measure the conductivity of cracked thin film by electrical methods. In this study, we report the electrical conductivity of perovskite $La_{0.6}Sr_{0.4}CoO_{3-{\delta}}$ (LSC) thin films on yttria-stabilized zirconia (YSZ) electrolyte quantitatively obtained by in-situ IR spectroscopy. This method enables a reliable measurement of the electronic conductivity of the electrodes as part of the SOFC configuration regardless of leakage current to the substrate and cracks in the film.

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Surface Roughness Effects on the Lubrication Characteristics of the Engine Piston Ring Pack

  • Yun, Jeong-Eui
    • KSTLE International Journal
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    • 제1권2호
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    • pp.83-90
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    • 2000
  • The surface roughness between a piston ring pack and a cylinder liner directly affects the fuel economy, the oil consumption, and the emission of the engine so that it is very important to clarify the surface roughness effects on the lubrication characteristics. The friction characteristics of the piston ring during engine operations are known to as mixed lubrication experimentally. In this study to simulate the effects of the surface roughness of the piston ring pack on the lubrication characteristics, the mixed lubrication analysis of piston rings was performed using the simplified average Reynolds equation. From the results the surface roughness was found be considerably affects minimum oil film thickness as well as FMEP(Friction Mean Effective Pressure). Especially, the oil ring was the most sensitive on the surface roughness.

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PBLG의 자격반응에 관한 연구 (A Study on the Stimulus Reaction of PBLG)

  • 김병근;장헌;이경섭
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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    • pp.719-722
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    • 2002
  • The Displacement current measurement system used in this experiment because detecting the dynamic behavior of monolayers at the air-water interface is possible. It basically consists of a film balance, a pair of electrodes connected to each other through a sensitive ammeter. Here, one electrode is suspended in air and the other electrode is placed in the water. PBLG phase transformation measured by Maxwell-displacement-current-measurement method in surface of the water. Measured (surface pressure, displacement current and dipole moment) of monolayers of PBLG on the water surface. We measured displacement current that occur when changed temperature. Could know that displacement current is proportional in increase of temperature and great as experiment result.

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