• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.482-483
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• 2009

In chemical mechanical planarization (CMP) process, the uniformity of stress acting on wafer surface is a key factor for uniform material removal of thin film especially in the oxide CMP. In this paper, we analyze the stress on the contact region between wafer and pad with finite-element analysis (FEA). The setting pressure acting on wafer back side was $500g/cm^2$ and the retainer pressure was changed from 300 to $700g/cm^2$. The polishing test is also done with the same conditions. The material removal rate profiles well-matched with stress distribution.

• Tribology and Lubricants
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• v.32 no.2
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• pp.67-71
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• 2016

This study investigates the characteristics of the sapphire wafer chemical mechanical polishing (CMP) process. The material removal rate is one of the most important factors since it has a significant impact on the production efficiency of a sapphire wafer. Some of the factors affecting the material removal rate include the pressure, platen speed and slurry. Among the factors affecting the CMP process, we analyzed the trends in the material removal rate and surface roughness, which are mechanical factors corresponding to both the pressure and platen speed, were analyzed. We also analyzed the increase in the material removal rate, which is proportional to the pressure and platen speed, using the Preston equation. In the experiment, after polishing a 4-inch sapphire wafer with increasing pressure and platen speed, we confirmed the material removal rate via thickness measurements. Further, surface roughness measurements of the sapphire wafer were performed using atomic force microscopy (AFM) equipment. Using the measurement results, we analyzed the trends in the surface roughness with the increase in material removal rate. In addition, the experimental results, confirmed that the material removal rate increases in proportion to the pressure and platen speed. However, the results showed no association between the material removal rate and surface roughness. The surface roughness after the CMP process showed a largely consistent trend. This study demonstrates the possibility to improve the production efficiency of sapphire wafer while maintaining stable quality via mechanical factors associated with the CMP process.

• Journal of the Ergonomics Society of Korea
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• v.30 no.2
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• pp.339-347
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• 2011

Objective: The purpose of this study was to evaluate of various material of pillows by using biomechanical variables such as the cervical stability, head pressure distribution, and muscle activity. Method: Eight subjects participated in the experiment. Three different materials such as polyester sponge, memory foam and the buckwheat shell used for Korean traditional pillow were tested. Electro-goniometer, six channels of electromyography(EMG), ten channels of the head pressure sensors were used to measure the biomechanical responses. Surface electrodes were attached to the right/left semispinals capitis(RSC, LSC), the right/left sternocleidomastoid(RSM, LSM), the right/left upper trapezius(RUT, LUT). The cervical stability was evaluated by the angle deviated from the standing neck position. The head pressure distribution was evaluated by the pressure per unit area recorded on the sensors and the intensity of peak pressure. Electromyography(EMG) data were analyzed by using root mean square(RMS) and mean power frequency(MPF). Results: The buckwheat shell material showed a higher stability in the cervical spine then the other pillows during spine position. In terms of head pressure distribution, the memory form indicated the lowest pressure at supine position, buckwheat shell material indicated the lowest pressure during lying down to side, and polyester cushion recorded the highest pressure at all postures. Conclusion: The buckwheat shell material has a biomechanical advantage to maintain a healthy neck angle and reduce the pressure on the head, which means the buckwheat shell is a potential material for ergonomic pillow design. The pillow with memory form showed second best biomechanical performance in this study. Application: The shape of the buckwheat shell pillow and the characteristics of materials can be used to design the pillow preventing neck pain and cervical disk problems.

• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.1314-1317
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• 1997

For realizing artificial skin sensing as a final goal, a mono-material pressure-conductive rubber sensor which is also sensitive for temperature is described. Firstly, discimination of the hardness and the thermal property of material using a proposed sensor is presented. Furthermore, a tactile sensor constints of four pressure-conductive rubber sensor to discriminate surface model which imitaties the surface roughness of material is proposed.

• Proceedings of the Korean Nuclear Society Conference
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• 2005.05a
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• pp.1120-1121
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• 2005

• Proceedings of the Korean Institute of Building Construction Conference
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• 2018.11a
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• pp.31-32
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• 2018

Lately, cement mixed siliceous powder waterproofing coating has been used as a waterproofing material in the wet environment condition of an underground concrete structure. Underground is exposed to environmental influences such as pressure of ground water, pressure of soil. However, the quality standard for pressure (water pressure, earth pressure) is not specified in the specification of the cement mixed siliceous powder waterproofing coating. Therefore, in this study, the permeability test was carried out based on the assumption that the durability should be verified in consideration of the environmental aspects of the material in actual field. As a result of the test, the permeability was generated from the inorganic single type material, but it was caused by the sealing failure and the test error, and the permeability was not generated in most of the materials. The results of this study will be analyzed by reviewing the physical properties of the material, and the research direction will be resumed.

• Nuclear Engineering and Technology
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• v.31 no.2
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• pp.139-150
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• 1999

The swelling pressure of a potential buffer material was measured and the effect of dry density, bentonite content and initial water content on the swelling pressure was investigated to provide the information for the selection of buffer material in a high-level waste repository. Swelling tests were carried out according to Box-Behnken's experimental design. Measured swelling pressures were in the wide range of 0.7 Kg/$\textrm{cm}^2$ to 190.2 Kg/$\textrm{cm}^2$ under given experimental conditions. Based upon the experimental data, a 3-factor polynomial swelling model was suggested to analyze the effect of dry density, bentonite content and initial water content on the swelling pressure The swelling pressure increased with an increase in the dry density and bentonite content, while it decreased with increasing the initial water content and, beyond about 12 wt.% of the initial water content, levelled off to nearly constant value.

• Journal of Sensor Science and Technology
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• v.31 no.3
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• pp.139-144
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• 2022

Advanced tactile sensors are receiving significant attention in various industries such as extended reality, electronic skin, organic user interfaces, and robotics. The capabilities of advanced tactile sensors require a variety of functions, including position sensing, pressure sensing, and material recognition. Moreover, they should comsume less power and be bio-friendly with human contact. Recently, a tactile sensor based on the triboelectrification effect was developed. Triboelectric tactile sensors have the advantages of wide material availability, simple structure, and low manufacturing cost. Because they generate electricity by contact, they have low power consumption compared to conventional tactile sensors such as capacitive and piezoresistive. Furthermore, they have the ability to recognize the contact material as well as execute position and pressure sensing functions using the triboelectrification effect. The aim of this study is to introduce the progress of research on triboelectrification-based tactile sensors with various functions such as position sensing, pressure sensing and contact material recognition.

• Particle and aerosol research
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• v.19 no.4
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• pp.145-154
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• 2023

Granular bed filters are widely used to remove particulate matter in flue gas and are filled with various shapes of packing material. The packing material plays an important role in determining the overall collection performance, such as pressure drop and collection efficiency. The pressure drop of a granular bed filter has been calculated using the Ergun equation, while the collection efficiency has been predicted using the log-penetration equation based on the single sphere theory. However, a prediction equation of collection efficiency for a granular bed filter filled with non-spherical packing materials has not been suggested yet. Therefore, in this study, three different shapes of packing materials (sphere, cylinder, and irregular) were prepared to propose a prediction equation. The pressure drop and collection efficiency in a granular bed filter filled with each shape of packing material were measured experimentally and compared with theoretically predicted values. We found that experimentally measured pressure drops matched well with values theoretically predicted using the Ergun equation considering the shape factor. However, experimental collection efficiencies were higher than theoretical ones predicted by the log-penetration equation using the single sphere theory. We modified the log-penetration equation by employing a shape factor and found a good relationship between experimental and theoretical collection efficiencies.

• Journal of the Korean Society for Railway
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• v.8 no.4
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• pp.348-353
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• 2005

In designing the structures of railway rolling stocks, deterministic methods associated with the concept of a safety factor have been traditionally used. The deterministic approaches based on the mean values of applied loads and material properties have been used as safety verification for the design of rolling-stock car body structures. The uncertainties in the applied loading for the high speed train and the strength of new materials in the rolling stocks require the application of probabilistic approaches to ensure fatigue safety in the desired system. Pressure loadings acting on the car body when the train passes through tunnels show reflected pressure waves for high-speed trains and they may cause a fatigue failure in vehicle bodies. Use of new material technology as body structures also introduces uncertainties in the material strength. A probabilistic approach is more adaptable in designing reliable structures when the pressure waves from the tunnels pounds and new material technology is adopted. In this paper, it is proposed that a fatigue design and assessment method based on a reliability which deals with the loading variations on a railway vehicle due to the pressure reflected in tunnels and the strength variations of material. Equation for the fatigue reliability index has been formulated to calculate the reliability assessment of a vehicle body under fluctuating pressure loadings in a tunnel. Considered in this formulation are the pressure distribution characteristics, the fatigue strength distribution characteristics, and the concept of stress-transfer functions due to the pressure loading.