• Transactions of Materials Processing
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• v.15 no.1 s.82
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• pp.9-14
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• 2006

In the present research, the simultaneous punching of ultra small size hole of $2\~10\;{\mu}m$ in diameter on flat rolled thin metal foils was conducted with elastic polymer punch. Workpiece used in the present investigation were the rolled pure copper of $3{\mu}m$ in thickness and CP titanium of 1.5fm in thickness. The metal foils were punched with the dies and arrays of circular and rectangular holes were made. The process set-up is similar to that of the flexible rubber pad farming or Guerin process. Arrays of holes were punched successfully in one step forming. The punched holes were examined in terms of their dimensions. The effects of the wafer die hole dimension and heat treatment of the workpiece on ultra small size hole formation of the thin foil were discussed. The process condition such as proper die shape, pressure, pressure rate and diameter-thickness ratio (d/t) were also discussed. The results in this paper show that the present method can be successfully applied to the fabrication of ultra small size hole away in a one step operation.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1997.10a
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• pp.37-42
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• 1997

This paper describes result of experiment of parameters affecting the micro hole drilling time, kind of assisting gas and it's pressure. The result reveals that parameter value of 0.08J, 20Hz, dwell time of 300 microseconds can be a good machining condition to make micro hole diameter range of 50-70${\mu}{\textrm}{m}$, Assistant gas such air, O2, Ar, N2 was adapted. Assistant gas of air makes heat affected zone enlarge due to burning of material, also it makes hole irregular and damage because of refusion stick to caused by chemical reaction with Al2O3 ceramic material. O2(99.9%) has good characteristic to get good drilling and smooth surface on pressure of 0.2kgf/$\textrm{cm}^2$, but it is expensive. Ar, N2 makes material burn and crack severely and proved to be an appropriate but, Ar was better than N2.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.138-144
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• 2006

Non-contact transportation of a large-sized glass plate using air cushion for the sputtering system of liquid crystal display panel was considered. The gas is injected through multiple small holes to maintain the force for levitating glass plate. Complex flow field and resulting pressure distribution on the glass surface was numerically studied to design the air injection pad. The exhaust hole size was varied to obtain evenly distributed pressure distribution at fixed diameter of the injection hole. Considering the force for levitating glass plate, the diameter of the exhaust hole of 30 to 40 times of the gas injection hole was recommended.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.231-234
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• 2002

Ultrasonic machining technology has been developed over recent years for the manufacture of cost-effective and quality-assured precision parts for several industrial application such as optics, semiconductors, aerospace, and automobile. Ultrasonic machining process is an efficient and economical means of precision machining of ceramic materials. The process is non-thermal, non-chemical and non-electric and hardly creates changes to the mechanical properties of the brittle materials machined. This paper describes the characteristics of the micro-hole of $\textrm{Al}_2\textrm{O}_3$ by ultrasonic machining with tungsten carbide tool. The effects of various parameters of ultrasonic machining, including abrasives, machining force and pressure, on the material removal rate, hole quality, and tool wear presented and discussed. The ultrasonic Machining of micro-holes in ceramics has been under taken and the machining mechanism in the ultrasonic machining of ceramics based on the fracture-mechanics concept has been analyzed.

• Journal of the Semiconductor & Display Technology
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• v.6 no.1 s.18
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• pp.59-64
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• 2007

Non-contact transportation of a large-sized glass plate using air cushion for the vertical sputtering system of liquid crystal display (LCD) panel was considered. The objective of the study was to design an air pad unit which was composed of multiple injection and exhaust holes and mass flow supplying pipe. The gas was injected through multiple small holes to maintain the force for levitating glass plate. After hitting the plate, the air was vented through exhaust holes. Complex flow field and resulting pressure distribution on the glass surface were numerically studied to design the air injection pad. The exhaust hole size was varied to obtain evenly distributed pressure distribution at fixed diameter of the injection hole. Considering the force for levitating glass plate, the diameter of the exhaust hole of 30 to 40 times of the gas injection hole was recommended.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.10
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• pp.2590-2600
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• 1993

The present paper describes numerical predictions for the film cooling effectiveness from a row of hole at various injection ratios and injection alngles.Numerical calculations were performed to investigate film cooling effectiveness and the characteristics of flow and temperature distributions in the region near the downstream of injection hole including the region of adverse pressure gradient. The elliptic 3-dimensional governing equations with variable thermal properties were solved by SIMPLE algorithm. The results showed that the presence of adverse pressure gradient in the region near the downstream of injection hole induces large temperature gradient. At injection angle of $35^{\circ}$ the average film cooling effectiveness was increased as increased of injection ratio up to 1.0. At injection angle of $90^{\circ}$ however, the average film cooling effectiveness was decreased from injection ratio larger than 0.4.

• Laser Solutions
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• v.18 no.2
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• pp.11-13
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• 2015

Pressure-drop in a micro-channel is critical when a hole diameter is less then 100um with the high aspect ratio, more than 40. To minimize these pressure loss for micro-channel applications is important and there would be the best hole diameter, taper angle, and their combinations. In this work, the parametric study for laser drilling of anodized material is conducted to obtain the micro-channel hole with high aspect ratio.

• Journal of the Korean Society of Visualization
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• v.18 no.3
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• pp.122-128
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• 2020

In the field of experimental fluid dynamics, the 5-hole probe is one of the most widely used tools to measure flow velocity and pressure. We hereby describe the development of an inexpensive laboratory-based flow calibration system for 5-hole probes. The system is applied to a custom L-shaped probe, and the probe performance is compared against a standard commercial probe in a custom wind tunnel. The setup allows rotation of the probe around the yaw and pitch axes. Static and total pressure values are calculated, and then calibration maps are constructed based on the yaw and pitch angles. Using these maps, errors of the custom probe are found to be ±5% for velocity magnitude and ±3° for direction, compared to the commercial probe, when both pitch and yaw angles are within 40°.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.21 no.9
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• pp.1185-1197
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• 1997

Three-dimensional flow within a film-cooling hole, which is normally oriented to the main flow, has been measured by using a straight five-hole probe for the blowing ratios of 1.0 and 2.0. The length-to-diameter ratio of the injection hole is fixed to be 1.0 throughout the whole experiments. The result shows that the secondary flow within the hole is strongly affected by the main flow and flow separation at the hole inlet. The higher blowing ratio provides less influence of the main flow on the injectant flow. The three-dimensional flow at the hole exit is considerably altered due to the strong interaction between the injectant and main flow. The aerodynamic loss produced inside the injection hole is mainly attributed to the inlet flow separation.

• Journal of Mechanical Science and Technology
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• v.18 no.10
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• pp.1849-1858
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• 2004

For examining friction-factor characteristics of round-hole pattern surfaces which are usually applied on damper seals, flat plate test apparatus is designed and fabricated. The measurement method of leakage and pressure distribution along round-hole pattern specimen with different hole area is described and a method for determining the Fanning friction factor is discussed. Results show that the round-hole pattern surfaces provide a much larger friction factor than smooth surface, and the friction factor vs. clearance behavior yields that the friction factor generally decreases as the clearance increases unlike the results of Nava's flat plate test. As the hole depth is decreased, the friction factor is increased, and maximum friction factor is obtained for 50% of hole area. Since the present experimental friction factor results show coincident characteristics with Moody's friction factor model, empirical friction factors for round-hole pattern surfaces are obtained by using the Moody's formula based on curve-fit of the experimental data. Results of Villasmil's 2D CFD simulation support the present experimental test result.