• Title/Summary/Keyword: Precision metrology

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Unequal-path Low-coherence Interferometry Using Femtosecond Pulse Lasers (펨토초 레이저를 이용한 비동일 광경로 저결맞음 간섭계)

  • Oh J.S.;Kim S.W.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.10a
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    • pp.204-207
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    • 2005
  • We discuss two possibilities of using femtosecond pulse lasers as a new interferometric light source fer enhanced precision surface profile metrology. First, a train of ultra-fast laser pulses yields repeated low temporal coherence, which allows performing unequal-path scanning interferometry that is not feasible with white light. Second, high spatial coherence of femtosecond pulse lasers enables to test large size optics in non-symmetric configurations with relatively small size reference surfaces. These two advantages are verified experimentally using Fizeau and Twyman-Green type scanning interferometers.

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Development of an In-process Confocal Positioning System for Nanostereolithography Using Evanescent Light

  • Kajihara, Yusuke;Takeuchi, Toru;Takahashi, Satoru;Takamasu, Kiyoshi
    • International Journal of Precision Engineering and Manufacturing
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    • v.9 no.3
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    • pp.51-54
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    • 2008
  • A novel stereolithography method using evanescent light has been proposed as a means to realize 100-nanometer resolution. An in-process measurement system with high accuracy has been introduced to the nanostereolithography apparatus. Specifically, an optical microscopic system was developed to monitor the exposure process and a confocal positioning system was established to improve the longitudinal positioning accuracy in the layer-by-layer process. A high-power objective lens, a tube lens, and a charge coupled device (CCD) were included in the optical microscopic system, whereas a laser, a high-power objective lens, a piezoelectric (PZT) stage, a condenser lens, a pinhole, and a photomultiplier (PMT) made up the confocal microscopic system. Two verification experiments were conducted, and the results indicated that the optical microscopic system had a horizontal resolution of 200 nm and that the confocal positioning system provided a depth resolution of 30.8 nm. These results indicate that nanostereolithography can be successfully performed with this system.

A Study on the Development of iGPS 3D Probe for RDS for the Precision Measurement of TCP (RDS(Robotic Drilling System)용 TCP 정밀계측을 위한 iGPS 3D Probe 개발에 관한 연구)

  • Kim, Tae-Hwa;Moon, Sung-Ho;Kang, Seong-Ho;Kwon, Soon-Jae
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.11 no.6
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    • pp.130-138
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    • 2012
  • There are increasing demands from the industry for intelligent robot-calibration solutions, which can be tightly integrated to the manufacturing process. A proposed solution can simplify conventional robot-calibration and teaching methods without tedious procedures and lengthy training time. iGPS(Indoor GPS) system is a laser based real-time dynamic tracking/measurement system. The key element is acquiring and reporting three-dimensional(3D) information, which can be accomplished as an integrated system or as manual contact based measurements by a user. A 3D probe is introduced as the user holds the probe in his hand and moves the probe tip over the object. The X, Y, and Z coordinates of the probe tip are measured in real-time with high accuracy. In this paper, a new approach of robot-calibration and teaching system is introduced by implementing a 3D measurement system for measuring and tracking an object with motions in up to six degrees of freedom. The general concept and kinematics of the metrology system as well as the derivations of an error budget for the general device are described. Several experimental results of geometry and its related error identification for an easy compensation / teaching method on an industrial robot will also be included.

Method for the Assembly of a High-density Multi-channel Deformable Mirror for High Energy Lasers (고에너지 레이저용 고밀집 다채널 실리콘-카바이드 변형거울의 정밀 조립 방법)

  • Hyug-Gyo Rhee;Sunho Cho;Sihyun Kim;Jaehyun Lee;Pilseong Kang
    • Korean Journal of Optics and Photonics
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    • v.35 no.4
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    • pp.170-174
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    • 2024
  • A laser beam propagating in free space can be negatively affected by atmospheric turbulence. To overcome this and correct the wavefront error of the laser beam itself, a deformable mirror (DM), which is a key component of adaptive optics, is widely used. In this paper, a novel precision assembling method is suggested for a multi-channel high-density DM. The material of the mirror sheet of the DM is silicon carbide (SiC), and the actuator is a stacked-type lead-magnesium-niobate (Pb(Mg1/3Nb2/3)O3; PMN). To connect the mirror sheet and each actuator, a flexure is inserted. The flexure can make the DM operate with full strokes without the failure of adhesive. A series of jigs were designed and applied in order to assemble these three parts (the mirror sheet, actuators, and flexures) precisely. After assembly, the performance of the DM was also checked.

AC Current Sensor Using Air Core (공심코어를 사용한 교류전류 센서)

  • Park, Young-Tae;Jung, Jae-Kap
    • Journal of the Korean Magnetics Society
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    • v.15 no.1
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    • pp.48-52
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    • 2005
  • This paper describes a current sensor for precision current measurement of an electronic watt-hour meter that is going to install in houses in the future. As the current sensor is based on an cored principle (the Rogowski principle) it is not subject to usual limitations of saturation and non-linearity of general current transformers. An advantage of the developed current sensor is that non-linearity error in low current range is improved and the construction can be kept simple using an air core. We present a magnetic field analysis of the sensor using a finite-element solver. We compared the measured values versus the calculated values.

Development of Isotope Dilution-Liquid Chromatography/Tandem Mass Spectrometry as a Candidate Reference Method for the Determination of Folic Acid in Infant Milk Formula

  • Jung, Min-Young;Kim, Byung-Joo;Boo, Doo-Wan;So, Hun-Young
    • Bulletin of the Korean Chemical Society
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    • v.28 no.5
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    • pp.745-750
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    • 2007
  • An isotope dilution-liquid chromatography/tandem mass spectrometric method was developed as a candidate reference method for the accurate determination of folic acid in infant milk formula. Sample was spiked with 13C5-folic acid and then extracted with phosphate buffer (pH 6) solution. The extract was further cleaned up by deproteinization followed by a C18 solid-phase extraction cartridge. The extract was analyzed by using LC/ ESI/MS/MS with selectively monitoring the collisionally induced dissociation channels of m/z 442 → m/z 295 and m/z 447 → m/z 295, which are the neutral glutamyl loss from the [M+H]+ ions of folic acid and 13C5-folic acid, respectively. LC/MS/MS chromatograms showed substantially reduced background from chemical noises compared to LC/MS chromatograms. Repeatability and reproducibility studies showed that the LC/MS/ MS method is a reliable and reproducible method which can provide less than 1.5 relative percentage of method precision.

A New Instrument for Measuring the Optical Properties of Wide-field-of-view Virtual-reality Devices

  • Ahn, Hee Kyung;Lim, Hyun Kyoon;Kang, Pilseong
    • Current Optics and Photonics
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    • v.6 no.4
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    • pp.392-399
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    • 2022
  • Light-measuring devices (LMDs) are frequently used to measure luminance and color coordinates of displays. However, it is very difficult to use a conventional LMD for measuring the optical properties of virtual-reality (VR) devices with a wide field of view (FOV), because of their confined spaces where the entrance pupil of a LMD is located. In this paper, a new LMD that can measure the optical properties of wide-FOV VR devices, without physical conflict with the goggles of the VR device, is proposed. The LMD is designed to fully satisfy the requirements of IEC 63145-20-10, and a pivot-point correction method for the LMD is applied to improve its accuracy. To show the feasibility of the developed LMD and the correction method, seven VR devices with wide FOV are measured with it. From the results, all of them are successfully measured without any physical conflict, and a comparison to their nominal values shows that the FOVs have been properly measured.

Pitch Measurement of One-dimensional Gratings Using a Metrological Atomic Force Microscope and Uncertainty Evaluation (미터 소급성을 갖는 원자간력 현미경을 이용한 1차원 격자 피치 측정과 불확도 평가)

  • Kim Jong-Ahn;Kim Jae Wan;Park Byong Chon;Eom Tae Bong;Kang Chu-Shik
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.4
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    • pp.84-91
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    • 2005
  • We measured the pitch of one-dimensional (ID) grating specimens using a metrological atomic force microscope (M-AFM). The ID grating specimens a.e often used as a magnification standard in nano-metrology, such as scanning probe microscopy (SPM) and scanning electron microscopy (SEM). Thus, we need to certify the pitch of grating specimens fur the meter-traceability in nano-metrology. To this end, an M-AFM was setup at KRISS. The M-AFM consists of a commercial AFM head module, a two-axis flexure hinge type nanoscanner with built-in capacitive sensors, and a two-axis heterodyne interferometer to establish the meter-traceability directly. Two kinds of ID grating specimens, each with the nominal pitch of 288 nm and 700 nm, were measured. The uncertainty in pitch measurement was evaluated according to Guide to the Expression of Uncertainty in Measurement. The pitch was calculated from 9 line scan profiles obtained at different positions with 100 ㎛ scan range. The expanded uncertainties (k = 2) in pitch measurement were 0.10 nm and 0.30 nm for the specimens with the nominal pitch of 288 nm and 700 nm. The measured pitch values were compared with those obtained using an optical diffractometer, and agreed within the range of the expanded uncertainty of pitch measurement. We also discussed the effect of averaging in the measurement of mean pitch using M-AFM and main components of uncertainty.

Feasibility Study on Audio-Tactile Display via Spectral Modulation (스펙트럼 변조를 이용한 청각정보의 촉감재현 가능성 연구)

  • Kwak, Hyun-Koo;Kim, Whee-Kuk;Chung, Ju-No;Kang, Dae-Im;Park, Yon-Kyu;Koo, Min-Mo
    • Journal of the Korean Society for Precision Engineering
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    • v.28 no.5
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    • pp.638-647
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    • 2011
  • Various approaches directly using vibrations of speakers have been suggested to effectively display the aural information such as the music to the hearing-impaired or the deaf. However, in these approaches, the human can't sense the frequency information over the maximum perceivable vibro-tactile frequency (around 1kHz). Therefore, in this study, an approach via spectral modulation of compressing the high frequency audio information into perceivable vibro-tactile frequency domain and outputting the modulated signals through the designated speakers is proposed. Then it is shown, through simulations of using Short-Time Fourier Transform (STFT) with Hanning windows and through preliminary experiments of using the vibro-tactile display testbed which is built and interfaced with a notebook PC, that the modulated signal of a natural sound composing sounds of a frog, a bird, and a water stream could produce the noise-free signal suitable enough for vibro-tactile speakers without causing Significant interfering disturbances, Lastly, for three different combinations of information provided to the subject, that is, i) with only video image, ii) with video image along with the modulated vibro-tactile stimuli as proposed in this study to the forearm of the subject, and iii) with video image along with full audio information, the effects to the human sense of reality and his emotion to given audio-video clips including various sounds and images are investigated and compared. It is shown from results of those experiments that the proposed method of providing modulated vibro-tactile stimuli along with the video images to the human has very high feasibility to transmit pseudo-aural sense to the human.