• Title/Summary/Keyword: Precision metrology

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Nano-technology survey(1996) (1996년도 나노 테크놀로지 Survey)

  • Stout, K.J.
    • Journal of the Korean Society for Precision Engineering
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    • v.14 no.1
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    • pp.29-51
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    • 1997
  • The purpose of the survey is to identify possible new areas of research relating to nanotechnology and in particular areas in which the established facilities of the Centre for Metrology can be employed to good effect. This survey indicates that nanotechnology, a sub set of the more embracing Nano Science, is a rapidly developing discipline with good potential for Electronic and Mechanical Engineering. Nanotechnology includes three areas: Nanometrology, Nanometer positioning and Control, and Nanomanufacturing. In each of the areas, the current research situation and developing trends have been summarised. Possibilities for future work indicated.

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Development of linear measuring system (선형측정장치 개발)

  • Eom, Tae-Bong;Kim, Goo-Young;Chung, Myung-Sai
    • Journal of the Korean Society for Precision Engineering
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    • v.10 no.4
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    • pp.104-108
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    • 1993
  • The linear length measurements are most frequently performed and should be most accurate among other parts in dimensional metrology. We developed the linear measuring system using a laser interferometer to improve the accuracy and to shorten the calibration time. The uncertainty of the system is 0.01 .mu. for 500mm steel gage block. The range of the measurement and resolution of the system are 1000mm and 0.01 .mu. m, respectively.

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The Study of the Fabrication of the Ultra-Precision Cylinder by the Compensation Process (보정 가공을 통한 초정밀 원통 가공에 대한 연구)

  • Lee, Jung-Chul
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.12 no.5
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    • pp.122-128
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    • 2013
  • This paper describes the on-machine surface form evaluation of an ultra-precision cylinder for the fabrication by the compensation process. In this study, the surface form error of an ultra-precision cylinder, which was fabricated by the ultra-precision diamond turning machine with a single diamond cutting tool, was evaluated by using two capacitance-type displacement probes. Based on the measurement results, the compensation process was conducted. Since the measurement was carried out on the machine without re-mounting of the workpiece, additional fabrication for compensation process can be conducted precisely.

Calibration of Thermistors for Precision Temperature Measurements (정밀온도측정을 위한 서미스터 교정)

  • Gam, Kee-Sool;Kim, Yong-Gyoo;Yang, In-Seok
    • Journal of Sensor Science and Technology
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    • v.20 no.5
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    • pp.329-335
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    • 2011
  • We demonstrated that high-stability thermistors can be calibrated with an uncertainty less than 1 mK, if the error due to the heat conduction is minimized. We first investigated the effect of the self-heating of typical thermistor probes to see how accurate we need to determine the effect of self-heating. We, then, calibrated thermistors and fitted the results using various modeling equations. We found out that the heat conduction is an important factor in achieving the calibration uncertainty under 1 mK for thermistors when the diameter of the probe is as thick as 10 mm. Therefore, we controlled the room temperature within $0.5^{\circ}C$ to minimize the heat conduction error during the calibration. The calibration with an uncertainty below 1 mK was possible when the stabilization time for each calibration was long enough to obtain a good thermal equilibrium.

Optical Technology of Mechanical Industries in the 21st Century (21세기 기계산업의 변화 - 광기술의 발전 동향)

  • Joo, Ki-Nam
    • Transactions of the KSME C: Technology and Education
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    • v.5 no.1
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    • pp.53-61
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    • 2017
  • In this review paper, the trend for optical technology is described as the development of mechanical industries in the $21^{st}$ century. Optical technology has been essential in various industries such as mechanical, electronic industries as the convergence technology. Based on the roadmap of optical science and technology, 12 working groups are categorized as the technical point of view and most of them are closely related to mechanical industries. Especially, solid-state lighting, optical metrology and industrial laser processing are important technologies in precision engineering and manufacturing. This paper introduces these optical technologies and their technological issues to look into the development trends and expectation.

Conversion from SIMS depth profiling to compositional depth profiling of multi-layer films

  • Jang, Jong-Shik;Hwang, Hye-Hyen;Kang, Hee-Jae;Kim, Kyung-Joong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.347-347
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    • 2011
  • Secondary ion mass spectrometry (SIMS) was fascinated by a quantitative analysis and a depth profiling and it was convinced of a in-depth analysis of multi-layer films. Precision determination of the interfaces of multi-layer films is important for conversion from the original SIMS depth profiling to the compositional depth profiling and the investigation of structure of multi-layer films. However, the determining of the interface between two kinds of species of the SIMS depth profile is distorted from original structure by the several effects due to sputtering with energetic ions. In this study, the feasibility of 50 atomic % definition for the determination of interface between two kinds of species in SIMS depth profiling of multilayer films was investigated by Si/Ge and Ti/Si multi-layer films. The original SIMS depth profiles were converted into compositional depth profiles by the relative sensitivity factors from Si-Ge and Si-Ti alloy reference films. The atomic compositions of Si-Ge and Si-Ti alloy films determined by Rutherford backscattering spectroscopy (RBS).

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Development of an Isotope-Dilution Flow-Injection Electrospray/ Mass Spectrometric Method for the Accurate Determination of Glucosamine in Pharmaceutical Formulation

  • Kim, Gui-Nam;Kim, Byung-Joo;Ahn, Seong-Hee;Hwang, Eui-Jin;Kim, Yong-Seong
    • Bulletin of the Korean Chemical Society
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    • v.30 no.2
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    • pp.363-367
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    • 2009
  • An isotope-dilution flow-injection electrospray/mass spectrometric method was developed for the accurate determination of glucosamine contents in pharmaceutical formulations. Samples were extracted by methanol. After spiking glucosamine-1-$^{13}C_1$ as an internal standard, the extracts were then analyzed by flow-injection ESI/MS in a selected ion monitoring (SIM) mode to detect [M+H]$^+$ ions of the analyte and its isotope analogue at m/z 180 and m/z 181, respectively. Confirmatory measurements were made by selectively monitoring the collisionally induced dissociation channels of m/z 180 $\rightarrow$ m/z 72 and m/z 181 $\rightarrow$73, respectively, to test the possibility of bias in the SIM method due to matrix interferences, but any significant bias in the SIM mode was not observed. Repeatability and reproducibility studies showed that the flow-injection ESI/MS method is a reliable and reproducible method which can provide a typical method precision of 1.0 %. Other results for the method validation are reported.