• International Journal of Precision Engineering and Manufacturing
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• 제5권3호
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• pp.19-25
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• 2004

Pitch measurements of 150 nm one-dimensional grating standards were carried out using a contact mode atomic force microscopy with a high resolution three-axis laser interferometer. This measurement technique was named as the 'nano-metrological AFM'. In the nano-metrological AFM, three laser interferometers were aligned precisely to the end of an AFM tip. Laser sources of the three-axis laser interferometer in the nano-metrological AFM were calibrated with an I$_2$ stabilized He-Ne laser at a wavelength of 633 nm. Therefore, the Abbe error was minimized and the result of the pitch measurement using the nano-metrological AFM could be used to directly measure the length standard. The uncertainty in the pitch measurement was estimated in accordance with the Guide to the Expression of Uncertainty in Measurement (GUM). The primary source of uncertainty in the pitch-measurements was derived from the repeatability of the pitch-measurements, and its value was about 0.186 nm. The average pitch value was 146.65 nm and the combined standard uncertainty was less than 0.262 nm. It is suggested that the metrological AFM is a useful tool for the nano-metrological standard calibration.

• 센서학회지
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• 제22권6호
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• pp.415-420
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• 2013

Calibration capabilities for thermometer calibration by comparison method were assessed using high-precision industrial platinum resistance thermometers (IPRT). It was found in the performance assessment that out of 31 laboratories who participated, 28 laboratories resulted magnitude of En number less than 1 at every calibration points they submitted results in the range from 50 to $500^{\circ}C$. The results of about 75% of the laboratories showed the difference from the assigned values less than 1/10 of the tolerance level of the class B IPRT. This indicates that the participating calibration laboratories performed with satisfactory level that was enough to calibrate IPRTs to significant precision. The sensors used in this work were manufactured and chosen by the criteria of long-term instability less than 4 mK and hysteresis less than 8 mK in the temperature range used in this work. Furthermore, the change in the resistance of the sensors in the calibration temperature range were less than the uncertainty of the calibration, 25 mK (k=2).

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.685-686
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• 2012

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.269-270
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• 2008

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.216-219
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• 2005

In precision length measurements using optical interferometry based on homodyne or heterodyne principles, it is crucial to have frequency-stabilized monochromatic light sources. To the end, we investigate the possibility of utilizing the optical comb constituted by ultrashort femtosecond pulse lasers generated from a gain medium of titanium-doped aluminium oxide $(Ti:Al_2O_3)$. The optical comb is stabilized by locking to the caesium atomic clock, which allows all the modes of the comb to maintain an extremely high level of frequency stabilization to precision of one part in $10^{16}$. Then, high precision length measurements are realized by extracting a single or group of particularly wanted optical frequency components or by adopting a third-party light source locked to the comb. Required measurement system setup will be presented in detail along with experimental results.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.53-54
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• 2007

• International Journal of Precision Engineering and Manufacturing
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• 제1권1호
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• pp.49-55
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• 2000

The semiconductor industry relies on digital optical imaging for the overlay metrology of integrated circuit patterns. One critical performance demand in the particular application of digital imaging is placed on the edge resolution that is defined as the smallest detectable displacement of an edge from its image acquired in digital from. As the critical feature size of integrated circuit patterns reaches below 0.35 micrometers, the edge resolution is required to be less than 0.01 micrometers. This requirement is so stringent that fundamental behaviors of digital optical imaging need to be explored especially for the precision coordinate metrology. Our investigation reveals that the edge resolution shows quasi-random characteristics, not being simply deduced from relevant opto-electronic system parameters. Hence, a stochastic upper bound analysis is made to come up with the worst edge resolution that can statistically well predict actual indeterminate edge resolutions obtained with high magnification microscope objectives.

• 한국정밀공학회지
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• 제23권9호
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• pp.102-110
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• 2006

We discuss two possibilities of using femtosecond pulse lasers as a new interferometric light source for enhanced precision surface-profile metrology. First, a train of ultra-fast laser pulses yields repeated low temporal coherence, which allows unequal-path scanning interferometry, which is not feasible with white light. Second, the high spatial coherence of femtosecond pulse lasers enables large-sized optics to be tested in nonsymmetric configurations with relatively small-sized reference surfaces. These two advantages are verified experimentally using Fizeau and Twyman-Green type scanning interferometers.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.188-191
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• 2005

A common feature in various methods of optical interferometry for absolute distance measurements is the use of multiple monochromatic light components either in sequence or in parallel at the same time. Two or multiple wavelength synthesis has been studied though its performance is vulnerable to the frequency instability of the light source. Recently continuous frequency modulation is considered a promising method with availability of wide band tunable diode lasers, which also have frequency instability errors. We can lock frequencies of these third-party light sources to the modes of the femtosecond laser which is stabilized to the precision of the standard radio frequency. To this end, we have stabilized all the modes of the femtosecond laser to the atomic frequency standard by using powerful tools of frequency-domain laser stabilization.

• Bulletin of the Korean Chemical Society
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• 제26권3호
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• pp.440-446
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• 2005

A method is described for the determination of dibutyltin (DBT) in sediment by isotope dilution using liquid chromatography inductively-coupled plasma/mass spectrometry (LC-ICP/MS). To achieve the highest accuracy and precision, special attentions are paid in optimization and evaluation of overall processes of the analysis including extraction of analytes, characterization of the standards used for calibration and LC-ICP/MS conditions. An approach for characterization of natural abundance DBT standard has been developed by combining inductively-coupled plasma/optical emission spectrometry (ICP/OES) and LC-ICP/MS for the total Sn assay and the analysis of Sn species present as impurities, respectively. An excellent LC condition for separation of organotin species was found, which is suitable for simultaneous DBT and tributyltin (TBT) analysis as well as impurity analysis of DBT standards. Microwave extraction condition was also optimized for high efficiency while preventing species transformation. The present method determines the amount contents of DBT in sediments with expanded uncertainty of less than 5% and its result shows high degree of equivalence with reference values of an international inter-comparison and a certified reference material (CRM) within stated uncertainties.