• Journal of the Optical Society of Korea
• /
• v.10 no.1
• /
• pp.48-54
• /
• 2006

White-light scanning interferometry (WLI) and phase shifting interferometry (PSI) are increasingly used for surface topography measurements, particularly for areal measurements. In this paper, we compare surface profiling results obtained from above two optical methods with those obtained from stylus instruments. For moderately rough surfaces ($Ra{\approx}500\;nm$), roughness measurements obtained with WLI and the stylus method seem to provide close agreement on the same roughness samples. For surface roughness measurements in the 50 nm to 300 nm range of Ra, discrepancies between WLI and the stylus method are observed. In some cases the discrepancy is as large as 109% of the value obtained with the stylus method. By contrast, the PSI results are in good agreement with those of the stylus technique.

• Transactions of the Korean Society of Mechanical Engineers
• /
• v.16 no.8
• /
• pp.1530-1535
• /
• 1992

An optical method of phase shifting interferometry is presented for the 3-dimensional profile measurement of mirror surfaces with nanometer resolution. A series of optical interferometric fringes are generated by comparing the surface to be measured with a reference flat. The fringes are captured by a CCD camera and then analyzed to obtain actual surface profile. Detailed principles are described along with necessary image processing algorithms. finally, several measurement examples are discussed which were performed on lapped surfaces, hard discs, and semiconductor wafers.

• Current Optics and Photonics
• /
• v.7 no.6
• /
• pp.708-713
• /
• 2023

A robust all-fiber nonlinear amplifying loop-mirror-based mode-locked femtosecond laser is demonstrated. Power-dependent nonlinear phase shift in a Sagnac loop enables stable and power-efficient mode-locking working as an artificial saturable absorber. The pump power is adjusted to achieve the lowest intensity noise for stable long-term operation. The minimum pump power for mode-locking is 180 mW, and the optimal pump power is 300 mW. The lowest integrated root-mean-square relative intensity noise of a free-running mode-locked laser is 0.009% [integration bandwidth: 1 Hz-10 MHz]. The long-term repetition-rate instability of a free-running mode-locked laser is 10^-7 over 1,000 s averaging time. The repetition-rate phase noise scaled at 10-GHz carrier is -122 dBc/Hz at 10 kHz Fourier frequency. The demonstrated method can be applied as a seed source in high-precision real-time mid-infrared molecular spectroscopy.

• The Journal of the Acoustical Society of Korea
• /
• v.43 no.2
• /
• pp.178-183
• /
• 2024

This study introduces an enhanced sound source localization technique, bolstered by a data-driven deep learning approach, to improve the precision and accuracy of direction of arrival estimation. Focused on refining Time Difference Of Arrival (TDOA) based sound source localization, the research hinges on accurately estimating TDOA from cross-correlation functions. Accurately estimating the TDOA still remains a limitation in this research field because the measured value from actual microphones are mixed with a lot of noise. Additionally, the digitization process of acoustic signals introduces quantization errors, associated with the sampling frequency of the measurement system, that limit the precision of TDOA estimation. A deep learning-based approach is designed to overcome these limitations in TDOA accuracy and precision. To validate the method, we conduct comprehensive evaluations using both two and three-microphone array configurations. Moreover, the feasibility and real-world applicability of the suggested method are further substantiated through experiments conducted in an anechoic chamber.

• Korean Journal of Optics and Photonics
• /
• v.17 no.1
• /
• pp.47-53
• /
• 2006

The Integrated Ballistics Identification Systems (IBIS) is widely used for bullet and casing signature identification. The IBIS obtains a pair of ballistic signatures from two bullets (or casings) using optical microscopy, and estimates a correlation score which can represent the degree of signature match. However, this method largely depends on lighting and surface conditions because optical image contrast is primarily a function of test surface's slope, shadowing, multiple reflections, optical properties, and illumination direction. Moreover, it can be affected with surface height variation. To overcome these problems and improve the identification system, we used well known surface topographic techniques, such as confocal microscopy and white-light scanning interferometry. The measuring instruments were calibrated by a NIST step height standard and verified by a NIST sinusoidal profile roughness standard and a commercial roughness standard. We also suggest a new analysis method for the ballistic identification. In this method, the maximum cross-correlation function CCFmax is used to quantify the degree of signature match. If the compared signatures were exactly the same, CCFmax would be $100\%$.

• Korean Journal of Optics and Photonics
• /
• v.10 no.5
• /
• pp.373-378
• /
• 1999

White light scanning interferometry is increasingly used for precision profile metrology of engineering surfaces, but its current application is primarily limited to opaque surfaces with relatively simple optical reflection behaviors. In this paper, a new attempt is made to extend the interferometric method to the thickness profile measurement of transparent thin film layers. An extensive frequency domain analysis of multiple reflection is performed to allow both the top and bottom interfaces of a thin film layer to be measured independently at the same time using nonlinear least squares technique. This rigorous approach provides not only point-by-point thickness probing but also complete volumetric film profiles digitized in three dimensions.

• Journal of Institute of Control, Robotics and Systems
• /
• v.14 no.4
• /
• pp.385-391
• /
• 2008

To effectively cope with a complexity of kinematic metrology due to workspace enlargement of the planar stage, the linear induction motor is suggested as its new driving source. Especially, the linear induction motor under uniform plate type of secondary doesn't inherently have a periodical force ripple which is generally shown in the brushless DC motor. But, it presents a poor transient characteristic at zero or low speed zone owing to time delay of flux settling, resulting in slow response. To improve the servo property of linear induction motor and apply successfully it to the precision stage, this paper discusses a modified vector control methodology. The controller has a novel input form, fixed d-axis current, q-axis current and forward-fed DC current, to control thrust force and normal force of the linear induction motor independently. Influence of the newly introduced input and the feasibility of controller are validated experimentally.

• Journal of Biomedical Engineering Research
• /
• v.32 no.3
• /
• pp.264-269
• /
• 2011

To increase therapeutic efficiency and biological safety, it is important to precision control of acoustic output for therapeutic ultrasound equipment. In this paper, the electro-acoustic radiation conductance, one of electroacoustic characteristics of therapeutic ultrasound equipment, was measured by the radiation force balance method according to IEC 61161 standards and the acoustic output was estimated using the electro-acoustic radiation conductance. The estimation of acoustic output was conducted to continuous wave mode and pulse wave mode of duty cycle between 20% and 80%. The differences between prediction values and measurement results are within 5% of measurement uncertainty, which is a reasonably good agreement. The results show that acoustic output controlled by electro-acoustic radiation conductance was found to be an effective method.

• Journal of the Optical Society of Korea
• /
• v.18 no.1
• /
• pp.37-44
• /
• 2014

The use of a laser interferometer as a metrological tool in micro-optics measurement is demonstrated. A transmissive interferometer is effective in measuring an optical specimen having a high angle slope. A configuration that consists of an optical resolution of 0.62 micron is adapted to measure a specimen, which is a micro-Fresnel lens-shaped lenticular lens. The measurement result shows a good repeatability at each fraction of facets, however, a reconstruction of the lens shape profile is disturbed by a known problem of $2{\pi}$-ambiguity. To solve this $2{\pi}$-ambiguity problem, we propose a two-step phase unwrapping method. In the first step, an unwrapped phase map is obtained by using a conventional unwrapping method. Then, a proposed unwrapping method based on the shape modeling is applied to correct the wrongly unwrapped phase. A measured height of each facet is compared with a profile result measured by AFM.

• Current Optics and Photonics
• /
• v.1 no.5
• /
• pp.505-513
• /
• 2017

Measuring the thickness of thin films is strongly required in the display industry. In recent years, as the size of a pattern has become smaller, the substrate has become larger. Consequently, measuring the thickness of the thin film over a wide area with low spatial sampling size has become a key technique of manufacturing-yield management. Interferometry is a well-known metrology technique that offers low spatial sampling size and the ability to measure a wide area; however, there are some limitations in measuring the thickness of the thin film. This paper proposes a method to calculate the thickness of the thin film in the following two steps: first, pre-estimation of the thickness with the phase at the peak position of the interferogram at the bottom surface of the thin film, using white-light phase-shift interferometry; second, accurate correction of the measurement by fitting the interferogram with the theoretical pattern through the estimated thickness. Feasibility and accuracy of the method has been verified by comparing measured values of photoresist pattern samples, manufactured with the halftone display process, to those measured by AFM. As a result, an area of $880{\times}640$ pixels could be measured in 3 seconds, with a measurement error of less than 12%.