• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1024-1027
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• 2005

This paper describes the performance index of mobile robot and development of testbed which is used to evaluate the index. The developed testbed has rectangular structure similar to a living room of home. It is semi-automation testbed system for evaluation of cleaning performance index. This system is composed with scattering and cleaning equipment of test materials, equipment rifting of objects in inner space and sides itself, vision processing system. To be consistent of performance evaluation of cleaning robot, we make use of camera in this system for the sake of measurement of robot s mobility, path and suction quantity.

• 한국소음진동공학회논문집
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• 제12권1호
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• pp.65-72
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• 2002

Generally, there are laser operating equipments( aligner, stepper) and electronic microscope( SEM, TEM) as a high precision manufacturing and inspection equipment in semiconductor production companies, precision examination and measuring laboratories. Mostly, these equipments are characterized by projection and target part. The relative displacements between projection and target part are dominant roles in vibrational problem in these precision equipments. These relative displacements are determined by the position of incoming vibration and the difference of vibration response in projection and target part. In this study, the allowable vibrational limits are suggested and the vibrational reduction plans are proposed by measurement and analysis of vibration phenomenon in the Clean Room in PDP(plasma display panel) production building. The vibration performance is evaluated by comparison relative displacements between projection and target part before/after the vibration isolation plan.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.17-17
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• 2010

This paper address technical issues in calibrating discharge coefficients of sonic nozzles used to measure the volume flow rate of low vacuum dry pumps. The first challenging issue comes from the technical limit that their calibration results available from the flow measurement standard laboratories do not fully cover the low vacuum measurement range although the use of sonic nozzles for precision measurement of gas flow has been well established in NMIs. The second is to make an ultra low flow sonic nozzlesufficient to measure the throughput range of 0.01 mbar-l/s. Those small-sized sonic nozzles do not only achieve the noble stability and repeatability of gas flow but also minimize effects of the fluctuation of down stream pressures for the measurement of the volume flow rate of vacuum pumps. These distinctive properties of sonic nozzles are exploited to measure the pumping speed of low vacuum dry pumps widely used in the vacuum-related academic and industrial sectors. Sonic nozzles have been standard devices for measurement of steady state gas flow, as recommended in ISO 9300. This paper introduces two small-sized sonic nozzles of diameter 0.03 mm and 0.2 mm precisely machined according to ISO 9300. The constant volume flow meter (CVFM) readily set up in the Vacuum center of KRISS was used to calibrate the discharge coefficients of the machined nozzles. The calibration results were shown to determine them within the 3% measurement uncertainty. Calibrated sonic nozzles were found to be applicable for precision measurement of steady state gas flow in the vacuum process. Both calibrated sonic nozzles are demonstrated to provide the precision measurement of the volume flow rate of the dry vacuum pump within one percent difference in reference to CVFM. Calibrated sonic nozzles are applied to a new 'in-situ and in-field' equipment designed to measure the volume flow rate of low vacuum dry pumps in the semiconductor and flat display processes.

• 한국군사과학기술학회지
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• 제5권1호
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• pp.15-23
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• 2002

Uncertainty components and evaluation of the system of pressure measurement are presented in this paper. Since early in 1980s, measurement uncertainty is getting more important due to ISO/IEC 17025, which is established for international test and calibration laboratories. Up to now it is true that accuracy, precision, error and etc. have been commonly used in industry to define the amount of error to the products and equipment, but these terms ought to be united into uncertainity in the future. This paper describes how to indicate measurement uncertainty and types of measurement errors, and then shows the evaluation result of measurement system using piezoelectric pressure transducers.

• 한국광학회지
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• 제2권3호
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• pp.121-126
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• 1991

칼날주사형 OTF 측정장치를 개선하여 비축상 OTF 측정 정확도를 향상시켰으며 SIRA 연구팀이 개발한 50mm 평면-볼록형 표준렌즈를 사용하여 OTF 측정장치의 성능을 평가하였다. 공간 주파수 0~100 cm / mm 영역에서 표준렌즈의 MTF 측정값은 극소수의 공간 주파수를 제외하고 축상에서 $\pm$0.02, 비축상에서 $\pm$0.03 이내에서 SIRA 측정값과 일치하였으며 PTF 측정값은 SIRA 측정값과 $\pm$$5^{\circ}$이내에서 일치하였다.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2001년도 추계학술대회(한국공작기계학회)
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• pp.375-380
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• 2001

This study is on the precision of the optical scanner which is suitable for shape modeling and non-contact equipment, comparing with a razer scanner. The optical scanner not only has all merits that non-contact methods have but also improve a veil phenomenon which is a razer scanner's demerits. However, the optical scanner has not been used extensively because the measurements are not very precise and there are not the definite methods of measurement. Hence, this study is to find out how parameters such as camera's hight, angle, luminous intensity, distance to object, and so on have an influence on measuring using the optical scanner and to establish the methods of measuring precision.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 추계학술대회논문집A
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• pp.841-847
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• 2001

This study is on the precision of the optical scanner which is suitable for shape modeling and non-contact equipment, comparing with a razer scanner. The optical scanner not only has all merits that non-contact methods have but also improve a veil phenomenon which is a razer scanner's demerits. However, the optical scanner has not been used extensively because the measurements are not very precise and there are not the definite methods of measurement. Hence, this study is to find out how parameters such as camera's hight, angle, luminous intensity, distance to object, and so on have an influence on measuring using the optical scanner and to establish the methods of measuring precision.

• 한국정밀공학회지
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• 제13권4호
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• pp.53-60
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• 1996

In the conventional linear elasticity, sound speed is determined by only elastic modulus and density of the medium. In actual, however, sound speed depends on the stress and this dependency becomes nonlinear as the stress increases. These phenomena can be introducing nonlinear elastic modulus. In this paper, relationships between nonlinear elastic modulus up to 4th order and the internal status of materials are discussed through computer simulations and experiments. For the measurement of sound speed, a new type of measurement system using ultrasonic wave is proposed on the basis of ultrasonic pulse echo method which has been generally used in nondestructive ultrasonic test equipment. In order to confirm the stress dependency of sound speed, several experiments are carried out for alumina specimen.

• 한국정밀공학회지
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• 제21권11호
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• pp.99-109
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• 2004

This paper proposes precision evaluation method for the positioning error of three-DOF translational parallel mechanism. The proposed method uses conventional CMM as metrology equipment to measure the position of end-effector. In order to obtain accurate measurement data from CMM, the transform relationship between the coordinate system of the parallel mechanism and the CMM coordinate system must be identified. For this purpose, a new coordinate referencing (or coordinate system identification) technique is presented. By using this technique accurate coordinate transformation relationships are efficiently established. According to these coordinate transformation relationships, an equation to calculate error components at any arbitrary position of the end-effector is derived. In addition, mathematical fitting models to represent the position error components in the two-dimensional workspace of the parallel mechanism are also constructed based on response surface methodology. The proposed error evaluation method proves its effectiveness through the experimental results and its application to real three-DOF parallel mechanism.

• 제어로봇시스템학회논문지
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• 제14권6호
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• pp.519-522
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• 2008

As industry of a semiconductor and LCD industry have been rapidly growing, precision technologies of machining such as etching and 3D measurement are required. Stylus has been important measuring method in traditional manufacturing process. However, its disadvantages are low measuring speed and damage possibility at contacting point. To overcome mentioned disadvantage, non-contacting measurement method is needed such as PMP(Phase Measuring Profilometry), WSI(white scanning interferometer) and Confocal Profilometry. Among above 3 well-known methods, WSI started to be applied to FPD(flat panel display) manufacturing process. Even though it overcomes 21t ambiguity of PMP method and can measure objects which has specular surface, the measuring speed and vibration coming from manufacturing machine are one of main issue to apply full automatic total inspection. In this study, We develop high speed WSI system and algorithm to reduce unknown noise. The developing WSI and algorithm are implemented to measure 3D surface of wafer. Experimental results revealed that the proposed system and algorithm are able to measure 3D surface profile of wafer with a good precision and high speed.